CN208865560U - A kind of preparation facilities of copper titanium corrosive liquid - Google Patents
A kind of preparation facilities of copper titanium corrosive liquid Download PDFInfo
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- CN208865560U CN208865560U CN201821067950.6U CN201821067950U CN208865560U CN 208865560 U CN208865560 U CN 208865560U CN 201821067950 U CN201821067950 U CN 201821067950U CN 208865560 U CN208865560 U CN 208865560U
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- storage tank
- water storage
- tank
- dioxygen water
- inlet pipe
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Abstract
The utility model discloses a kind of preparation facilities of copper titanium corrosive liquid, including sequentially connected dioxygen water storage tank, blending tank, regulating valve, filter device and finished pot, deionized water storage tank is also connected on the blending tank, liquid-adding device is additionally provided on the dioxygen water storage tank, the liquid-adding device includes the siphon catheter for conveying hydrogen peroxide into blending tank, for conveying the air inlet pipe of gas into dioxygen water storage tank and being used for siphon catheter, air inlet pipe is separately fixed at the bindiny mechanism on dioxygen water storage tank, the bindiny mechanism is mounted on dioxygen water storage tank, feed inlet is additionally provided on the mixing tank skin.The utility model is passed through gas into dioxygen water storage tank by air inlet pipe, flow into hydrogen peroxide in blending tank by siphon catheter, effectively prevent liquid spillage, it also can avoid hydrogen peroxide to contact with air, reduce pollution, operator's workload is reduced, operator's safety coefficient is improved, so that realizing reduces production cost.
Description
Technical field
The utility model relates to electronic chemical product production equipment technologies, and in particular to a kind of preparation of copper titanium corrosive liquid
Device, the lug manufacturing process for semicon industry.
Background technique
In recent years, while people are continuously increased the demand of semiconductor device, liquid crystal display, for these devices
The requirement of the microminiaturization, high performance of possessed wiring, electrode etc. is also increasingly stringenter, and the effect etched can directly result in
The quality of circuit board manufacturing process influences the precision and quality of high density thin wire image.
Currently, the main component of semicon industry lug manufacturing process copper titanium corrosive liquid includes potassium hydroxide, hydrogen peroxide, complexing
Agent, surfactant and water, and the hydrogen peroxide of high concentration has strong oxidizing property and certain corrosivity, while dioxygen water storage tank one
As it is more bulky and hulking, if be added in blending tank using the method directly toppled over, might have a large amount of hydrogen peroxide and splash and mix
Outside tank, the loss of raw material is caused, while there is also the security risks for endangering equipment and operator for the liquid splashed out.
Utility model content
The purpose of this utility model is that overcome defect existing in the prior art, it is high-efficient to provide a kind of liquid feeding, can have
Effect avoids waste when liquid feeding, improves safety coefficient when operating personnel's liquid feeding, reduces working strength when operating personnel's liquid feeding
Semicon industry lug manufacturing process copper titanium corrosive liquid preparation facilities.
To achieve the above object, the technical solution of the utility model is to design a kind of preparation facilities of copper titanium corrosive liquid, packet
Sequentially connected dioxygen water storage tank, blending tank, regulating valve, filter device and finished pot are included, is also connected on the blending tank
Deionized water tank is additionally provided with liquid-adding device on the dioxygen water storage tank, and the liquid-adding device includes for conveying into blending tank
The siphon catheter of hydrogen peroxide, for conveying the air inlet pipe of gas into dioxygen water storage tank and being used for siphon catheter, air inlet
Pipe is separately fixed at the bindiny mechanism on dioxygen water storage tank, and the bindiny mechanism is mounted on dioxygen water storage tank, the mixing
Feed inlet is additionally provided on tank skin.
