CN208982704U - A kind of semiconductor waste gas processing equipment check-valves - Google Patents
A kind of semiconductor waste gas processing equipment check-valves Download PDFInfo
- Publication number
- CN208982704U CN208982704U CN201821253607.0U CN201821253607U CN208982704U CN 208982704 U CN208982704 U CN 208982704U CN 201821253607 U CN201821253607 U CN 201821253607U CN 208982704 U CN208982704 U CN 208982704U
- Authority
- CN
- China
- Prior art keywords
- check
- lower cover
- upper cover
- baffle
- waste gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Valve Housings (AREA)
Abstract
The utility model relates to waste gas treatment equipment technical fields, specially a kind of semiconductor waste gas processing equipment check-valves, including upper cover and lower cover, the middle part of upper cover and lower cover is through setting through-hole, the upper cover is provided projectingly upper protrusion on the outside of lower cover, the lower cover is being provided projectingly lower convexity on the outside of upper cover, the beneficial effects of the utility model are: this check-valves is closed state under isobaric environment because of it, with auto-reset function, so installation site and angle are unrestricted, angle can be installed arbitrarily, and practical performance is greatly enhanced；Installation site is unrestricted in board, all mountable in import, outlet, avoids back flow of gas from causing pipeline High Temperature mounted in air inlet is significantly more efficient；Compared to traditional technology, the utility model passes through the design of check baffle, can accomplish effectively to seal, avoid wearing；The utility model strong applicability can change inlet and outlet connection type and then apply in pipeline of leaking water.
Description
Technical field
The utility model relates to waste gas treatment equipment technical field, specially a kind of semiconductor waste gas processing equipment non-return
Valve.
Background technique
Waste gas treatment equipment in actual operation, if air exit back segment blocking or inlet pressure be less than exhaust outlet pressure
Power will lead in pipeline exhaust gas adverse current, and high temperature will be siphoned away by counter-current gas in cavity, cause pipeline high temperature be easily under fire calamity,
Converted products such as scraps at the consequences.Prior art is mounted on board outlet port, and intermediate spool is spherical high-temperature resistant rubber material
Matter.
The prior art after abrasion, cannot be sealed effectively with contact surface, cause gas leakage the disadvantage is that 1, rubber material is not wear-resisting；
2, existing ball core type setting angle is restricted, can only right angle setting, horizontal direction can not install, because ball core type is to utilize rubber
The self gravity of ball, which is landed, to be sealed, so ball check valve can be only installed at the position of air-flow from the bottom up, (gas goes out in board
Mouthful), the pipeline (gas access in board) of gas from the top down is not available, because flowing backwards, gas is different surely to blow spool
It seals (core is than heavier).
Utility model content
The purpose of this utility model is to provide a kind of semiconductor waste gas processing equipment check-valves, to solve above-mentioned background skill
Itd is proposed in art because exhaust outlet back segment blocking or pressure reduction problem cause exhaust gas adverse current, cause converted products to scrap, pipeline high temperature draws
The problems such as playing fire.
To achieve the above object, the utility model provides the following technical solutions: a kind of semiconductor waste gas processing equipment non-return
Valve, including upper cover and lower cover, through setting through-hole, the upper cover is provided projectingly on the outside of lower cover at the middle part of upper cover and lower cover
Upper protrusion, the lower cover are being provided projectingly lower convexity on the outside of upper cover, and the upper cover and lower cover are harmonious, and upper protrusion is under
It is fixed between protrusion by interspersed bolt, the through-hole of the upper cover is far from being wholely set fixed link at lower cover, and upper cover is logical
Hole at lower cover enlarged-diameter formed check chamber, the upper cover be disposed on the inside of fixed link spring, central axis and
Check baffle, the central axis are provided projectingly limiting stand, and the one end of central axis far from check baffle far from one end of fixed link
Across spring and it is interspersed in the middle part of fixed link, the T-shaped structure setting of check baffle, the upper end of the check baffle is located at
In check chamber, and locating slot is arranged close to a middle side part of central axis in check baffle, and central axis is inserted in far from one end of fixed link
In locating slot, the side of the separate central axis of the check baffle is pressed on the end face of lower cover.
Preferably, the central axis is titanium alloy bar.
Preferably, the check baffle is titanium alloy baffle or polytetrafluoroethylene (PTFE) baffle.
Preferably, the top and bottom edge of the check baffle is in circular arc setting.
Preferably, the surface of the spring is coated with antirust coat.
Compared with prior art, the utility model has the beneficial effects that
1, this check-valves because its under isobaric environment be closed state, have auto-reset function, so installation site and
Angle is unrestricted, and angle can be installed arbitrarily, greatly enhances practical performance；
2, installation site is unrestricted in board, all mountable in import, outlet, avoids mounted in air inlet is significantly more efficient
Back flow of gas causes pipeline High Temperature；
3, compared to traditional technology, the utility model passes through the design of check baffle, can accomplish effectively to seal, avoid grinding
Damage；
4, the utility model strong applicability can change inlet and outlet connection type and then apply in pipeline of leaking water.
