CN209024676U - A kind of single crystal growing furnace - Google Patents
A kind of single crystal growing furnace Download PDFInfo
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- CN209024676U CN209024676U CN201822025382.XU CN201822025382U CN209024676U CN 209024676 U CN209024676 U CN 209024676U CN 201822025382 U CN201822025382 U CN 201822025382U CN 209024676 U CN209024676 U CN 209024676U
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- gas cylinder
- single crystal
- lug boss
- card slot
- crystal growing
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Abstract
The utility model provides a kind of single crystal growing furnace, including ontology, and single crystal growing furnace further includes gas cylinder and river bottom protection pressing plate；Gas cylinder is provided at least one first lug boss in one end circumferential side wall of the river bottom protection pressing plate；At least one is provided on the river bottom protection pressing plate for assembling the pilot hole of the gas cylinder, at least one card slot is provided on the pilot hole inner sidewall, first lug boss may be disposed in the card slot, and the gas cylinder is made to connect and fix with the river bottom protection pressing plate.The utility model limits the connection relationship of gas cylinder and river bottom protection pressing plate; a possibility that reducing two-phase sliding; single crystal growing furnace recoil air-flow is prevented to jack up gas cylinder; and make its possibility with heater contacts; to reduce the generation of spark phenomenon; the surface of gas cylinder is protected, the number of damaged area and reparation, replacement is reduced.
Description
Technical field
The utility model relates to silicon single crystal rod manufacturing fields, more particularly to a kind of single crystal growing furnace.
Background technique
Silicon single crystal rod production procedure is crystal pulling, machine is subject to and polishing process.When crystal pulling, the air guide of the thermal field component of single crystal growing furnace
Cylinder needs to be packed into single crystal growing furnace.Currently, there is no limits for the assembly relation of the gas cylinder to come into operation in single crystal growing furnace and river bottom protection pressing plate
Production is used.Therefore, during crystal pulling, the gas cylinder air-flow that is easy to be recoiled is blown afloat, and contacts the heater of monocrystalline furnace bottom,
Cause the two to be struck sparks, causes heater lower surface and gas cylinder upper surface pit or point occur, when serious, also will cause list
The heater of brilliant furnace bottom is broken.
Utility model content
In order to solve aforementioned technical problem, the utility model provides a kind of single crystal growing furnace.
A kind of single crystal growing furnace provided by the utility model, including ontology, single crystal growing furnace further include gas cylinder and river bottom protection pressing plate；Air guide
Cylinder is provided at least one first lug boss in one end circumferential side wall of river bottom protection pressing plate；At least one is provided on river bottom protection pressing plate
It is a for assembling the pilot hole of gas cylinder, be provided at least one card slot on pilot hole inner sidewall, the first lug boss may be disposed at
In card slot, gas cylinder is made to connect and fix with river bottom protection pressing plate.
Preferably, several first lug bosses are provided on gas cylinder.
Preferably, the end face of several first lug bosses and gas cylinder is in a parallel set.
Preferably, the same end face of several first lug bosses and gas cylinder has same plane.
Preferably, card slot is the groove being set on pilot hole inner sidewall.
Preferably, card slot includes at least one second lug boss and at least one third protrusion portion, and at least one second
There is space, for accommodating at least one first lug boss between lug boss and at least one third protrusion portion.
Preferably, distance of the card slot apart from river bottom protection pressing plate both ends is identical.
Preferably, one end of at least one card slot is additionally provided with positive stop lug boss.
Preferably, card slot is equal with the quantity of the first lug boss.
Preferably, the spacing between the spacing between card slot and the first lug boss is identical, and the length of card slot and first convex
The length in the portion of rising is identical.
To sum up, the first lug boss is arranged by the circumferential side wall in gas cylinder, in river bottom protection in single crystal growing furnace described in the utility model
Card slot is set in the pilot hole of pressing plate, and the first lug boss may be disposed in card slot, thus by the connection of gas cylinder and river bottom protection pressing plate
A possibility that relationship is limited, and two-phase sliding is reduced prevents single crystal growing furnace recoil air-flow to jack up gas cylinder, so as to cause it
Protect the surface of gas cylinder to prevent the generation of spark phenomenon with the possibility of heater contacts, reduce damaged area with
And it repairs, the number of replacement.
