CN208921796U

CN208921796U - Capacity measurement device

Info

Publication number: CN208921796U
Application number: CN201821482145.XU
Authority: CN
Inventors: 不公告发明人
Original assignee: Changxin Memory Technologies Inc
Current assignee: Changxin Memory Technologies Inc
Priority date: 2018-09-11
Filing date: 2018-09-11
Publication date: 2019-05-31
Anticipated expiration: 2028-09-11

Abstract

The utility model provides a kind of capacity measurement device.Capacity measurement device includes: the capacity measurement chain for being connected in series by N number of equivalent capacity unit and being constituted；The first contact layer being electrically connected with the 1st equivalent capacity element in capacity measurement chain；And the second contact layer being electrically connected with the n-th equivalent capacity element in capacity measurement chain.It, can be by applying corresponding electric signal to the first contact layer and the second contact layer, and based on the feedback signal to obtain the capacitance parameter of capacity cell in equivalent capacity unit when being detected to capacity measurement device.The detection for being formed by the capacitance parameter of capacity cell is realized in the utility model based on multiple equivalent capacity units, it is abnormal more can accurately to reflect that the preparation process of corresponding capacitor element whether there is, and judge the performance for being formed by capacitor element.

Description

Capacity measurement device

Technical field

The utility model relates to IC semiconductor technical field, in particular to a kind of capacity measurement device.

Background technique

In the manufacturing process of semiconductor devices, it is formed by whether device meets technique requirement for judgement, usually in device Reliability test (the wafer through a series of test, such as wafer is needed in the manufacturing process of part or after completing Acceptable test, WAT).WAT test is mostly to complete the chip after processing technology as test object, the result of test Can be used as judge chip whether He Ge foundation.

Specifically, when preparing capacitor element, for that can judge the performance for being formed by capacitor element, it usually needs It is formed simultaneously capacity measurement device, so as to by being detected to the capacity measurement device, is reflected with this prepared Whether capacitor element meets the requirements.Currently used its structure of capacity measurement device is typically more simple, such as only has one A equivalent capacity unit.

However, increasingly mature with semiconductor technology, super large-scale integration is rapidly developed, have more preferable performance and More powerful integrated circuit requires bigger device density.For capacity measurement device, single equivalent capacity list Member can not effectively reflect the preparation process of corresponding capacitor element and the performance of prepared capacitor element.

Utility model content

The purpose of this utility model is to provide a kind of capacity measurement devices, can not to solve existing capacity measurement device Accurately reflect the performance of the whether abnormal and prepared capacitor element of the preparation process of corresponding capacitor element.

In order to solve the above technical problems, the utility model provides a kind of capacity measurement device, comprising:

One capacity measurement chain, the capacity measurement chain include the equivalent capacity unit of N number of series connection, and N is just greater than 1 Integer, the equivalent capacity unit have lower electrode and coat the top electrode of the lower electrode；

One first contact layer is formed in the top electrode of the 1st equivalent capacity unit of the capacity measurement chain, and It is electrically connected with the top electrode of the 1st equivalent capacity unit；And

One second contact layer, it is described when the quantity of the equivalent capacity unit in the capacity measurement chain is even number Second contact layer is formed in the top electrode of n-th equivalent capacity unit, and the institute with the n-th equivalent capacity unit State top electrode electric connection；When the quantity of the equivalent capacity unit in the capacity measurement chain is odd number, described second Contact layer is formed in the lower section of the lower electrode of the n-th equivalent capacity unit, and with the n-th equivalent capacity unit The lower electrode be electrically connected.

Optionally, when the quantity of the equivalent capacity unit in the capacity measurement chain is equal to 2, the 1st equivalent capacity list The lower electrode of member and the 2nd equivalent capacity unit is electrically connected with each other, the top electrode connection of the 2nd equivalent capacity unit To second contact layer, so that the 1st equivalent capacity unit and the 2nd equivalent capacity unit are connected in series；And

When the quantity of the equivalent capacity unit in the capacity measurement chain is greater than 2, by the 1st equivalent capacity Unit rises, and the lower electrode of two adjacent equivalent capacity units is electrically connected two-by-two, and by the 2nd equivalent capacity unit It rises, the top electrode of two adjacent equivalent capacity units is electrically connected two-by-two, so that N number of equivalent capacity unit is connected in series.

Optionally, the capacity measurement device further includes at least one first conductive layer and separation layer, and the separation layer covers First conductive layer is covered, the lower electrode of the equivalent capacity unit through the separation layer and is formed in first conduction On layer, to be electrically connected with first conductive layer, and the adjacent equivalent capacity that the lower electrode is electrically connected with each other In unit, the lower electrode is formed on same first conductive layer, to be electrically connected with each other by first conductive layer.

Optionally, the quantity of the equivalent capacity unit in the capacity measurement chain is odd number, the equivalent electricity of n-th Hold the lower electrode of unit through the separation layer and being formed on second contact layer, and second contact layer with First conductive layer is located in same structure layer.

Optionally, the capacity measurement device further include:

Second conductive layer is formed in the top electrode of the equivalent capacity unit, and is electrically connected with the top electrode It connects, and in the adjacent equivalent capacity unit that is electrically connected with each other of the top electrode, the top electrode is connected to same Second conductive layer, to be electrically connected with each other by second conductive layer.

Optionally, when the quantity of the equivalent capacity unit in the capacity measurement chain is even number, described first is connect Contact layer, second contact layer and second conductive layer are located in same structure layer；Described in the capacity measurement chain When the quantity of equivalent capacity unit is odd number, first contact layer and second conductive layer are located in same structure layer.

Optionally, the capacity measurement device has device region and contact zone, the equivalent electricity of the capacity measurement chain Hold unit to be formed in the device region, first contact layer is formed in the described of the 1st equivalent capacity unit and powers on On extremely, and the contact zone is extended to by the device region；Wherein,

When the quantity of the equivalent capacity unit in the capacity measurement chain is even number, second contact layer is formed The contact zone is extended in the top electrode of the n-th equivalent capacity unit, and by the device region；

When the quantity of the equivalent capacity unit in the capacity measurement chain is odd number, second contact layer is formed In the lower section of the lower electrode of the n-th equivalent capacity unit, and the contact zone is extended to by the device region.

Optionally, the lower electrode of the equivalent capacity unit includes a tubular structure, described in the top electrode covering The tube inner surface of lower electrode and cylinder outer surface, first contact layer are formed in the tubular knot of the 1st equivalent capacity unit The top of structure, and the tubular structure is extended to from the top of the tubular structure along the cylinder outer surface of the tubular structure Bottom, to further extend in contact zone；Wherein,

When the quantity of the equivalent capacity unit in the capacity measurement chain is even number, second contact layer is formed In the top of the tubular structure of the n-th equivalent capacity unit, and from the top of the tubular structure along the cylinder The cylinder outer surface of shape structure extends to the bottom of the tubular structure, to further extend in the contact zone；

When the quantity of the equivalent capacity unit in the capacity measurement chain is odd number, second contact layer is formed In the lower section of the tubular structure of the n-th equivalent capacity unit, and extend in the contact zone.

Optionally, multiple lower electrodes are formed in the equivalent capacity unit, the top electrode cladding is multiple described Lower electrode, so that each lower electrode constitutes a capacity cell with the corresponding top electrode, and same described equivalent Multiple lower electrodes in capacitor cell are electrically connected with each other, so that multiple lower electricity in the same equivalent capacity unit Extremely corresponding multiple capacity cells are connected in parallel.

Optionally, the capacity measurement device further includes an interconnection layer, and the interconnection layer covers the capacity measurement chain, institute The first contact layer and second contact layer are stated, and is formed with the first interconnection structure and the second mutually connection in the interconnection layer Structure, first interconnection structure and first contact layer are electrically connected, second interconnection structure and second contact layer It is electrically connected.

Optionally, first interconnection structure includes the first conductive plunger and the first testing cushion, first conductive plunger Bottom be connected to first contact layer, first testing cushion is connected at the top of first conductive plunger；And institute Stating the second interconnection structure includes the second conductive plunger and the second testing cushion, and the bottom of second conductive plunger is connected to described the Two contact layers are connected to second testing cushion at the top of second conductive plunger.

