CN208796969U - Wafer with protection paper automatic stripping equipment - Google Patents

Wafer with protection paper automatic stripping equipment Download PDF

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Publication number
CN208796969U
CN208796969U CN201821788451.6U CN201821788451U CN208796969U CN 208796969 U CN208796969 U CN 208796969U CN 201821788451 U CN201821788451 U CN 201821788451U CN 208796969 U CN208796969 U CN 208796969U
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CN
China
Prior art keywords
straight line
mould group
wafer
line mould
axis
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Active
Application number
CN201821788451.6U
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Chinese (zh)
Inventor
狄建科
秦松
胡斌
张大勇
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Suzhou Exhibition Automation Equipment Co Ltd
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Suzhou Exhibition Automation Equipment Co Ltd
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Priority to CN201821788451.6U priority Critical patent/CN208796969U/en
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Abstract

The utility model relates to wafer with protection paper automatic stripping equipments; rack is fixed on bottom plate; vacuum suction pressure device includes clamping cylinder and connecting column; connecting column is fixed on bottom plate; support plate is installed on connecting column; evacuated panel is placed in support plate, and clamping cylinder is installed on the supporting plate, and vacuum cups is installed on evacuated panel;Protection sheet stripping off device includes mounting plate and Z axis straight line mould group; Z axis straight line mould group is installed on mounting plate, and Z axis mounting plate is installed in Z axis straight line mould group, installs rotary cylinder on Z axis mounting plate; pneumatic clamper is installed, pneumatic clamper is equipped with upper protection sheet fixture block and lower protection sheet fixture block on rotary cylinder;Oblique movement device includes sliding panel and oblique straight line mould group, and sliding panel is mounted in oblique straight line mould group;Oblique straight line mould group lifting is on the rack;Sliding panel is connect with the mounting plate of protection sheet stripping off device.Pneumatic clamper clamps wafer with protection paper and is removed under the driving of straight line mould group, effectively improves the consistency of peeling action, and blue film is avoided to generate fold.

