CN208815105U - Cavity temperature regulating device - Google Patents
Cavity temperature regulating device Download PDFInfo
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- CN208815105U CN208815105U CN201821085689.2U CN201821085689U CN208815105U CN 208815105 U CN208815105 U CN 208815105U CN 201821085689 U CN201821085689 U CN 201821085689U CN 208815105 U CN208815105 U CN 208815105U
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Abstract
The utility model discloses a kind of cavity temperature regulating devices, are used for PVD method vacuum coating characterized by comprising cavity；The bottom of the cavity is equipped with outlet；Temperature control loop is set to the inside of the cavity, and is led to outside the cavity by the outlet；Detection unit is set to the outside of the cavity；Control unit is set to the outside of the cavity, and connect with the detection unit signal；Execution unit is set to the outside of the cavity, and connect with described control unit signal.The temperature control device in same temperature control loop by carrying out cooling and heating stepses using common control unit, and compared with traditional PVD vacuum coating temperature control system, faster, temperature control is more accurate for response speed, and Temperature Distribution is more uniform；And in same temperature control loop, cold water stream and hydrothermal fluid are recycled work, can be effectively reduced energy consumption, prevent the wasting of resources.
Description
Technical field
The utility model relates to a kind of cavity temperature control devices, belong to temperature control device field.
Background technique
Control for PVD vacuum coating cavity temperature, at present existing mode largely using installation heating equipment and
Refrigeration equipment, or using modes such as semi-integrated type thermostatic equipments.By taking heating equipment as an example, heating rod and heater are mostly used,
Temperature change is controlled by traditional temperature relay to reach heating purpose, and the cooling equipment of corresponding cavity mostly uses external cold
Water dispenser is aided with compressor to achieve the purpose that cavity cools.Both of the above needs to cooperate, to reach PVD Vacuum Deposition
The purpose of membrane cavity temperature control, since cavity heats and is cooled to the units of two autonomous workings, often occur being out of step,
Many drawbacks such as big, the temperature control inaccuracy of temperature fluctuation.To sum up, existing PVD vacuum coating temperature control device, due to heating and
Two mutually indepedent units are cooled to, there is the shortcomings that can not being precisely controlled cavity temperature, are unable to satisfy PVD vacuum coating cavity
Temperature requirement can not create optimal operating condition for PVD vacuum coating working environment.
Utility model content
Based on above-mentioned problems of the prior art, the purpose of this utility model is to provide a kind of simple chambers of structure
Body temperature control device, can control and adjust simultaneously its heating and refrigerating function is provided with reaching accurate temperature controlling for PVD vacuum coating
The effect of best effort environment.
In order to achieve the above objectives, the utility model provides the following technical solutions: a kind of cavity temperature control device, is used for PVD method
Vacuum coating, comprising: cavity；The bottom of cavity is equipped with outlet；Temperature control loop, is set to the inside of cavity, and passes through extraction
Mouth is led to outside cavity；Detection unit is set to the outside of cavity；Control unit is set to the outside of cavity, and single with detection
First signal connection；Execution unit is set to the outside of cavity, and connect with control unit signal.
Further, temperature control loop is the conduit being cascaded, and is filled with inside conduit and follows bad flowing
Aqueous fluid；It is respectively equipped with water inlet pipe and outlet pipe on conduit, and is led to outside cavity by outlet.
Further, detection unit is temperature sensor.
Further, control unit is single-chip computer control system.
Further, executable unit includes the solenoid valve being connected with temperature control loop, magnetic drive pump, by pipeline is connected in parallel on magnetic
Heating unit and cooling unit, Inlet and outlet water on power pump are responsible for；Wherein, solenoid valve is responsible for by Inlet and outlet water and is connected with magnetic drive pump
It is logical.
Further, solenoid valve is connected by water inlet pipe and outlet pipe with temperature control loop
Further, sealing device is equipped at outlet, water inlet pipe and outlet pipe are led to outside cavity by sealing device.
