CN209014192U - A kind of intelligent gas pressure sensor - Google Patents
A kind of intelligent gas pressure sensor Download PDFInfo
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- CN209014192U CN209014192U CN201821616030.5U CN201821616030U CN209014192U CN 209014192 U CN209014192 U CN 209014192U CN 201821616030 U CN201821616030 U CN 201821616030U CN 209014192 U CN209014192 U CN 209014192U
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- pressure sensor
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- 238000000034 method Methods 0.000 description 17
- 238000005259 measurement Methods 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 238000012937 correction Methods 0.000 description 5
- 238000012360 testing method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
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- 230000005611 electricity Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
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- 230000007774 longterm Effects 0.000 description 1
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Abstract
It include circuit board the utility model relates to a kind of intelligent gas pressure sensor, sensor diaphragm, pressure detecting gas circuit and ventilation gas circuit, the sensor diaphragm setting is on circuit boards, the ventilation gas circuit and pressure detecting gas circuit are respectively acting on two faces of positive back of sensor diaphragm, the pressure detecting gas circuit is equipped with triple valve, it is the first end of triple valve close to pressure detecting gas circuit inlet end, it is the second end of triple valve far from pressure detecting gas circuit inlet end, the third end of triple valve and ventilation air circuit connection, the triple valve and circuit board electrical connection, with two working conditions, first is that closing the first end of triple valve, and it is connected to second end with third end, second is that closing the third end of triple valve, and it is connected to first end with second end.The utility model increases triple valve, realizes gas pressure sensor automatic zero adjustment, to avoid zero point error accumulative, solves the problems, such as gas pressure sensor null offset.
Description
Technical field
The utility model relates to metrological testing technology field more particularly to a kind of gas pressure sensors.
Background technique
Gas pressure sensor has a wide range of applications in the industrial production, such as pipeline pressure, wind speed measurement, unmanned plane
System etc..Due to being influenced by environment is complicated and changeable, pressure sensor used in these fields be required to it is long-term and
It works without interruption, the long-time stability of pressure sensor are by very big restriction.The core component of pressure sensor product is
Sensor diaphragm is a kind of semiconductor pressure diaphragm, by the way that the pressure that need to be detected is transmitted to semiconductor pressure film by carrier
On piece is under pressure according to semiconductor pressure diaphragm and generates resistance variations, then is worked by electronic circuit and realize pressure change
It is converted into the output of electronic signal.Pressure-sensitive diaphragm is many in the influence factor that working environment is subject to, and mainly has in application
The performance assessment criteria such as temperature drift and the null offset of pressure sensor itself.Temperature drift refers to pressure when variation of ambient temperature
The variation of force snesor parameter will cause the unstable of pressure sensor work.Null offset refers to due to temperature or other originals
It changes because will lead to pressure sensor in the benchmark zero point of detection.
Since the temperature change and humidity of local environment change, especially under the conditions of long-time, pressure sensor is close
The accumulation of closed loop border null offset, so that the measurement accuracy of pressure sensor is severely impacted, unreliable or unstable survey
Amount data can mislead the judgement of system, and system regulation is caused to fail.And it is mounted on the pressure sensor of some specific positions, due to
Position is special, it is impossible to which timing is replaced, and how to solve null offset just in this way becomes an intractable thing.
For product sensor under normal circumstances when reducing temperature drift and null offset there are mainly two types of method, i.e. hardware is superfluous
Yu Fayu software compensation method, hardware redundancy have manual clearing method, and pressure sensor works after a certain period of time, by manually clear
Zero, this method is feasible, but more troublesome；Also there is the method for the number for increasing pressure sensor, use multiple same types
Pressure sensor measure simultaneously, to improve the measurement accuracy of pressure signal, this method in consumer product due to
Cost requirement is undesirable；Another method is exactly software compensation method, examines pressure to pass by a large amount of, prolonged test
The variation characteristic of sensor, and then sensor compensation coefficient is calculated, but due to the process variations of pressure sensor individual, compensation
Effect also respectively has the problem of different, not can effectively solve null offset, these modes are meeting pressure sensor performance
Meanwhile also bringing the increase of cost.