Preferred technical solution is that the siphon catheter is inverted U, is made of corrosion resistant rigid material comprising
Connecting the first transverse arm of the first trailing arm and the second trailing arm, the first trailing arm inserting is fixed in the bindiny mechanism, and described the
The lower end of two trailing arms is fixedly connected with the feed inlet of blending tank by pipeline.Siphon catheter made of rigid material can be stablized
Ground is fixed on dioxygen water storage tank, is not easy activity, ensure that the smooth flow of liquid.
Preferred technical solution is, the end into the air inlet pipe in dioxygen water storage tank be located at the liquid level of hydrogen peroxide with
On, the end of the first trailing arm of the siphon catheter is located at the bottom of dioxygen water storage tank.The end of air inlet pipe is located at hydrogen peroxide
Liquid level on, gas enters in the storage tank of sealing, with enter gas volume increase, force dioxygen water liquid to pass through drain
Pipe enters in blending tank.
Preferred technical solution is that the end of the air inlet pipe being located at outside dioxygen water storage tank is connected with gas storage tank,
Air inlet pipe between the air accumulator and dioxygen water storage tank is equipped with the gas flowmeter for controlling volumetric flow of gas.Air inlet
Pipe is equipped with gas flowmeter, and the liquid volume added of hydrogen peroxide can be accurately controlled according to the volume for being passed through gas, and the gas is pure
Net nitrogen or argon gas.
In order to be uniformly mixed mixed liquor, solid material dissolution is more abundant, and product impurity content is few, preferred technical solution
To be equipped with blender in the blending tank tank.
In order to improve the corrosion resistance of inner tank wall, further preferred technical solution is that the dioxygen water storage tank mixes
It closes tank and finished product top tank structure is polytetrafluoroethylene ethylene layer.
Advantages and beneficial effects of the utility model lie in that by the way that liquid-adding device is arranged on dioxygen water storage tank, by dress
The air inlet pipe set is passed through gas into dioxygen water storage tank, flows into the hydrogen peroxide in dioxygen water storage tank by siphon catheter mixed
It closes in tank, for being mixed with for copper titanium corrosive liquid, liquid when effectively preventing traditional liquid feeding is splashed out, and can also avoid double
Oxygen water is contacted with air, reduces pollution, is operated additionally by the control of the gas flowmeter in air inlet pipe, convenient for liquid volume added
Control reduces operator's workload, operator's safety coefficient, Improving The Quality of Products and yield is improved, to realize reduction
The effect of production cost.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the preparation facilities of the utility model copper titanium corrosive liquid；
In figure: 1, dioxygen water storage tank；2, blending tank；3, regulating valve；4, filter device；5, finished pot；6, deionized water is stored up
Tank；7, air inlet pipe；8, bindiny mechanism；9, siphon catheter；10, air accumulator；11, gas flowmeter；12, blender；13, it feeds
Mouthful.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiment of the present utility model is further described.Implement below
Example is only used for clearly illustrating the technical solution of the utility model, and cannot be used as a limitation the protection model of limitation the utility model
It encloses.
As shown in Figure 1, the utility model is a kind of preparation facilities of copper titanium corrosive liquid, including the storage of sequentially connected hydrogen peroxide
Tank 1, blending tank 2, regulating valve 3, filter device 4 and finished pot 5 are also connected with deionized water storage tank 6 on the blending tank, described
Liquid-adding device is additionally provided on dioxygen water storage tank 1, the liquid-adding device includes leading for conveying the siphon of hydrogen peroxide into blending tank
Liquid pipe 9, for conveying the air inlet pipe 7 of gas into dioxygen water storage tank and for fixing siphon catheter 9, air inlet pipe 7 respectively
Bindiny mechanism 8 on dioxygen water storage tank, the bindiny mechanism 8 are mounted on dioxygen water storage tank 1, on 2 wall of blending tank
It is additionally provided with feed inlet 13.
The end of the air inlet pipe 7 being located at outside dioxygen water storage tank 1 is connected with gas storage tank 10, the air accumulator 10 and
Air inlet pipe 7 between dioxygen water storage tank 1 is equipped with the gas flowmeter 11 for controlling volumetric flow of gas.