The utility model has the beneficial effects that: by being cooled down in same temperature control loop using common control unit
With heating stepses, compared with traditional PVD vacuum coating temperature control system, faster, temperature control is more accurate for response speed, and Temperature Distribution is more
Add uniformly；And in same temperature control loop, cold water stream and hydrothermal fluid are recycled work, can be effectively reduced energy consumption, prevent
The only wasting of resources.
The above description is merely an outline of the technical solution of the present invention, in order to better understand the skill of the utility model
Art means, and can be implemented in accordance with the contents of the specification, below on the preferred embodiment of the present invention and the accompanying drawings in detail
It describes in detail bright as after.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of cavity temperature control device；
Fig. 2 is the partial structural diagram of cavity temperature control device bottom；
Fig. 3 is the temperature control loop structural schematic diagram of cavity temperature control device；
Fig. 4 is the electric control structure schematic diagram of cavity temperature control device；
Fig. 5 is the work flow diagram of cavity temperature control device.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiment of the present utility model is described in further detail.Below
Embodiment is not intended to limit the scope of the present invention for illustrating the utility model.
Referring to Fig. 1, a kind of cavity temperature control device, is used for PVD method vacuum coating, comprising: cavity 20；The bottom of cavity 20
Equipped with outlet；Temperature control loop 11 is set to the inside of cavity 20, and is led to outside cavity 20 by outlet；Detection unit,
It is set to the outside of cavity 20；Control unit is set to the outside of cavity 20, and connect with detection unit signal；Execution unit,
It is set to the outside of cavity 20, and is connect with control unit signal.
In the above-described embodiments, detection unit is temperature sensor 12.
In the above-described embodiments, control unit is single-chip computer control system.
In the above-described embodiments, executable unit includes the solenoid valve 15 being connected with temperature control loop 11, magnetic drive pump 17, passes through
Pipeline is connected in parallel on heating unit 18 and cooling unit 19, Inlet and outlet water supervisor 16 on magnetic drive pump 17；Wherein, solenoid valve 15 by into
Water outlet main pipe 16 is connected with magnetic drive pump 17, and hot water or cold water's access can be switched in solenoid valve 15.
In the above-described embodiments, solenoid valve 15 is connected by water inlet pipe 13 and outlet pipe 14 with temperature control loop.
Fig. 2 and Fig. 3 are please referred to, temperature control loop 11 is the conduit being cascaded, and is filled with and follows inside conduit
Bad flowing water fluid；It is respectively equipped with water inlet pipe 13 and outlet pipe 14 on conduit, and cavity is led to by outlet
Outside 20.
In the above-described embodiments, sealing device 21 is equipped at outlet, water inlet pipe 13 and outlet pipe 14 pass through sealing device
21 lead to outside cavity 20.
Referring to Fig. 4, the temperature sensor 12 in detection unit detects heat when 20 temperature of cavity reaches set temperature
Signal simultaneously passes the signal to the single-chip computer control system in control unit, and single-chip computer control system passes through in control execution unit
Magnetic drive pump 17 drive heating unit 18 or cooling unit 19, carry out temperature control process.
Referring specifically to Fig. 5, when work, it is first turned on magnetic drive pump 17 and drives heating unit 18, solenoid valve 15 is switched to
Hot water passageway is passed through hot water preheating cavity 20；Then temperature sensor 12 detects that cavity 20 reaches preset temperature, and signal is passed
It is sent to single-chip computer control system, single-chip computer control system closes magnetic drive pump 17；PVD magnetron sputtering apparatus is started to work at this time, single
Piece machine control system control magnetic drive pump 17 switches to cooling unit 19, opens simultaneously solenoid valve 15 and switches to cold water pathway, is passed through
Cooling water to cavity 20 is cooled down；When PVD magnetron sputtering apparatus power cut-off, cooling water temperature control circuit 11 is kept, is continued
Cooling is until 20 temperature of cavity reaches preset temperature；The temperature signal that end temperature sensor 12 will test sends single-chip microcontroller to
Control system, single-chip computer control system cut off magnetic drive pump 17, close solenoid valve 15.
