CN208912734U - The device of exhaust pipe in a kind of cleaning single crystal growing furnace - Google Patents
The device of exhaust pipe in a kind of cleaning single crystal growing furnace Download PDFInfo
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- CN208912734U CN208912734U CN201821402807.8U CN201821402807U CN208912734U CN 208912734 U CN208912734 U CN 208912734U CN 201821402807 U CN201821402807 U CN 201821402807U CN 208912734 U CN208912734 U CN 208912734U
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- crystal growing
- growing furnace
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Abstract
The utility model provides a kind of device for clearing up exhaust pipe in single crystal growing furnace, including cleaning section, connector, power device and dust exhaust apparatus, and cleaning section is connect by connector with power device, and dust exhaust apparatus is matched with cleaning section.The utility model has the beneficial effects that making the apparatus structure of exhaust pipe in the cleaning single crystal growing furnace simple, detachable maintaining is convenient, and processing cost is low, and cleaning work is high-efficient, and easy to use, reduces labour cost, improves working efficiency.
Description
Technical field
The utility model belongs to monocrystalline production equipment technology, more particularly, to exhaust pipe in a kind of cleaning single crystal growing furnace
Device.
Background technique
Single crystal growth process includes tearing clear, melt open, steady temperature, seeding, expanding shoulder, turn shoulder, is isometrical, ending, blowing out work step.?
In single crystal growing furnace operational process, melted silicon high temperature can volatilize silicon steam, and the protective gas that single crystal growing furnace is passed through can be by silicon steam and its
Its impurity together, is discharged to outside furnace body through gas cylinder and exhaust pipe.Since gas cylinder is in furnace bottom, temperature is low, so these silicon steam
Vapour, which is cooled, can deposit to gas cylinder inner wall.These deposit hardness are big, and high temperature bonding has arrived gas cylinder inner wall, are difficult to clean up.
If cleaning is not clean when tearing clear open, volatile matter can block exhaust outlet after long-play, lead into brilliant difficulty.The prior art is logical
Cross and manually cleared up using tools such as scoops, inside gas cylinder can not thorough cleaning it is clean, again blow-on run when, wave
Hair object is easier to deposit inside the gas cylinder that do not clean out, and gas cylinder is generally graphite material or carbon carbon materials matter etc., hand
Gas cylinder easy to damage in work scale removal process.
Summary of the invention
In view of the above problems, problem to be solved in the utility model is to provide a kind of dress for clearing up exhaust pipe in single crystal growing furnace
It sets, is especially suitable for the cleaning of the gas cylinder in pulling of crystals, can be cleared up automatically, convenience and high-efficiency.
In order to solve the above technical problems, the technical solution adopted in the utility model is: exhaust pipe in a kind of cleaning single crystal growing furnace
Device, including cleaning section, connector, power device and dust exhaust apparatus, cleaning section connect by connector with power device, suction
Dirt device is matched with cleaning section.
Further, cleaning section includes cleaning device and cleaning support, and cleaning device is set in cleaning support, cleaning support
It is connect with connector.
Further, cleaning device is scouring pad or grinding wheel.
Further, power device is electric hand drill or motor.
Further, dust exhaust apparatus includes dust catcher, connecting pipe and suction inlet, and suction inlet passes through connecting pipe and dust suction
Device connection.
Further, connector is telescopic rod.
The utility model has the advantages and positive effects of:
1. due to the adoption of the above technical scheme, so that the apparatus structure of exhaust pipe is simple in the cleaning single crystal growing furnace, disassembly dimension
It repairs conveniently, processing cost is low, and cleaning work is high-efficient, and easy to use, reduces labour cost, improves working efficiency；
2. the device of exhaust pipe drives cleaning device to carry out spin-cleaning using power device in the cleaning single crystal growing furnace, so that
The cleaning inside of gas cylinder is simple and convenient, automatic to clear up volatile matter inside gas cylinder, and is waved using dust exhaust apparatus by what is cleaned up
It sends out object and draws collection, easy to use, work efficiency is high, and gas cylinder cleaning effect is good；
3. using this device carry out gas cylinder cleaning, avoid gas cylinder block or be vented it is unsmooth, reduce single crystal growing furnace because
Be vented it is unsmooth caused by brilliant difficult, improve single crystal growing furnace operation stability, improve the quality of monocrystalline, reduce gas cylinder
Damage.