Detailed description of the invention
Fig. 1 is the gas cylinder structural schematic diagram of the single crystal growing furnace of one embodiment of the utility model；
Fig. 2 is the river bottom protection pressure plate structure schematic diagram of the single crystal growing furnace of one embodiment of the utility model；
Fig. 3 is mounting hole configuration enlarged drawing in Fig. 2.
Wherein, 1 is gas cylinder, and 2 be the first lug boss, and 3 be river bottom protection pressing plate, and 4 be pilot hole, and 5 be card slot, and 6 is convex for second
The portion of rising, 7 be positive stop lug boss, and 8 be third protrusion portion.
Specific embodiment
Illustrate specific embodiment according to the present utility model with reference to the accompanying drawing.
Many details are explained in the following description in order to fully understand the utility model, still, this is practical
Novel to be implemented using other than the one described here other modes, therefore, the utility model is not limited to following
The limitation of disclosed specific embodiment.
Single crystal growing furnace recoil air-flow jacks up gas cylinder and causes to strike sparks with heater contacts in order to prevent, causes the surface of gas cylinder
Impaired, the utility model provides a kind of single crystal growing furnace.
Single crystal growing furnace in the present embodiment, including ontology, single crystal growing furnace further include gas cylinder 1 and river bottom protection pressing plate 3, as shown in Figure 1, Figure 2 and
Shown in Fig. 3.Gas cylinder 1 is provided at least one first lug boss 2 in one end circumferential side wall of river bottom protection pressing plate 3.River bottom protection pressure
It is provided at least one on plate 3 for assembling the pilot hole 4 of gas cylinder 1, is provided at least one card slot on 4 inner sidewall of pilot hole
5, the first lug boss 2 may be disposed in card slot 5, and gas cylinder 1 is made to connect and fix with river bottom protection pressing plate 3.River bottom protection pressing plate 3 is according to monocrystalline
Multiple pilot holes 4 can be set in thermal field environment in furnace, without restriction herein.The structure of card slot 5 can be played to the first protrusion
Position-limiting action is played in portion 2, and specific structure is without restriction herein.
By adopting the above technical scheme, by the way that at least one first lug boss 2 is arranged on gas cylinder 1, in river bottom protection pressing plate 3
At least one card slot 5 is set on pilot hole 4, while the first lug boss 2 being attached and being fixed with card slot 5, it is convex by first
It plays portion 2 and card slot 5 limits gas cylinder 1 and the connection type of river bottom protection pressing plate 3, reduce two unstability being connected,
It prevents single crystal growing furnace recoil air-flow to jack up gas cylinder 1, reduces the possibility of gas cylinder 1 Yu heater contacts, so as to avoid
The generation of the two spark phenomenon protects heater and gas cylinder 1 without damage.
On the basis of the above embodiment, further, as a preferred embodiment, several are provided on gas cylinder 1
One lug boss 2.Wherein, the quantity of the first lug boss 2 can be configured according to the diameter of gas cylinder 1, such as can be set
It is set to two or three or any number of.In the present embodiment, as shown in Figure 1, being preferably provided with three the first lug bosses 2.In addition,
First lug boss 2 can also be further preferably uniformly arranged in 1 circumferential side wall of gas cylinder.
By adopting the above technical scheme, three the first lug bosses 2 of circumferential setting, especially uniformly three the first lug bosses 2 when, can
So that the uniform load of gas cylinder 1 be connected in the pilot hole 4 of river bottom protection pressing plate 3, further reduce gas cylinder 1 due to stress not
It falls off caused by.
On the basis of the above embodiment, further, as a preferred embodiment, several first lug bosses 2 and air guide
The end face of cylinder 1 is in a parallel set.
By adopting the above technical scheme, several first lug bosses 2 are distributed in 1 lateral wall of gas cylinder, and several first lug bosses 2
It is in a parallel set with the end face of gas cylinder 1.Structure design is more preferably convenient to gas cylinder 1 and river bottom protection pressing plate 3 is clamped, and especially will
When first lug boss 2 is connected in card slot 5 by way of rotation, since structure disposed in parallel facilitates rotation, so that it is more just
In constructing operation.