Utility model content
The purpose of this utility model is to provide a kind of intelligent gas pressure sensors, the gas especially under atmospheric environment
Pressure sensor can effectively solve gas pressure sensor in use caused by null offset with smart auto-calibrate
Measure the problem of inaccuracy.
Technical solution provided by the utility model are as follows: a kind of intelligent gas pressure sensor, including circuit board, sensor film
Piece, pressure detecting gas circuit and ventilation gas circuit, the sensor diaphragm are arranged on circuit boards, the ventilation gas circuit and pressure detecting
Gas circuit is respectively acting on two faces of positive back of sensor diaphragm, and the pressure detecting gas circuit is equipped with triple valve, close to pressure detecting
Gas circuit inlet end is the first end of triple valve, is the second end of triple valve, triple valve far from pressure detecting gas circuit inlet end
Third end and ventilation air circuit connection, the triple valve and circuit board electrical connection there are two working conditions, first is that closing first
End, and it is connected to second end with third end, second is that closing third end, and it is connected to first end with second end.
Wherein, the triple valve is three-way solenoid valve, electric T-shaped valve, midget relay triple valve or microswitch threeway
Valve.
Wherein, the gas pressure sensor includes upper cover and lower cover, and the circuit board is horizontally installed on upper cover and lower cover
Between, it is equipped with partition in the upper cover, the space between circuit board and upper cover is separated into the first gas chamber and the second gas chamber, first
Gas chamber is equipped with the first gas nozzle, and the second gas chamber is equipped with the second gas nozzle, and the first gas circuit, the second gas circuit and the are equipped in the lower cover
Three gas chambers, the circuit board are equipped with the first venthole, the second venthole and third venthole, and first gas chamber passes through first
Venthole is connected to the first gas circuit, and second gas chamber is connected to by the second venthole with the second gas circuit, and first gas chamber is logical
It crosses third venthole to be connected to third gas chamber, the sensor diaphragm is arranged at third venthole, and the lower lid is equipped with the
Four ventholes and the 5th venthole, first gas circuit are connected to by the 4th venthole with third gas chamber, and second gas circuit is logical
It crosses the 5th venthole to be connected to third gas chamber, the triple valve is three-way solenoid valve, including electromagnetic coil and sealing piston are described
It is mobile that circuit board controls sealing piston by electromagnetic coil, and sealing piston is made to close the 4th venthole or the 5th venthole,
First gas nozzle, the first gas chamber, the first venthole, the first gas circuit and four-way stomatal limiting value ventilation gas circuit, second gas
Mouth, the second gas chamber, the second venthole, the second gas circuit, the 5th venthole and third gas chamber form pressure detecting gas circuit.
Wherein, first gas nozzle is for being communicated with the atmosphere, and the second gas nozzle with the gas circuit to be detected for being connected to.
Wherein, the circuit board is equipped with single-chip microcontroller and threeway valve-driving circuit, the single-chip microcontroller and threeway electrohydraulic valve actuator
The circuit of road and sensor film on piece is electrically connected.
Wherein, it is additionally provided with reset circuit on the circuit board, the RESET pin of the reset circuit and single-chip microcontroller is electrically connected
It connects.