Detailed description of the invention
Fig. 1 is the schematic perspective view of the utility model；
Fig. 2 is the configuration schematic diagram of the utility model；
Fig. 3 is the front view of the utility model；
Fig. 4 is the A-A cross-sectional view of the structure of the utility model Fig. 3.
In figure: upper cover 1, upper raised 11, lower cover 2, lower convexity 21, fixed link 3, check baffle 4, central axis 5, limiting stand
51, spring 6, check chamber 7.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
Fig. 1-4 is please referred to, the utility model provides a kind of technical solution: a kind of semiconductor waste gas processing equipment check-valves,
Including upper cover 1 and lower cover 2, through setting through-hole, upper cover 1 is provided projectingly close to the outside of lower cover 2 at the middle part of upper cover 1 and lower cover 2
Upper raised 11, lower cover 2 is provided projectingly lower convexity 21 in the outside close to upper cover 1, and upper cover 1 and lower cover 2 are harmonious, and upper raised 11 He
It is fixed between lower convexity 21 by interspersed bolt, the through-hole of upper cover 1 is far from being wholely set fixed link 3, and upper cover 1 at lower cover 2
Through-hole at lower cover 2 enlarged-diameter form check chamber 7, upper cover 1 is disposed with spring 6, center in the inside of fixed link 3
Axis 5 and check baffle 4, check baffle 4 are titanium alloy baffle or polytetrafluoroethylene (PTFE) baffle, and central axis 5 is titanium alloy bar, and titanium closes
Fitting has the features such as high temperature resistant, corrosion-resistant, light-weight, ensure that the flexibility and reliability of either on or off movement.Check baffle 4 it is upper
End and lower edge are in circular arc setting.Central axis 5 is provided projectingly limiting stand 51, and central axis 5 far from one end of fixed link 3
One end far from check baffle 4 passes through spring 6 and is interspersed in the middle part of fixed link 3, and the surface of spring 6 is coated with antirust coat, inverse
The upper end of the T-shaped structure setting of baffle plate 4, check baffle 4 is located in check chamber 7, and check baffle 4 is close to the one of central axis 5
Locating slot is arranged in middle side part, and central axis 5 is inserted in locating slot far from one end of fixed link 3, the separate central axis 5 of check baffle 4
Side be pressed on the end face of lower cover 2.
Central axis 5 when utility model works, is first passed through spring and is interspersed in fixed link 3, by center by working principle
The upper end of axis 5, which is plugged on, realizes preliminary fixation in locating slot, then push check baffle 4, and check baffle 4 is pressed into check chamber
In 7, then check baffle 4 is pressed on the inner end end face of lower cover 2, so that forming plane between check baffle 4 and lower cover 2
Sealing structure then fixes the bolt interted between upper raised 11 and lower convexity 21, this check-valves at work, can pass through
The check baffle 4 of setting realizes better seal effect, and the structure setting of check baffle 4, can change under traditional technology
Check-valves, realize the installation process of non-angular limitation, and its installation site is also adjustable, and angle can be installed arbitrarily,
Practical performance is greatly enhanced, when the utility model at work, installation site can be in import, be also possible to
Outlet port, if this check-valves loads air inlet position and pipeline high temperature caused by back flow of gas significantly more efficient can be avoided to endanger
Danger, and the utility model can be seen that sealing between the two by plane sealing structure between check baffle 4 and lower cover 2
Mode compares traditional technology, wears low efficiency, the service life is longer.Pass through higher upper cover 1 and lower cover 2 and external connection
Mode, the utility model can also be mounted in the pipeline leaked water, and applicability is stronger, be conducive to marketing.
While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art,
It is understood that these embodiments can be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaired
Change, replacement and variant, the scope of the utility model is defined by the appended claims and the equivalents thereof.
Claims (6)
1. a kind of semiconductor waste gas processing equipment check-valves, including upper cover (1) and lower cover (2), in upper cover (1) and lower cover (2)
Portion is provided projectingly raised (11) through setting through-hole, the upper cover (1) on the outside of lower cover (2), and the lower cover (2) is being leaned on
Be provided projectingly lower convexity (21) on the outside of nearly upper cover (1), the upper cover (1) and lower cover (2) are harmonious, and upper protrusion (11) and under it is convex
It rises and is fixed between (21) by the bolt interted, it is characterised in that: the through-hole of the upper cover (1) at lower cover (2) far from integrally setting
It sets fixed link (3), and the through-hole of upper cover (1) enlarged-diameter at lower cover (2) forms check chamber (7), the upper cover (1) is solid
Spring (6), central axis (5) and check baffle (4) are disposed on the inside of fixed pole (3), the central axis (5) is far from fixed link
(3) one end is provided projectingly limiting stand (51), and central axis (5) passes through spring (6) far from the one end of check baffle (4) and interts
It is located at check in the upper end at the middle part of fixed link (3), the T-shaped structure setting of the check baffle (4), the check baffle (4)
In chamber (7), and locating slot is arranged in a middle side part of the check baffle (4) close to central axis (5), and central axis (5) is far from fixed link (3)
One end be inserted in locating slot, the side of the separate central axis (5) of the check baffle (4) is pressed on the end face of lower cover (2).