Detailed description of the invention
Fig. 1 is the single crystal furnace structure schematic diagram of an embodiment of the utility model；
Fig. 2 is the structural schematic diagram of an embodiment of the utility model.
In figure:
1, gas cylinder 2, volatilization sediment 3, cleaning section
4, power device 5, dust catcher 6, suction inlet
Specific embodiment
The utility model is further described in the following with reference to the drawings and specific embodiments.
By Fig. 1 it is recognised that gas cylinder 1 is located at the bottom of single crystal growing furnace, argon gas enters heat preservation hot by the top of single crystal growing furnace
, and be discharged from gas cylinder 1 and exhaust pipe, so, during pulling of crystals, silicon steam, which is cooled, deposits to the interior of gas cylinder 1
On wall, hardness is big, high temperature bonding, and bonding securely, is not easily cleaned.Need a kind of will not only damage to gas cylinder 1 again can be fastly
The device of speed cleaning.
Fig. 2 shows the structural schematic diagrams of an embodiment of the utility model, and the structure of the present embodiment has been shown in particular, this
Embodiment is related to the device of exhaust pipe in a kind of cleaning single crystal growing furnace will lead for the cleaning of gas cylinder in single crystal growing furnace in single crystal growing furnace
The deposit of volatile matter inside inflator is cleared up, and the cleaning of gas cylinder is kept, and is avoided gas cylinder from blocking or be vented unsmooth, is mentioned
Single crystal growing furnace operation stability has been risen, the quality of monocrystalline is improved, has reduced the damage of gas cylinder.
Specifically, the above-mentioned device for clearing up exhaust pipe in single crystal growing furnace, including cleaning section 3, connector, 4 and of power device
Dust exhaust apparatus, cleaning section 3 are connect by connector with power device 4, and it is heavy to the volatile matter inside gas cylinder 1 that cleaning section 3 is used for
Product object 2 carries out cleaning cleaning, and power device 4 is used to provide power to cleaning section 3, cleaning section 3 is moved, convenient for cleaning
Portion 3 carries out action cleans, reduces labour cost, improves automation；Connector is for connecting cleaning section 3 and power device 4
It connects, so that being to be detachably connected between cleaning section 3 and power device 4, reduces the occupied space of the cleaning plant；Dust exhaust apparatus with
Cleaning section 3 matches, and the volatilization sediment 2 in the gas cylinder that dust exhaust apparatus cleans up cleaning section 3 carries out absorption collection, and
It is uniformly processed, reduces the pollution to environment, while staff will not be allowed to suck, ensure that the safety of staff.
Above-mentioned cleaning section 3 includes cleaning device and cleaning support, and cleaning device is fixedly mounted in cleaning support, is cleaned
Bracket plays the role of support, and convenient for the installation of cleaning device, cleaning device is for cleaning the inside of gas cylinder.At this
In embodiment, cleaning support is cylindrical structure, and the diameter of diameter and gas cylinder 1 is adapted, and the diameter of cleaning support is less than
The diameter of gas cylinder 1 enables cleaning support to carry cleaning device and enters inside gas cylinder 1, clear to carrying out inside gas cylinder 1
It is clean.The shape of cleaning support be also possible to it is coniform it is cylindric with it is coniform combine or hyperbola constitute
Shape, or other shapes, are selected according to actual needs, it is preferred that herein, the shape of cleaning support is cylinder
Shape is cleared up convenient for the inside to gas cylinder 1.
Cleaning device is used to, since gas cylinder 1 is graphite material or carbon carbon material, make to clearing up inside gas cylinder 1
It is easy to damage gas cylinder 1 with the cleaning device of hard structure, such as scoop, so, in the present embodiment, cleaning device
Preferably scouring pad, scouring pad type is more, including industrial scouring pad, civilian scouring pad, scouring pad containing sand, without sand scouring pad etc.
