CN208872656U - A kind of sonde-type porous silicon optical gas sensor - Google Patents

A kind of sonde-type porous silicon optical gas sensor Download PDF

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Publication number
CN208872656U
CN208872656U CN201821595522.0U CN201821595522U CN208872656U CN 208872656 U CN208872656 U CN 208872656U CN 201821595522 U CN201821595522 U CN 201821595522U CN 208872656 U CN208872656 U CN 208872656U
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China
Prior art keywords
bonding pad
sonde
porous silicon
gas
signal bonding
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Expired - Fee Related
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CN201821595522.0U
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Chinese (zh)
Inventor
王子聪
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Individual
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Individual
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Priority to CN201821595522.0U priority Critical patent/CN208872656U/en
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Abstract

The utility model discloses a kind of sonde-type porous silicon optical gas sensors, including signal bonding pad, one end of the signal bonding pad is fixedly installed with chuck, the leading exterior surface of the chuck is equipped with clip, the inside of the clip is equipped with gasket, and gasket is set to the side of chuck, the side of the clip is equipped with hex bolts, the lower end outer surface of the signal bonding pad is equipped with gas conduction area, the lower section in the gas conduction area is equipped with lower cover, the leading exterior surface of the lower cover is equipped with screw thread, and the inside of the signal bonding pad is equipped with laser aligner.A kind of sonde-type porous silicon optical gas sensor described in the utility model, signal bonding pad can be made to be easily installed by being equipped with clip and chuck cooperation, it is conveniently replaceable different sensing substrates, realize different sensing capabilities, the service life and reliability that improve signal bonding pad may insure the stability of measurement result, bring better prospect of the application.

