CN209036281U - One kind removing glue chamer body pumping equipment - Google Patents

Abstract

The utility model discloses one kind to remove glue chamer body pumping equipment, the drain pipe of glue chamer body and setting up and down in the first valve and the second valve on the drain pipe is removed including a connection, liquid level detection device is additionally provided between first valve and second valve, first valve, second valve and the liquid level detection device are controlled by drain pipe folding automatic control device, the drain pipe folding automatic control device can be according to the level condition in the drain pipe that the liquid level detection device transmits, control the folding condition of first valve and second valve, and then it realizes and the liquid of the drain pipe is collected, the automatic control of discharge, the utility model structure is simple, it can be according to the liquid capacity situation in drain pipe, it is automatic to carry out liquid collection or drain operation, it reduces artificial in discharge opeing process The risk for contacting toxic liquid improves the convenience of drain operation.

Description

One kind removing glue chamer body pumping equipment

Technical field

The utility model relates to a kind of pumping equipment more particularly to a kind of chambers that removes photoresist applied to chemical mechanical grinding field Body pumping equipment.

Background technique

The degumming process needs of chemical mechanical grinding go in glue chamer body to carry out dedicated, and stripping process usually requires water steaming Gas is trapped in and goes after the liquefaction of part vapor in the drain pipe of glue chamer body connection as process gas, and in stripping process, Since these are trapped in the liquid in drain pipe with highly acid, so the effect of removing photoresist in order to ensure removing glue chamer body, need pair Drain pipe carries out regular drain operation.

Fig. 1 is please referred to, drain operation, the row in the prior art applied to degumming process are carried out to drain pipe for convenience Setting up and down in liquid pipe there are two valves, and when needing to collect liquid, the artificial valve opened above drain pipe is closed under drain pipe The valve of side allows the vapor after liquefaction to be flowed into drain pipe；When needing drain, referring to figure 2., then close above drain pipe Valve to prevent the vapor after liquefaction from being continuously introduced in drain pipe, then open the valve below drain pipe, allow drain The liquid discharge being detained in pipe.

Above-mentioned fluid-discharge method overall process requires to carry out by manual operation, however the process gas after liquefying usually has There are highly acid, volatility, or even there is toxicity, so staff needs significant care in entire discharge opeing process, grasps with caution Make, goes trouble to drain work belt.

Utility model content

It, being capable of basis the purpose of this utility model is to provide a kind of structure is simple in view of above-mentioned technical problem Liquid capacity in drain pipe, automatically control drain pipe folding condition removes glue chamer body pumping equipment, is asked with solving above-mentioned technology Topic.

The technical scheme in the invention for solving the technical problem is to provide one kind and removes glue chamer body pumping equipment, packet It includes a connection and removes the drain pipe of glue chamer body and setting up and down in the first valve and the second valve on the drain pipe, Yu Suoshu Liquid level detection device is additionally provided between one valve and second valve.

In a kind of preferred embodiment of the utility model, first valve is set to the upper position of second valve It sets.

In a kind of preferred embodiment of the utility model, first valve and second valve include solenoid valve.

In a kind of preferred embodiment of the utility model, the liquid level detection device is arranged and remote close to first valve From second valve.

In a kind of preferred embodiment of the utility model, the liquid level detection device includes liquid level detecting sensor.

In a kind of preferred embodiment of the utility model, a processing procedure exhaust outlet, the system are also provided on the drain pipe Journey exhaust outlet is opened in the top position of first valve.

In a kind of preferred embodiment of the utility model, the glue chamer body pumping equipment that goes further includes a drain tail pipe, The drain tail pipe connects the leakage fluid dram of the drain pipe.

Compared with prior art, the utility model has the beneficial effects that being used for the row of folding by that will be set on drain pipe The conventional valves of liquid pipe replace with the autocontrol valves such as solenoid valve, and above and below the first valve and the second valve two valves it Between liquid level detection device is set, when the liquid level between upper and lower two valves reaches preset liquid level, with liquid level examine The drain pipe folding automatic control device that device and upper and lower two valves are electrically connected is surveyed to be detected according to liquid level detection device The liquid level information arrived according to preset control method control up and down two valves folding condition, realize to drain pipe collect, The Automatic Control for discharging liquid reduces the risk of artificial contact toxic liquid, improves the convenience of drain operation.