Product, product are widely used in decoration, metal sanding and polishing, daily washing, herein, select industrial scouring pad or contain sand
Scouring pad can grind 1 inner wall of gas cylinder, the volatilization sediment 2 deposited on 1 inner wall of gas cylinder is cleaned up, and
1 inner wall of gas cylinder is not caused to damage, it, can due to the characteristic that there is self-sharpening to grind for industrial scouring pad or scouring pad containing sand
When clear up the sediment 2 that volatilizees in gas cylinder 1, itself carries out grinding loss, can guarantee the grinding of itself always
Characteristic always can clear up the volatilization sediment 2 deposited on 1 inner wall of gas cylinder, until itself attrition is most,
In scale removal process, 1 inner wall of gas cylinder will not be caused to damage.
Scouring pad is mounted in cleaning support, is carried scouring pad by cleaning support and is cleared up gas cylinder 1, it is,
Scouring pad is wrapped in cleaning support, at this point, cleaning support is relatively large in diameter, convenient for scouring pad and waving on 1 inner wall of gas cylinder
Sediment contact is sent out, is cleared up；Scouring pad also can be made the cylindrical-shaped structure of spool, be mounted on clearly convenient for scouring pad
On clean bracket, 1 inner wall of gas cylinder is cleared up, at this point, the diameter of cleaning support and the diameter of the spool on scouring pad are mutually fitted
It answers, is mounted in cleaning support convenient for scouring pad.Scouring pad can also be other shapes, other mounting means are mounted on cleaning branch
On frame, selected according to actual needs.
Cleaning device is also possible to the small-sized grinding wheel of fine grit, can also be other grinding devices, according to actual needs into
Row selection.
Above-mentioned power device 4 is electric hand drill, and cleaning section 3 is mounted on the main shaft of electric hand drill by connector, is opened
Dynamic electric hand drill cleans 1 inner wall of gas cylinder so that cleaning section 3 is rotated as the main shaft of electric hand drill rotates,
It is, cleaning support is connect by connector with power device 4, so that cleaning device scouring pad is with electric hand drill main shaft
Rotation and rotate, 1 inner wall of gas cylinder is cleared up, by rotate scouring pad carry out cleaning volatilize sediment 2, cleaning it is equal
It is even, the place of omission will not be generated, cleaning efficiency is high, and cleaning effect is good.Power device 4 is also possible to hand-held micro-machine, also
It can be other rotating devices, selected according to actual needs.
Above-mentioned dust exhaust apparatus is used to draw the sediment 2 that volatilizees on 1 inner wall of gas cylinder collected and cleaned up, and prevents from clearing up
The volatilization sediment 2 fallen dances in the air everywhere, is sucked by staff, damages to body.Dust exhaust apparatus include dust catcher 5,
Connecting pipe and suction inlet 6, suction inlet 6 are connect by connecting pipe with dust catcher 5, and the volatile matter cleaned up, which deposits 2 objects, to be passed through
Suction inlet 6 and connecting pipe enter dust catcher 5, and then carry out absorption collection to the volatilization sediment 2 cleaned up.Here dust suction
Device 5 is industrial dust collector, is commercial product, is selected according to actual needs.Suction inlet 6 is that lower openings are big, and top is opened
The small horn-like structure of mouth, the small one end that is open are connect with connecting pipe, and lower openings are big, and the area of covering is big, being capable of big model
The volatilization sediment 2 cleaned up is collected in the absorption enclosed.Suction inlet 6 is set to clear by the dust exhaust apparatus when carrying out drawing collection
The top in clean portion 3, the volatilization sediment 2 on 1 inner wall of gas cylinder that cleaning section 3 is cleaned up convenient for suction inlet 6.
Above-mentioned connector is connecting rod, and the connecting rod is telescopic rod, is able to carry out flexible, further extends cleaning
The cleaning stroke in portion 3 is equipped with screw thread at the both ends of connecting rod, connect respectively with cleaning support and electric hand drill convenient for connecting rod.
Connecting rod can also be connect with cleaning support and electric hand drill respectively by clamping, be also possible to other connection types, according to reality
Border demand is selected.