Description

Wafer with protection paper automatic stripping equipment
Technical field
The utility model relates to a kind of wafer with protection paper automatic stripping equipments.
Background technique
Currently, in the production process of LED wafer, LED wafer shape crystal grain arranged into an array, battle array after the completion of scribing process The crystal grain of column arrangement is attached in wafer film, and the crystal grain arrangement in wafer film closely, is unfavorable for the behaviour of subsequent die bond process Make, therefore the wafer film for serving as LED grain carrier must be expanded in LED production process, so that being attached to wafer film The crystal grain uniform expansion of upper array arrangement, this is the function of realizing needed for expanding brilliant machine manually at present.
The existing brilliant machine of manual expansion, has main steps that: 1. will manually expand transgranular ring and be placed on lower platen;2. manually will patch There is the label paper of bar code or two dimensional code to tear and place aside;3. manually wafer with protection paper is removed;4. manually by chip Film is placed on lower platen;5. manually covering top board and fixation;6. jacking heating mechanism, which gradually rises completion, expands crystalline substance;7. artificial Brilliant outer ring will be expanded to be placed in wafer film;8. press mechanism will expand brilliant outer ring compacting in place;9. it is extra that brilliant outer ring periphery is expanded in removal Wafer film;10. artificial take out expands the brilliant finished product completed.
In the above-mentioned manual key step for expanding brilliant machine, the 3. step be to realize that wafer with protection paper is removed by manually, manually Removing wafer with protection paper has some drawbacks: first is that inefficiency, due to wafer with protection paper and indigo plant in every product in supplied materials in batch For film location all there may be relatively large deviation, operator needs to rotate product to find best peel angle;Second is that consistency is poor, people Speed when work is removed unevenly be easy to cause blue film fold, subsequent blue film to be restored smooth by hand;Third is that wafer is easily dirty Or may cause finger when damage, the maloperation of operator or fatigue or palm touches wafer, it be easy to cause the dirty of wafer Dirty even damage wafer.
Utility model content
The purpose of the utility model is to overcome the shortcomings of the prior art, a kind of wafer with protection paper is provided automatically strips and set It is standby.
The purpose of this utility model is achieved through the following technical solutions:
Wafer with protection paper automatic stripping equipment, feature is: including vacuum suction pressure device, protection sheet stripping off device, oblique fortune Dynamic device, bottom plate and rack, rack are fixed on bottom plate;The vacuum suction pressure device includes clamping cylinder, vacuum cups, true Hollow plate, support plate and connecting column, connecting column are fixed on bottom plate, and support plate is installed on connecting column, and evacuated panel is placed in support plate On, clamping cylinder installation on the supporting plate and can up and down adjustment, vacuum cups is installed on evacuated panel and can up and down adjustment;
The protection sheet stripping off device includes mounting plate, Z axis straight line mould group, Z axis mounting plate, rotary cylinder, pneumatic clamper, upper guarantor Shield folder block and lower protection sheet fixture block, Z axis straight line mould group are installed on mounting plate, and Z axis installation is installed in Z axis straight line mould group Plate installs rotary cylinder on Z axis mounting plate, and pneumatic clamper is installed on rotary cylinder, and pneumatic clamper is equipped with upper protection sheet fixture block and lower protection Folder block;
The oblique movement device includes sliding panel and oblique straight line mould group, and sliding panel is mounted in oblique straight line mould group; Oblique straight line mould group lifting is on the rack;Sliding panel is connect with the mounting plate of protection sheet stripping off device.
Further, above-mentioned wafer with protection paper automatic stripping equipment, wherein the surrounding of the evacuated panel has been evenly arranged Vacuum cups.
Further, above-mentioned wafer with protection paper automatic stripping equipment, wherein be densely covered with stomata on the evacuated panel.
Further, above-mentioned wafer with protection paper automatic stripping equipment, wherein the aperture of the stomata be 0.3mm~ 1mm。
Further, above-mentioned wafer with protection paper automatic stripping equipment, wherein the oblique straight line mould group is installed by it Hole is lifted on the crossbeam above rack.
Further, above-mentioned wafer with protection paper automatic stripping equipment, wherein be equipped with biography on the upper protection sheet fixture block Sensor.
Further, above-mentioned wafer with protection paper automatic stripping equipment, wherein also comprising one and Z axis linear module drive The Z axis motor of connection.
Further, above-mentioned wafer with protection paper automatic stripping equipment, wherein also comprising one and oblique linear module drive The oblique motor of connection.
The utility model has significant advantages and beneficial effects compared with prior art, embodies in the following areas:
The utility model design uniqueness, structure novel, realize the automated job of wafer with protection paper removing, are come with automating Replace manual operation, significantly improves production efficiency.Pneumatic clamper clamps wafer with protection paper and is removed under the drive of straight line mould group, The consistency of peeling action can be effectively improved, blue film is effectively avoided to generate fold.Compared with manual removal movement, pneumatic clamper is clamped The wafer with protection paper and mode removed does not easily cause the dirty of wafer, will not damage wafer.
Other feature and advantage of the utility model will illustrate in subsequent specification, also, partly from specification It becomes apparent, or by implementing specific embodiment of the present invention understanding.The purpose of this utility model is excellent with other Point can be achieved and obtained by structure specifically indicated in the written description, claims, and drawings.
Detailed description of the invention
It, below will be to use required in embodiment in order to illustrate more clearly of the technical solution of the utility model embodiment Attached drawing be briefly described, it should be understood that the following drawings illustrates only some embodiments of the utility model, therefore should not be by Regard the restriction to range as, for those of ordinary skill in the art, without creative efforts, may be used also To obtain other relevant attached drawings according to these attached drawings.
Fig. 1: the structural schematic diagram of the utility model device;
Fig. 2: the structural schematic diagram of vacuum suction pressure device;
Fig. 3: the structural schematic diagram of protection sheet stripping off device and oblique movement device.
Specific embodiment
