CN209014472U - The laser induced breakdown spectroscopy system that single multiple spot measures simultaneously - Google Patents
The laser induced breakdown spectroscopy system that single multiple spot measures simultaneously Download PDFInfo
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- CN209014472U CN209014472U CN201821562705.2U CN201821562705U CN209014472U CN 209014472 U CN209014472 U CN 209014472U CN 201821562705 U CN201821562705 U CN 201821562705U CN 209014472 U CN209014472 U CN 209014472U
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Abstract
The utility model discloses the laser induced breakdown spectroscopy systems that a kind of single multiple spot measures simultaneously, the system includes: laser excitation and collection subsystem, for output laser pulse and by focusing laser pulses at linear light spot, collects the luminescence of plasma that sample facula position generates and be imaged onto optical fiber transmission and light splitting subsystem；Optical fiber transmission and light splitting subsystem, shine for plasma and transmit as carrying out and the light of different wave length scatters；Data acquisition and procession subsystem, for being showed luminescence of plasma picture and analyzing different location luminescence of plasma spectrum；Circuit control subsystem, for sending control signal with processing subsystem to laser excitation and collection subsystem and data acquisition, to control the time synchronization between subsystems.The utility model increases sample measurement spatial dimension, improves diagnosis efficiency, shortens sample time of measuring, is suitable for the different fields multiple spot diagnostic applications such as solid, liquid, gas, dust.
Description
Technical field
The utility model relates to the induced with laser that spectral measurement system field more particularly to a kind of single multiple spot measure simultaneously
Breakdown spectral system.
Background technique
Laser induced breakdown spectroscopy is the detection that a kind of atom spectrum technology is used for element, is mainly based upon high energy arteries and veins
Rush laser ablation substance, use in the luminescent spectrum of laser plasma element contained by the analysis of material such as the intensity of spectral line, position with
And the ratio between each element ingredient, have easy, quick, former without sample pretreatment, simultaneous determination of multielement, complex environment
Position real-time detection the advantages that, environment measuring, Industry Control, bio-safety, in terms of have huge application
Prospect.
It is limited by laser energy requirement, laser induced breakdown spectroscopy measures sample composition the side mostly using sampling at present
Superlaser is focused on submillimeter scale by formula, is detected the luminescent spectrum of the position plasma, however is obtained sample Elemental redistribution
Overall picture be conducive to the full appreciation to sample, researcher has studied the member of different samples by the way of point by point scanning accordingly
Plain distributed image.And for detonation process, the rapid developments process such as exhaust emissions, the element point that can not be obtained using point by point scanning
Cloth image, and the image that non-synchronization obtains can not clearly recognize the physical process.
Therefore, develop laser induced breakdown spectroscopy new method of measuring, make full use of pulsed laser energy, realize the more of sample
Point element measurement simultaneously, improves the compact and practicability of diagnostic system, to the development of laser induced breakdown spectroscopy with answer
With will be of great significance.
Utility model content
The technical problem to be solved by the utility model is in view of the problems of the existing technology, the utility model proposes
The laser induced breakdown spectroscopy system that a kind of single multiple spot measures simultaneously is focused using pulse superlaser, in focal plane
Position, which focuses, becomes a linear light spot, while exciting the analysis sample of larger area, forms the plasma of similar spheroid-like
Illuminator analyzes the luminescent spectrum of plasma, realizes the laser induced breakdown spectroscopy diagnosis of single multiple spot；And using conllinear
Collection mode is excited, is a kind of compact multiple spot laser induced breakdown spectroscopy system simultaneously, and realize to metal, dust etc.
Laser induced breakdown spectroscopy test.The utility model not only increases sample measurement spatial dimension, improves diagnosis efficiency, and
Sample time of measuring is shortened, the different fields multiple spot diagnostic applications such as solid, liquid, gas, dust are suitable for.