On the basis of the above embodiment, further, as a preferred embodiment, several first lug bosses 2 and air guide
The same end face of cylinder 1 has same plane.
By adopting the above technical scheme, it is ensured that the first lug boss 2 is in the same plane, and this structure design is further
It ensure that the convenience installed between gas cylinder 1 and pilot hole 4.
On the basis of the above embodiment, further, as a preferred embodiment, card slot 5 is to be set in pilot hole 4
Groove (not shown) on side wall.In the present embodiment, groove is set on 4 inner sidewall of pilot hole, can be by increasing material system
The method made is processed into groove, can also be by subtracting material manufacture, and the inner sidewall of cut-out pilot hole 4 forms groove.
It by adopting the above technical scheme, can when the first lug boss 2 is connected in pilot hole 4 by groove (not shown)
Any one first lug boss 2 to be first connected in groove, then by rotation, it is clamped remaining first lug boss 2 sequentially
In in groove.Further, it is also possible to by setting elastic piece structure for the first lug boss 2, the first lug boss 2 is at contraction-like when starting
State, after completely into groove, the first lug boss 2 of elastic slice shape is unfolded, and is connected in groove.The assembly method by groove with
First lug boss 2 defines the connection relationship of gas cylinder 1 Yu river bottom protection pressing plate 3, further reduced gas cylinder 1 and is detached from pilot hole 4,
The possibility jacked up by recoil air-flow.
As the deformation of above embodiment, further, in this embodiment, card slot 5 includes at least one second protrusion
Portion 6 and at least one third protrusion portion 8, and there is sky between at least one second lug boss 6 and at least one third protrusion portion 8
Between, for accommodating the first lug boss 2.
By adopting the above technical scheme, at least one second lug boss 6 and at least is arranged in parallel in the circumferential direction of 4 inner sidewall of pilot hole
One third protrusion portion 8, at least one second lug boss 6 is at least one third protrusion portion 8 along 4 central axial direction of pilot hole
Projection be overlapped or intersection, while guaranteeing that there is space between the second lug boss 6 and third protrusion portion 8, constitute card slot 5, be used for
Accommodate the first lug boss 2.Card slot 5 protrudes from the inner wall setting of pilot hole 4, which easily facilitates the first lug boss 2 and card slot 5
It is connected by way of interior turning clamped connection, the first lug boss 2 starts to rotate at no card slot 5, until the first lug boss 2 is threaded to card slot
In 5, since the first lug boss 2 is clamped with card slot 5 by rotation mode, the card slot 5 of the structure is more preferably convenient for gas cylinder 1 and assembly
The rotary clamping in hole 4 is fixed, and the convenience of installation is further ensured.
On the basis of the above embodiment, further, as a preferred embodiment, card slot 5 is apart from 3 both ends of river bottom protection pressing plate
Distance it is identical.
By adopting the above technical scheme, the distance due to card slot 5 apart from 3 both ends of river bottom protection pressing plate is identical, river bottom protection pressing plate 3 when installation
Any one end face can use upward, the two-sided use of river bottom protection pressing plate 3 may be implemented in this way, when further improving installation
Convenience.
On the basis of the above embodiment, further, as a preferred embodiment, as shown in figure 3, at least one card slot
One end in 5 is additionally provided with positive stop lug boss 7.In the present embodiment, positive stop lug boss 7 is set to the single-ended of any one card slot 5.If
Positive stop lug boss 7 is set in multiple card slots 5, then positive stop lug boss 7 should be set to the same end of multiple card slots 5, can guarantee the in this way
One lug boss 2 easily rotary clamping in card slot 5.
By adopting the above technical scheme, the connection type of clamping is further limited, which further enhances gas cylinder 1
With the connection tightness of pilot hole 4, the first lug boss 2 is avoided to rotate into during pilot hole 4 or in use process, first is convex
It plays portion 2 to rotate excessively, be slid out of card slot 5.
