CN208859148U - A kind of glass tube seal structure for ultra-high vacuum system - Google Patents
A kind of glass tube seal structure for ultra-high vacuum system Download PDFInfo
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- CN208859148U CN208859148U CN201821410186.8U CN201821410186U CN208859148U CN 208859148 U CN208859148 U CN 208859148U CN 201821410186 U CN201821410186 U CN 201821410186U CN 208859148 U CN208859148 U CN 208859148U
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- flange
- bellmouth
- hole
- sealing flange
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Abstract
The application discloses a kind of glass tube seal structure for ultra-high vacuum system, and upper sealing flange and lower sealing flange include flange body in the form of annular discs；The first bellmouth and first through hole are offered at the center of the flange body of lower sealing flange, the upper surface of the flange body of lower sealing flange is connected with chime rings step；Indium silk sealing ring is placed in chime rings step；The second through-hole is offered at the center of the flange body of upper sealing flange, the lower end surface of the flange body of upper sealing flange is provided with the first hollow cylinder interconnecting piece, offers third through-hole and the second bellmouth at the first hollow cylinder interconnecting piece center；After upper sealing flange and lower sealing flange are attached by fastener, the first hollow cylinder interconnecting piece lower part is located in chime rings step, and the big nose end of the second bellmouth is connected with the big nose end of the first bellmouth.The application structure is simple, easy to use, and sealing effect is good, is particularly suitable in ultra-high vacuum system.
Description
Technical field
The utility model relates to sealing structures, in particular, being related to a kind of glass seal of tube for ultra-high vacuum system
Structure.
Background technique
For ultra-high vacuum system, (air pressure is lower than 10-6Pa), conventional seal with elastometic washer has been not suitable for because no matter which kind of
Seal with elastometic washer can all have gas permeation, and these gas permeations are unacceptable in ultra-high vacuum system.So generally
Ultra-high vacuum system is all to ensure that leak rate is sufficiently small using metal sealing method, to reach required pressure.
There are a large amount of glass devices, in general, the ultrahigh vacuum of glass and metal in conventional ultra-high vacuum system
Sealing generallys use the soldering processes of glass and metal, i.e., by kovar alloy transition, glass and metal flange are welded on one
It rises.Such as by flat glass and plane flange welding, an observation window is formed, or glass pipe and plane flange welding are existed
Together, a pipeline is formed.But in some special purposes, when glass can not be welded with metal, need glass
Sealing is directly crimped with metal flange, most common is glass planar and metal flat using indium silk as sealing material
Encapsulating method is crimped, and glass pipe side wall and metal flange are realized not yet using the method for indium silk crimping sealing.
Utility model content
The purpose of the utility model is to overcome the above deficiencies in the existing technologies, and provide a kind of structure design conjunction
Reason, the glass tube seal structure for ultra-high vacuum system of good seal performance.
The technical scheme in the invention for solving the above technical problem is: a kind of glass tube for ultra-high vacuum system
Sealing structure, it is characterised in that: including upper sealing flange, lower sealing flange and indium silk sealing ring；The upper sealing flange is under
Sealing flange includes flange body in the form of annular discs；The first cone is offered at the center of the flange body of the lower sealing flange
The upper surface of shape hole and first through hole, the flange body of lower sealing flange is connected with chime rings step；First bellmouth
Small bore end docked with first through hole, big nose end is docked with chime rings step；The indium silk sealing ring is placed on protrusion circle
In land rank；The second through-hole, the flange body of upper sealing flange are offered at the center of the flange body of the upper sealing flange
Lower end surface be provided with the first hollow cylinder interconnecting piece, the inner hole of the first hollow cylinder interconnecting piece is followed successively by third from top to bottom
Through-hole and the second bellmouth；Second through-hole is docked with third through-hole, and aperture is identical, the aperture of third through-hole and the second bellmouth
End docking；After the upper sealing flange and lower sealing flange are attached by fastener, the first hollow cylinder interconnecting piece lower part
In chime rings step, the big nose end of the second bellmouth is connected with the big nose end of the first bellmouth.