Below in conjunction with attached drawing in the utility model embodiment, the technical scheme in the embodiment of the utility model is carried out clear Chu is fully described by, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole realities Apply example.The component of the utility model embodiment being usually described and illustrated herein in the accompanying drawings can be come with a variety of different configurations Arrangement and design.Therefore, the detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit below The range of claimed invention, but it is merely representative of the selected embodiment of the utility model.Based on the utility model Embodiment, those skilled in the art's every other embodiment obtained without making creative work, all Belong to the range of the utility model protection.
It should also be noted that similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi It is defined in a attached drawing, does not then need that it is further defined and explained in subsequent attached drawing.Meanwhile it is practical new at this In the description of type, directional terminology and ordinal term etc. are only used for distinguishing description, are not understood to indicate or imply relatively important Property.
As shown in Figures 1 to 3, wafer with protection paper automatic stripping equipment, including vacuum suction pressure device 1, protection sheet stripping off device 2, oblique movement device 3, bottom plate 4 and rack 5, rack 5 are fixed on bottom plate 4;Vacuum suction pressure device 1 includes clamping cylinder 11, vacuum cups 12, evacuated panel 13, support plate 14 and connecting column 15, connecting column 15 are fixed on bottom plate 4, and support plate 14 is installed In on connecting column 15, evacuated panel 13 is placed in support plate 14, clamping cylinder 11 be mounted in support plate 14 and can up and down adjustment, very The surrounding of hollow plate 13 has been evenly arranged vacuum cups 12, and vacuum cups 12 is installed on evacuated panel 13 and can up and down adjustment;Vacuum Stomata is densely covered on plate 13, the aperture of stomata is 0.3mm~1mm.
Protection sheet stripping off device 2 includes mounting plate 29, Z axis straight line mould group 28, Z axis mounting plate 26, rotary cylinder 25, pneumatic clamper 22, upper protection sheet fixture block 23 and lower protection sheet fixture block 24, Z axis straight line mould group 28 are installed on mounting plate 29, Z axis straight line mould group Z axis mounting plate 26 is installed, Z axis motor 27 and Z axis straight line mould group 28 are drivingly connected, and install rotary pneumatic on Z axis mounting plate 26 on 28 Cylinder 25, pneumatic clamper 22 is installed on rotary cylinder 25, and pneumatic clamper 22 is equipped with upper protection sheet fixture block 23 and lower protection sheet fixture block 24;Upper protection Sensor 21 is installed on folder block 23.
Oblique movement device 3 includes that sliding panel 31 and oblique straight line mould group 32, sliding panel 31 are mounted on oblique straight line mould group On 32;Oblique straight line mould group 32 is lifted on the crossbeam of 5 top of rack by its mounting hole, oblique motor 33 and oblique straight line mould Group 32 is drivingly connected;Sliding panel 31 is connect with the mounting plate 29 of protection sheet stripping off device 2.
When concrete application, product is placed on the evacuated panel 13 of vacuum suction pressure device 1 by preceding road feeding device, negative pressure of vacuum By the vacuum cups 12 arranged along 13 surrounding of evacuated panel and the stomata on evacuated panel 13 that gathers, product is adsorbed on evacuated panel On 13, oblique motor 33 drives protection sheet stripping off device 2 to move to extreme position to the right, and Z axis motor 27 drives Z axis straight line mould Group 28 is moved downwardly to Z-direction operating position, and pneumatic clamper 22 is opened, and oblique motor 33 drives protection sheet stripping off device 2 to move to the left A distance reaches operating position, and wafer with protection paper is between upper protection sheet fixture block 23 and lower protection sheet fixture block 24, pneumatic clamper 22 It closes, upper protection sheet fixture block 23 and the movement of lower protection sheet fixture block 24 clamp wafer with protection paper, and rotary cylinder 25 is rotated and stopped at The position of setting, 1 right side clamping cylinder 11 of vacuum suction pressure device work and push down blue film leading portion, and Z axis motor 27 drives Z axis straight line Mould group 28 moves upwards set distance, and in the case where there is product, oblique motor 33 drives protection sheet stripping off device 2 to transport to the left Stop after dynamic setting distance, two clamping cylinders are triggered and push down blue film middle section, oblique motor 33 among vacuum suction pressure device 1 Continue that protection sheet stripping off device 2 is driven to move to extreme position to the left, wafer with protection paper is discarded in specified by the opening of pneumatic clamper 22 In collection box.
In conclusion the utility model design is unique, structure novel, the automated job of wafer with protection paper removing is realized, Replace manual operation to automate, significantly improves production efficiency.Pneumatic clamper clamps wafer with protection paper and in the drive of straight line mould group It is lower to be removed, the consistency of peeling action can be effectively improved, blue film is effectively avoided to generate fold.Phase is acted with manual removal Than pneumatic clamper clamps wafer with protection paper and the mode removed does not easily cause the dirty of wafer, will not damage wafer.
The above descriptions are merely preferred embodiments of the present invention, is not intended to limit the utility model, for this For the technical staff in field, various modifications and changes may be made to the present invention.It is all in the spirit and principles of the utility model Within, any modification, equivalent replacement, improvement and so on should be included within the scope of protection of this utility model.It should be noted that To: similar label and letter indicate similar terms in following attached drawing, therefore, once determined in a certain Xiang Yi attached drawing Justice does not need then that it is further defined and explained in subsequent attached drawing.
The above is only the specific embodiments of the present invention, and but protection scope of the utility model is not limited thereto, Anyone skilled in the art within the technical scope disclosed by the utility model, can readily occur in variation or replace It changes, should be covered within the scope of the utility model.Therefore, the protection scope of the utility model should be with claim institute Subject to the protection scope stated.
It should be noted that, in this document, relational terms such as first and second and the like are used merely to a reality Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation In any actual relationship or order or sequence.Moreover, the terms "include", "comprise" or its any other variant are intended to Non-exclusive inclusion, so that the process, method, article or equipment including a series of elements is not only wanted including those Element, but also including other elements that are not explicitly listed, or further include for this process, method, article or equipment Intrinsic element.In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that There is also other identical elements in process, method, article or equipment including the element.