The laser induced breakdown spectroscopy system that a kind of single multiple spot provided by the utility model measures simultaneously, comprising:
Laser excitation and collection subsystem swash for exporting after the control signal for receiving the output of circuit control subsystem
Light pulse, and focusing laser pulses are collected the luminescence of plasma that sample facula position generates and be imaged onto light at linear light spot
Fibre transmission and light splitting subsystem；
Optical fiber transmission and light splitting subsystem, shine for plasma as being transmitted, and the light of different wave length is dissipated
It opens；
Data acquisition and procession subsystem, for collecting optical fiber transmission and the luminescence of plasma after light splitting subsystem light splitting
Luminescence of plasma picture is showed and analyzes different location luminescence of plasma spectrum by picture；
Circuit control subsystem, for sending and controlling with processing subsystem to laser excitation and collection subsystem and data acquisition
Signal processed, to control the time synchronization between subsystems.
Further, laser excitation and collection subsystem include cylindrical mirror, spherical mirror and mesoporous reflecting mirror, and laser pulse passes through
The combination of cylindrical mirror and spherical mirror is focused into linear light spot, and the luminescence of plasma that sample facula position generates is by the same spherical surface
Mirror is collected and is reflected with mesoporous reflecting mirror, and the spherical mirror and another spherical mirror form imaging system, then by signal light
It is imaged onto optical fiber transmission and light splitting subsystem.
Further, optical fiber transmission and light splitting subsystem include image-carrying fiber bundle and spectrometer, and image-carrying fiber bundle will be for that will wait
Gas ions shine as being transferred on spectrometer, and spectrometer is for scattering the light of different wave length.
Further, data acquisition and procession subsystem includes the i.e. enhanced array photodetectors of ICCD camera, ICCD phase
Machine by luminescence of plasma picture for showing and analyzing different location luminescence of plasma spectrum.
Compared with prior art, the beneficial effects of the utility model are embodied in:
(1) multiple spot measures sample elemental composition simultaneously, does not need the equipment such as multi-station laser, spectrometer.
(2) multiple spot measures sample elemental composition simultaneously, is not required to scanning mode, diagnosis efficiency is higher.
(3) different spaces point element ingredient is measured in synchronization, is conducive to accurate understanding sample physical state comprehensively.
(4) conllinear laser excitation and collection system are used, keeps spectroscopic system more compact, is not required to strictly focus, to sample
Form, position no requirement (NR) can be easy to use, flexible to real-time measurements such as solid, liquid, gas, aerosols.
(5) disposably measurement sample size, interval can be designed according to different measurement demands, be suitable for laser-induced breakdown
Application of the spectral technique in different fields of measurement.
Detailed description of the invention
Fig. 1 is the laser induced breakdown spectroscopy system structure diagram of the utility model；
Fig. 2 (a) -2 (b) is that the laser of the utility model embodiment focuses on sample surfaces schematic diagram and simulation calculated result
Schematic diagram；
Fig. 3 (a) -3 (f) is the single multiple spot of the sample specifically measured of the utility model embodiment while induced with laser is hit
Wear the pixel of spectrogram and ICCD and the corresponding relationship of diagnosis sample position.
Specific embodiment
With reference to the accompanying drawing, the utility model is described in detail.
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation
Example, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only used to explain
The utility model is not used to limit the utility model.
As shown in Figure 1, the laser induced breakdown spectroscopy system of the utility model include laser excitation and collection subsystem 2,
Optical fiber transmission and light splitting subsystem 3, data acquisition and procession subsystem 4 and circuit control subsystem 1.
Laser excitation and collection subsystem 2: laser is exported after the control signal for receiving the output of circuit control subsystem 1
Pulse, and focusing laser pulses are collected the luminescence of plasma that sample facula position generates and be imaged onto optical fiber at linear light spot
Transmission and light splitting subsystem 3.In some embodiments, laser excitation and collection subsystem 2 may include cylindrical mirror, spherical mirror and
The optical modules such as mesoporous reflecting mirror, laser are focused into a linear light spot, sample hot spot by the combination of cylindrical mirror and spherical mirror
Position generate plasma luminescence collected and reflected with mesoporous reflecting mirror by the same spherical mirror, the spherical mirror and another
Spherical mirror forms imaging system, and signal light is then imaged onto optical fiber transmission and light splitting subsystem 3.