Optionally, the lower electrode of the equivalent capacity unit includes a tubular structure, described in the top electrode covering The tube inner surface of tubular structure and cylinder outer surface, first contact layer are formed in the tubular of the 1st equivalent capacity unit The top of structure, and the tubular structure is extended to from the top of the tubular structure along the cylinder outer surface of the tubular structure Bottom, to further extend in contact zone；Wherein,

Optionally, the bottom of first interconnection structure is connected to first contact layer and is located above the tubular structure The first lead division, wherein

When the quantity of the equivalent capacity unit in the capacity measurement chain is even number, second interconnection structure Bottom is connected to the second lead division that second contact layer is located above the tubular structure；

When the quantity of the equivalent capacity unit in the capacity measurement chain is odd number, second interconnection structure Bottom is connected to the part that second contact layer is located at the contact zone, and the height of second interconnection structure is greater than described the The height of one interconnection structure.

In capacity measurement device provided by the utility model, the equivalent capacity unit with multiple series connections, and structure At a capacity measurement chain, when being detected to the capacity measurement device, applied by the both ends to capacity measurement chain corresponding Electric signal, and based on the feedback signal, so as to obtain the capacitance parameter of capacity cell in equivalent capacity unit.As it can be seen that this Capacity measurement device in utility model is that multiple equivalent capacity units is combined to detect capacity cell in equivalent capacity unit Capacitance parameter, so as to more accurately reflect the preparation process of corresponding capacitor element with the presence or absence of abnormal and accurate The performance for judging to be formed by capacitor element.

Further, for the capacity measurement chain with even number equivalent capacity unit, due to the first contact layer and Second contact layer is formed in the top electrode of equivalent capacity unit, therefore completes the preparation of equivalent capacity unit and shape When at the first contact layer and the second contact layer, the first contact layer and the second contact layer are to be located at the top of structure and expose, At this time test probe can directly contact the first contact layer and the second contact layer, so as in time to be formed by capacitor survey Examination device is detected, without just detecting to stating capacity measurement chain after the interconnection process of back segment is completed.It can See, it, can not only be in the preparation work for completing capacity cell for the capacity measurement chain with even number equivalent capacity unit The performance parameters of capacity cell in prepared equivalent capacity unit are timely detected after skill；Also, section is mutual in the completed Even after technique, still capacity measurement chain can also be detected again, to further confirm that the technique of back segment whether to it The device of lower section impacts.

Detailed description of the invention

Fig. 1 a is a kind of top view of capacity measurement device；

Fig. 1 b is diagrammatic cross-section of a kind of capacity measurement device on the direction aa ' shown in Fig. 1 a；

Fig. 2 is the equivalent circuit diagram of the capacity measurement device in the utility model embodiment one；

Fig. 3 a is the top view of the capacity measurement device in the utility model embodiment one；

Fig. 3 b is diagrammatic cross-section of the capacity measurement device in the utility model embodiment one shown in Fig. 3 a along the direction aa '；

Fig. 4 a is the top view of the capacity measurement device in the utility model embodiment two；

Fig. 4 b is diagrammatic cross-section of the capacity measurement device in the utility model embodiment one shown in Fig. 4 a along the direction aa '；

Fig. 5 is the top view of the capacity measurement device in the utility model embodiment three；

Fig. 6 is the flow diagram of the forming method of the capacity measurement device in the utility model embodiment four；

Fig. 7 a~Fig. 7 e is structural schematic diagram of the capacity measurement device in its preparation process in the utility model embodiment four；

Fig. 8 is the flow diagram of the forming method of the capacity measurement unit in the utility model embodiment five.

Wherein, appended drawing reference is as follows:

10- capacity cell；

The first contact layer of 20L-；The second contact layer of 20R-；

30- separation layer；40- interconnection layer；

The first conductive plunger of 41L-；The first testing cushion of 42L-；

The second conductive plunger of 41R-；The second testing cushion of 42R-；

100- capacity measurement chain；

The 1st equivalent capacity unit of 1001-；The 2nd equivalent capacity unit of 1002-；

The 3rd equivalent capacity unit of 1003-；The 4th equivalent capacity unit of 1004-；

100N- n-th equivalent capacity unit；

The first contact layer of 110L-；

The first lead division of 111L-；The first contact portion of 112L-；

The-the second contact layer of 110R/110R '；

The-the second lead division of 111R/111R '；The-the second contact portion of 112R/112R '；

The first conductive layer of 120-；130- separation layer；

The second conductive layer of 140-；

200- interconnection layer；

The first interconnection structure of 200L-

The first conductive plunger of 210L-；The first testing cushion of 220L-；

The second interconnection structure of 200R-；

The second conductive plunger of 210R-；The second testing cushion of 220R-；

230- protective layer；

300- substrate；

The first conductive layer of 320-；330- separation layer；

340- sacrificial layer；341- opening；

351- layer of support material；350- supporting layer；

The first contact layer of 360L-；The second contact layer of 360R-；

AA- device region；The contact zone BB-；

The 1st cellular zone of A1-；The 2nd cellular zone of A2-；

C- capacity cell

Electrode under P1-；P2- top electrode.

Specific embodiment

As stated in the background art, the structure of existing capacity measurement device is relatively simple.Such as shown in Fig. 1 a and Fig. 1 b A kind of structural schematic diagram of capacity measurement device, wherein Fig. 1 a is a kind of top view of capacity measurement device, and Fig. 1 b is Fig. 1 a institute A kind of diagrammatic cross-section of the capacity measurement device shown on the direction aa '.It should be noted that for signal that can be more apparent The structure of capacity measurement device out, the members in Fig. 1 a are not shown.

As described in Fig. 1 a and Fig. 1 b, capacity measurement device includes a capacity cell 10, the top electrode of the capacity cell 10 It is connected to the first contact layer 20L, with for being connected to the first power supply, the lower electrode of the capacity cell 10 is connected to the second contact Layer 20R, for being connected to second source.When being detected to the capacity measurement device, to the first contact layer 20L and Two contact layer 20R apply corresponding electric signal, that is, the top electrode and lower electrode to capacity cell 10 apply electric signal, and Obtain feedback signal, and then it can be concluded that in capacity measurement device capacity cell capacitance parameter.

As described in Fig. 1 a and Fig. 1 b, there is usually one capacity cell 10 in existing capacity measurement device, and single electricity Hold element 10 can not accurately indicator with the ever-increasing capacitor element of closeness performance.

In addition, continuing to refer to figure 1 described in a and Fig. 1 b, in existing capacity measurement device, the second contact layer 20R is formed in The lower section of the lower electrode of capacity cell 10, therefore when completing the preparation process of capacity cell 10, the second contact layer 20R meeting It is buried in the lower section of device, and is not exposed.Such as shown in Fig. 1 b, usually it will form on the second contact layer 20R One separation layer 30, to avoid the other assemblies (such as top electrode) being formed on the second contact layer 20R and the second contact layer 20R electricity Property connection.At this point, the second contact layer 20R can be made not expose, to can not draw under the covering of the separation layer 30 The second contact layer 20R, and then directly capacity cell 10 can not be detected.Therefore, in existing technique, usually The interconnection process of section in the completed, to draw the first contact layer 20L and the second contact layer 20R and then to the capacity cell 10 capacitance parameter is detected.

With specific reference to described in Fig. 1 b, after forming the capacity cell 10, interconnection layer 40 is formed in the capacity cell 10, on the first contact layer 20L and the second contact layer 20R, the first interconnection structure and the second interconnection are formed in the interconnection layer 40 Structure, first interconnection structure include be connected to the first contact layer 20L the first conductive plunger 41L and with it is described first conductive The first testing cushion 42L that plug 41L is electrically connected, second interconnection structure includes be connected to the second contact layer 20R second Conductive plunger 41R and with the second conductive plunger 41R be electrically connected the second testing cushion 42R.

At this point, applying to the first testing cushion 42L and the second testing cushion 42R corresponding using probe is for example tested Electrical number, so to be detected to capacity cell.

It can be seen that existing capacity measurement device can not timely its complete capacity cell preparation process after, Directly the capacity cell of capacity measurement device is detected, and is needed after the interconnection process of back segment is completed, it just can be right Capacity cell is detected.In this way, will lead to the detection lag of capacity cell, thus prepared by can not timely finding Whether capacity cell has defect, and can not timely reflect the preparation process of capacity cell with the presence or absence of abnormal.

For this purpose, the utility model provides a kind of capacity measurement device, comprising:

In capacity measurement device i.e. provided by the utility model, the equivalent capacity unit with multiple series connections, thus Can improve Single Capacitance element can not accurately indicator with the ever-increasing capacitor element of closeness performance the problem of.