The utility model has the following beneficial effects: can all be calibrated before gas pressure sensor factory, high-precision is used
Pressure calibrator gas pressure sensor is demarcated, and construct the eigenvalue equation of Pressure Variation, obtain pressure
The linearly interval that force snesor works normally.The utility model gas pressure sensor increases triple valve, realizes gas pressure
Force snesor automatic zero adjustment solves the problems, such as gas pressure sensor null offset to avoid zero point error accumulative, specific former
Manage as follows: the opportunity of automatic zero adjustment is when gas pressure sensor normally powers on start-up operation or timing carries out, electric first
Road plate first passes through triple valve and closes first end, and is connected to second end with third end, at this time two face pressures of positive back of sensor diaphragm
Power is identical, can't detect pressure difference, i.e. reference zero, and gas pressure sensor calls calibration data to reset pressure, disappears
Except null offset bring error；Then circuit board closes third end by triple valve, and is connected to first end with second end, this
When sensor diaphragm positive back two surface pressures it is different, start normally to carry out pressure detecting to the air pressure in pressure detecting gas circuit.This
Utility model can intelligent automatic zero adjustment, open each in use, automatic zero adjustment is primary, if gas pressure sensor is long
Between work, also can be set as timing school zero, the zero point for efficiently solving gas force snesor in long-time closed environment is floated
Shifting problem.
Detailed description of the invention
Structure principle chart when Fig. 1 is one school zero of intelligent gas pressure sensor embodiment described in the utility model；
Fig. 2 is structure principle chart when intelligent gas pressure sensor embodiment one described in the utility model normally detects；
Fig. 3 is the circuit diagram of intelligent gas pressure sensor embodiment one described in the utility model；
Fig. 4 is the overall appearance schematic diagram of intelligent gas pressure sensor embodiment two described in the utility model；
The schematic diagram of the section structure when Fig. 5 is intelligent gas pressure sensor embodiment second revisal zero described in the utility model；
Fig. 6 is cross-section structure signal when intelligent gas pressure sensor embodiment two described in the utility model normally detects
Figure.
Wherein, 1, circuit board；11, the first venthole；12, the second venthole；13, third venthole；14, single-chip microcontroller；15,
Threeway valve-driving circuit；16, reset circuit；2, sensor diaphragm；21, sensor diaphragm circuit；3, pressure detecting gas circuit；4, lead to
Gas gas circuit；5, triple valve；51, electromagnetic coil；52, sealing piston；53, first end；54, second end；55, third end；6, upper cover；
61, partition；62, the first gas chamber；63, the second gas chamber；64, the first gas nozzle；65, the second gas nozzle；7, lower cover；71, the first gas circuit；
72, the second gas circuit；73, third gas chamber；74, the 4th venthole；75, the 5th venthole.
Specific embodiment
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation
Example, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only used to explain
The utility model is not used to limit the utility model.
Intelligent air pressure pressure sensor described in the utility model aims to solve the problem that certain application environment decline low-pressure sensor
Temperature drift and null offset bring measure problem, to reach the accuracy and reduction pressure that improve the measurement of pressure sensor product
The cost of force snesor product.Under pressure sensor service intermittent, circuit compensation is not used and is reduced to technical process control
The dependence of system realizes that zero point is captured using the change of solenoid valve control gas circuit, reduces temperature drift and null offset to pressure
The influence of sensor accuracy class reaches the mesh for improving pressure sensor measurement accuracy and reducing pressure sensor product cost
's.
As the embodiment one of intelligent gas pressure sensor described in the utility model, as shown in Figure 1 to Figure 3, including electricity
Road plate 1, sensor diaphragm 2, pressure detecting gas circuit 3 and ventilation gas circuit 4, the sensor diaphragm 2 are arranged on the circuit card 1, institute
It states ventilation gas circuit 4 and pressure detecting gas circuit 3 is respectively acting on two faces of positive back of sensor diaphragm 2, in the pressure detecting gas circuit 3
It is the first end 53 of triple valve close to 3 inlet end of pressure detecting gas circuit, far from the air inlet of pressure detecting gas circuit equipped with triple valve 5
End is the second end 54 of triple valve, and the third end 55 of triple valve is connect with ventilation gas circuit 4, the triple valve 5 and 1 electricity of circuit board
Connection has two working conditions, first is that closing first end 53, and is connected to second end 54 with third end 55, second is that closing the
Three ends 55, and it is connected to first end 53 with second end 54.
