CN209024675U - A kind of auxiliary chamber of single crystal furnace furnace tube cleaning tool - Google Patents

A kind of auxiliary chamber of single crystal furnace furnace tube cleaning tool Download PDF

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Publication number
CN209024675U
CN209024675U CN201821686247.3U CN201821686247U CN209024675U CN 209024675 U CN209024675 U CN 209024675U CN 201821686247 U CN201821686247 U CN 201821686247U CN 209024675 U CN209024675 U CN 209024675U
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CN
China
Prior art keywords
iron hoop
single crystal
cleaning tool
strut
soft tire
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Active
Application number
CN201821686247.3U
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Chinese (zh)
Inventor
王永和
孟涛
王海庆
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Baotou Meike Silicon Energy Co Ltd
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Baotou Meike Silicon Energy Co Ltd
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Priority to CN201821686247.3U priority Critical patent/CN209024675U/en
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Abstract

The utility model discloses a kind of auxiliary chamber of single crystal furnace furnace tube cleaning tool, including iron hoop and strut, iron hoop lower surface is equipped with fulcrum, and strut is mutually fixedly connected with iron hoop by the fulcrum and is in be mutually perpendicular to state between strut and iron hoop;It is opened up within one week along iron hoop ring body outer wall fluted, soft tire is inlaid in groove, soft tire and iron hoop entire surface are bundled with non-dust cloth, soft tire is equipped on air nozzle hole and iron hoop and is equipped with air nozzle hole with air nozzle hole corresponding section, is outward extended with tracheae by air nozzle hole and air nozzle hole inside soft tire, and tracheae is equipped with inflating switch valve, auxiliary chamber of single crystal furnace furnace tube cleaning tool designed by the utility model improves work efficiency, the operation of staff is facilitated, structure is simple, easy to maintain.

Description

A kind of auxiliary chamber of single crystal furnace furnace tube cleaning tool
Technical field
The utility model is suitable for the Removal Technology field of the various auxiliary chamber of single crystal furnace furnace tubes of monocrystalline manufacturing field, specifically It is to be related to a kind of auxiliary chamber of single crystal furnace furnace tube cleaning tool.
Background technique
Since volatile matter is attached to auxiliary chamber of single crystal furnace furnace tube outer wall during pulling monocrystal, existing method is when clearing up after blowing out Non-dust cloth is entangled in above the ring-like iron bar with iron, upper alcohol of remarrying protrudes into wiping up and down after concubine furnace tube.Such wiping Volatile matter is ineffective and non-dust cloth is wrapped in more situations that cleaning tool is not easy to take after having cleared up concubine furnace tube for method cleaning Out, it wastes time.
Utility model content
Technical problem to be solved in the utility model is, the shortcomings that for the above prior art, proposes a kind of single crystal growing furnace Concubine furnace tube cleaning tool, improves work efficiency, and facilitates the operation of staff, and structure is simple, easy to maintain.
In order to solve the above-mentioned technical problem, the technical solution of the utility model is achieved in the following ways: Yi Zhongdan Brilliant furnace concubine furnace tube cleaning tool, including iron hoop and strut, iron hoop lower surface are equipped with fulcrum, and strut passes through the fulcrum and iron hoop It is mutually fixedly connected and is in be mutually perpendicular to state between strut and iron hoop;Opened up within one week along iron hoop ring body outer wall it is fluted, in groove It is inlaid with soft tire, soft tire and iron hoop outer surface are integrally bundled with non-dust cloth, and soft tire is equipped with air nozzle hole, passes through inside soft tire Air nozzle hole is outward extended with tracheae, and tracheae, which is equipped with, inflates switch valve.
The technical solution that the utility model further limits is:
Auxiliary chamber of single crystal furnace furnace tube cleaning tool above-mentioned, soft tire use rubber material.
Auxiliary chamber of single crystal furnace furnace tube cleaning tool above-mentioned, non-dust cloth use alcohol non-dust cloth.
Auxiliary chamber of single crystal furnace furnace tube cleaning tool above-mentioned, tracheae extension are mutually close to by multiple snap rings with strut.
The beneficial effects of the utility model are: original iron hoop has been made into ring by the technical solution of the utility model The external reeded iron hoop of wall, and card has a soft tire in groove, the tracheae that soft tire extends, which is equipped with, inflates switch valve, can be by opening Pass valve is inflated and is deflated to clear up, so that concubine furnace tube cleaning quality is improved, original method is used to clear up one Concubine cylinder needs five minutes, has used clearance time after the product to be down to three minutes, working efficiency greatly improves, and facilitates The operation of staff, it is time saving and energy saving, it is energy-efficient, and the technical solution structure is simple, and easy for installation, maintenance is simple.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model;
Fig. 2 is the utility model iron hoop section;
Fig. 3 is the utility model tracheae detail view;
Wherein: 1- iron hoop, 2- strut, 3- groove, the soft tire of 4-, 5- non-dust cloth, 6- air nozzle hole, 7- tracheae, 8- inflate switch Valve, 9- snap ring.
Specific embodiment
The utility model is described in further detail below:
Embodiment 1
A kind of auxiliary chamber of single crystal furnace furnace tube cleaning tool provided in this embodiment, including iron hoop 1 and strut 2,1 following table of iron hoop Face is equipped with fulcrum, and strut 2 is fixedly connected with 1 phase of iron hoop by the fulcrum and is in be mutually perpendicular to state between strut 2 and iron hoop 1; Fluted 3 are opened up within one week along 1 ring body outer wall of iron hoop, soft tire 4 is inlaid in groove 3, soft tire 4 and 1 outer surface of iron hoop are integrally tied It is tied with non-dust cloth 5, soft tire 4 is equipped with air nozzle hole 6, tracheae 7 is outward extended with by air nozzle hole 6 inside soft tire 4, on tracheae 7 Equipped with inflating switch valve 8;
Soft tire 4 uses rubber material;Non-dust cloth 5 uses alcohol non-dust cloth;7 extension of tracheae by multiple snap rings 9 with 2 phase of strut is close to.
The operating method of the present embodiment are as follows: spirituous non-dust cloth will be dipped in front of clearing up concubine furnace tube first and be wrapped in iron hoop And the outer surface of soft tire entirety, it is carried out by the air nozzle hole of soft tire with tracheae is connect when extending into furnace tube using inflator Inflation, is wiped after contacting soft tire sufficiently with furnace tube outer wall up and down.By inflating switch valve for soft tire after cleaning out In gas bleed off, smoothly take out cleaning tool.
By the technical solution of the utility model, original iron hoop the reeded iron hoop of ring body outer wall is made into, and recessed Card has a soft tire in slot, the tracheae that soft tire extends, which is equipped with, inflates switch valve, can inflating and deflating and do by switch valve Cleaning clears up a concubine cylinder using original method and needs five minutes, use so that concubine furnace tube cleaning quality is improved Clearance time is down to three minutes after the product, and working efficiency greatly improves, and facilitates the operation of staff, time saving province Power, it is energy-efficient, and the technical solution structure is simple, and easy for installation, maintenance is simple.
Above embodiments are only to illustrate the technical idea of the utility model, and the protection model of the utility model cannot be limited with this Enclose, it is all according to the utility model proposes technical idea, any changes made on the basis of the technical scheme each falls within this reality Within the scope of novel protected.