Detailed description of the invention

Fig. 1 is the schematic diagram that the drain pipe in the prior art gone in glue chamer body pumping equipment collects liquid；

Fig. 2 is the schematic diagram in the prior art for removing the drain line drains liquid in glue chamer body pumping equipment；

Fig. 3 is the structural schematic diagram for removing glue chamer body pumping equipment that the utility model embodiment one provides；

Fig. 4 is the structural schematic diagram for removing glue chamer body pumping equipment that the utility model embodiment two provides；

Fig. 5 is the schematic diagram for going glue chamer body pumping equipment to collect liquid provided using the utility model embodiment one；

Fig. 6 is the schematic diagram for going glue chamer body pumping equipment to discharge liquid provided using the utility model embodiment one.

Specific embodiment

The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are in the premise for not making creative work Under every other embodiment obtained, fall within the protection scope of the utility model.

It should be noted that in the absence of conflict, the feature in the embodiments of the present invention and embodiment can To be combined with each other.

The utility model is described in further detail in the following with reference to the drawings and specific embodiments, but not as the utility model It limits.

Embodiment one:

Referring to figure 3., one kind that the utility model embodiment one provides goes glue chamer body pumping equipment, including a connection to remove photoresist The drain pipe 100 of cavity and setting up and down in the first valve 1 and the second valve 2 on the drain pipe 100, the drain pipe Liquid level detection device 3 is additionally provided in 100, the liquid level detection device 3 is used to detect the level condition in drain pipe 100, institute It states the first valve 1, second valve 2 and the liquid level detection device 3 and communicates to connect drain pipe folding automatic control dress Set 4, the liquid in the drain pipe 100 that the drain pipe folding automatic control device 4 is sent according to the liquid level detection device 3 Position situation, and when the liquid level in the drain pipe 100 reaches the level value of setting, automatically control first valve 1 and institute The folding condition of the second valve 2 is stated, to carry out automatic drain operation to the drain pipe 100.

In order to realize ability that the drain pipe 100 collects liquid, it is preferable that first valve 1 is set to described the The top position of two valves 2, first valve 1 and second valve 2 are used to control the folding shape of the drain pipe 100 State, referring to figure 5., when first valve 1 is opened, and second valve 2 is in close state simultaneously, the drain pipe 100 are in liquid collection status；Fig. 6 is please referred to, when first valve 1 is in close state, second valve 2 is in When open state, the drain pipe 100 is in drain state, and the liquid in drain pipe 100 is discharged downwards.Need exist for explanation It is that under drain state, first valve 1 and second valve 2 can be in open state, but arrange to reduce During liquid, the liquefaction vapor gone in glue chamer body excessively enters in drain pipe 100, discharges excessive noxious material and be easy to cause Actual bodily harm to staff so preferably only opening second valve 2 in discharge opeing process, and closes first valve Door 1.

Since solenoid valve possesses good control precision and control flexibility ratio, so, first valve 1 and described second Valve 2 is preferably solenoid valve.

The liquid level detection device 3 being arranged in the drain pipe 100 is fixedly installed on first valve 1 and described the In the drain pipe 100 of two valves 2 between the two.It is excellent in order to increase the ability that the drain pipe 100 collects liquefaction vapor Selection of land, the liquid level detection device 3 are arranged and separate second valve 2 close to first valve 1.The level sensing dress Setting 3 includes liquid level detecting sensor.

It is also opened up on the drain pipe 100 by the drain pipe 100 to going glue chamer body to input process gas for convenience There is a processing procedure exhaust outlet 5, the processing procedure exhaust outlet 5 is opened in the top position of first valve 1.

It is further to note that the drain pipe folding automatic control device 4 includes computer, naturally it is also possible to be to set The control system being placed in inside chemical-mechanical grinding device.