In the present embodiment, the triple valve 5 can be three-way solenoid valve, electric T-shaped valve, midget relay triple valve
Or microswitch triple valve.It is the protection scope of this patent right as long as being able to achieve the valve of tee-joint function.
The zero point correction method of gas pressure sensor described in the present embodiment, comprising steps of
S1: gas pressure sensor is made to be in off working state；
S2: circuit board 1 drives triple valve 5 to close first end 53, and is connected to second end 54 with third end 55, senses at this time
Two surface pressures of positive back of device diaphragm 2 are identical；
S4: carrying out zero correction, and gas pressure sensor circuit remembers the zero point parameter at this temperature moment；
S5: circuit board 1 drives triple valve 5 to close third end 55, and is connected to first end 53 with second end 54, senses at this time
Two surface pressures of positive back of device diaphragm 2 are different；
S6: keeping gas pressure sensor in running order, detects the pressure in pressure detecting gas circuit.Pressure sensor root
According to the sensor zero point parameter at this temperature moment remembered based on front calibration zero point work, start to test this temperature moment
The output signal of pressure effect lower pressure sensor.Because calibration when temperature and pressure test when temperature change it is smaller, can
To ignore.
In the present embodiment, the circuit board 1 is equipped with single-chip microcontroller 14 and threeway valve-driving circuit 15, the single-chip microcontroller 14
It is electrically connected with threeway valve-driving circuit 15 and sensor diaphragm circuit 21.Sensor diaphragm 2 is pressure sensitive device, single-chip microcontroller
14 be calibration and intelligent control device, and triple valve 6 is intelligent control performer.
In the present embodiment, reset circuit 16, the reset circuit 16 and single-chip microcontroller 14 are additionally provided on the circuit board 1
The electrical connection of RESET pin.It can be used for actively manual zero correction.
The utility model gas pressure sensor increases triple valve 5, realizes gas pressure sensor automatic zero adjustment, from
And avoid zero point error accumulative, solve the problems, such as gas pressure sensor null offset, concrete principle is as follows: automatic zero adjustment when
Machine is when gas pressure sensor normally powers on start-up operation or timing carries out, and circuit board 1 first passes through the pass of triple valve 5 first
First end 53 is closed, and is connected to second end 54 with third end 55, two surface pressures of positive back of sensor diaphragm 2 are identical at this time,
It can't detect pressure difference, i.e. reference zero, gas pressure sensor calls calibration data to reset pressure, eliminates null offset band
The error come；Then circuit board 1 closes third end 55 by triple valve 5, and is connected to first end 53 with second end 54, passes at this time
Two surface pressures of positive back of sensor diaphragm 2 are different, start normally to carry out pressure detecting to the air pressure in pressure detecting gas circuit.This is practical
It is novel can intelligent automatic zero adjustment, open each in use, automatic zero adjustment is primary, if gas pressure sensor is long-time work
Make, also can be set as timing school zero, the null offset for efficiently solving gas force snesor in long-time closed environment is asked
Topic.
The utility model can remove null offset in time and add up linearity error, compared with artificial reset with hardware redundancy method
Cost is extremely low；This method can constantly automatic clear, it is more convenient compared with the software compensation method of pressure sensor, after calibration
The measurement accuracy of pressure sensor is improved significantly；Using calibration method provided by the utility model, pressure sensor
Calibration process realizes autonomy-oriented, is switched in the case where unmanned participate in or periodically calibrates to the performance of pressure sensor, this
The occasion that can not be related to for manual calibration is of great significance.