On the basis of the above embodiment, further, as a preferred embodiment, the number of card slot 5 and the first lug boss 2
It measures equal.Certainly, the quantity of card slot 5 can also be inconsistent with the quantity of the first lug boss 2, to be adapted to be provided with different number the
The gas cylinder 1 of one lug boss 2.For example, the quantity of the card slot 5 in pilot hole 4 is set as five, being adapted to setting, there are three the
The gas cylinder 1 of one lug boss 2, or there are five the gas cylinders 1 of the first lug boss 2 for adaptation setting.In the present embodiment select card slot 5 with
The quantity of first lug boss 2 is equal, is not the restriction carried out to the quantity of card slot 5 and the first lug boss 2, and is used for the purpose of
Further illustrate embodiment cited by assembly relation.
Using above embodiment, card slot 5 is equal with 2 quantity of the first lug boss, as corresponds clamping, without inspection
It tests.
As the deformation of above embodiment, in the present embodiment, between the spacing and the first lug boss 2 between card slot 5
Spacing is identical, and the length of card slot 5 is identical as the length of the first lug boss 2.
By adopting the above technical scheme, the first lug boss 2 on gas cylinder 1 is consistent with 5 length of card slot on pilot hole 4, number
Amount and spacing are also identical, and the first lug boss 2 can be realized with card slot 5 and correspond clamping.The clamping structure makes the first protrusion
There is one of them to complete clamping in portion 2, then clamping can be completed in other first lug bosses 2, without veritifying, further decreases air guide
The assembling difficulty of cylinder 1 and pilot hole 4, improves convenience when installation.
The above is only the preferred embodiments of the utility model, are not intended to limit the utility model, for this field
Technical staff for, various modifications and changes may be made to the present invention.Within the spirit and principle of the utility model,
Any modification, equivalent replacement, improvement and so on should be included within the scope of protection of this utility model.
Claims (10)
1. a kind of single crystal growing furnace, comprising: ontology, which is characterized in that the single crystal growing furnace further include: gas cylinder and river bottom protection pressing plate；
The gas cylinder is provided at least one first lug boss in one end circumferential side wall of the river bottom protection pressing plate；
At least one is provided on the river bottom protection pressing plate for assembling pilot hole of the gas cylinder, on the pilot hole inner sidewall
It is provided at least one card slot, first lug boss may be disposed in the card slot, make the gas cylinder and the river bottom protection pressure
Plate is connected and is fixed.
2. single crystal growing furnace according to claim 1, which is characterized in that be provided with several first protrusions on the gas cylinder
Portion.
3. single crystal growing furnace according to claim 2, which is characterized in that the end face of several first lug bosses and the gas cylinder
It is in a parallel set.
4. the single crystal growing furnace according to Claims 2 or 3, which is characterized in that several first lug bosses and the gas cylinder
The same end face has same plane.
5. single crystal growing furnace according to claim 1, which is characterized in that the card slot is to be set on the pilot hole inner sidewall
Groove.
6. single crystal growing furnace according to claim 1, which is characterized in that the card slot includes at least one second lug boss and at least
One third protrusion portion, and there is space between at least one described second lug boss and at least one described third protrusion portion,
For accommodating at least one described first lug boss.
7. single crystal growing furnace according to claim 1, which is characterized in that distance of the card slot apart from the river bottom protection pressing plate both ends of the surface
It is identical.
8. single crystal growing furnace according to claim 1, which is characterized in that one end of at least one card slot is additionally provided with limit convex
Platform.
9. single crystal growing furnace according to claim 1, which is characterized in that the quantity of the quantity of the card slot and first lug boss
It is equal.
10. single crystal growing furnace according to claim 1, which is characterized in that spacing and first lug boss between the card slot
Between spacing it is identical, and the length of the card slot is identical as the length of first lug boss.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822025382.XU CN209024676U (en) | 2018-12-04 | 2018-12-04 | A kind of single crystal growing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822025382.XU CN209024676U (en) | 2018-12-04 | 2018-12-04 | A kind of single crystal growing furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209024676U true CN209024676U (en) | 2019-06-25 |
Family
ID=66911242
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822025382.XU Active CN209024676U (en) | 2018-12-04 | 2018-12-04 | A kind of single crystal growing furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209024676U (en) |
-
2018
- 2018-12-04 CN CN201822025382.XU patent/CN209024676U/en active Active
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