Description

A kind of sonde-type porous silicon optical gas sensor
Technical field
The utility model relates to sensor field, in particular to a kind of sonde-type porous silicon optical gas sensor.
Background technique
Gas sensor is a kind of converter that certain gas volume fraction is converted to corresponding electric signal;The prior art makes With flow cell, senses substrate and be placed in gas flow cell.If gas flow cell and fiber distance change, transducing signal will Change.This design needs in measurement while fixing optical fiber and gas flow cell, makes troubles to practical application.Meanwhile The replacement process for sensing substrate is relatively complicated, certain adverse effect is brought to actual use, for this purpose, it is proposed that a kind of spy Hair style porous silicon optical gas sensor.
Utility model content
The main purpose of the utility model is to provide a kind of sonde-type porous silicon optical gas sensors, can effectively solve Certainly the problems in background technique.
The utility model is implemented by following technical solution: a kind of sonde-type porous silicon optical gas sensor, including signal Bonding pad, one end of the signal bonding pad are fixedly installed with chuck, and the leading exterior surface of the chuck is equipped with clip, the card The inside of hoop is equipped with gasket, and gasket is set to the side of chuck, and the side of the clip is fixedly installed with hex bolts, described The lower end outer surface of signal bonding pad is equipped with gas conduction area, and the lower section in the gas conduction area is equipped with lower cover, the lower cover Leading exterior surface is equipped with screw thread, and the inside of the signal bonding pad is equipped with laser aligner, and the inside of the signal bonding pad is remote Side from laser aligner is equipped with photodetector, and the top of the laser aligner is fixed close to the lower section of photodetector Sheet glass is installed, the lower end outer surface of the sheet glass is equipped with O-ring seal, and the one end in the gas conduction area is fixedly mounted There is sensor chip.
Preferably, the upper end outer surface of the signal bonding pad is equipped with air plug, the laser aligner and sensor chip Input port with the output port of air plug be electrically connected.
Preferably, the side of the air plug is equipped with flange, and the inside of the flange is equipped with groove, outside the side of the flange Surface is fixedly connected by groove with a side external surface of air plug.
Preferably, the side of the photodetector is equipped with collimator fixator, the side appearance of the photodetector Face is fixedly connected by collimator fixator with the inner wall of signal bonding pad.
Preferably, one end of the laser aligner is equipped with receiver fixator, the side appearance of the laser aligner Face is fixedly connected by receiver fixator with the inner wall in gas conduction area.
Preferably, the leading exterior surface in the gas conduction area is equipped with terminal pad, and the leading exterior surface of the terminal pad is set There is gas-tpe fitting, is fixedly connected between the gas-tpe fitting and terminal pad, the gas conduction area designs for cylindrical, hollow.
The advantages of the utility model: the sonde-type porous silicon optical gas sensor is cooperated by being equipped with clip and chuck What be can be convenient is fixed on fibre-optical probe, by the way that fibre-optical probe to be connect with chuck, and by the way that two halves clip is buckled in optical fiber Fixation can be completed by being inserted into hex bolts on chuck in probe, more convenient, by passing lower cover by screw thread and gas It leads area to be attached, can facilitate and lower cover is dismantled, and then the sensing substrate that the replacement that can be convenient is different, realize different Sensing capabilities, do not contacted under test gas by installing gasket in all parts junction with sealing means such as O-ring seals, Can make signal bonding pad that can use under the complex working conditions such as corrosive conditions, improve signal bonding pad service life and can It may insure the stability of measurement result, entire sonde-type porous silicon optical gas sensor, easy for installation, the effect used by property Fruit is more preferable relative to traditional approach.
Detailed description of the invention:
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only It is some embodiments of the utility model, for those of ordinary skill in the art, in the premise not made the creative labor Under, it is also possible to obtain other drawings based on these drawings.
Fig. 1 is a kind of overall structure diagram of sonde-type porous silicon optical gas sensor of the utility model;
Fig. 2 is a kind of partial view of sonde-type porous silicon optical gas sensor of the utility model;
Fig. 3 is a kind of enlarged drawing of the A of sonde-type porous silicon optical gas sensor of the utility model;
Fig. 4 is a kind of front cross-sectional view of sonde-type porous silicon optical gas sensor of the utility model.
In figure: 1, signal bonding pad;2, gas conduction area;3, terminal pad;4, gas-tpe fitting;5, laser aligner;6, it passes Sensor chip;7, lower cover;8, clip;9, hex bolts;10, flange;11, air plug;12, chuck;13, gasket;14, photodetection Device;15, sheet glass;16, O-ring seal;17, screw thread.
Specific embodiment:
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without creative efforts Every other embodiment obtained, fall within the protection scope of the utility model.
As shown in Figs 1-4, a kind of sonde-type porous silicon optical gas sensor, including signal bonding pad 1, signal bonding pad 1 one end is fixedly installed with chuck 12, and the leading exterior surface of chuck 12 is equipped with clip 8, and the inside of clip 8 is equipped with gasket 13, and Gasket 13 is set to the side of chuck 12, and the side of clip 8 is fixedly installed with hex bolts 9, the lower end appearance of signal bonding pad 1 Face is equipped with gas conduction area 2, and the lower section in gas conduction area 2 is equipped with lower cover 7, and the leading exterior surface of lower cover 7 is equipped with screw thread 17, signal The inside of bonding pad 1 is equipped with laser aligner 5, and the inside of signal bonding pad 1 is visited far from the side of laser aligner 5 equipped with photoelectricity Survey device 14, the top of laser aligner 5 is fixedly installed with sheet glass 15 close to the lower section of photodetector 14, under sheet glass 15 Outer surface is held to be equipped with O-ring seal 16, the one end in gas conduction area 2 is fixedly installed with sensor chip 6.
The upper end outer surface of signal bonding pad 1 is equipped with air plug 11, and air plug 11 plays the role of transmission of monitoring signal, laser quasi The input port of straight device 5 and sensor chip 6 is electrically connected with the output port of air plug 11;The side of air plug 11 is equipped with flange 10, flange 10 plays fixed function, and the inside of flange 10 is equipped with groove, and a side external surface of flange 10 passes through groove and air plug 11 A side external surface be fixedly connected;The side of photodetector 14 is equipped with collimator fixator, and collimator fixator plays fixation The effect of photodetector 14, a side external surface of photodetector 14 are interior by collimator fixator and signal bonding pad 1 Wall is fixedly connected;One end of laser aligner 5 is equipped with receiver fixator, and receiver fixator plays fixed laser collimator 5 Effect, a side external surface of laser aligner 5 is fixedly connected by receiver fixator with the inner wall in gas conduction area 2;Gas The leading exterior surface of body conducting region 2 is equipped with terminal pad 3, and terminal pad 3 plays the role of connecting gas-tpe fitting 4, the front end of terminal pad 3 Outer surface is equipped with gas-tpe fitting 4, is fixedly connected between gas-tpe fitting 4 and terminal pad 3, and gas conduction area 2 is cylindrical, hollow Design.
It should be noted that the utility model is that a kind of sonde-type porous silicon optical gas sensor passes through when in use Fibre-optical probe is connect with chuck 12, and by the way that two halves clip 8 to be buckled on fibre-optical probe and chuck 12, by being inserted into hexagonal spiral shell Fixation can be completed in bolt 9, can be connect under test gas by gas-tpe fitting 4, can also can make gas by removing terminal pad 3 Body conducting region 2 is directly exposed under test gas, and incident laser can be carried out to collimation processing by photodetector 14 and passed Enter 2 inside of gas conduction area, monitoring signals are spread out of on the inside of gas conduction area 2 by air plug 11, pass through 5 energy of laser aligner Enough to convert electric signal for the optical signal after absorption, sensor chip 6 plays the work of the other parameters for measuring environment to be measured With collimator fixator capable of being compressed by flange 10, collimator fixator plays the role of fixed photodetector 14, glass Glass piece 15 plays the role of preventing measurement gaseous contamination probe, and gasket 13 and O-ring seal 16 play jointly and increase leakproofness Effect, it is more practical.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this Within the spirit and principle of utility model, any modification, equivalent replacement, improvement and so on should be included in the utility model Protection scope within.