Preferably, the first bellmouth described in the utility model is identical as the taper of the second bellmouth.
Preferably, first through hole described in the utility model is identical as the aperture of the second through-hole.
Preferably, the internal diameter of chime rings step described in the utility model is outer slightly larger than the first hollow cylinder interconnecting piece
Diameter, difference are less than 10um.
Preferably, the lower end surface of lower sealing flange described in the utility model is provided with the second hollow cylinder interconnecting piece.
Preferably, the cross section of indium silk sealing ring described in the utility model is square or ellipse.
Preferably, fastener described in the utility model selects screw, quantity is no less than six, is uniformly distributed circumferentially,
Upper sealing flange and lower sealing flange are fastened.
In order to solve the above technical problems, the utility model also provides another technical solution: one kind is for ultra-high vacuum system
Glass tube seal structure encapsulating method, comprising the following steps:
Step 1: indium silk sealing ring is placed in chime rings step；
Step 2: it is logical that one end of glass tube sequentially passes through indium silk sealing ring, the first bellmouth of lower sealing flange and first
Hole；
Step 3: upper sealing flange is set in glass with the posture of the first hollow cylinder interconnecting piece towards lower sealing flange
Guan Shang；
Step 4: screwing fastener, and sealing flange and lower sealing flange is made to tighten together, until, the first open circles
Column interconnecting piece lower part is located in chime rings step, and the big nose end of the second bellmouth docks company with the big nose end of the first bellmouth
It connects, at this point, indium silk sealing ring extrusion, fills up the filling that the first bellmouth, the second bellmouth and glass pipe outer wall are formed
In region, sealing is completed.
The utility model compared with prior art, has the following advantages that and effect: structure is simple, easy to use, sealing effect
Fruit is good, is particularly suitable in ultra-high vacuum system.
Detailed description of the invention
Fig. 1 is the schematic cross-sectional view of upper sealing flange in the utility model embodiment.
Fig. 2 is the schematic cross-sectional view of lower sealing flange in the utility model embodiment.
Fig. 3 is the schematic view of the front view (cross section is rectangular indium silk sealing ring) of the utility model embodiment.
Fig. 4 be the utility model embodiment another schematic view of the front view (cross section be ellipse indium silk sealing
Ring).
Fig. 5 is the structural schematic diagram that upper sealing flange and lower sealing flange tighten together in the utility model embodiment.
Description of symbols: upper sealing flange 1, the second through-hole 1-1, the first hollow cylinder interconnecting piece 1-2, third through-hole 1-
3, the second bellmouth 1-4, lower sealing flange 2, the first bellmouth 2-1, first through hole 2-2, chime rings step 2-3, the second sky
Heart cylinder interconnecting piece 2-4, indium silk sealing ring 3, glass tube 4, fastener 5.
Specific embodiment
The utility model is described in further detail with reference to the accompanying drawing and by embodiment, and following embodiment is pair
The explanation of the utility model and the utility model is not limited to following embodiment.
Embodiment.
Referring to Fig. 1 to Fig. 3.
A kind of glass tube seal structure for ultra-high vacuum system of the present embodiment, including upper sealing flange 1, lower Sealing Method
Orchid 2 and indium silk sealing ring 3.Upper sealing flange 1 and lower sealing flange 2 include flange body in the form of annular discs.
The second through-hole 1-1, the flange body of upper sealing flange 1 are offered at the center of the flange body of upper sealing flange 1
Lower end surface be provided with the first hollow cylinder interconnecting piece 1-2, it is logical that third is offered at the center first hollow cylinder interconnecting piece 1-2
Hole 1-3 and the second bellmouth 1-4.Second through-hole 1-1 is docked with third through-hole 1-3, and aperture is identical, third through-hole 1-3 and
The small bore end of two bellmouth 1-4 is docked.
The first bellmouth 2-1 and first through hole 2-2, lower sealing are offered at the center of the flange body of lower sealing flange 2
The upper surface of the flange body of flange 2 is connected with chime rings step 2-3.The small bore end and first through hole of first bellmouth 2-1
2-2 docking, big nose end are docked with chime rings step 2-3.
