CN209006261U - A kind of spray tube swing mechanism - Google Patents

A kind of spray tube swing mechanism Download PDF

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Publication number
CN209006261U
CN209006261U CN201821450589.5U CN201821450589U CN209006261U CN 209006261 U CN209006261 U CN 209006261U CN 201821450589 U CN201821450589 U CN 201821450589U CN 209006261 U CN209006261 U CN 209006261U
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CN
China
Prior art keywords
spray tube
cylinder
spray
connecting rod
groove body
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Active
Application number
CN201821450589.5U
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Chinese (zh)
Inventor
胡宏锋
戴洪烨
路兆亮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Fuchuan Intelligent Technology Co ltd
Wuxi Fuchuan Technology Co ltd
Original Assignee
Shanghai Fuchuan Automation Equipment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Fuchuan Automation Equipment Co Ltd filed Critical Shanghai Fuchuan Automation Equipment Co Ltd
Priority to CN201821450589.5U priority Critical patent/CN209006261U/en
Application granted granted Critical
Publication of CN209006261U publication Critical patent/CN209006261U/en
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Abstract

The utility model discloses a kind of spray tube swing mechanisms, including groove body, spray station is equipped in groove body, the two sides outside groove body are respectively equipped with a pair of of spray tube, and a pair of of spray tube is connected with cylinder, cylinder is fixed on groove body, the centre of a pair of spray tube is placed, cylinder is double cylinders out, and a pair of of spray tube is connected with double cylinders out by movable connecting rod, no matter double cylinder whichaways out stretch out, and the spray tube at both ends can be driven to rotate.The utility model is using double cylinders out, it is connected by movable connecting rod with spray tube at the both ends of cylinder, three connecting rods interconnected by movable connecting rod, the linear motion of cylinder is converted to the rotary motion of spray tube, simply and effectively the scope of activities of spray tube is determined, and does not influence the operating angle of spray.The utility model has the advantages of simple structure, reliable and stable, takes up space small, securely and reliably, at low cost, solves the problems, such as Caton, and the spray tube hunting range can make to spray comprehensive covering object surface, cleaning effect is significantly improved between 0~52 °.