Optical fiber transmission is with light splitting subsystem 3: luminescence of plasma picture is transferred to the incidence end of spectrometer correspondingly
Mouthful, grating spectrograph scatters the light of different wave length.
Data acquisition and procession subsystem 4: the luminescence of plasma after optical fiber transmission is divided with light splitting subsystem 3 is collected
Luminescence of plasma picture is showed and analyzes different location luminescence of plasma spectrum by picture.In some embodiments, it uses
Enhanced array photodetectors analyze facula position each point luminescence of plasma spectrum, and correspond with sample position.
Circuit control subsystem 1: it sends and controls with processing subsystem 4 to laser excitation and collection subsystem 2 and data acquisition
Signal processed, to control the time synchronization between subsystems.
The measurement process of laser induced breakdown spectroscopy system based on the utility model is as follows: the survey of Tthe utility model system
Amount process is similar with traditional laser induced breakdown spectroscopy, firstly, circuit control subsystem 1 exports a control signal, high energy
It measures after pulse laser receives signal and exports a laser pulse, optical path of the laser pulse in laser excitation and collection subsystem 2
In be focused into a linear light spot, be placed on the sample of near focal point by linear light spot ablation at plasma after, generation it is equal from
Daughter shines outward, and the fiber end face of optical fiber transmission with light splitting subsystem 3 is imaged by laser excitation and collection subsystem 2
On, luminescence of plasma picture is transferred to optical fiber transmission to optical fiber and the spectrometer of light splitting subsystem 3 is divided, and is adopted by data
Collection is collected with processing subsystem 4, and ICCD camera shows luminescence of plasma picture, finally obtains different location plasma
Luminescent spectrum.
With conventional laser induced breakdown spectroscopy except that: conventional laser induced breakdown spectroscopy is once only capable of
The spectrum of a point is measured, and measurement while multiple spot may be implemented in the utility model by the way of line focus.
The utility model uses image-carrying fiber bundle, and luminescence of plasma picture can be transferred on spectrometer, realize sample
Product element measurement spatial discrimination, and use position resolution algorithm, in conjunction with two be imaged spherical surface microscope group imaging relations and
The coordinate of the corresponding luminescence of plasma position of each of ICCD pixel is calculated to the imaging relations of ICCD in spectrometer
With area size size, the image pixel intensities and luminescence of plasma position for extracting ICCD camera are corresponded, are realized to sample member
The spatial discrimination of element diagnosis.
The utility model combines together laser focusing optical lenses group and collecting lens group, realizes spectroscopic system
Compact design, and ensure that and collect the accurate overlapping of position and laser ablation position, without the strict control of sample position,
Realize the easy and applicability of measurement process.
In a specific embodiment, use sample for the lead of 1mm, copper, tungsten-molybdenum alloy be clipped in magnesium alloy and ferrochrome it
Between, focused spot size is 10 × 1mm, as shown in Fig. 2 (a).Fig. 2 (b) indicates the hot spot light distribution of the focal position of simulation,
In such a way that simulation calculates, the size for designing focal beam spot is a × b, can be according to the concrete condition of sample and wanting for measurement
It asks, designs different size of a, b, wherein a is the length of linear light spot, and b is the width of linear light spot the widest part.
The utility model proposes multiple spot simultaneously measure laser induced breakdown spectroscopy system, effectively realize in an experiment
Multiple layer metal composition measurement, analysis the result shows that, element measures while which can be realized different spatial, and
The measurement of different spatial resolutions can be realized by optimization design light path system.Citing is as shown in table 1.