Claims (4)

1. a kind of auxiliary chamber of single crystal furnace furnace tube cleaning tool, including iron hoop (1) and strut (2), it is characterised in that: the iron hoop (1) lower surface be equipped with fulcrum, the strut (2) by the fulcrum be mutually fixedly connected with the iron hoop (1) and the strut (2) and It is in be mutually perpendicular to state between the iron hoop (1);Fluted (3), the groove are opened up within ring body outer wall one week along the iron hoop (1) (3) it is inlaid in soft tire (4), the soft tire (4) and iron hoop (1) outer surface are integrally bundled with non-dust cloth (5), the soft tire (4) air nozzle hole (6) are equipped with, are outward extended with tracheae (7), the tracheae by air nozzle hole (6) inside the soft tire (4) (7) it is equipped with and inflates switch valve (8).
2. auxiliary chamber of single crystal furnace furnace tube cleaning tool according to claim 1, it is characterised in that: the soft tire (4) uses Rubber material.
3. auxiliary chamber of single crystal furnace furnace tube cleaning tool according to claim 1, it is characterised in that: the non-dust cloth (5) uses Alcohol non-dust cloth.
4. auxiliary chamber of single crystal furnace furnace tube cleaning tool according to claim 1, it is characterised in that: tracheae (7) extension Divide and is mutually close to by multiple snap rings (9) with the strut (2).
CN201821686247.3U 2018-10-17 2018-10-17 A kind of auxiliary chamber of single crystal furnace furnace tube cleaning tool Active CN209024675U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201821686247.3U CN209024675U (en) 2018-10-17 2018-10-17 A kind of auxiliary chamber of single crystal furnace furnace tube cleaning tool

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201821686247.3U CN209024675U (en) 2018-10-17 2018-10-17 A kind of auxiliary chamber of single crystal furnace furnace tube cleaning tool

Publications (1)

Publication Number Publication Date
CN209024675U true CN209024675U (en) 2019-06-25

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201821686247.3U Active CN209024675U (en) 2018-10-17 2018-10-17 A kind of auxiliary chamber of single crystal furnace furnace tube cleaning tool

Country Status (1)

Country Link
CN (1) CN209024675U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111112158A (en) * 2019-12-31 2020-05-08 内蒙古中环领先半导体材料有限公司 Method and device for avoiding deflagration in dismantling and cleaning process

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111112158A (en) * 2019-12-31 2020-05-08 内蒙古中环领先半导体材料有限公司 Method and device for avoiding deflagration in dismantling and cleaning process

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