Description

A kind of spray tube swing mechanism
Technical field
The utility model relates to the spray equipments that silicon wafer stripping machine uses, and in particular to a kind of spray tube swing mechanism belongs to In the technical field of spray equipment.
Background technique
The spray equipment that current automatic degumming machine uses, in actual use, spray equipment can only carry out silicon wafer to determine angle Degree spray cleaning, due to silicon wafer height, there are dead angles for spray, and the spray tube of existing spray equipment is straight line spray Leaching, cannot cover the surface of silicon wafer comprehensively, cause to spray less than silicon chip surface cannot be cleaned, cause flower piece phenomenon, shadow It rings and arrives cleaning effect.
Since the installation space of degumming machine is small, so spray equipment mechanical structure cannot be too cumbersome, can not be filled in spray Too many thing is fixed on the groove body set, the spray tube of existing spray equipment can only move along a straight line in activity, lead to silicon in this way Piece degumming is not clean, so influencing very much the degumming effect of degumming machine.
Utility model content
It is not in Caton problem that the purpose of the utility model is to provide a kind of in the continuous swing process of spray tube, and Occupy a kind of small spray tube swing mechanism in degumming machine space.
In order to solve the above-mentioned technical problem, the technical solution of the utility model is there is provided a kind of spray tube swing mechanism, Including groove body 5, spray station is equipped in the groove body 5, the two sides outside the groove body 5 are respectively equipped at least one spray tube 1, institute It states spray tube 1 to be connected with cylinder 6, which is characterized in that the spray tube 1 is connected with cylinder 6 by movable connecting rod 7.
Preferably, the movable connecting rod 7 includes primary connecting rod 4, second level even the rod 3, three-level connecting rod 2;One cascade One end of bar 4 is connected with cylinder, and the other end and second level even the rod 3 are hinged, the other end and three-level connecting rod 2 of the second level even the rod 3 Hingedly, the other end of the three-level connecting rod 2 is connected with spray tube.
Preferably, the primary connecting rod 4, second level even the rod 3, three-level connecting rod 2 pass through contour screw connection.
Preferably, the cylinder 6 is double cylinders out.
Preferably, institute's cylinder 6 is fixed on groove body 5.
Preferably, the two sides outside institute's groove body 5 are a pair of respectively is equipped with spray tube 1, and the pair of spray tube 1 passes through movable company Extension bar 7 is connected with the double cylinders out being fixed on groove body 5.
The utility model is connected with spray tube by movable connecting rod at the both ends of cylinder, is passed through using double cylinders out The linear motion of cylinder, is converted to the rotary motion of spray tube by three connecting rods that movable connecting rod interconnects, simple and effective The scope of activities of spray tube is determined, and do not influence the operating angle of spray.The utility model has the advantages of simple structure, reliable steady It is fixed, take up space small, it is securely and reliably, at low cost, solve the problems, such as Caton, the spray tube hunting range 0~52 ° it Between, it can make to spray comprehensive covering object surface, cleaning effect is significantly improved.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of spray tube swing mechanism provided by the utility model.
Specific embodiment
To be clearer and more comprehensible the utility model, hereby with preferred embodiment, and attached drawing is cooperated to be described in detail below.
As shown in Figure 1, be a kind of spray tube swing mechanism provided by the utility model, including groove body 5, in the groove body 5 Equipped with spray station, the two sides outside the groove body 5 are respectively equipped with a pair of of spray tube 1, and a pair of of spray tube 1 is connected with cylinder 6, described Cylinder 6 is fixed on groove body 5, places the centre of a pair of of spray tube 1, and the cylinder 6 is double cylinders out, the pair of spray tube 1 It is connected with double cylinders out by movable connecting rod 7, no matter double cylinder whichaways out stretch out, and can drive the spray at both ends Pipe 1 rotates.
The movable connecting rod 7 includes primary connecting rod 4, second level even the rod 3, three-level connecting rod 2;The one of the primary connecting rod 4 End is connected with cylinder, and the other end and second level even the rod 3 are hinged, and the other end and three-level connecting rod 2 of the second level even the rod 3 are hinged, institute The other end for stating three-level connecting rod 2 is connected with spray tube;The primary connecting rod 4, second level even the rod 3, three-level connecting rod 2 use contour screw It is simple and effective as movement duplicate connection.
The utility model is connected with spray tube by movable connecting rod at the both ends of cylinder, is passed through using double cylinders out The linear motion of cylinder, is converted to the rotary motion of spray tube by three connecting rods that movable connecting rod interconnects, simple and effective The scope of activities of spray tube is determined, and do not influence the operating angle of spray.The utility model has the advantages of simple structure, reliable steady It is fixed, take up space small, it is securely and reliably, at low cost, solve the problems, such as Caton, the spray tube hunting range 0~52 ° it Between, it can make to spray comprehensive covering object surface, cleaning effect is significantly improved.

Claims (6)

