CN209024191U - A kind of valve block of carrying liqs safe retrieving function - Google Patents
A kind of valve block of carrying liqs safe retrieving function Download PDFInfo
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- CN209024191U CN209024191U CN201821270075.1U CN201821270075U CN209024191U CN 209024191 U CN209024191 U CN 209024191U CN 201821270075 U CN201821270075 U CN 201821270075U CN 209024191 U CN209024191 U CN 209024191U
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Abstract
The utility model discloses a kind of valve blocks of carrying liqs safe retrieving function, including valve block and liquids recovery tank arrangement, porous barrier is equipped between valve block and liquids recovery tank arrangement, valve block includes liquid source import, purge gas import, the outlet of the first liquid source, the outlet of the second liquid source, the outlet of N liquid source, venturi gas feed, first row port and second exhaust port, liquids recovery tank arrangement includes liquid feed valve, exhaust valve, liquid recovery tank, weighing sensor, and liquid recovery tank lower end is provided with weighing sensor.The utility model in the exhaust pipe in the valve block of existing configuration parallel connection into a liquids recovery tank arrangement, when any branch needs to safeguard, individually the liquid in the branch and secondary distribution pipes can all be pushed back to the recycling tank arrangement newly increased, guarantee that wholly liquid state source supplying system operates normally, greatly reduce the workload of binder recharge, the operating time is saved, production efficiency is improved, reduces safe operation risk.
Description
Technical field
The utility model relates to field of semiconductor manufacture more particularly to a kind of valve blocks of carrying liqs safe retrieving function.
Background technique
Conventional chemical liquid valve block often directly uses the design configurations of gas phase media valve block, i.e. liquid flow
Enter supervisor, liquid outflow supply branch is reconfigured purging branch and vacuumizing and exhausting branch.Break down when production machine or
There are the situations such as contaminated in secondary distribution pipes, the secondary distribution pipes to a certain branch and rear end is needed to vacuumize purging displacement
When, existing valve block equipment needs to push back liquid in head tank, then the method for purging plus being vented by gas is dry to replace
Only.Need to stop a whole set of liquid source supply system once when the method for purging and being vented by gas that breaks down is to replace
The operation of system, the normal process production for stopping all boards need to close the valve of other branches, only relatively for valve block
Keep needing to safeguard the valve opening of branch, it will seriously affect the production capacity of factory, there is an urgent need to one kind, and list may be implemented
The liquid valve block of only maintenance function.
Therefore, there are also to be developed for the prior art.
Utility model content
Place in view of above-mentioned deficiencies of the prior art, the purpose of this utility model is to provide a kind of carrying liqs safe retrievings
The valve block of function, it is intended to solve the problems, such as that existing valve block to spontaneous combustion, poisonous and harmful liquids recovery and cannot separately maintain.
In order to achieve the above object, the utility model takes following technical scheme:
A kind of valve block of carrying liqs safe retrieving function, including valve block and liquids recovery tank arrangement, the valve block
Porous barrier is equipped between the liquids recovery tank arrangement, the valve block includes liquid source import, purge gas import, the
The outlet of one liquid source, the outlet of the second liquid source, the outlet of N liquid source, venturi gas feed, first row port and second exhaust
Mouthful, the liquid source import is exported with first liquid source and is connect by pipeline, the liquid source import and first liquid
State source is successively arranged main feed liquor isolating valve, principal pressure table, first branch liquid feed valve, first branch pressure gauge, first between outlet
Branch low-pressure vent valve, the first branch export isolating valve；
The liquid source import and second liquid source are exported to be connect by pipeline, the liquid source import and described the
Two liquid sources outlet between be successively arranged main feed liquor isolating valve, principal pressure table, second branch liquid feed valve, second branch pressure gauge,
Second branch low-pressure vent valve, second branch export isolating valve；
The liquid source import is exported with the N liquid source and is connect by pipeline, the liquid source import and the N
Liquid source is also successively arranged main feed liquor isolating valve, principal pressure table, N branch liquid feed valve, N branch pressure table, N between outlet
Branch low-pressure vent valve, N branch way outlet isolating valve；
The purge gas import is connect with the first row port by pipeline, the purge gas import and described the
Air inlet isolating valve, boost gauge, check-valves, recycling can by-passing valve, discharge pressure gauge and true are successively arranged between one exhaust outlet
Idle discharge air valve；
The purge gas import is connect with the second exhaust port by pipeline, the purge gas import and described the
Air inlet isolating valve, boost gauge, check-valves, recycling can by-passing valve, vacuum generator isolation are successively arranged between two exhaust outlets
Valve and venturi vacuum generator；
The venturi vacuum generator is also connect with the venturi gas feed, the venturi vacuum generator with
Venturi gas source isolating valve is provided between the venturi gas feed；
Recycling can by-passing valve side between the purge gas import and the first row port on pipeline is equipped with feed liquor
The other side of pipe, the recycling can by-passing valve is equipped with exhaust pipe, and the inlet tube, exhaust pipe are canned with the liquids recovery respectively
Connection is set, is successively arranged the first main feed liquor isolating valve and N branch liquid feed valve on the inlet tube, on the exhaust pipe successively
Equipped with the second isolating valve and exhaust valve；
The liquids recovery tank arrangement includes liquid feed valve, exhaust valve, liquid recovery tank, weighing sensor, and the liquid returns
Closed cans lower end is provided with weighing sensor.