Blender 12 is equipped in the blending tank 2.
The preparation of the copper titanium corrosive liquid of the utility model, includes the following steps:
Step 1: first injecting deionized water in blending tank, then it is passed through and required dioxygen in formula into dioxygen water storage tank
Hydrogen peroxide is injected in blending tank and first stirs sulfuric acid and surfactant in the first blending tank by the equal gas of the volume of water
Mix it is uniformly mixed, after persulfate is weighed according to the proportion by feeding-passage be added the first blending tank in, be uniformly mixed；
Step 2: it is living that potassium hydroxide, complexing agent and surface after proportion weighing are added into blending tank by feed inlet again
Property agent, be stirred for uniformly；
It is filtered step 3: mixture in blending tank is passed through filter, obtains the copper titanium corrosive liquid finished product.
The above is only the preferred embodiment of the utility model, it is noted that for the common skill of the art
For art personnel, without deviating from the technical principle of the utility model, several improvements and modifications can also be made, these change
It also should be regarded as the protection scope of the utility model into retouching.
Claims (6)
1. a kind of preparation facilities of copper titanium corrosive liquid, including sequentially connected dioxygen water storage tank, blending tank, regulating valve, filtering dress
It sets and finished pot, is also connected with deionized water storage tank on the blending tank, which is characterized in that be additionally provided on the dioxygen water storage tank
Liquid-adding device, the liquid-adding device include the siphon catheter for conveying hydrogen peroxide into blending tank, for storing up to hydrogen peroxide
The air inlet pipe of conveying gas and the connection machine for being separately fixed at siphon catheter, air inlet pipe on dioxygen water storage tank in tank
Structure, the bindiny mechanism are mounted on dioxygen water storage tank, are additionally provided with feed inlet on the mixing tank skin.
2. the preparation facilities of copper titanium corrosive liquid according to claim 1, which is characterized in that the siphon catheter is U
Type is made of corrosion resistant rigid material comprising the first transverse arm of connection the first trailing arm and the second trailing arm, first trailing arm
Inserting is fixed in the bindiny mechanism, and the lower end of second trailing arm is fixedly connected with the feed inlet of blending tank by pipeline.
3. the preparation facilities of copper titanium corrosive liquid according to claim 2, which is characterized in that described to enter in dioxygen water storage tank
The end of air inlet pipe be located at the liquid level of hydrogen peroxide or more, the end of the first trailing arm of the siphon catheter is located at hydrogen peroxide storage
The bottom of tank.
4. the preparation facilities of copper titanium corrosive liquid according to claim 3, which is characterized in that the air inlet pipe is located at dioxygen
End outside water storage tank is connected with gas storage tank, and the air inlet pipe between the air accumulator and dioxygen water storage tank is equipped with for controlling
The gas flowmeter of volumetric flow of gas processed.
5. the preparation facilities of copper titanium corrosive liquid according to claim 4, which is characterized in that be equipped with and stir in the blending tank tank
Mix device.
6. the preparation facilities of any one copper titanium corrosive liquid described in -5 according to claim 1, which is characterized in that the hydrogen peroxide storage
Tank, blending tank and finished product top tank structure are polytetrafluoroethylene ethylene layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821067950.6U CN208865560U (en) | 2018-07-06 | 2018-07-06 | A kind of preparation facilities of copper titanium corrosive liquid |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821067950.6U CN208865560U (en) | 2018-07-06 | 2018-07-06 | A kind of preparation facilities of copper titanium corrosive liquid |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208865560U true CN208865560U (en) | 2019-05-17 |
Family
ID=66462779
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821067950.6U Active CN208865560U (en) | 2018-07-06 | 2018-07-06 | A kind of preparation facilities of copper titanium corrosive liquid |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208865560U (en) |
-
2018
- 2018-07-06 CN CN201821067950.6U patent/CN208865560U/en active Active
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