Below in conjunction with the drawings and specific embodiments to the utility model proposes capacity measurement device and forming method thereof make It is further described.According to following explanation, will be become apparent from feature the advantages of the utility model.It should be noted that attached drawing is equal Using very simplified form and using non-accurate ratio, only to convenient, lucidly aid illustration the utility model is real Apply the purpose of example.

Embodiment one

Fig. 2 is the equivalent circuit diagram of the capacity measurement device in the utility model embodiment one, as shown in Fig. 2, this implementation Example in capacity measurement device include:

One capacity measurement chain 100, the capacity measurement chain 100 include the equivalent capacity unit of N number of series connection (1001 ... 100N), N are the positive integer greater than 1；Wherein, the equivalent capacity unit have lower electrode P1 and coat it is described under The top electrode P2 of electrode P1, i.e., from the 1st equivalent capacity unit to n-th equivalent capacity unit, the adjacent equivalent capacity One of electrode between unit is connected with each other, so that N number of equivalent capacity unit is connected in series；The lower electrode P1 and The top electrode P2 can constitute capacity cell, be equivalent in the equivalent capacity unit and be formed at least one capacitor member Part, and capacitor dielectric layer is also formed between the top electrode P3 and the lower electrode P1；

One first contact layer 110L is formed in the described of the 1st equivalent capacity unit 1001 of the capacity measurement chain 100 It on top electrode P1, and is electrically connected with the top electrode P1 of the 1st equivalent capacity unit 1001, for being connected to the One power supply；

One second contact layer 110R is formed in the described of the n-th equivalent capacity unit 100N of the capacity measurement chain 100 The lower section of top electrode P2 up or down electrode P1, for being connected to second source.

Specifically, when the quantity of the equivalent capacity unit in the capacity measurement chain 100 is even number, described second Contact layer 110R is formed on the top electrode P2 of n-th equivalent capacity unit 100N, and with the n-th equivalent capacity list The top electrode P2 of first 100N is electrically connected；When the quantity of the equivalent capacity unit in the capacity measurement chain 100 is When odd number, the second contact layer 110R is formed in the lower section of the lower electrode P1 of the n-th equivalent capacity unit 100N, And it is electrically connected with the lower electrode P1 of the n-th equivalent capacity unit 100N.

Since N number of equivalent capacity unit in the capacity measurement chain 100 is connected in series.Wherein, N number of equivalent capacity Unit is to be formed in same manufacturing process, therefore N number of equivalent capacity unit has same or similar equivalent capacitance value C₁, And then the total capacitance value C of the capacity measurement chain 100_A=1/NC₁。

When being detected to the capacity measurement chain 100, in the first contact layer 110L and the second both ends contact layer 110R Apply electric signal, and detects and corresponding feedback signal occur.For example, to the first contact layer 110L and the second both ends contact layer 110R Apply electric current, and detect corresponding voltage, so as to obtain the practical total capacitance value of the capacity measurement chain 100, at this time The approximate capacitance value of you can get it equivalent capacity unit.

It is understood that due to multiple equivalent capacity units in capacity measurement device in the present embodiment, thus Can the preparation process based on multiple equivalent capacity unit judges capacitor elements it is whether abnormal.Compared to merely with an equivalent capacity For the preparation process of unit judges capacitor element, the capacity measurement device in the present embodiment more can accurately judge electricity Whether the preparation process of container piece abnormal, and can be more accurate reflect prepared have functional capacitor The performance of part.

As described above, N number of equivalent capacity unit in capacity measurement chain is connected in series.Wherein:

(work as N=2) when the quantity of the 100 equivalent capacity unit in the capacity measurement chain is equal to 2, the 1st etc. The lower electrode P1 of effect capacitor cell 1001 and the 2nd equivalent capacity unit 1002 is electrically connected with each other, and described 2nd equivalent The top electrode P2 of capacitor cell 1002 is connected to the second contact layer 110R, so that the 1st equivalent capacity unit 1001 and the 2nd equivalent capacity unit 1002 be connected in series；

Alternatively, with continued reference to shown in Fig. 2, when the quantity of the equivalent capacity unit in the capacity measurement chain 100 is big When 2 (that is, N > 2), then by the 1st equivalent capacity unit 1001, adjacent two equivalent capacity units two-by-two The lower electrode P1 be electrically connected, and by the 2nd equivalent capacity unit 1002, two-by-two adjacent two it is described etc. The top electrode P2 for imitating capacitor cell is electrically connected, in this way, so that N number of equivalent capacity unit is connected in series.

It should be noted that n-th equivalent capacity unit 100N is connected to the second contact layer 110R for top electrode P2, or N-th equivalent capacity unit 100N is that lower electrode P1 is connected to the second contact layer 110R, this depends on capacity measurement chain 100 In equivalent capacitor cell quantity.As described above, when the quantity of the equivalent capacity unit in the capacity measurement chain 100 is When odd number, then the lower electrode P1 of n-th equivalent capacity unit 100N is connected to the second contact layer 110R；When the capacity measurement chain When the quantity of the equivalent capacity unit in 100 is even number, then the top electrode P2 of n-th equivalent capacity unit 100N is connected to Second contact layer 110R.

Below with reference to the concrete structure schematic diagram of capacity measurement device, the capacity measurement device in the present embodiment is carried out detailed It describes in detail bright.Fig. 3 a is the top view of the capacity measurement device in the utility model embodiment one, and Fig. 3 b is this reality shown in Fig. 3 a With the capacity measurement device in new embodiment one along the diagrammatic cross-section in the direction aa '.It should be appreciated that for can be more bright The clear structure for embodying capacity measurement device in the present embodiment in attached drawing and does not complete and shows all of the capacity measurement device Component.

As shown in Figure 3a and Figure 3b shows, in the present embodiment, to have 2 equivalent capacity units in the capacity measurement chain 100 For be explained.Further, the capacity measurement chain 100 has an a device region AA and contact zone BB, the electricity The equivalent capacity unit for holding test chain 100 is formed in the device region AA and the first contact layer 110L and institute The second contact layer 110R is stated partially to be formed in the device region AA and extend in the contact zone BB.

Specifically, lower electrode P1 and the top electrode P2 for coating the lower electrode P1 are respectively formed in the equivalent capacity unit In the device region AA, the lower electrode P1 and the top electrode P2 can constitute capacity cell C.Wherein, due to lower electrode P1 is coated by the top electrode P2, therefore for the top electrode P2, and the lower electrode P1 is buried in device architecture In and do not expose.

With continued reference to described in Fig. 3 a and Fig. 3 b, the part the first contact layer 110L is formed in the 1st equivalent capacity On the top electrode P2 of unit, and by being extended in the contact zone BB in the device region AA, so as to be connect described Touching area BB is connected to the first contact layer 110L on the first power supply.Specifically, the first contact layer 110L includes being formed The first lead division 111L on the top electrode P2 and the first contact portion 112L in the contact zone BB is extended to, described the One contact portion 112L has the contact surface of a large surface area, during the test, can make the test probe of corresponding first power supply It can be electrically connected with the contact surface of the first contact portion 112L.

The second contact layer 110R is formed in the top electrode P2 of the 2nd equivalent capacity unit 1002, and by described It is extended in device region AA in the contact zone BB, so as to make the second contact layer 110R connection in the contact zone BB To second source.Similar, the second contact layer 110R includes the second lead division being formed on the top electrode P2 111R and the second the contact portion 112R, the second contact portion 112R extended in the contact zone BB have a large surface area Contact surface can make the contact surface of the test probe and the second contact portion 112R of corresponding second source during the test It is electrically connected.

With continued reference to described in Fig. 3 a and Fig. 3 b, the capacity measurement device further includes at least one 120 He of the first conductive layer One separation layer 130, the separation layer 130 cover first conductive layer 120, for avoiding the first conductive layer 120 and its top Other conducting elements be electrically connected (for example, the first conductive layer 120 is avoided to be electrically connected with top electrode P2), and based on described The covering of separation layer 130 exposes first conductive layer 120 not.

Wherein, the lower electrode P1 of the equivalent capacity unit through the separation layer 130 and is formed in described first On conductive layer 120, with first conductive layer 120 be electrically connected, and the lower electrode P1 be electrically connected with each other it is adjacent The equivalent capacity unit in, the lower electrode P1 is formed on same first conductive layer 120.In this way, under can making In the adjacent equivalent capacity unit that electrode P1 is electrically connected with each other, its lower electricity is realized by first conductive layer 120 Pole P1 is electrically connected with each other.In the present embodiment, lower electrode P1 and the 2nd equivalent capacity list of the 1st equivalent capacity unit 1001 The lower electrode P1 of member 1002 is formed on same first conductive layer 120.