Further, the first row port connects vacuum pump.
Further, the second exhaust port connects exhaust gas treating device.
Further, the pipeline of the purge gas import and the first row port is equipped with test mouth isolating valve, institute
It states and also is provided with test mouth isolating valve on the pipeline of purge gas import and the second exhaust port.
Further, the valve block is additionally provided with the exhaust outlet with vacuum table.
The utility model compared with prior art the utility model has the advantages that row of the utility model in the valve block of existing configuration
Parallel connection is into a liquids recovery tank arrangement in feed channel, when any branch needs to safeguard, can individually the branch and
Liquid in secondary distribution pipes is all pushed back to the recycling tank arrangement newly increased, guarantees that wholly liquid state source supplying system is normal
Operation would not have any impact to the machine in other normal productions, can greatly reduce the workload that binder returns tank, section
The operating time is saved, improves production efficiency, and reduce safe operation risk.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the valve block of carrying liqs safe retrieving function provided by the embodiment of the utility model.
Specific embodiment
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation
Example, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only used to explain
The utility model is not used to limit the utility model.
It should be noted that it can be directly another when element is referred to as " being fixed on " or " being set to " another element
On one element or it may be simultaneously present centering elements.When an element is known as " being connected to " another element, it can
To be directly to another element or may be simultaneously present centering elements.
It is only each other relatively it should also be noted that, the positional terms such as left and right, upper and lower in the utility model embodiment
Concept or be reference with the normal operating condition of product, and should not be regarded as restrictive.
As shown in Figure 1, a kind of valve block of carrying liqs safe retrieving function for the utility model specific embodiment,
It is equipped with including valve block and liquids recovery tank arrangement, between the valve block and the liquids recovery tank arrangement porous
Partition 1, the valve block include liquid source import 2, purge gas import 3, the first liquid source outlet the 4, second liquid source outlet
5, N liquid source outlet 6, venturi gas feed 7, first row port 8 and second exhaust port 9, the liquid source import 2 and institute
It states the first liquid source outlet 4 to connect by pipeline, successively be set between the liquid source import 2 and first liquid source outlet 4
There are main feed liquor isolating valve 11, principal pressure table 12, the first main road liquid feed valve 13, first branch pressure gauge 14, first branch low pressure row
Air valve 15, the first branch export isolating valve 16；
The liquid source import 2 is connect with second liquid source outlet 5 by pipeline, the liquid source import 2 and institute
It states and is successively arranged main feed liquor isolating valve 11, principal pressure table 12, second branch liquid feed valve 21, second between the second liquid source outlet 5
Branch pressure table 22, second branch low-pressure vent valve 23, second branch export isolating valve 24；
The liquid source import 2 and the N liquid source outlet 6 is connect by pipeline, the liquid source import 2 with it is described
Main feed liquor isolating valve 11, principal pressure table 12, N branch liquid feed valve 31, N branch are also successively arranged between N liquid source outlet 6
Road pressure gauge 32, N branch exhaust valve 33, N branch way outlet isolating valve 34；
The purge gas import 3 is connect with the first row port 8 by pipeline, the purge gas import 3 and institute
It states and is successively arranged air inlet isolating valve 41, boost gauge 42, check-valves 43, recycling can by-passing valve 44, row between first row port 8
Put pressure gauge 45 and vacuum evacuation valve 46；
The purge gas import 3 is connect with the second exhaust port 9 by pipeline, the purge gas import 3 and institute
It states and is equipped with the second air inlet isolating valve 41, boost gauge 42, check-valves 43, recycling can by-passing valve 44, true between second exhaust port 9
Empty generator isolating valve 51 and venturi vacuum generator 52；
The venturi vacuum generator 52 is also connect with the venturi gas feed 7, and the venturi vacuum occurs
Venturi gas source isolating valve 61 is set between device 52 and the venturi gas feed 7；
44 side of recycling can by-passing valve between the purge gas import 3 and the first row port 8 on pipeline is equipped with
Inlet tube, the other side of the recycling can by-passing valve 44 are equipped with exhaust pipe, and the inlet tube, exhaust pipe are returned with the liquid respectively
Closed cans device connects and is successively arranged the first isolating valve 71 and liquid feed valve 72 on the inlet tube, is successively arranged on the exhaust pipe
Second isolating valve 73 and exhaust valve 74；
The liquids recovery tank arrangement includes liquid feed valve 72, exhaust valve 74, liquid recovery tank 75, weighing sensor 76, institute
It states 75 lower end of liquid recovery tank and is provided with weighing sensor 73.