The interpretation of result of 1 the utility model of table
The pixel of ICCD and corresponding relationship such as Fig. 3 (a) of diagnosis sample position are shown, the sample light of the different location of measurement
Shown in spectrogram such as Fig. 3 (b) -3 (f), the spectrogram of different spatial is extracted from ICCD, five layers of distribution of sample in ICCD
It is just corresponded to each other with five regions in ICCD, and difference is obvious between each other, the spectrum of acquisition is also very clear, this is practical
Novel diagnosis while can realize more spatial point sample elemental compositions well.
The utility model can also obtain in the non-uniform Distribution sample of consecutive variations using using the utility model simultaneously
Single multiple spot simultaneously measure laser induced breakdown spectroscopy system can obtain non-uniform Distribution in conjunction with spectral manipulation program
The ratio and corresponding change trend of each ingredient of sample different location.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Made any modifications, equivalent replacements, and improvements etc., should be included in the utility model within the spirit and principle of utility model
Protection scope within.
Claims (4)
1. the laser induced breakdown spectroscopy system that a kind of single multiple spot measures simultaneously characterized by comprising
Laser excitation and collection subsystem, for exporting laser arteries and veins after the control signal for receiving the output of circuit control subsystem
Punching, and by focusing laser pulses at linear light spot, it collects the luminescence of plasma that sample facula position generates and is imaged onto optical fiber biography
Defeated and light splitting subsystem；
Optical fiber transmission and light splitting subsystem, shine for plasma as being transmitted, and the light of different wave length is scattered；
Data acquisition and procession subsystem, for collecting optical fiber transmission and the luminescence of plasma picture after light splitting subsystem light splitting,
Luminescence of plasma picture is showed and analyzes different location luminescence of plasma spectrum；
Circuit control subsystem, for sending control letter with processing subsystem to laser excitation and collection subsystem and data acquisition
Number, to control the time synchronization between subsystems.
2. the laser induced breakdown spectroscopy system that a kind of single multiple spot according to claim 1 measures simultaneously, feature exist
In laser excitation and collection subsystem include cylindrical mirror, spherical mirror and mesoporous reflecting mirror, and laser pulse passes through cylindrical mirror and spherical surface
The combination of mirror is focused into linear light spot, during the luminescence of plasma that sample facula position generates is collected and used by the same spherical mirror
Hole reflecting mirror is reflected, and the spherical mirror and another spherical mirror form imaging system, and signal light is then imaged onto optical fiber and is passed
Defeated and light splitting subsystem.
3. the laser induced breakdown spectroscopy system that a kind of single multiple spot according to claim 1 measures simultaneously, feature exist
In optical fiber transmission includes image-carrying fiber bundle and spectrometer with light splitting subsystem, and image-carrying fiber bundle is used for luminescence of plasma picture
It is transferred on spectrometer, spectrometer is for scattering the light of different wave length.
4. the laser induced breakdown spectroscopy system that a kind of single multiple spot according to claim 1 measures simultaneously, feature exist
In, data acquisition and procession subsystem include the i.e. enhanced array photodetectors of ICCD camera, ICCD camera for will wait from
Daughter shines as showing and analyzing different location luminescence of plasma spectrum.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109030463A (en) * | 2018-09-21 | 2018-12-18 | 中国工程物理研究院流体物理研究所 | The laser induced breakdown spectroscopy system and measurement method that single multiple spot measures simultaneously |
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2018
- 2018-09-21 CN CN201821562705.2U patent/CN209014472U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109030463A (en) * | 2018-09-21 | 2018-12-18 | 中国工程物理研究院流体物理研究所 | The laser induced breakdown spectroscopy system and measurement method that single multiple spot measures simultaneously |
| CN109030463B (en) * | 2018-09-21 | 2024-01-30 | 中国工程物理研究院流体物理研究所 | Laser-induced breakdown spectroscopy system for single multi-point simultaneous measurement and measurement method |
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Granted publication date: 20190621 Termination date: 20200921 |