CN209035659U - The auxiliary device of target infiltration processing - Google Patents
The auxiliary device of target infiltration processing Download PDFInfo
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- CN209035659U CN209035659U CN201821710875.0U CN201821710875U CN209035659U CN 209035659 U CN209035659 U CN 209035659U CN 201821710875 U CN201821710875 U CN 201821710875U CN 209035659 U CN209035659 U CN 209035659U
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- ultrasonic wave
- drive rod
- auxiliary device
- fixedly connected
- target
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Abstract
A kind of auxiliary device of target infiltration processing, including drive rod and support frame, support frame as described above are suitable for supporting the drive rod;It further include ultrasonic wave disk, the ultrasonic wave disk is fixedly connected with described drive rod one end, and the ultrasonic wave pan bottom is fixedly connected at least one processor for ultrasonic wave.Support frame as described above supports the drive rod and the ultrasonic wave disk, so operator can support the processor for ultrasonic wave by the power of support frame as described above, has significantly saved the labour of operator;And the drive rod is fixedly connected with the ultrasonic wave disk, when operator holds the drive rod, and when rotating the drive rod, the fixed processor for ultrasonic wave in the ultrasonic wave pan bottom will be rotated along fixed circular track, so that the processor for ultrasonic wave can handle target blankss surface or other wait infiltrating each details position of surface of processing, so that infiltration result is more stable and uniform.
Description
Technical field
The utility model relates to field of machining, in particular to a kind of auxiliary device of target infiltration processing.
Background technique
Soldering is a kind of material joining methods, and people are often used this method connection target.During the brazing process, it will be less than target
The solder and target of fusing point, so that the solder is liquid, utilize the liquid pricker while heated to after the temperature of brazing filler metal melts
Material can spread into target material surface to fill the gap of target material surface, connect the target blankss of target with the surface of backboard.Liquid with
When solid contact, some surface tension of liquids are big, it is difficult to and solid is attached to each other, it is generally right in order to increase this adhesive force
The surface of solids carries out surface infiltration processing.In the prior art, the surface of solids is handled using ultrasonic wave, so that liquid is sprawled
On to entire brazing surface and form stronger adhesive force.
But in the prior art, target material surface is infiltrated handle when, usually operator's hand-held ultrasound processing instrument
Device needs to handle many times repeatedly since the ultrasonication welding surface time is more lasting, so, at artificial hand-held ultrasound
Reason instrument carries out processing welding surface and is easy to make one tired out, and working efficiency can not improve, and splash especially for semiconductor crystal wafer magnetic control
Penetrate the target of plated film, the target blankss surface of this target be it is round, to enable processor for ultrasonic wave uniform treatment to the circle
At each details of shape, the difficulty for increasing infiltration processing is more unfavorable for high-volume operation so that working efficiency is very low.
Therefore, pole needs a kind of auxiliary device, and the working efficiency of operator can be improved, and is beneficial to high-volume operation.
Summary of the invention
The utility model solve the problems, such as to be improved when carrying out infiltration processing using processor for ultrasonic wave to target blankss surface
The working efficiency of operator.
To solve the above problems, the utility model provides a kind of auxiliary device of target infiltration processing, drive rod and branch
Support, support frame as described above are suitable for supporting the drive rod;Ultrasonic wave disk, the ultrasonic wave disk and described drive rod one end are fixed to be connected
It connects, is fixedly connected at least one processor for ultrasonic wave on the ultrasonic wave disk.
Optionally, support frame as described above includes supporting leg and support rod, and the quantity of the supporting leg is at least two, the branch
Support leg is fixedly connected with the support rod, and the supporting leg supports the support rod.
It optionally, further include bearing, the bearing outer ring is fixed on the support rod, the bearing inner race and the transmission
Bar radially outer band is fixed.
It optionally, further include bearing disk, the bearing disk is fixed on the support rod.
Optionally, the drive rod is fixedly connected with the bearing disk by bearing.
Optionally, there is through-hole, the drive rod passes through the through-hole on bearing disc thickness direction.
Optionally, in the through-hole, the bearing outer ring is fixedly connected with the through-hole wall, the bearing inner race with
The drive rod radial outer end is fixedly connected.
Optionally, there are two the supporting legs, two supporting legs to be built up in the support rod axial ends respectively for tool.
Optionally, there are two the supporting legs for tool, and two supporting leg settings are local in the support rod, and the branch
Support leg is suitable for supporting the support rod.
Optionally, there are three supporting legs, the support rod is suitable for being fixed on the supporting leg.
Optionally, the processor for ultrasonic wave is fixed on the ultrasonic wave disk by welding or threaded connection.