1. a kind of spray tube swing mechanism, including groove body (5), the groove body (5) is interior to be equipped with spray station, and the groove body (5) is outside Two sides be respectively equipped at least one spray tube (1), the spray tube (1) is connected with cylinder (6), which is characterized in that the spray Shower pipe (1) is connected with cylinder (6) by movable connecting rod (7).
2. a kind of spray tube swing mechanism as described in claim 1, which is characterized in that the movable connecting rod (7) includes Primary connecting rod (4), second level even the rod (3), three-level connecting rod (2);One end of the primary connecting rod (4) is connected with cylinder, the other end Hingedly with second level even the rod (3), the other end of the second level even the rod (3) and three-level connecting rod (2) hingedly, the three-level connecting rod (2) The other end is connected with spray tube.
3. a kind of spray tube swing mechanism as claimed in claim 2, which is characterized in that the primary connecting rod (4), second level even the rod (3), three-level connecting rod (2) passes through contour screw connection.
4. a kind of spray tube swing mechanism as described in claim 1, which is characterized in that the cylinder (6) is double cylinders out.
5. a kind of spray tube swing mechanism as claimed in claim 4, which is characterized in that the cylinder (6) is fixed on groove body (5) On.
6. a kind of spray tube swing mechanism as claimed in claim 5, which is characterized in that the two sides difference of the groove body (5) outside A pair is equipped with spray tube (1), the pair of spray tube (1) by movable connecting rod (7) be fixed on groove body (5) it is double out Cylinder is connected.
CN201821450589.5U 2018-09-05 2018-09-05 A kind of spray tube swing mechanism Active CN209006261U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201821450589.5U CN209006261U (en) 2018-09-05 2018-09-05 A kind of spray tube swing mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201821450589.5U CN209006261U (en) 2018-09-05 2018-09-05 A kind of spray tube swing mechanism

Publications (1)

Publication Number Publication Date
CN209006261U true CN209006261U (en) 2019-06-21

Family

ID=66832511

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201821450589.5U Active CN209006261U (en) 2018-09-05 2018-09-05 A kind of spray tube swing mechanism

Country Status (1)

Country Link
CN (1) CN209006261U (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110328181A (en) * 2019-07-20 2019-10-15 苏州秋纺纺织科技有限公司 A kind of automation textile machinery cleaning device
CN112845293A (en) * 2020-12-31 2021-05-28 上海至纯洁净系统科技股份有限公司 Automatic change wafer tong and spray abluent washing tank equipment
CN113600534A (en) * 2021-07-26 2021-11-05 张家港市晨艺电子有限公司 Coating pretreatment device and pretreatment method for aviation aluminum parts
CN114985360A (en) * 2022-08-05 2022-09-02 江苏京创先进电子科技有限公司 Belt cleaning device and cascade belt cleaning device suitable for scribing machine

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110328181A (en) * 2019-07-20 2019-10-15 苏州秋纺纺织科技有限公司 A kind of automation textile machinery cleaning device
CN112845293A (en) * 2020-12-31 2021-05-28 上海至纯洁净系统科技股份有限公司 Automatic change wafer tong and spray abluent washing tank equipment
CN113600534A (en) * 2021-07-26 2021-11-05 张家港市晨艺电子有限公司 Coating pretreatment device and pretreatment method for aviation aluminum parts
CN114985360A (en) * 2022-08-05 2022-09-02 江苏京创先进电子科技有限公司 Belt cleaning device and cascade belt cleaning device suitable for scribing machine
CN114985360B (en) * 2022-08-05 2022-11-15 江苏京创先进电子科技有限公司 Belt cleaning device and cascade belt cleaning device suitable for scribing machine

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GR01 Patent grant
CP03 Change of name, title or address

Address after: No. 209, Zhangjing East Section, Xigang Road, Xibei Town, Xishan District, Wuxi City, Jiangsu Province, 214194

Patentee after: Wuxi Fuchuan Technology Co.,Ltd.

Address before: 201808 Building 1, 89 Wuxiang Road, Xuxing Town, Jiading District, Shanghai

Patentee before: Shanghai Fuchuan Intelligent Technology Co.,Ltd.

Address after: 201808 Building 1, 89 Wuxiang Road, Xuxing Town, Jiading District, Shanghai

Patentee after: Shanghai Fuchuan Intelligent Technology Co.,Ltd.

Address before: 201800 Room J1078, Floor 2, Building 39, No. 52, Chengliu Road, Jiading District, Shanghai

Patentee before: SHANGHAI FUCHUAN AUTOMATION EQUIPMENT Co.,Ltd.

CP03 Change of name, title or address