A kind of spray tube swing mechanism
Technical field
The utility model relates to the spray equipments that silicon wafer stripping machine uses, and in particular to a kind of spray tube swing mechanism belongs to
In the technical field of spray equipment.
Background technique
The spray equipment that current automatic degumming machine uses, in actual use, spray equipment can only carry out silicon wafer to determine angle
Degree spray cleaning, due to silicon wafer height, there are dead angles for spray, and the spray tube of existing spray equipment is straight line spray
Leaching, cannot cover the surface of silicon wafer comprehensively, cause to spray less than silicon chip surface cannot be cleaned, cause flower piece phenomenon, shadow
It rings and arrives cleaning effect.
Since the installation space of degumming machine is small, so spray equipment mechanical structure cannot be too cumbersome, can not be filled in spray
Too many thing is fixed on the groove body set, the spray tube of existing spray equipment can only move along a straight line in activity, lead to silicon in this way
Piece degumming is not clean, so influencing very much the degumming effect of degumming machine.
Utility model content
It is not in Caton problem that the purpose of the utility model is to provide a kind of in the continuous swing process of spray tube, and
Occupy a kind of small spray tube swing mechanism in degumming machine space.
In order to solve the above-mentioned technical problem, the technical solution of the utility model is there is provided a kind of spray tube swing mechanism,
Including groove body 5, spray station is equipped in the groove body 5, the two sides outside the groove body 5 are respectively equipped at least one spray tube 1, institute
It states spray tube 1 to be connected with cylinder 6, which is characterized in that the spray tube 1 is connected with cylinder 6 by movable connecting rod 7.
Preferably, the movable connecting rod 7 includes primary connecting rod 4, second level even the rod 3, three-level connecting rod 2;One cascade
One end of bar 4 is connected with cylinder, and the other end and second level even the rod 3 are hinged, the other end and three-level connecting rod 2 of the second level even the rod 3
Hingedly, the other end of the three-level connecting rod 2 is connected with spray tube.
Preferably, the primary connecting rod 4, second level even the rod 3, three-level connecting rod 2 pass through contour screw connection.
Preferably, the cylinder 6 is double cylinders out.
Preferably, institute's cylinder 6 is fixed on groove body 5.
Preferably, the two sides outside institute's groove body 5 are a pair of respectively is equipped with spray tube 1, and the pair of spray tube 1 passes through movable company
Extension bar 7 is connected with the double cylinders out being fixed on groove body 5.
The utility model is connected with spray tube by movable connecting rod at the both ends of cylinder, is passed through using double cylinders out
The linear motion of cylinder, is converted to the rotary motion of spray tube by three connecting rods that movable connecting rod interconnects, simple and effective
The scope of activities of spray tube is determined, and do not influence the operating angle of spray.The utility model has the advantages of simple structure, reliable steady
It is fixed, take up space small, it is securely and reliably, at low cost, solve the problems, such as Caton, the spray tube hunting range 0~52 ° it
Between, it can make to spray comprehensive covering object surface, cleaning effect is significantly improved.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of spray tube swing mechanism provided by the utility model.
Specific embodiment
To be clearer and more comprehensible the utility model, hereby with preferred embodiment, and attached drawing is cooperated to be described in detail below.
As shown in Figure 1, be a kind of spray tube swing mechanism provided by the utility model, including groove body 5, in the groove body 5
Equipped with spray station, the two sides outside the groove body 5 are respectively equipped with a pair of of spray tube 1, and a pair of of spray tube 1 is connected with cylinder 6, described
Cylinder 6 is fixed on groove body 5, places the centre of a pair of of spray tube 1, and the cylinder 6 is double cylinders out, the pair of spray tube 1
It is connected with double cylinders out by movable connecting rod 7, no matter double cylinder whichaways out stretch out, and can drive the spray at both ends
Pipe 1 rotates.
The movable connecting rod 7 includes primary connecting rod 4, second level even the rod 3, three-level connecting rod 2;The one of the primary connecting rod 4
End is connected with cylinder, and the other end and second level even the rod 3 are hinged, and the other end and three-level connecting rod 2 of the second level even the rod 3 are hinged, institute
The other end for stating three-level connecting rod 2 is connected with spray tube;The primary connecting rod 4, second level even the rod 3, three-level connecting rod 2 use contour screw
It is simple and effective as movement duplicate connection.
The utility model is connected with spray tube by movable connecting rod at the both ends of cylinder, is passed through using double cylinders out
The linear motion of cylinder, is converted to the rotary motion of spray tube by three connecting rods that movable connecting rod interconnects, simple and effective
The scope of activities of spray tube is determined, and do not influence the operating angle of spray.The utility model has the advantages of simple structure, reliable steady
It is fixed, take up space small, it is securely and reliably, at low cost, solve the problems, such as Caton, the spray tube hunting range 0~52 ° it
Between, it can make to spray comprehensive covering object surface, cleaning effect is significantly improved.