Optionally, the drive rod includes hand-held part and interconnecting piece, the interconnecting piece be it is rod-shaped, described interconnecting piece one end with
The hand-held part is fixedly connected, and the other end is fixedly connected with the ultrasonic wave disk.
Compared with prior art, the technical solution of the utility model has the advantage that
A kind of auxiliary device of target infiltration processing, comprising: drive rod and support frame, support frame as described above are suitable for support institute
State drive rod;Further include: ultrasonic wave disk, the ultrasonic wave disk are fixedly connected with described drive rod one end, and the ultrasonic wave is tried to get to the heart of a matter
Portion is fixedly connected at least one processor for ultrasonic wave.Since support frame as described above supports the drive rod and the ultrasonic wave disk,
So operator using the processor for ultrasonic wave to target blankss or other can be with when the surface of infiltration processing is handled
By the power of support frame as described above, without holding the processor for ultrasonic wave, the labour of operator has significantly been saved
Power;And the drive rod is fixedly connected with the ultrasonic wave disk, when operator holds the drive rod, and the rotation transmission
When bar, the ultrasonic wave disk can be rotated with the rotation of the drive rod, when the ultrasonic wave disc spins, the ultrasonic wave disk
The fixed processor for ultrasonic wave in bottom will be rotated along fixed circular track, so that the processor for ultrasonic wave can handle
Target blankss or other wait infiltrate processing each details position of surface so that infiltration result it is more stable and uniform.
Detailed description of the invention
Fig. 1 is that the utility model provides the front view of embodiment;
Fig. 2 is ultrasonic wave pan bottom view in Fig. 1 embodiment.
Specific embodiment
It can be seen from background technology that, in the prior art using processor for ultrasonic wave to target blankss surface or other wait at infiltration
In the work on the surface of reason, operator is easy tired out, waste of manpower, is unfavorable for lasting large batch of operation.
Analysis finds that the target material surface in existing technology to semiconductor crystal wafer use in magnetron sputtering coating carries out infiltration processing
When, it is that target blankss are handled by operator's hand-held ultrasound processor, although treatment process is simple, ultrasonication
Device has constant weight, and needs persistently repeatedly to handle the target blankss surface, and operator also needs described in control
Processor for ultrasonic wave inevitably exists and shakes at a distance from the target blankss surface, causes to be surface-treated the target blankss non-uniform
Situation, operator can also be easy tired out, influence working efficiency, be unfavorable for lasting large batch of operation.
To solve the above problems, the utility model provides a kind of auxiliary device of target infiltration processing, pass through support frame branch
Drive rod and ultrasonic wave disk are supportted, ultrasonic wave pan bottom is fixed with processor for ultrasonic wave, reduces operator by support frame and is using
The processor for ultrasonic wave to target blankss or other when infiltration processing surface handle when burden, significantly save
The labour of operator;And ultrasonic wave disk and the target blankss or other wait infiltrating certain, institute at a distance from the surface of processing
To have ensured that infiltration processing result is more uniform.
It is understandable to enable the above objects, features, and advantages of the utility model to become apparent, with reference to the accompanying drawing to this
The specific embodiment of utility model is described in detail.
With reference to Fig. 1 and Fig. 2, the auxiliary device of target infiltration processing in embodiment provided by the utility model, comprising: transmission
Bar 20 and support frame 10, support frame as described above 10 are suitable for supporting the drive rod 20;Further include: ultrasonic wave disk 30, the ultrasound
Wave disk 30 is fixedly connected with described 20 one end of drive rod, is fixedly connected at least one ultrasonication on the ultrasonic wave disk 30
Device.
Support frame as described above 10 is fixed on the table, including supporting leg 10a and support rod 10b, the number of the supporting leg 10a
Amount is at least 2, and the supporting leg 10a is fixedly connected with the support rod 10b, and the supporting leg 10a supports the support rod
10b.There are two the supporting leg 10a for the tool of support frame as described above 10, and the altitude range of the supporting leg 10a is according to the target blankss surface
Or depending on other wait infiltrating the surface handled, the height of the general supporting leg 10a is 50mm-100mm.
In the present embodiment, the height of the supporting leg 10a is 80mm, and the support rod 10b axial ends is fixedly connected with institute
State supporting leg 10a.The supporting leg 10a and the support rod 10b will use the material for being unlikely to deform and consolidating, specifically can be with
It is unlikely to deform or damages to ensure that the supporting role of support frame as described above 10 is stablized using stainless steel or titanium alloy.The support
The quantity of leg 10a is 2, while enabling support frame as described above 10 to reach support effect, so that overall structure is simply uncomplicated,
Support purpose is reached using the simplest method.
In other embodiments, when the quantity of the supporting leg 10a is 2, the position of the supporting leg 10a is not limited to
The axial ends of the support rod 10b, the support rod 10b are supporting leg 10a support.