As described above, the first contact layer 110L and the second contact layer 110R are formed in top electrode P2 in the present embodiment On, therefore prepare completion in the capacity cell of capacity measurement device and form the first contact layer 110L and the second contact layer 110R Later, the test probe of the test probe of corresponding first power supply and correspondence second source can directly be electrically connected to described the One contact layer 110L and the second contact layer 110R, thus can the capacity cell C directly to capacity measurement device detect. That is, can use test probe when testing the capacity measurement device in the present embodiment and be directly electrically connected to first Contact layer 110L and the second contact layer 110R.

As it can be seen that not needing to complete until the interconnection process of back segment, it can timely to capacity cell in the present embodiment C is detected, so as to timely judge the whether abnormal and detected capacitor member of the preparation process of capacity cell The capacitance parameter of part can more accurate indicator have the actual capacitance parameter of functional capacity cell, without by rear The influence of the interconnection process of section.

With continued reference to shown in Fig. 3 a and Fig. 3 b, in the present embodiment, it is each formed in each equivalent capacity unit multiple Lower electrode P1, the top electrode P2 in the equivalent capacity unit coats multiple lower electrode P1, so that described in each Lower electrode P1 constitutes a capacity cell C with the corresponding top electrode P2.It is understood that each equivalent capacity In unit, the same top electrode P2 covers multiple lower electrode P1.Further, in the same equivalent capacity unit Multiple lower electrode P1 are electrically connected with each other, in this way, can make in the same equivalent capacity unit, multiple lower electrodes Multiple capacity cell C corresponding to P1 are connected in parallel.Multiple lower electrodes in the present embodiment, in same equivalent capacity unit P1 is formed on same first conductive layer 120, so that multiple lower electrode P1 in same equivalent capacity unit are mutually electrical Connection.

That is, in the present embodiment, the capacity cell C being connected in parallel in each equivalent capacity unit with M is each described Capacity cell C all has identical or close capacitance C₂, therefore the equivalent capacitance value C of the equivalent capacity unit₁=MC₂。

It should be noted that generally including multiple capacity cells, multiple capacitors in functional capacitor element Element is arranged with scheduled closeness.Therefore, to ensure that capacity measurement device can be accurately reflected with functional capacitor The performance of device can make have multiple capacity cells accordingly in each equivalent capacity unit of the capacity measurement device, And multiple capacity cells can arrange using with the identical arrangement mode of capacity cell in functional capacitor element. In this way, more can accurately be inferred to the performance with functional capacitor element according to the capacity measurement device.

With continued reference to shown in Fig. 3 a and Fig. 3 b, the lower electrode P1 includes a tubular structure, and the top electrode P2 covers institute Tube inner surface and the cylinder outer surface of lower electrode P1 are stated, so that the lower electrode P1 is respectively in tube inner surface and cylinder outer surface and described Lower electrode P2 constitutes capacitor.That is, the capacitance C of each capacity cell C in each equivalent capacity unit₂Including in corresponding cylinder The capacitance of the capacitance on surface and corresponding cylinder outer surface.

In the present embodiment, the bottom of the tubular structure of the lower electrode P1 through the separation layer 130 and is formed in On first conductive layer 120, the top electrode P2 covers the tubular structure of the lower electrode P1, and further extends over institute State separation layer 130.

Further, the first contact layer 110L is formed in the tubular structure of the 1st equivalent capacity unit 1001 Top, and the bottom of the tubular structure is extended to from the top of the tubular structure along the cylinder outer surface of the tubular structure Portion, to further extend in contact zone BB.That is, the first lead division 111L of the first contact layer 110L is located at the tubular The top of structure, and the corresponding top position in the tubular structure, the first contact portion 112L of the first contact layer 110L The bottom position of the corresponding tubular structure.And in the present embodiment, the second contact layer 110R is also partially formed described The top of the tubular structure of 2nd equivalent capacity unit 1002, and from the top of the tubular structure along the tubular The cylinder outer surface of structure extends to the bottom of the tubular structure, to further extend in the contact zone BB, to make institute The the second lead division 111R for stating the second contact layer 110R is located at the top of the tubular structure, and corresponding in the tubular structure Second contact portion 112R of top position, the second contact layer 110R corresponds to the bottom position of the tubular structure.

In addition, in the alternative, the capacity measurement device can also include an interconnection layer, the interconnection layer is formed On the capacity measurement chain 100, for further drawing the capacity measurement chain 100.

Fig. 3 c is capacity measurement device its structural schematic diagram for being formed with interconnection layer in the utility model embodiment one.Such as Shown in Fig. 3 c, the interconnection layer 200 includes the first interconnection structure 200L and the second interconnection structure 200R, in the interconnection layer 200 The bottom of the first interconnection structure 200L be connected at the top of the first contact layer 110L, the first interconnection structure 200L and extend to interconnection The top surface of layer 200；And the bottom of the second interconnection structure 200R of the interconnection layer 200 is connected to second contact layer The top surface of interconnection layer 200 is extended at the top of 110R, the second interconnection structure 200R.

Further, the first interconnection structure 200L includes at least one first conductive plunger 210L and the first testing cushion 220L, the bottom of the first conductive plunger 210L are connected to the first contact layer 110L, the first conductive plunger 210L Top be connected to the first testing cushion 220L.Similar, the second interconnection structure 200R includes that at least one second is led Electric plug 210R and the second testing cushion 220R, the bottom of the second conductive plunger 210R is connected to second contact layer The second testing cushion 220R is connected at the top of 110R, the second conductive plunger 210R.

In the present embodiment, the first part contact layer 110L is formed in the top electrode of the 1st equivalent capacity unit 1001 P2 is upper and part is located in device region AA, and the second part contact layer 110R is formed in the described of the 2nd equivalent capacity unit 1002 On top electrode P2 and part is in device region AA, therefore the first interconnection structure 200L can be formed in device region AA and be located at The top of 1st equivalent capacity unit 1001, so as to electrical with the first lead division 111L of the first contact layer 110L Connection；The second interconnection structure 200R can be formed in device region AA and be located at the upper of the 2nd equivalent capacity unit 1002 Side, to be electrically connected with the second lead division 111R of the second contact layer 110R.

It should be noted that the lower electrode P1 in the present embodiment includes tubular structure, the of the first contact layer 110L One lead division 111L is formed in the top of the tubular structure of the 1st equivalent capacity unit 1001, second contact layer The second lead division 111R of 110R is formed in the top of the tubular structure of the 2nd equivalent capacity unit 1002.Based on this, originally That is, to be connected to the bottom of the first conductive plunger 210L of the first interconnection structure 200L described in embodiment First contact layer 110L is located at the first lead division 111L above the tubular structure, and makes the second interconnection structure 200R The bottom of the second conductive plunger 210R be connected to the second contact layer 110R is located above the tubular structure Two lead division 111R.

Due to the top of the tubular structure of the corresponding lower electrode P1 in the position of the first lead division 111L of the first contact layer 110L The bottom position of the tubular structure of the corresponding lower electrode P1 in the position of the first contact portion 112L of position and the first contact layer 110L Set, i.e. in the first contact layer 110L, the first lead division 111L relative to the first contact portion 112L closer to it is described mutually The even top surface of layer 200.Therefore, the first contact portion of the first contact layer 110L is connected to the first conductive plunger 210L 112L is compared, and is connected to the bottom of the first conductive plunger 210L on the first lead division 111L of the first contact layer 110L, It can be effectively reduced the height of the first conductive plunger 210L, to advantageously reduce the system of the first conductive plunger 210L Standby difficulty, and improve the quality for being formed by the first conductive plunger 210L.Similar, in the present embodiment, by the second conductive plunger 210R is also connected on the second lead division 111R of the second contact layer 110R, therefore the depth of the first interconnection structure 200L It spends same or similar with the depth of the second interconnection structure 200R.

Certainly it should be appreciated that the first contact layer 110L and the second contact layer 110R are all extended in contact zone BB, therefore First interconnection structure 200L and the second interconnection structure 200R can also be formed in contact zone BB, and make the first interconnection structure 200L It is electrically connected with the first contact portion 112L of the first contact layer 110L, the of the second interconnection structure 200R and the second contact layer 110R Two contact portion 112R are electrically connected.

When detecting to the capacity measurement device for being formed with the interconnection layer 200, the test of corresponding first power supply is visited Needle contacts the first testing cushion 220L, and the test probe of corresponding second source contacts the second testing cushion 220R, so as to right Capacity measurement chain 100 is detected.