Claims (6)

1. a kind of sonde-type porous silicon optical gas sensor, including signal bonding pad (1), it is characterised in that: the signal connects The one end for meeting area (1) is fixedly installed with chuck (12), and the leading exterior surface of the chuck (12) is equipped with clip (8), the clip (8) inside is equipped with gasket (13), and gasket (13) is set to the side of chuck (12), the fixed peace in the side of the clip (8) Equipped with hex bolts (9), the lower end outer surface of the signal bonding pad (1) is equipped with gas conduction area (2), the gas conduction area (2) lower section is equipped with lower cover (7), and the leading exterior surface of the lower cover (7) is equipped with screw thread (17), the signal bonding pad (1) Inside is equipped with laser aligner (5), and the inside of the signal bonding pad (1) is equipped with photoelectricity far from the side of laser aligner (5) The top of detector (14), the laser aligner (5) is fixedly installed with sheet glass below photodetector (14) (15), the lower end outer surface of the sheet glass (15) is equipped with O-ring seal (16), and one end of the gas conduction area (2) is fixed Sensor chip (6) are installed.
2. a kind of sonde-type porous silicon optical gas sensor according to claim 1, it is characterised in that: the signal connects The upper end outer surface for meeting area (1) is equipped with air plug (11), and the laser aligner (5) and the input port of sensor chip (6) are equal It is electrically connected with the output port of air plug (11).
3. a kind of sonde-type porous silicon optical gas sensor according to claim 2, it is characterised in that: the air plug (11) side is equipped with flange (10), and the inside of the flange (10) is equipped with groove, and a side external surface of the flange (10) is logical Groove is crossed to be fixedly connected with a side external surface of air plug (11).
4. a kind of sonde-type porous silicon optical gas sensor according to claim 1, it is characterised in that: the photoelectricity is visited The side for surveying device (14) is equipped with collimator fixator, and a side external surface of the photodetector (14) passes through collimator fixator It is fixedly connected with the inner wall of signal bonding pad (1).
5. a kind of sonde-type porous silicon optical gas sensor according to claim 1, it is characterised in that: the laser quasi One end of straight device (5) is equipped with receiver fixator, a side external surface of the laser aligner (5) by receiver fixator with The inner wall in gas conduction area (2) is fixedly connected.
6. a kind of sonde-type porous silicon optical gas sensor according to claim 1, it is characterised in that: the gas passes The leading exterior surface for leading area (2) is equipped with terminal pad (3), and the leading exterior surface of the terminal pad (3) is equipped with gas-tpe fitting (4), institute It states to be fixedly connected between gas-tpe fitting (4) and terminal pad (3), the gas conduction area (2) is designed for cylindrical, hollow.
CN201821595522.0U 2018-09-28 2018-09-28 A kind of sonde-type porous silicon optical gas sensor Expired - Fee Related CN208872656U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201821595522.0U CN208872656U (en) 2018-09-28 2018-09-28 A kind of sonde-type porous silicon optical gas sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201821595522.0U CN208872656U (en) 2018-09-28 2018-09-28 A kind of sonde-type porous silicon optical gas sensor

Publications (1)

Publication Number Publication Date
CN208872656U true CN208872656U (en) 2019-05-17

Family

ID=66469163

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201821595522.0U Expired - Fee Related CN208872656U (en) 2018-09-28 2018-09-28 A kind of sonde-type porous silicon optical gas sensor

Country Status (1)

Country Link
CN (1) CN208872656U (en)

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CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20190517

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