In order to which by the liquid automatic-discharging in drain pipe 100, into the sewage treatment equipment of plant area, the present embodiment one is provided The glue chamer body pumping equipment that goes further include a drain tail pipe 6, the drain tail pipe 6 connects the leakage fluid dram of the drain pipe 100, institute The liquid stated in drain pipe 100 is emitted into the sewage treatment equipment of plant area by the drain tail pipe 6.

Glue chamer body pumping equipment is gone to realize that the operating principle of drain is as follows using what the utility model embodiment one provided:

In the initial state, first valve 1 is opened, and second valve 2 is closed.In degumming process, liquefy water Steam is accumulated in the drain pipe 100, when detecting liquid in the liquid level detection device 3 being arranged in the drain pipe 100 When body, the liquid-detecting 3 sends a drain signal, the drain pipe to drain pipe folding automatic control device 4 It opens and closes automatic control device 4 and controls closing first valve 1 first according to the drain signal received, then control is opened Second valve 2 is opened, the liquid in drain pipe 100 is the sewage treatment equipment that plant area is discharged to by the drain tail pipe 6 In.When drain time reaches preset value, drain pipe folding automatic control device 4 controls first valve 1 and described Second valve 2 restores to original state.

Embodiment two:

Referring to figure 4., embodiment two and the difference of embodiment one are, what embodiment two provided removes glue chamer body pumping equipment It does not include a drain tail pipe 6, that is to say, that the drain pipe 100 gone in glue chamer body pumping equipment that the present embodiment two provides Tail end be not connected with drain tail pipe, so the liquid in drain pipe 100 can not be by the sewage treatment equipment of automatic-discharging to factory service In, so needing to place fluid collection device, such as wastewater barrel etc. in the tail end of the drain pipe in discharge opeing process.

The operating principle and implementation for going glue chamer body pumping equipment to realize drain provided using the utility model embodiment two What example one provided goes glue chamer body pumping equipment to realize that the principle of drain operation is completely the same, and details are not described herein.

In conclusion the hand valve used in the prior art is changed into autocontrol valve by the utility model, and in drain Liquid level detection device 3 is added in pipe 100, two autocontrol valves and liquid level detection device 3 are controlled by drain pipe folding Automatic control device 4, when liquid level detection device 3 detects that the liquid in drain pipe 100 reaches the level value of setting, drain pipe Open and close automatic control device 4 be automatically control two autocontrol valves folding condition, realize to drain pipe 100 collect and The Automatic Control for discharging liquid reduces the risk of artificial contact toxic liquid, improves the convenience of drain operation.

The foregoing is merely the utility model preferred embodiment, be not intended to limit the embodiments of the present invention and Protection scope should can appreciate that all in the utility model specification and diagram to those skilled in the art Hold made equivalent replacement and obviously change obtained scheme, the protection model of the utility model should all be included in In enclosing.

Claims (7)

1. one kind removes glue chamer body pumping equipment, which is characterized in that including one connection go glue chamer body drain pipe and it is setting up and down in The first valve and the second valve on the drain pipe, are additionally provided with liquid level between the first valve of Yu Suoshu and second valve Detection device.

2. removing glue chamer body pumping equipment as described in claim 1, which is characterized in that first valve is set to described second The top position of valve.

3. removing glue chamer body pumping equipment as described in claim 1, which is characterized in that first valve and second valve It include solenoid valve.

4. removing glue chamer body pumping equipment as described in claim 1, which is characterized in that the liquid level detection device is close to described the One valve is arranged and separate second valve.

5. removing glue chamer body pumping equipment as described in claim 1, which is characterized in that the liquid level detection device includes liquid level inspection Survey sensor.

6. removing glue chamer body pumping equipment as described in claim 1, which is characterized in that be also provided with a processing procedure on the drain pipe Exhaust outlet, the processing procedure exhaust outlet are opened in the top position of first valve.

7. removing glue chamer body pumping equipment as described in claim 1, which is characterized in that further include a drain tail pipe, the drain Tail pipe connects the leakage fluid dram of the drain pipe.