In the utility model, the N is less than or equal to 6, and the inlet tube insertion tank is interior to tank bottom 5-10mm, the exhaust valve
72 are located at the top of the recycling can, and 75 bottom end of liquid recovery tank is also equipped with for showing 75 amount of fluid of liquid recovery tank
Electronic scale need integrally to tear liquids recovery tank arrangement open after amount of fluid inside liquid recovery tank 75 is more than setting value
Under, the backlash closed cans that more renews.
Specifically, the first row port 8 is connected with vacuum pump.
Specifically, the second exhaust port 9 is connected with exhaust gas treating device.
Specifically, the pipeline of the purge gas import 3 and the first row port 8 is equipped with test mouth isolating valve 47,
Test mouth isolating valve 47 also is provided on the purge gas import 3 and the pipeline of the second exhaust port 9.
Specifically, the valve block is additionally provided with the exhaust outlet 80 with vacuum table.
Specific embodiment 1:
When needing any branch to valve block to safeguard, the 4 place first branchs are exported with the first liquid source and are needed
For being safeguarded:
Step 1: closing first branch liquid feed valve 13, other branch road valves are failure to actuate, and original operating status is maintained；
Step 2: closing vacuum evacuation valve 46, and close recycling can by-passing valve 44；
Step 3: opening venturi gas source isolating valve 61, make venturi vacuum generator 52 in running order；
Step 4: opening the 4th isolating valve 51, and observe discharge 45 pressure of pressure gauge (- 10psi is literary mound lower than -10psi
In the vacuum values that generate when working normally of vacuum generator 52)；
Step 5: opening the second isolating valve 73 and exhaust valve 74, then open liquid feed valve 72 and the first isolating valve 71, Extract
Gas in body recycling can 75 and in exhaust manifold road simultaneously closes off the 4th isolating valve 51 to vacuum values are set；
Step 6: the first low-pressure vent valve 15 is slowly opened, by the vacuum degree in liquid recovery tank 75, the first branch
It is pumped into liquid recovery tank 75 with the liquid in the secondary distribution pipes in rear end, until the pressure in liquid recovery tank 75 rises to stabilization
Value, i.e. observation discharge 45 pressure rise of pressure gauge to stationary value (pressure inside the tank is still negative value at this time)；
Step 7: meanwhile, the gas valve for liquid reflux in the secondary distribution pipes of force feed to storage tank at board end is opened,
By air pressure the liquid pressure in pipeline into liquid recovery tank 75, until the pressure in liquid recovery tank 75 rises to back pressure gas
Body uniform pressure, i.e. Synchronous discharge the pressure rise of pressure gauge 45 to stationary value；
Step 8: closing the back pressure gas valve at board end, turn off the first low-pressure vent valve 15；
Step 9: opening the 4th isolating valve, the gas in extraction liquid recovery tank 75 and in exhaust manifold road is to setting vacuum
Value, i.e. observation discharge pressure gauge 45 are lower than -10psi, simultaneously close off the 4th isolating valve；
Step 10: being repeated 20 times step 6- step 9, it can in the branch and second level distribution pipes 99% or more liquid
Source is pushed back to liquid recovery tank 75；
Step 11: and then the first isolating valve 71, liquid feed valve 72, exhaust valve 74,73 valve of the second isolating valve are turned off, it opens
Valve on recycling can by-passing valve 44, vacuum evacuation 46 vacuum exhaust line of valve；
Step 12: one time liquid safe reclaimer operation is completed.