As the embodiment two of intelligent gas pressure sensor described in the utility model, as shown in Figures 4 to 6, with implementation
One structure compared of example is more specific, and the gas pressure sensor includes upper cover 6 and lower cover 7, and the circuit board 1 is horizontally installed on
Between upper cover 6 and lower cover 7, it is equipped with partition 61 in the upper cover 6, the space between circuit board 1 and upper cover 6 is separated into the first gas
Room 62 and the second gas chamber 63, the first gas chamber 62 are equipped with the first gas nozzle 64, and the second gas chamber 63 is equipped with the second gas nozzle 65, under described
The first gas circuit 71, the second gas circuit 72 and third gas chamber 73 are equipped in lid 7, the circuit board 1 is equipped with the first venthole 11, second
Venthole 12 and third venthole 13, first gas chamber 62 are connected to by the first venthole 11 with the first gas circuit 71, and described the
Two gas chambers 63 are connected to by the second venthole 12 with the second gas circuit 72, and first gas chamber 62 passes through third venthole 13 and third
Gas chamber 73 is connected to, and the sensor diaphragm 2 is arranged at third venthole 13, and the lower cover 7 is equipped with 74 He of the 4th venthole
5th venthole 75, first gas circuit 71 are connected to by the 4th venthole 74 with third gas chamber 73, and second gas circuit 72 is logical
It crosses the 5th venthole 75 to be connected to third gas chamber 73, the triple valve 5 is three-way solenoid valve, including electromagnetic coil 51 and sealing are lived
Plug 52, it is mobile that the circuit board 1 controls sealing piston 52 by electromagnetic coil 51, and makes the 4th ventilation of the closing of sealing piston 52
Hole 74 or the 5th venthole 75, first gas nozzle 64, the first gas chamber 62, the first venthole 11, the first gas circuit 71 and four-way
Stomata 74 forms ventilation gas circuit, second gas nozzle 65, the second gas chamber 63, the second venthole 12, the ventilation of the second gas circuit the 72, the 5th
Hole 75 and third gas chamber 73 form pressure detecting gas circuit.
In the present embodiment, for being communicated with the atmosphere, the second gas nozzle 65 is used for and the gas to be detected first gas nozzle 64
Road connection.The first end of triple valve is equivalent on the outside of 5th venthole 75, inside is equivalent to the second end of triple valve, the 4th ventilation
The outside in hole 74 is equivalent to the third end of triple valve.
The zero point correction method of gas pressure sensor described in the present embodiment, comprising steps of
S1: gas pressure sensor is made to be in off working state；
S2: the triple valve 5 is three-way solenoid valve, including electromagnetic coil 51 and sealing piston 52, circuit board 1 pass through electromagnetism
Coil 51 keeps sealing piston 52 mobile, opens the 4th venthole 74, closes the 5th venthole 75.Sensor diaphragm 2 is being just at this time
It is identical to carry on the back two surface pressures；
S4: carrying out zero correction, and gas pressure sensor circuit remembers the zero point parameter at this temperature moment；
S5: circuit board 1 keeps sealing piston 52 mobile by electromagnetic coil 51, closes the 4th venthole 74, and it is logical to open the 5th
Stomata 75, two surface pressures of positive back of sensor diaphragm 2 are different at this time；
S6: keeping gas pressure sensor in running order, detects the pressure in pressure detecting gas circuit.
The present embodiment and the beneficial effect of embodiment one are consistent, and details are not described herein again.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Made any modifications, equivalent replacements, and improvements etc., should be included in the utility model within the spirit and principle of utility model
Protection scope within.
Claims (6)
1. a kind of intelligent gas pressure sensor, including circuit board, sensor diaphragm, pressure detecting gas circuit and ventilation gas circuit, institute
State sensor diaphragm setting on circuit boards, the ventilation gas circuit and pressure detecting gas circuit are being respectively acting on sensor diaphragm just
Carry on the back two faces, which is characterized in that the pressure detecting gas circuit is equipped with triple valve, is threeway close to pressure detecting gas circuit inlet end
The first end of valve is the second end of triple valve, the third end of triple valve and ventilation gas circuit far from pressure detecting gas circuit inlet end
Connection, the triple valve and circuit board electrical connection have two working conditions, first is that close first end, and make second end and the
The connection of three ends, second is that closing third end, and is connected to first end with second end.
2. pressure sensor according to claim 1, which is characterized in that the triple valve is three-way solenoid valve, electronic three
Port valve, midget relay triple valve or microswitch triple valve.