As it can be seen that the capacity measurement device in the present embodiment can be directly to the capacitor after forming capacity cell C The capacitance parameter of element C is detected, so as to timely know the performance for being formed by capacity cell C, and institute at this time The capacitance parameter of the capacity cell C of acquisition is the interconnection process for obviating back segment and the capacitance parameter obtained, can be more smart The performance of capacity cell C described in quasi- indicator.Also, it, can also be again to institute after the preparation process for completing interconnection layer 200 It states capacity measurement device to be detected, can judge whether the interconnection process of back segment is formed by capacitor member to leading portion at this time Part assembly influences, and further monitors the performance for the capacity cell C being ultimately formed.

In addition, as shown in Figure 3c, a protective layer 230 is also formed on the interconnection layer 200, the protective layer 230 is used In the protection capacity measurement device.And the of the first testing cushion 220L of first interconnection structure and the second interconnection structure Two testing cushion 220R are exposed from the protective layer 230, when in favor of the detection of subsequent execution capacitance parameter, test probe energy It is enough to be contacted with the first testing cushion 220L and the second testing cushion 220R.

Embodiment two

Compared with embodiment one, in the present embodiment the quantity of the equivalent capacity unit of capacity measurement device be greater than 2, i.e. N > 2.In the present embodiment, it is illustrated for there are 3 equivalent capacity units in capacity measurement device, i.e. capacitor in the present embodiment The quantity for testing the equivalent capacity unit of chain is odd number, and second contact layer may be formed at the equivalent electricity of the n-th at this time Hold the lower section of the lower electrode of unit, and contact zone is extended to by device region.

Fig. 4 a is the top view of the capacity measurement device in the utility model embodiment two, and Fig. 4 b is this reality shown in Fig. 4 a With the capacity measurement device in new embodiment one along the diagrammatic cross-section in the direction aa '.In conjunction with Fig. 2 and Fig. 4 a~Fig. 4 b institute Show, the top electrode P2 of the 1st equivalent capacity unit 1001 is electrically connected to the first contact layer 110L, the 1st equivalent capacity unit The lower electrode P1 of 1001 lower electrode P1 and the 2nd equivalent capacity unit 1002 is electrically connected with each other, the 2nd equivalent capacity unit The top electrode P2 of 1002 top electrode P2 and the 3rd equivalent capacity unit 1003 is electrically connected with each other and the 3rd equivalent capacity The lower electrode P1 of unit 1003 is electrically connected to the second contact layer 110R '.

Specifically, the first contact layer 110L is formed on the top electrode P2 of the 1st equivalent capacity unit 1001 and extends to In contact zone BB；The lower electrode P1 of lower electrode P1 and the 2nd equivalent capacity unit 1002 of 1st equivalent capacity unit 1001 it Between, it is electrically connected with each other by being formed in the first conductive layer 120 below the lower electrode P1；2nd equivalent capacity unit Between the top electrode P2 of 1002 top electrode P2 and the 3rd equivalent capacity unit 1003, by being formed on the top electrode P2 One second conductive layer 140 be electrically connected；And second contact layer 110R ' be formed under the 3rd equivalent capacity unit 1003 The lower section of electrode simultaneously extends to contact zone BB.

Wherein, the part being located in the first contact layer 110L in device region AA constitutes the first lead division 111L, is located at contact Part in area BB constitutes the first contact portion 112L.And second the part that is located in contact layer 110R ' in device region AA constitute Second lead division 111R ', the part in contact zone BB constitute the first contact portion 112R '.

With continued reference to shown in Fig. 4 b, second conductive layer 140 is formed in the top electrode of the equivalent capacity unit On P2, and it is electrically connected with the top electrode P2, and the adjacent equivalent capacity that the top electrode is electrically connected with each other In unit, the top electrode P2 is connected to same second conductive layer 140, to pass through second conductive layer 140 mutually electricity Property connection.That is, second conductive layer 140 is formed in the 2nd equivalent capacity unit 1002 and the 3rd equivalent in the present embodiment In the top electrode of capacitor cell 1003, and the second conductive layer 140 is in the 2nd equivalent capacity unit 1002 and the 3rd equivalent electricity Hold and is connected with each other between unit 1003.

In preferred scheme, second conductive layer 140 and the first contact layer 110L can be located at same structure layer In.For example, the first contact layer 110L and second conductive layer 140 utilize same top layer conductive material layer, in same work It is formed simultaneously in skill step.

Similar, the second contact layer 110R ' and first conductive layer 120 can also be located in same structure layer. For example, the second contact layer 110R ' and first conductive layer 120 utilize same bottom conductive material layer, in same technique It is formed simultaneously in step.Wherein, the second contact layer 110R ' can also be covered by separation layer, therefore the 3rd equivalent electricity The lower electrode P1 for holding unit 1003 runs through the separation layer and is formed on the second contact layer 110R '.

In the present embodiment, the capacity measurement device further includes interconnection layer 200, as embodiment one kind, the interconnection The bottom of the first interconnection structure 200L in layer 200, which is connected at the top of the first contact layer 110L, the first interconnection structure 200L, prolongs Extend to the top surface of interconnection layer 200；And the bottom of the second interconnection structure 200R of the interconnection layer is connected to described second and connects The top surface of interconnection layer 200 is extended at the top of contact layer 110R ', the second interconnection structure 200R.

Wherein, the first interconnection structure 200L includes the first conductive plunger 210L and the first testing cushion 220L, and described the One conductive plunger 210L can be formed in device region AA and be located at the top of the 1st equivalent capacity unit 1001, with it is described The first lead division 111L of first contact layer 110L is electrically connected, certainly it should be appreciated that the first of the first interconnection structure 200L Conductive plunger 210L can also be formed in contact zone BB and the bottom of the first conductive plunger 210L is made to be connected to the first contact layer On the first contact portion 112L of 110L.And the second conductive plunger 210R of the second interconnection structure 200R is formed in contact In area BB, and so that the bottom of the second conductive plunger 210R is connected to the second contact layer 110R ' and is extended to the second of contact zone BB and connect On contact portion 112R '.That is, the height of the second conductive plunger 210R is greater than the first conductive plunger 210L in the present embodiment Height.

Embodiment three

Compared with embodiment two, the quantity of the equivalent capacity unit of capacity measurement chain is even number in the present embodiment.For example, There are 4 equivalent capacity units in the capacity measurement chain.

As described above, then the first contact layer and second connects when having even number equivalent capacity unit in capacity measurement chain Contact layer is both formed in the top electrode of equivalent capacity unit.Therefore, complete equivalent capacity unit in capacity cell preparation work After skill, it can directly detected to capacity cell, and judge the performance of the capacity cell.

Fig. 5 is the top view of the capacity measurement device in the utility model embodiment three, in conjunction with shown in Fig. 2 and Fig. 5, first Contact layer 110L is formed on the top electrode P2 of the 1st equivalent capacity unit 1001 and extends to contact zone BB, the 1st equivalent electricity Between the lower electrode P1 for holding lower electrode P1 and the 2nd equivalent capacity unit 1002 of unit 1001, pass through first conductive layer 120 are electrically connected with each other；The top electrode P2 of 2nd equivalent capacity unit 1002 is powered on the 3rd equivalent capacity unit 1003 Between the P2 of pole, it is electrically connected by the second conductive layer 140；Lower electrode P1 and the 4th of 3rd equivalent capacity unit 1003 is equivalent Between the lower electrode P1 of capacitor cell 1004, it is electrically connected with each other by another first conductive layer 120；And second contact layer 110R is formed on the top electrode P2 of the 4th equivalent capacity unit 1004 and extends to contact zone BB.4 strings are formed as a result, Join the capacity measurement chain of connection.

In the present embodiment, the first contact layer 110L, the second conductive layer 140 and the second contact layer 110R are located at same knot In structure layer.Specifically, the first contact layer 110L, the second conductive layer 140 and the second contact layer 110R are all made of same top layer Conductive material layer is formed.And for connecting under the 1st equivalent capacity unit 1001 and the 2nd equivalent capacity unit 1002 First conductive layer 120 of electrode, and for connecting the 3rd equivalent capacity unit 1003 and the 4th equivalent capacity unit 1004 First conductive layer 120 of lower electrode, this two the first conductive layers 120 are located in same structure layer.Specifically, can be by forming one Bottom conductive material layer, and the bottom conductive material layer is truncated, to respectively constitute first conductive layer 120 of two disjunctions.