The course of work of the present embodiment: the device of exhaust pipe is in use, when single crystal growing furnace tears clear open in the cleaning single crystal growing furnace
Gas cylinder 1 is cleared up, cleaning device is mounted in cleaning support, cleaning support is passed through into connector and power device 4
Connection, and suction inlet 6 is connect by connecting pipe with dust catcher 5, when carrying out the cleaning of gas cylinder 1, cleaning device is placed
At suction inlet 6, the gas cylinder 1 to get off clearly will be torn open and be placed at suction inlet 6, start power device 4, so that cleaning device carries out
Gas cylinder 1 is cleared up in rotation, during cleaning, is opened dust catcher 5, is carried out to the volatilization sediment 2 cleaned up
It draws and collects.
Using the device of exhaust pipe in above-mentioned cleaning single crystal growing furnace, the volatile matter on the gas cylinder inner wall in single crystal growing furnace is deposited
Object is cleared up, and monocrystalline crystal forming rate 2% is able to ascend, and is improved the graphite gas cylinder service life 10%, is improved the quality of monocrystalline silicon,
Carbon content reduces 5%, improves monocrystalline production capacity 2%, improves the minority carrier life time 2% of monocrystalline.
The utility model has the advantages and positive effects of: due to the adoption of the above technical scheme, so that the cleaning monocrystalline
The apparatus structure of exhaust pipe is simple in furnace, and detachable maintaining is convenient, and processing cost is low, and cleaning work is high-efficient, and easy to use, drop
Low labour cost improves working efficiency；In the cleaning single crystal growing furnace device of exhaust pipe using power device drive cleaning device into
Row spin-cleaning, so that the cleaning inside of gas cylinder is simple and convenient, it is automatic to clear up volatile matter inside gas cylinder, and filled using dust suction
It sets to draw the volatile matter cleaned up and collect, easy to use, work efficiency is high, and gas cylinder cleaning effect is good；Using this device into
The cleaning of row gas cylinder, avoid gas cylinder block or be vented it is unsmooth, reduce single crystal growing furnace because be vented it is unsmooth caused by brilliant difficult,
Single crystal growing furnace operation stability is improved, the quality of monocrystalline is improved, reduces the damage of gas cylinder.
One embodiment of the utility model is described in detail above, but the content is only the utility model
Preferred embodiment should not be considered as limiting the scope of the present invention.It is all to be made according to application scope of the utility model
All the changes and improvements etc., should still belong within the patent covering scope of the utility model.
Claims (6)
1. the device of exhaust pipe in a kind of cleaning single crystal growing furnace, it is characterised in that: including cleaning section, connector, power device and suction
Dirt device, the cleaning section are connect by the connector with the power device, the dust exhaust apparatus and the cleaning section phase
Cooperation.
2. the device of exhaust pipe in cleaning single crystal growing furnace according to claim 1, it is characterised in that: the cleaning section includes clear
Clean device and cleaning support, the cleaning device are set in the cleaning support, and the cleaning support is connect with the connector.
3. the device of exhaust pipe in cleaning single crystal growing furnace according to claim 2, it is characterised in that: the cleaning device is hundred
Clean cloth or grinding wheel.
4. the device of exhaust pipe in cleaning single crystal growing furnace according to claim 1-3, it is characterised in that: the power
Device is electric hand drill or motor.
5. the device of exhaust pipe in cleaning single crystal growing furnace according to claim 4, it is characterised in that: the dust exhaust apparatus includes
Dust catcher, connecting pipe and suction inlet, the suction inlet are connect by the connecting pipe with the dust catcher.
6. the device of exhaust pipe in cleaning single crystal growing furnace according to claim 5, it is characterised in that: the connector is flexible
Bar.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821402807.8U CN208912734U (en) | 2018-08-29 | 2018-08-29 | The device of exhaust pipe in a kind of cleaning single crystal growing furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821402807.8U CN208912734U (en) | 2018-08-29 | 2018-08-29 | The device of exhaust pipe in a kind of cleaning single crystal growing furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208912734U true CN208912734U (en) | 2019-05-31 |
Family
ID=66704440
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821402807.8U Active CN208912734U (en) | 2018-08-29 | 2018-08-29 | The device of exhaust pipe in a kind of cleaning single crystal growing furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208912734U (en) |
-
2018
- 2018-08-29 CN CN201821402807.8U patent/CN208912734U/en active Active
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