In other embodiments, the supporting leg 10a quantity is 3, and 3 supporting leg 10a make support frame as described above
10 structure makes support effect more steady good.
It should be noted that stable backing metal can be used and be placed on when the insufficient height of support frame as described above 10
The bottom of the supporting leg 10a, so that the whole height of support frame as described above 10 is suitable.
The drive rod 20 is fixed on support frame as described above 10, specifically, the drive rod 20 includes hand-held part 20b and company
Socket part 20a, the hand-held part 20b are fixedly connected with the interconnecting piece 20a, and the interconnecting piece 20a is metal cylinder, vertical side
To extension, the hand-held part 20b is fixedly connected with the top the interconnecting piece 20a, and the hand-held part has and the interconnecting piece
The second hand-held part of the first vertical hand-held part of 20a and first hand-held part vertically, the benefit being arranged in this way is operator
When using the auxiliary device, first hand-held part and second hand-held part cooperate so that described in operator's promotion rotation
When drive rod 20, torque reduces, and is beneficial to operator and rotates the drive rod 20.
In other embodiments, the drive rod 20 includes hand-held part and interconnecting piece, in the interconnecting piece and upper embodiment
The effect of the interconnecting piece 20a is identical with shape and structure;The hand-held part can have any shape or any materials, and with it is described
One end of interconnecting piece is fixedly connected or the hand-held part is integrally formed with the interconnecting piece.
In the present embodiment, the interconnecting piece 20a and the junction the support rod 10b further include bearing disk 11, the axis
11 section of tray is circle, and thickness is greater than the diameter of the support rod 10b.The a certain radial both ends of bearing disk 11 and the branch
Strut 10b is fixed, and can be specifically fixedly connected by argon arc welding.There is through-hole on 11 thickness direction of bearing disk, it is described
Interconnecting piece 20a passes through the through-hole.Specifically, the interconnecting piece 20a is fixedly connected with the bearing disk 11 by bearing,
In, the bearing inner race is fixed with the interconnecting piece 20a radial outer end, the bearing outer ring and the fixed company of the through-hole wall
It connects, the mode that is fixedly connected here can be argon arc welding.The interconnecting piece 20a is connect with the bearing disk 11 by bearing,
The interconnecting piece 20a is fixed on the bearing disk 11, that is to say, that the interconnecting piece 20a is fixed on the support
On bar 10b, and the interconnecting piece 20a can be rotated relative to the bearing disk 11 or support frame as described above 10.
In other embodiments, the section shape of the bearing disk 11 is not limited to circle, can for it is rectangular or other
Suitable for the shape being fixedly connected with the support rod 10b, but 11 thickness direction of bearing disk has the through-hole, and described
Entire widths allow the drive rod to pass through.
In other embodiments, the drive rod 20 is connect directly through a bearing connection, tool with the support rod 10b
Body, the bearing outer ring is fixedly connected with the support rod 10b, the bearing inner race and the interconnecting piece 20a radially outer band
It is fixed.The interconnecting piece 20a can be fixed on the support rod 10b by such method, that is to say, that by the drive rod 20
It is fixed on support frame as described above 10, and the drive rod 20 can be rotated freely with respect to support frame as described above 10.
The ultrasonic wave disk 30 be disc-shape, diameter range according to described in wait infiltrate surface depending on, general diameter range
For 100mm-600mm, it is fixedly connected on the end of the interconnecting piece 20a, used material will need to be subjected to 200 degrees Celsius or more
High temperature without chemically or physically changing;The ultrasonic wave disk 30 is for accepting processor for ultrasonic wave, by the ultrasonic wave
Processor is arranged on the ultrasonic wave disk 30 and towards workbench.Starting the processor for ultrasonic wave can be on workbench
The target blankss surface or other wait infiltrate processing surface carry out infiltration processing.
In the present embodiment, 30 diameter of ultrasonic wave disk is 300mm, and specific material is titanium alloy, by welding
The ultrasonic wave disk 30 is horizontally fixed on to the end of the interconnecting piece 20a.Be for the advantages of titanium alloy material, quality compared with
Gently, be conducive to the support of support frame as described above 10.
It should be noted that 30 face of ultrasonic wave disk fixes three ultrasonications by welding
Device, respectively the first processor for ultrasonic wave 101, the second processor for ultrasonic wave 102, third processor for ultrasonic wave 103, and it is described
Distance of the ultrasonic wave disk 30 apart from the target blankss surface is 2mm-5mm.So that 30 bottom of the ultrasonic wave disk fixation is described super
Sound wave processor carries out infiltration processing work with appropriately distance.