Indium silk sealing ring 3 is placed in chime rings step 2-3.
After upper sealing flange 1 and lower sealing flange 2 are attached by fastener 5, under the first hollow cylinder interconnecting piece 1-2
Portion is located in chime rings step 2-3, and the big nose end of the second bellmouth 1-4 and the big nose end of the first bellmouth 2-1 are connected,
3 extrusion of indium silk sealing ring at this time fills up what the first bellmouth 2-1, the second bellmouth 1-4 were formed with 4 outer wall of glass tube
It fills in space, the setting of two bellmouths provides space to two sides extension to after 3 extrusion of indium silk sealing ring, guarantees
Sealing effect.
First bellmouth 2-1 is identical as the taper of the second bellmouth 1-4.Referring to fig. 2, the cross section of the first bellmouth 2-1
In cross-sectional view, the range of the angle a between left side inclined-plane and horizontal plane is 45 ° ~ 60 °.
First through hole 2-2 is identical as the aperture of the second through-hole 1-1, and the diameter with glass tube 4 matches.
The internal diameter of chime rings step 2-3 is slightly larger than the outer diameter of the first hollow cylinder interconnecting piece 1-2, and difference is less than
There is lesser aperture difference in 10um, facilitate and upper sealing flange 1 is fastened on lower sealing flange 2 between the two.
The lower end surface of lower sealing flange 2 is provided with the second hollow cylinder interconnecting piece 2-4, the second hollow cylinder interconnecting piece 2-
4 for connecting other component, is tightly connected glass tube 4 on the components to realize.
The cross section of indium silk sealing ring 3 is square or ellipse.Fastener 5 selects screw, and quantity is no less than six, specifically
Quantity is uniformly distributed circumferentially depending on flange size cases, and upper sealing flange 1 and lower sealing flange 2 are fastened.
In the present embodiment, the encapsulating method of the glass tube seal structure for ultra-high vacuum system, comprising the following steps:
Step 1: indium silk sealing ring 3 is placed in chime rings step 2-3；
Step 2: one end of glass tube 4 sequentially pass through indium silk sealing ring 3, lower sealing flange 2 the first bellmouth 2-1 and
First through hole 2-2；
Step 3: upper sealing flange 1 is arranged with the posture of the first hollow cylinder interconnecting piece 1-2 towards lower sealing flange 2
On glass tube 4；
Step 4: screwing fastener 5, according to direction is pushed in figure, is fastened on sealing flange 1 and lower sealing flange 2
Together, until, the first hollow cylinder lower part interconnecting piece 1-2 is located in chime rings step 2-3, the macropore of the second bellmouth 1-4
It holds and is connected with the big nose end of the first bellmouth 2-1, at this point, 3 extrusion of indium silk sealing ring, fills up the first bellmouth 2-
1, in the filling region that the second bellmouth 1-4 and 4 outer wall of glass tube are formed, sealing is completed.
In the present embodiment, for the dimensions of indium silk sealing ring depending on the size of glass tube, specific selection principle is logical
It crosses and analyzes and obtain using simulation software in the prior art, therefore, avoid due to the selection of the dimensions of indium silk sealing ring is improper
The case where racking glass tube.
In addition, it should be noted that, the specific embodiments described in this specification, the shape of parts and components are named
Title etc. can be different, and above content is only to the utility model structure example explanation described in this specification.
All equivalence changes or simple change done according to structure, feature and principle described in the concept of the patent of the utility model, are wrapped
It includes in the protection scope of the utility model patent.Those skilled in the art of the present invention can be to described
Specific embodiment does various modifications or additions or is substituted in a similar manner, without departing from the knot of the utility model
Structure or beyond the scope defined by this claim, all should belong to the protection range of the utility model.