With embodiment it is a kind of as, the capacity measurement device in the present embodiment further includes interconnection layer, and the interconnection layer The first interconnection structure can be formed in device region AA, and electrically connect with the first lead division 111L of the first contact layer 110L It connects and the second interconnection structure of the interconnection layer can also be formed in device region AA, and with the second contact layer 110R Two lead division 111R are electrically connected.In this way, first interconnection structure and the second interconnection structure can be made equal in the interconnection layer Has smaller depth, so as to which the preparation difficulty of first interconnection structure and the second interconnection structure, and phase is effectively reduced That answers can be improved the quality for being formed by the first interconnection structure and the second interconnection structure.

It should be noted that the capacity measurement device in the present embodiment can also complete electricity with as embodiment one kind Hold element preparation process after, directly the performance of capacity cell is detected, and after its formation the interconnection process of section it Afterwards, capacity measurement device can also be detected herein.In this way, can be in the influence for having got rid of interconnection process, and more The preparation process of capacitor element is accurately assessed, and subsequent interconnection process can be further inferred that out whether to being formed by electricity Hold element to impact.

Example IV

A kind of forming method of capacity measurement device is provided in the present embodiment.As described above, based in capacity measurement chain The quantity of equivalent capacity unit, the second contact layer is formed in the top electrode of the n-th test cell of capacity measurement chain or shape At the lower section of the lower electrode of the n-th test cell in capacity measurement chain.In the present embodiment, there is the equivalent electricity of even number to be formed It is explained for the capacity measurement chain of appearance unit.

Fig. 6 is the flow diagram of the forming method of the capacity measurement device in the utility model embodiment four, such as Fig. 6 institute Show, the forming method of the capacity measurement device includes:

Step S110 provides a substrate, and the substrate has N number of cellular zone for being used to form equivalent capacity unit, and N is big In 1 even number；

Step S120 sequentially forms lower electrode and top electrode in the cellular zone of the substrate, the top electrode packet The lower electrode is covered, and an equivalent capacitor cell is formed in each cellular zone by the lower electrode and the top electrode, Multiple equivalent capacity units in multiple cellular zones are connected in series to constitute a capacity measurement chain；

Step S130, formed one first contact layer the capacity measurement chain the 1st equivalent capacity unit it is described on On electrode, and the second contact layer is formed in the top electrode of the n-th equivalent capacity unit of the capacity measurement chain.

Fig. 7 a~Fig. 7 e is that structure of the capacity measurement device in its preparation process in the utility model embodiment four is shown It is intended to, each step of the forming method of capacity measurement device in the present embodiment is described in detail in following Structure Figure.

In step S100, with specific reference to shown in Fig. 7 a, providing a substrate 300, the substrate have it is N number of be used to form it is equivalent The cellular zone of capacitor cell, wherein N is the even number greater than 1.In the present embodiment, to form the electricity with 2 equivalent capacity units For holding test chain, therefore there is 2 cellular zones, respectively the 1st cellular zone A1 and the 2nd cellular zone A2 in the substrate.

Further, a device region AA and a contact zone BB be there is also defined on the substrate 300, be used to form equivalent electricity The cellular zone for holding unit corresponds in the device region AA and subsequent the first contact layer and second that is formed by contacts Layer extends in the contact zone BB.

In step 200, with specific reference to shown in Fig. 7 a~Fig. 7 d, sequentially forming lower electrode P1 and top electrode P2 in the substrate In 300 cellular zone, the top electrode P2 coats the lower electrode P1, and by the lower electrode P1 and top electrode P2 Equivalent capacity unit is constituted in each cellular zone, multiple equivalent capacity unit series connection in multiple cellular zones Connection is to form a capacity measurement chain.

Wherein, the connection type that multiple equivalent capacity units are connected in series is for example are as follows:

(work as N=2) when the quantity for the equivalent capacity unit being formed by capacity measurement chain is equal to 2, then the 1st The lower electrode P1 of equivalent capacity unit 3001 and the 2nd equivalent capacity unit 3002 is electrically connected with each other；And

When the quantity of the equivalent capacity unit in the capacity measurement chain is greater than 2 (that is, N > 2), then by the described 1st A equivalent capacity unit 3001 rises, and the lower electrode P1 of the adjacent two equivalent capacity units is electrically connected two-by-two, In in the lower electrode adjacent equivalent capacity unit interconnected, can use one first conductive layer realize it is adjacent two-by-two Lower electrode is electrically connected with each other in equivalent capacity unit；And by the 2nd equivalent capacity unit 3002, two two-phases The top electrode P2 of two adjacent equivalent capacity units is electrically connected, in this way, so that N number of equivalent capacity unit string Connection connection.

In the present embodiment, definition has the 1st cellular zone A1 and the 2nd cellular zone A2 in the device region AA of the substrate 300, And then the 1st equivalent capacity unit 3001 and the 2nd equivalent capacity unit 3002 can be formed.And the 1st equivalent capacity unit The lower electrode P1 of 3001 lower electrode P1 and the 2nd equivalent capacity unit 3002 is electrically connected.Specifically, the 1st equivalent The lower electrode P1 of the lower electrode P1 of capacitor cell 3001 and the 2nd equivalent capacity unit 3002 is both formed in same first and leads In electric layer 120.

With specific reference to shown in Fig. 7 a, before forming the lower electrode P1, the forming method of the capacity measurement device is also It include: to form at least one first conductive layer 320 and separation layer 330 on the substrate 300, the separation layer 330 covers institute State the first conductive layer 320.In the present embodiment, first conductive layer 330 is extended to form in the 1st cellular zone A1 and the 2nd list In first area A2.And under formation when electrode P1, the lower electrode P1 runs through the separation layer 330 to be formed in described the On one conductive layer 320.

In the present embodiment, the lower electrode P1 in the equivalent capacity unit has a tubular structure, forming method Include the following steps.

Step 1 forms a sacrificial layer 340 on the substrate 300, shape in the sacrificial layer 340 with reference to shown in Fig. 7 a At there is multiple openings 341, the opening 341 is used to define position and the pattern of the subsequent lower electrode that need to be formed, therefore every The opening 341 has been correspondingly formed in one cellular zone.

In the present embodiment, the sacrificial layer 340 covers the separation layer 330 and is formed in first conductive layer 320 Top, the opening 341 runs through the sacrificial layer 340 and the separation layer 330, to expose first conductive layer 320.

In preferred scheme, a layer of support material 351, the layer of support material are also formed on the sacrificial layer 340 351 are used to form supporting layer in subsequent technique, and the supporting layer can be supported the tubular structure of lower electrode, to keep away Exempt from the tubular structure inclination of lower electrode or collapses.In the present embodiment, the layer of support material 351 is formed on sacrificial layer 340, because This subsequent top for being formed by supporting layer and being located at the tubular structure of lower electrode accordingly.And the opening 341 is from the branch The top surface of the timbering bed of material 351 is through the layer of support material 351 and extends in the sacrificial layer 340.

Step 2 forms lower electrode P1 in the opening 341 of the sacrificial layer 340, under described with reference to described in Fig. 7 b Electrode P1 covers roof and the bottom of the opening 341, so that the part for corresponding to the opening 341 in the lower electrode P1 is constituted Tubular structure；Also, the bottom of the tubular structure of the lower electrode P1 is contacted with first conductive layer 320.This implementation In example, it is conductive that the lower electrode P1 in lower electrode P1 and the 2nd cellular zone A2 in the 1st cellular zone A1 is both formed in same first On layer 320.

As described above, being formed with a layer of support material 351 on sacrificial layer 340 in the present embodiment, the opening 341 runs through The layer of support material 351, therefore the lower electrode P1 covers the side that the layer of support material 351 is exposed to the opening 341 Wall, so that the top of the tubular structure of the lower electrode P1 is connect with the layer of support material 351.In optional scheme, in shape It further include the graphical layer of support material 351, to form supporting layer 350 after the lower electrode P1.

Step 3 removes the sacrificial layer with reference to described in Fig. 7 c, to expose the cylinder of the tubular structure of the lower electrode P1 Inner surface and cylinder outer surface.At this point, supporting the tubular structure of the lower electrode P1 using the supporting layer 350.

Based on the lower electrode P1 have tubular structure, therefore it is subsequent be formed by equivalent capacity unit, i.e., accordingly It may be constructed the capacity cell of tubular structure, the capacity cell of tubular structure is effective due to that can increase in the height direction capacitor Area, therefore can effectively improve the capacitance for being formed by capacity cell.