In other embodiments, the ultrasonic wave disk 30 and interconnecting piece 20a is integrally formed, in the ultrasonic wave disk 30
The mode that the processor for ultrasonic wave is threadedly coupled is fixed on 30 face of ultrasonic wave disk by face setting shallow thread.
In other embodiments, the quantity of the fixed processor for ultrasonic wave of 30 face of ultrasonic wave disk can be any
A, particular number is according to the determination of the area on the target blankss surface or the areas on other infiltration surfaces to be processed.
The auxiliary device provided by the utility model supports the drive rod 20 to surpass with described using support frame as described above 10
Sound wave disk 30, and the processor for ultrasonic wave is arranged on the ultrasonic wave disk 30, and the processor for ultrasonic wave is towards work
Platform, so the ultrasonic wave disk 30 can be with turning while rotation by pushing the drive rod 20 to make the drive rod 20
It is dynamic, so that the processor for ultrasonic wave can control the velocity of rotation of the drive rod 20 to control with rotation, operator
The rotational frequency for stating processor for ultrasonic wave carries out infiltration processing to the target blankss surface on workbench.The present embodiment is used for institute
Target blankss surface is stated as circular target infiltration processing.But it is not limited to circle, when needing at the target material surface to other shapes
When reason, support frame as described above 10 can be suitably moved so that the processor for ultrasonic wave can be radiated any position.
Although the utility model discloses as above, the utility model is not limited to this.Anyone skilled in the art,
It does not depart from the spirit and scope of the utility model, can make various changes or modifications, therefore the protection scope of the utility model
It should be defined by the scope defined by the claims..
Claims (12)
1. a kind of auxiliary device of target infiltration processing characterized by comprising
Drive rod and support frame, support frame as described above are suitable for supporting the drive rod;
Ultrasonic wave disk, the ultrasonic wave disk are fixedly connected with described drive rod one end, be fixedly connected on the ultrasonic wave disk to
A few processor for ultrasonic wave.
2. the auxiliary device of target as described in claim 1 infiltration processing, which is characterized in that support frame as described above include supporting leg with
Support rod, the quantity of the supporting leg are at least two, and the supporting leg is fixedly connected with the support rod, and the supporting leg
Support the support rod.
3. the auxiliary device of target infiltration processing as claimed in claim 2, which is characterized in that further include bearing, outside the bearing
Circle is fixed on the support rod, and the bearing inner race is fixed with the drive rod radially outer band.
4. the auxiliary device of target infiltration processing as claimed in claim 3, which is characterized in that further include bearing disk, the bearing
Disk is fixed on the support rod.
5. the auxiliary device of target infiltration processing as claimed in claim 4, which is characterized in that the drive rod and the bearing disk
It is fixedly connected by bearing.
6. the auxiliary device of target infiltration processing as claimed in claim 5, which is characterized in that the bearing disc thickness has on direction
There is through-hole, the drive rod passes through the through-hole.
7. the auxiliary device of target infiltration processing as claimed in claim 6, which is characterized in that in the through-hole, the bearing
Outer ring is fixedly connected with the through-hole wall, and the bearing inner race is fixedly connected with the drive rod radial outer end.
8. the auxiliary device of target infiltration processing as claimed in claim 2, which is characterized in that the supporting leg there are two having, two
A supporting leg is built up in the support rod axial ends respectively.
9. the auxiliary device of target infiltration processing as claimed in claim 2, which is characterized in that the supporting leg there are two having, two
The setting of supporting leg described in item is in the support rod part, and the supporting leg is suitable for supporting the support rod.
10. the auxiliary device of target infiltration processing as claimed in claim 2, which is characterized in that have three supporting legs, institute
Support rod is stated to be suitable for being fixed on the supporting leg.
11. the auxiliary device of target infiltration processing as described in claim 1, which is characterized in that the processor for ultrasonic wave passes through
Welding or threaded connection are fixed on the ultrasonic wave disk.
12. the auxiliary device of target infiltration processing as described in claim 1, which is characterized in that the drive rod includes hand-held part
With interconnecting piece, the interconnecting piece be it is rod-shaped, described interconnecting piece one end is fixedly connected with the hand-held part, the other end and the ultrasound
Wave disk is fixedly connected.
Priority Applications (1)
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CN201821710875.0U CN209035659U (en) | 2018-10-22 | 2018-10-22 | The auxiliary device of target infiltration processing |
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CN201821710875.0U CN209035659U (en) | 2018-10-22 | 2018-10-22 | The auxiliary device of target infiltration processing |
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CN209035659U true CN209035659U (en) | 2019-06-28 |
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CN201821710875.0U Active CN209035659U (en) | 2018-10-22 | 2018-10-22 | The auxiliary device of target infiltration processing |
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- 2018-10-22 CN CN201821710875.0U patent/CN209035659U/en active Active
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