Claims (7)
1. a kind of glass tube seal structure for ultra-high vacuum system, it is characterised in that: including upper sealing flange, lower Sealing Method
Blue and indium silk sealing ring；The upper sealing flange and lower sealing flange include flange body in the form of annular discs；The lower sealing
The first bellmouth and first through hole, the upper surface of the flange body of lower sealing flange are offered at the center of the flange body of flange
It is connected with chime rings step；The small bore end of first bellmouth is docked with first through hole, big nose end and chime rings platform
Rank docking；The indium silk sealing ring is placed in chime rings step；It is opened at the center of the flange body of the upper sealing flange
Equipped with the second through-hole, the lower end surface of the flange body of upper sealing flange is provided with the first hollow cylinder interconnecting piece, this is first hollow
The inner hole of cylinder interconnecting piece is followed successively by third through-hole and the second bellmouth from top to bottom；Second through-hole is docked with third through-hole, and
Aperture is identical, and third through-hole is docked with the small bore end of the second bellmouth；The upper sealing flange and lower sealing flange pass through fastening
After part is attached, the first hollow cylinder interconnecting piece lower part is located in chime rings step, the big nose end of the second bellmouth and
The big nose end of one bellmouth is connected.
2. the glass tube seal structure according to claim 1 for ultra-high vacuum system, it is characterised in that: described first
Bellmouth is identical as the taper of the second bellmouth.
3. the glass tube seal structure according to claim 1 for ultra-high vacuum system, it is characterised in that: described first
Through-hole is identical as the aperture of the second through-hole.
4. the glass tube seal structure according to claim 1 for ultra-high vacuum system, it is characterised in that: the protrusion
The internal diameter of annular steps is slightly larger than the outer diameter of the first hollow cylinder interconnecting piece, and difference is less than 10um.
5. the glass tube seal structure according to claim 1 for ultra-high vacuum system, it is characterised in that: close under described
The lower end surface of envelope flange is provided with the second hollow cylinder interconnecting piece.
6. the glass tube seal structure according to claim 1 for ultra-high vacuum system, it is characterised in that: the indium silk
The cross section of sealing ring is square or ellipse.
7. the glass tube seal structure according to claim 1 for ultra-high vacuum system, it is characterised in that: the fastening
Part selects screw, and quantity is no less than six, is uniformly distributed circumferentially, upper sealing flange and lower sealing flange are fastened.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821410186.8U CN208859148U (en) | 2018-08-30 | 2018-08-30 | A kind of glass tube seal structure for ultra-high vacuum system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821410186.8U CN208859148U (en) | 2018-08-30 | 2018-08-30 | A kind of glass tube seal structure for ultra-high vacuum system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208859148U true CN208859148U (en) | 2019-05-14 |
Family
ID=66416324
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821410186.8U Withdrawn - After Issue CN208859148U (en) | 2018-08-30 | 2018-08-30 | A kind of glass tube seal structure for ultra-high vacuum system |
Country Status (1)
| Country | Link |
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| CN (1) | CN208859148U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108869911A (en) * | 2018-08-30 | 2018-11-23 | 杭州赛威斯真空技术有限公司 | A kind of glass tube seal structure and encapsulating method for ultra-high vacuum system |
-
2018
- 2018-08-30 CN CN201821410186.8U patent/CN208859148U/en not_active Withdrawn - After Issue
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108869911A (en) * | 2018-08-30 | 2018-11-23 | 杭州赛威斯真空技术有限公司 | A kind of glass tube seal structure and encapsulating method for ultra-high vacuum system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200224 Address after: 310000 room 103, block a, building 2, No. 60, Jianghong South Road, Changhe street, Binjiang District, Hangzhou City, Zhejiang Province Patentee after: Hangzhou ruilaibo Technology Co.,Ltd. Address before: 310052 Building 2, Jiangnan Road, Binjiang District, Hangzhou, Zhejiang, 2 Patentee before: HANGZHOU SAIWEISI VACUUM TECHNOLOGY Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| AV01 | Patent right actively abandoned |
Granted publication date: 20190514 Effective date of abandoning: 20230801 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20190514 Effective date of abandoning: 20230801 |
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| AV01 | Patent right actively abandoned | ||
| AV01 | Patent right actively abandoned |