2. a kind of semiconductor waste gas processing equipment check-valves according to claim 1, it is characterised in that: the central axis
It (5) is titanium alloy bar.
3. a kind of semiconductor waste gas processing equipment check-valves according to claim 1, it is characterised in that: the check baffle
It (4) is titanium alloy baffle or polytetrafluoroethylene (PTFE) baffle.
4. a kind of semiconductor waste gas processing equipment check-valves according to claim 1, it is characterised in that: the check baffle
(4) top and bottom edge is in circular arc setting.
5. a kind of semiconductor waste gas processing equipment check-valves according to claim 1, it is characterised in that: the spring (6)
Surface be coated with antirust coat.
6. a kind of semiconductor waste gas processing equipment check-valves according to claim 1, it is characterised in that: the fixed link
(3) it is arranged in cross.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821253607.0U CN208982704U (en) | 2018-08-06 | 2018-08-06 | A kind of semiconductor waste gas processing equipment check-valves |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821253607.0U CN208982704U (en) | 2018-08-06 | 2018-08-06 | A kind of semiconductor waste gas processing equipment check-valves |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208982704U true CN208982704U (en) | 2019-06-14 |
Family
ID=66780938
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821253607.0U Active CN208982704U (en) | 2018-08-06 | 2018-08-06 | A kind of semiconductor waste gas processing equipment check-valves |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208982704U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112361035A (en) * | 2020-10-27 | 2021-02-12 | 无锡凯必特斯半导体科技有限公司 | System for preventing vacuum pipeline from back pressure |
-
2018
- 2018-08-06 CN CN201821253607.0U patent/CN208982704U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112361035A (en) * | 2020-10-27 | 2021-02-12 | 无锡凯必特斯半导体科技有限公司 | System for preventing vacuum pipeline from back pressure |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN208982704U (en) | A kind of semiconductor waste gas processing equipment check-valves | |
| CN208417754U (en) | A kind of molecular sieve adsorber pipeline is connected and fixed device | |
| CN207270610U (en) | A kind of improved Anti-collision fire hydrant | |
| CN204386842U (en) | Hydraulic substation low frequency one-way valve | |
| CN208501033U (en) | Ladle argon-blown device | |
| CN103016762B (en) | Bidirectional sealed butterfly valve | |
| CN109099193A (en) | A kind of Novel air valve type check-valves | |
| CN206130210U (en) | Novel no water clock check valve | |
| CN209245686U (en) | A kind of novel unidirectional hydrophobic valve | |
| CN204371691U (en) | Compression assembly and there is its rotary compressor | |
| CN107166058A (en) | A kind of three hole air bleeding valves | |
| CN209494721U (en) | A kind of Bidirectional water outlet axis, mixed-flow pump | |
| CN202578629U (en) | Oil well wellhead novel consolidation valve group | |
| CN207349676U (en) | A kind of new nozzle block | |
| CN206070035U (en) | A kind of liquid level maintaining device in electroplating bath | |
| CN203962419U (en) | A kind of automobile vacuum pump composite air intake valve | |
| CN205136688U (en) | Low resistance backflow preventer | |
| CN100567737C (en) | A kind of automatic deloading one-way valve of air compressor | |
| CN219606137U (en) | Check valve with several word frame construction | |
| CN210600223U (en) | Solenoid valve body for pneumatic shutter | |
| CN208221713U (en) | Automatic blow off valve valve air relief before a kind of pumping of screw pump | |
| CN215410454U (en) | Industrial electric regulating valve | |
| CN205896289U (en) | Check valve | |
| CN208535152U (en) | A kind of humidifying cup fixing seal structure | |
| CN215950487U (en) | Check valve |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230825 Address after: 201315, 3rd Floor, Building 12, No. 957 Kangqiao Road, Pudong New Area, Shanghai Patentee after: Shanghai Gaosheng Integrated Circuit Equipment Co.,Ltd. Address before: Room 102, Building B, No. 1088 Kangqiao East Road, Pudong New Area, Shanghai, 201315 Patentee before: SHANGHAI GAOSHENG INTEGRATED CIRCUIT EQUIPMENT Co.,Ltd. |
|
| TR01 | Transfer of patent right |