The utility model in the exhaust pipe in the valve block of existing configuration parallel connection into a liquids recovery tank arrangement, when
When any branch needs to safeguard, individually the liquid in the branch and secondary distribution pipes all can be pushed back to this and newly increased
Recycling tank arrangement in, guarantee that wholly liquid state source supplying system operates normally, the machine in other normal productions would not be made
At any influence, the workload that binder returns tank can be greatly reduced, the operating time is saved, improve production efficiency, and reduce
Safe operation risk.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Made any modifications, equivalent replacements, and improvements etc., should be included in the utility model within the spirit and principle of utility model
Protection scope within.
Claims (5)
1. a kind of valve block of carrying liqs safe retrieving function, including valve block and liquids recovery tank arrangement, the valve block with
Porous barrier is equipped between the liquids recovery tank arrangement, it is characterised in that: the valve block includes liquid source import, purge gass
Body import, the outlet of the first liquid source, the outlet of the second liquid source, the outlet of N liquid source, venturi gas feed, first row port
And second exhaust port, the liquid source import and first liquid source are exported to be connect by pipeline, the liquid source import and
Main feed liquor isolating valve, principal pressure table, first branch liquid feed valve, first branch pressure are successively arranged between the first liquid source outlet
Power table, first branch low-pressure vent valve, the first branch export isolating valve；
The liquid source import is exported with second liquid source and is connect by pipeline, the liquid source import and second liquid
State source is successively arranged main feed liquor isolating valve, principal pressure table, second branch liquid feed valve, second branch pressure gauge, second between outlet
Branch low-pressure vent valve, second branch export isolating valve；
The liquid source import is exported with the N liquid source and is connect by pipeline, the liquid source import and the N liquid
Source is also successively arranged main feed liquor isolating valve, principal pressure table, N branch liquid feed valve, N branch pressure table, N branch between outlet
Low-pressure vent valve, N branch way outlet isolating valve；
The purge gas import is connect with the first row port by pipeline, the purge gas import and the first row
Air inlet isolating valve, boost gauge, check-valves, recycling can by-passing valve, discharge pressure gauge and vacuum row are successively arranged between port
Air valve；
The purge gas import is connect with the second exhaust port by pipeline, the purge gas import and the second row
Be successively arranged between port air inlet isolating valve, boost gauge, check-valves, recycling can by-passing valve, vacuum generator isolating valve and
Venturi vacuum generator；
The venturi vacuum generator is also connect with the venturi gas feed, the venturi vacuum generator with it is described
Venturi gas source isolating valve is provided between venturi gas feed；
Recycling can by-passing valve side between the purge gas import and the first row port on pipeline is equipped with inlet tube, institute
The other side for stating recycling can by-passing valve is equipped with exhaust pipe, and the inlet tube, exhaust pipe connect with the liquids recovery tank arrangement respectively
It connects, the first isolating valve and liquid feed valve is successively arranged on the inlet tube, the second isolating valve and row are successively arranged on the exhaust pipe
Air valve；
The liquids recovery tank arrangement includes liquid feed valve, exhaust valve, liquid recovery tank, weighing sensor, the liquid recovery tank
Lower end is provided with weighing sensor.
2. the valve block of carrying liqs safe retrieving function according to claim 1, it is characterised in that: the first row port
Connect vacuum pump.
3. the valve block of carrying liqs safe retrieving function according to claim 1, it is characterised in that: the second exhaust port
Connect exhaust gas treating device.
4. the valve block of carrying liqs safe retrieving function according to claim 1, it is characterised in that: the purge gas into
The pipeline of mouth and the first row port is equipped with test mouth isolating valve, the purge gas import and the second exhaust port
Test mouth isolating valve also is provided on pipeline.
5. the valve block of carrying liqs safe retrieving function according to claim 1, it is characterised in that: the valve block is also set
There is the exhaust outlet with vacuum table.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821270075.1U CN209024191U (en) | 2018-08-08 | 2018-08-08 | A kind of valve block of carrying liqs safe retrieving function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821270075.1U CN209024191U (en) | 2018-08-08 | 2018-08-08 | A kind of valve block of carrying liqs safe retrieving function |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209024191U true CN209024191U (en) | 2019-06-25 |
Family
ID=66872789
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821270075.1U Active CN209024191U (en) | 2018-08-08 | 2018-08-08 | A kind of valve block of carrying liqs safe retrieving function |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209024191U (en) |
-
2018
- 2018-08-08 CN CN201821270075.1U patent/CN209024191U/en active Active
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