3. pressure sensor according to claim 2, which is characterized in that the gas pressure sensor includes upper cover under
Lid, the circuit board are horizontally installed between upper cover and lower cover, partition are equipped in the upper cover, between circuit board and upper cover
Space is separated into the first gas chamber and the second gas chamber, and the first gas chamber is equipped with the first gas nozzle, and the second gas chamber is equipped with the second gas nozzle, institute
It states and is equipped with the first gas circuit, the second gas circuit and third gas chamber in lower cover, the circuit board is equipped with the first venthole, the second venthole
With third venthole, first gas chamber is connected to by the first venthole with the first gas circuit, and second gas chamber is logical by second
Stomata is connected to the second gas circuit, and first gas chamber is connected to by third venthole with third gas chamber, and the sensor diaphragm is set
It sets at third venthole, the lower lid is equipped with the 4th venthole and the 5th venthole, and first gas circuit passes through four-way
Stomata is connected to third gas chamber, and second gas circuit is connected to by the 5th venthole with third gas chamber, and the triple valve is electromagnetism
Triple valve, including electromagnetic coil and sealing piston, it is mobile that the circuit board controls sealing piston by electromagnetic coil, and makes close
Seal piston and close the 4th venthole or the 5th venthole, first gas nozzle, the first gas chamber, the first venthole, the first gas circuit and
Four-way stomatal limiting value ventilate gas circuit, second gas nozzle, the second gas chamber, the second venthole, the second gas circuit, the 5th venthole and
Third gas chamber forms pressure detecting gas circuit.
4. pressure sensor according to claim 3, which is characterized in that first gas nozzle is used to be communicated with the atmosphere, the
Two gas nozzles with the gas circuit to be detected for being connected to.
5. pressure sensor according to claim 2, which is characterized in that the circuit board is equipped with single-chip microcontroller and triple valve
Driving circuit, the single-chip microcontroller are electrically connected with threeway valve-driving circuit and the circuit of sensor film on piece.
6. pressure sensor according to claim 5, which is characterized in that be additionally provided with reset circuit, institute on the circuit board
Reset circuit is stated to be electrically connected with the RESET pin of single-chip microcontroller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821616030.5U CN209014192U (en) | 2018-09-30 | 2018-09-30 | A kind of intelligent gas pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821616030.5U CN209014192U (en) | 2018-09-30 | 2018-09-30 | A kind of intelligent gas pressure sensor |
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| Publication Number | Publication Date |
|---|---|
| CN209014192U true CN209014192U (en) | 2019-06-21 |
Family
ID=66837605
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821616030.5U Withdrawn - After Issue CN209014192U (en) | 2018-09-30 | 2018-09-30 | A kind of intelligent gas pressure sensor |
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| CN (1) | CN209014192U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109282938A (en) * | 2018-09-30 | 2019-01-29 | 深圳电通纬创微电子股份有限公司 | A kind of intelligent gas pressure sensor and its zero point correction method |
| CN110440983A (en) * | 2019-09-16 | 2019-11-12 | 大唐半导体科技有限公司 | A kind of control method for fully automatic for the calibration of air compressor machine sensor parameters |
-
2018
- 2018-09-30 CN CN201821616030.5U patent/CN209014192U/en not_active Withdrawn - After Issue
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109282938A (en) * | 2018-09-30 | 2019-01-29 | 深圳电通纬创微电子股份有限公司 | A kind of intelligent gas pressure sensor and its zero point correction method |
| CN109282938B (en) * | 2018-09-30 | 2024-02-27 | 深圳电通纬创微电子股份有限公司 | Intelligent gas pressure sensor and zero calibration method thereof |
| CN110440983A (en) * | 2019-09-16 | 2019-11-12 | 大唐半导体科技有限公司 | A kind of control method for fully automatic for the calibration of air compressor machine sensor parameters |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20190621 Effective date of abandoning: 20240227 |
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