The cavity temperature control device of the utility model using common control unit in same temperature control loop by being cooled down
With heating stepses, compared with traditional PVD vacuum coating temperature control system, faster, temperature control is more accurate for response speed, and Temperature Distribution is more
Add uniformly；And in same temperature control loop, cold water stream and hydrothermal fluid are recycled work, can be effectively reduced energy consumption, prevent
The only wasting of resources.
Each technical characteristic of embodiment described above can be combined arbitrarily, for simplicity of description, not to above-mentioned reality
It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, all should be considered as described in this specification.
Above-described embodiments merely represent several embodiments of the utility model, the description thereof is more specific and detailed,
But it cannot be understood as the limitations to utility model patent range.It should be pointed out that for the common skill of this field
For art personnel, without departing from the concept of the premise utility, various modifications and improvements can be made, these are belonged to
The protection scope of the utility model.Therefore, the scope of protection shall be subject to the appended claims for the utility model patent.
Claims (7)
1. a kind of cavity temperature regulating device is used for PVD method vacuum coating characterized by comprising
Cavity；The bottom of the cavity is equipped with outlet；
Temperature control loop is set to the inside of the cavity, and is led to outside the cavity by the outlet；
Detection unit is set to the outside of the cavity；
Control unit is set to the outside of the cavity, and connect with the detection unit signal；
Execution unit is set to the outside of the cavity, and connect with described control unit signal.
2. cavity temperature regulating device according to claim 1, which is characterized in that the temperature control loop is the pipe being cascaded
Road circuit, the conduit inside, which is filled with, follows bad flowing water fluid；Be respectively equipped on the conduit water inlet pipe and
Outlet pipe, and led to outside the cavity by the outlet.
3. cavity temperature regulating device according to claim 1, which is characterized in that the detection unit is temperature sensor.
4. cavity temperature regulating device according to claim 1, which is characterized in that described control unit is single-chip microcontroller control system
System.
5. cavity temperature regulating device according to claim 2, which is characterized in that the execution unit includes returning with the temperature control
Solenoid valve that road is connected, magnetic drive pump, the heating unit and cooling unit, Inlet and outlet water being connected in parallel on by pipeline on the magnetic drive pump
Supervisor；The solenoid valve is responsible for by the Inlet and outlet water to be connected with the magnetic drive pump.
6. cavity temperature regulating device according to claim 5, it is characterised in that the solenoid valve passes through the water inlet pipe and institute
Outlet pipe is stated to be connected with the temperature control loop.
7. cavity temperature regulating device according to claim 2, which is characterized in that be equipped with sealing device, institute at the outlet
It states water inlet pipe and the outlet pipe is led to outside the cavity by the sealing device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821085689.2U CN208815105U (en) | 2018-07-10 | 2018-07-10 | Cavity temperature regulating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821085689.2U CN208815105U (en) | 2018-07-10 | 2018-07-10 | Cavity temperature regulating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208815105U true CN208815105U (en) | 2019-05-03 |
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ID=66270619
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821085689.2U Active CN208815105U (en) | 2018-07-10 | 2018-07-10 | Cavity temperature regulating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208815105U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113355639A (en) * | 2021-06-08 | 2021-09-07 | 京东方科技集团股份有限公司 | Temperature detection device and evaporation equipment |
| CN114277349A (en) * | 2021-12-28 | 2022-04-05 | 无锡展硕科技有限公司 | Novel physical vapor deposition equipment capable of adjusting chamber temperature |
-
2018
- 2018-07-10 CN CN201821085689.2U patent/CN208815105U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113355639A (en) * | 2021-06-08 | 2021-09-07 | 京东方科技集团股份有限公司 | Temperature detection device and evaporation equipment |
| CN113355639B (en) * | 2021-06-08 | 2023-09-12 | 京东方科技集团股份有限公司 | Temperature detection device and evaporation equipment |
| CN114277349A (en) * | 2021-12-28 | 2022-04-05 | 无锡展硕科技有限公司 | Novel physical vapor deposition equipment capable of adjusting chamber temperature |
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