With further reference to shown in Fig. 7 d, after removing the sacrificial layer, and is formed before top electrode, further include forming electricity Hold dielectric layer on the surface of the lower electrode P1.The capacitor dielectric layer covers the tubular structure of the lower electrode P1 accordingly Tube inner surface and cylinder outer surface.And after forming the capacitor dielectric layer, the top electrode P2 is formed, it is described to power on Pole P2 is formed in the capacitor dielectric layer, and is spaced table in the cylinder for the tubular structure that the capacitor dielectric layer covers the lower electrode Face and cylinder outer surface.

Wherein, the top electrode P2 can be formed by depositing operation, and be formed by film executing thin film deposition processes In material layer, the tube inner surface of the tubular structure of electrode P1 and cylinder outer surface under covering, while also covering adjacent unit Region between area, therefore the film material plies being located in different units area are connected with each other.Based on this, can according to virtual condition, The film material plies are truncated to form the top electrode P2.

Specifically, as described above, when the quantity of the equivalent capacity unit in the capacity measurement chain be greater than 2 when (that is, N > 2), then by the 2nd equivalent capacity unit 3002, the described of adjacent two equivalent capacity units powers on two-by-two Pole P2 is electrically connected.Therefore, when the quantity of the equivalent capacity unit is greater than 2 (that is, N > 2), then from the 2nd equivalent electricity Hold unit 3002 to rise, the film material plies for corresponding to top electrode in two adjacent two-by-two equivalent capacity units can be made mutually to interconnect It connects.In the present embodiment, be formed with 2 equivalent capacity units in the capacity measurement chain, the 1st equivalent capacity unit 3001 it is upper The top electrode P2 of electrode P2 and the 2nd equivalent capacity unit 3002 is mutually disconnected, it is therefore desirable to the thin of corresponding top electrode P2 be truncated Membrane layers.It should be noted that so that top electrode P2 is mutually disconnected in this step, it can also be in the next steps Disconnect top electrode P2 mutually.

Step S300 forms the first contact layer 360L at the 1st etc. of the capacity measurement chain with specific reference to shown in Fig. 7 e On the top electrode P2 for imitating capacitor cell 3001, and the second contact layer 360R is formed in the n-th etc. of the capacity measurement chain On the top electrode P2 for imitating capacitor cell.

In the present embodiment, 1st equivalent capacity unit 3001 of the first contact layer 360L in the capacity measurement chain The top electrode P2 on, and extended in contact zone BB from device region AA；And second contact layer 360R in the capacitor It tests on the top electrode P2 of the 2nd equivalent capacity unit 3002 of chain, and is extended in contact zone BB from device region AA.

It should be noted that capacity measurement chain formed in the present embodiment only includes 2 equivalent capacity units.However, In other embodiments, when the quantity of the equivalent capacity unit of the capacity measurement chain is greater than 2, then from the 2nd equivalent capacity list Member rises, and the top electrode P2 of two adjacent equivalent capacity units is electrically connected with each other using the second conductive layer two-by-two.

Accordingly, it is preferred that second conductive layer, the first contact layer 360L and the second contact layer 360R exist in scheme It is formed in same step.Specifically, the formation of second conductive layer, the first contact layer 360L and the second contact layer 360R Method includes:

First step forms top layer conductive material layer over the substrate, and the top layer conductive material layer covers every first-class The top electrode P2 of capacitor cell is imitated, and is extended in contact zone BB；Optionally, described in the top layer conductive material layer covers The cylinder of tubular structure is open；

The top layer conductive material layer is truncated in second step, and makes to be located at described 1st in the top layer conductive material layer Part on equivalent capacity unit constitutes the first contact layer 360L, is located in the top layer conductive material layer described adjacent two-by-two Part on two equivalent capacity units constitutes second conductive layer, to connect the top electrode of adjacent equivalent capacity unit, And the part being located on the n-th equivalent capacity unit in the top layer conductive material layer constitutes the second contact layer 360R.

So far, that is, the capacity measurement chain in the capacity measurement device is formd, and is connected to the capacity measurement and connects Connect first contact layer and the second contact layer at both ends.At this point, can be by the test probe and the first contact layer of corresponding first power supply In the first contact portion for being located in contact zone be electrically connected, and will be in the test probe and the second contact layer of corresponding second source The second contact portion in contact zone is electrically connected, so as to detect to the capacity measurement device.

It further include forming one mutually after forming first contact layer and second contact layer in optional scheme Even over the substrate, the interconnection layer covers on the capacity measurement chain layer.It specifically refers to described in embodiment one, it is described mutual Even layer can be used interconnection process and be formed, to form the first interconnection structure and the second interconnection structure in the interconnection layer, described the The bottom of one interconnection structure is connected to first contact layer, extends to the interconnection layer at the top of first interconnection structure Top surface, the bottom of second interconnection structure are connected to second contact layer, and the top of second interconnection structure extends To the top surface of the interconnection layer.

Further, a protective layer can also be formed on the interconnection layer, with to be formed by capacity measurement device into Row protection, and the second testing cushion in the first testing cushion and the second interconnection structure in first interconnection structure is from described It exposes in protective layer, is surveyed in favor of probe in the detection of subsequent execution capacitance parameter, can be enable to touch described first Examination pad and the second testing cushion.

Embodiment five

Difference with example IV is, in capacity measurement chain formed in the present embodiment, equivalent capacity unit Quantity is odd number, therefore second contact layer is formed in the lower section of the lower electrode of the n-th test cell of capacity measurement chain.

Fig. 8 is the flow diagram of the forming method of the capacity measurement unit in the utility model embodiment five, such as Fig. 8 institute Show, the forming method of the capacity measurement device includes:

Step S210 provides a substrate, and the substrate has N number of cellular zone for being used to form equivalent capacity unit, and N is big In 1 odd number；

Further, definition has a device region and a contact zone on the substrate, and N number of cellular zone is respectively positioned on the device In part area.

Step S220 forms the second contact layer on the substrate of n-th cellular zone；Wherein, second contact layer part It is formed in the device region and further extends in the contact zone；

Step S230 sequentially forms lower electrode and top electrode in the cellular zone of the substrate, the top electrode packet The lower electrode is covered, and an equivalent capacitor cell is formed in each cellular zone by the lower electrode and the top electrode, Multiple equivalent capacity units in multiple cellular zones are connected in series to constitute a capacity measurement chain；

Wherein, the lower electrode of the n-th equivalent capacity unit in n-th unit is formed in second contact layer On, and be electrically connected with second contact layer；Specifically, the lower electrode of n-th equivalent capacity unit is formed in the second contact Layer is located on the part in device region；

Step S240 forms the first contact layer and powers on described in the 1st equivalent capacity unit of the capacity measurement chain On extremely.First contact layer also may partly form in device region and extend in contact zone.

It is similar with example IV, it is formed by the capacity measurement chain of series connection, from the 1st equivalent capacity unit It rises, the lower electrode of adjacent equivalent capacity unit is connected with each other two-by-two, and the electricity that one first conductive layer realizes lower electrode can be used Property connection.At this point, first conductive layer and second contact layer can use same bottom conductive material layer, and by same One processing step is formed.

Specifically, the forming method of first conductive layer and second contact layer includes: firstly, forming bottom conduction Over the substrate, the bottom conductive material layer extends over the substrate of N number of cellular zone to material layer；Then, institute is truncated The part stated bottom conductive material layer, and be located at the bottom conductive material layer in adjacent two cellular zones two-by-two constitutes the One conductive layer, and the part being located in the n-th cellular zone in the bottom conductive material layer is made to constitute second contact Layer.To, when forming the lower electrode, can make described in the lower electrodes of adjacent two equivalent capacity units two-by-two be formed in together On one first conductive layer, and it is electrically connected with same first conductive layer.

The forming method of capacity measurement device in the present embodiment further include: form an interconnection layer over the substrate, institute It states interconnection layer and covers the capacity measurement chain, the first contact layer and the second contact layer.

Wherein, the first interconnection structure and the second interconnection structure are formed in the interconnection layer, first interconnection structure can It is connected to part that first contact layer is located in device region and the second interconnection structure can be connected to second contact layer The part in contact zone is extended to, so to draw the capacity measurement using first interconnection structure and the second interconnection structure The both ends of chain.

In conclusion utilizing the equivalent capacity list of multiple series connections in capacity measurement device provided by the utility model Member constitutes a capacity measurement chain, so as to by detecting to the capacity measurement chain, to judge corresponding capacitor element Preparation process with the presence or absence of abnormal, and thus reflect the performance for being formed by capacitor element.As it can be seen that the utility model provides Capacity measurement device in, the preparation process of capacitor element more can be accurately monitored based on multiple equivalent capacity units, and Can be more accurate reflect the performance for having functional electric container piece as closeness is ever-increasing.

Further, for the capacity measurement chain with even number equivalent capacity unit, at this time the first contact layer and Second contact layer is formed in the top electrode of equivalent capacity unit, therefore completes the preparation process of equivalent capacity unit simultaneously Formed after the first contact layer and the second contact layer, it can directly to be formed by capacity measurement chain detected (it is specific and Speech, test probe at this time can be contacted directly with the first contact layer and the second contact layer exposed, be detected with executing Journey), so as to timely learn the performance for being formed by equivalent capacity unit, and further obtain in equivalent capacity unit The performance of capacity cell.In this way, the influence of the interconnection process of back segment can be got rid of, more accurately detects out and be formed by electricity Hold the capacitance parameter of capacity cell in test chain.

It certainly, still can be again to the capacitor in the capacity measurement device in the completed after the interconnection process of section Test chain is detected, and can learn the performance of capacity cell in the equivalent capacity unit being ultimately formed at this time, and can Further infer that out the interconnection process of back segment with the presence or absence of abnormal.

Each embodiment in this specification is described in a progressive manner, the highlights of each of the examples are with other The difference of embodiment, the same or similar parts in each embodiment may refer to each other.

Foregoing description is only the description to the utility model preferred embodiment, not to any limit of the scope of the utility model Fixed, any change, the modification that the those of ordinary skill in the utility model field does according to the disclosure above content belong to right and want Seek the protection scope of book.

Claims

1. a kind of capacity measurement device characterized by comprising

One capacity measurement chain, the capacity measurement chain include the equivalent capacity unit of N number of series connection, and N is just whole greater than 1 Number, the equivalent capacity unit have lower electrode and coat the top electrode of the lower electrode；

One first contact layer is formed in the top electrode of the 1st equivalent capacity unit of the capacity measurement chain, and with institute The top electrode for stating the 1st equivalent capacity unit is electrically connected；And

One second contact layer, when the quantity of the equivalent capacity unit in the capacity measurement chain is even number, described second Contact layer is formed in the top electrode of n-th equivalent capacity unit, and with the n-th equivalent capacity unit it is described on Electrode is electrically connected；When the quantity of the equivalent capacity unit in the capacity measurement chain is odd number, second contact Layer is formed in the lower section of the lower electrode of the n-th equivalent capacity unit, and the institute with the n-th equivalent capacity unit Lower electrode is stated to be electrically connected.

2. capacity measurement device as described in claim 1, which is characterized in that when the equivalent electricity in the capacity measurement chain When holding the quantity of unit and being equal to 2, the lower electrode of the 1st equivalent capacity unit and the lower electrode of the 2nd equivalent capacity unit are mutual It is electrically connected, the top electrode of the 2nd equivalent capacity unit is connected to second contact layer, so that described 1st equivalent Capacitor cell and the 2nd equivalent capacity unit are connected in series；And

When the quantity of the equivalent capacity unit in the capacity measurement chain is greater than 2, by the 1st equivalent capacity unit Rise, two-by-two two adjacent equivalent capacity units lower electrode be electrically connected, and by the 2nd equivalent capacity unit, The top electrode of two adjacent equivalent capacity units is electrically connected two-by-two, so that N number of equivalent capacity unit is connected in series.

3. capacity measurement device as claimed in claim 2, which is characterized in that further include at least one first conductive layer and isolation Layer, the separation layer cover first conductive layer, and the lower electrode of the equivalent capacity unit runs through the separation layer simultaneously It is formed on first conductive layer, to be electrically connected with first conductive layer, and the lower electrode is electrically connected with each other The adjacent equivalent capacity unit in, the lower electrode is formed on same first conductive layer, to pass through described the One conductive layer is electrically connected with each other.

4. capacity measurement device as claimed in claim 3, which is characterized in that the equivalent capacity list in the capacity measurement chain The quantity of member is odd number, and the lower electrode of the n-th equivalent capacity unit is through the separation layer and is formed in described the On two contact layers, and second contact layer and first conductive layer are located in same structure layer.

5. capacity measurement device as claimed in claim 2, which is characterized in that further include:

Second conductive layer is formed in the top electrode of the equivalent capacity unit, and is electrically connected with the top electrode, and And in the adjacent equivalent capacity unit that is electrically connected with each other of the top electrode, the top electrode is connected to same described Two conductive layers, to be electrically connected with each other by second conductive layer.

6. capacity measurement device as claimed in claim 5, which is characterized in that the equivalent capacity in the capacity measurement chain When the quantity of unit is even number, first contact layer, second contact layer and second conductive layer are located at same structure In layer；When the quantity of the equivalent capacity unit in the capacity measurement chain is odd number, first contact layer and described Second conductive layer is located in same structure layer.

7. capacity measurement device as described in claim 1, which is characterized in that the capacity measurement device has device region and contact The equivalent capacity unit in area, the capacity measurement chain is formed in the device region, and first contact layer is formed in institute In the top electrode for stating the 1st equivalent capacity unit, and the contact zone is extended to by the device region；Wherein,

When the quantity of the equivalent capacity unit in the capacity measurement chain is even number, second contact layer is formed in institute In the top electrode for stating n-th equivalent capacity unit, and the contact zone is extended to by the device region；

When the quantity of the equivalent capacity unit in the capacity measurement chain is odd number, second contact layer is formed in institute The lower section of the lower electrode of n-th equivalent capacity unit is stated, and the contact zone is extended to by the device region.

8. capacity measurement device as claimed in claim 7, which is characterized in that the lower electrode of the equivalent capacity unit includes One tubular structure, the top electrode cover tube inner surface and the cylinder outer surface of the lower electrode, and first contact layer is formed in The top of the tubular structure of 1st equivalent capacity unit, and from the top of the tubular structure along the tubular structure Cylinder outer surface extend to the bottom of the tubular structure, to further extend in contact zone；Wherein,

When the quantity of the equivalent capacity unit in the capacity measurement chain is even number, second contact layer is formed in institute The top of the tubular structure of n-th equivalent capacity unit is stated, and from the top of the tubular structure along the tubular knot The cylinder outer surface of structure extends to the bottom of the tubular structure, to further extend in the contact zone；

When the quantity of the equivalent capacity unit in the capacity measurement chain is odd number, second contact layer is formed in institute The lower section of the tubular structure of n-th equivalent capacity unit is stated, and is extended in the contact zone.

9. capacity measurement device as described in claim 1, which is characterized in that be formed with multiple institutes in the equivalent capacity unit State lower electrode, the top electrode coats multiple lower electrodes so that each lower electrode with the corresponding top electrode A capacity cell is constituted, and multiple lower electrodes in the same equivalent capacity unit are electrically connected with each other, so that together Multiple capacity cells corresponding to multiple lower electrodes are connected in parallel in the one equivalent capacity unit.

10. capacity measurement device as described in any one of claims 1 to 9, which is characterized in that the capacity measurement device also wraps An interconnection layer is included, the interconnection layer covers the capacity measurement chain, first contact layer and second contact layer, and institute It states and is formed with the first interconnection structure and the second interconnection structure in interconnection layer, the bottom of first interconnection structure is connected to described One contact layer extends to the top surface of the interconnection layer, the bottom of second interconnection structure at the top of first interconnection structure Portion is connected to second contact layer, and the top surface of the interconnection layer is extended at the top of second interconnection structure.

11. capacity measurement device as claimed in claim 10, which is characterized in that the lower electrode of the equivalent capacity unit Including a tubular structure, the top electrode covers tube inner surface and the cylinder outer surface of the tubular structure, first contact layer It is formed in the top of the tubular structure of the 1st equivalent capacity unit, and from the top of the tubular structure along the cylinder The cylinder outer surface of shape structure extends to the bottom of the tubular structure, to further extend in contact zone；Wherein,

12. capacity measurement device as claimed in claim 11, which is characterized in that the bottom of first interconnection structure is connected to First contact layer is located at the first lead division above the tubular structure；Wherein,

When the quantity of the equivalent capacity unit in the capacity measurement chain is even number, the bottom of second interconnection structure It is connected to the second lead division that second contact layer is located above the tubular structure；

When the quantity of the equivalent capacity unit in the capacity measurement chain is odd number, the bottom of second interconnection structure It is connected to the part that second contact layer is located at the contact zone, the height of second interconnection structure is greater than described first mutually Link the height of structure.