Claims (8)

1. wafer with protection paper automatic stripping equipment, it is characterised in that: including vacuum suction pressure device, protection sheet stripping off device, oblique Telecontrol equipment, bottom plate and rack, rack are fixed on bottom plate;The vacuum suction pressure device include clamping cylinder, vacuum cups, Evacuated panel, support plate and connecting column, connecting column are fixed on bottom plate, and support plate is installed on connecting column, and evacuated panel is placed in support On plate, clamping cylinder installation on the supporting plate and can up and down adjustment, vacuum cups is installed on evacuated panel and can up and down adjustment;
The protection sheet stripping off device includes mounting plate, Z axis straight line mould group, Z axis mounting plate, rotary cylinder, pneumatic clamper, upper protection sheet Fixture block and lower protection sheet fixture block, Z axis straight line mould group are installed on mounting plate, and Z axis mounting plate, Z axis are installed in Z axis straight line mould group Rotary cylinder is installed on mounting plate, pneumatic clamper is installed on rotary cylinder, pneumatic clamper is equipped with upper protection sheet fixture block and lower protection sheet fixture block;
The oblique movement device includes sliding panel and oblique straight line mould group, and sliding panel is mounted in oblique straight line mould group;It is oblique Straight line mould group lifts on the rack;Sliding panel is connect with the mounting plate of protection sheet stripping off device.
2. wafer with protection paper automatic stripping equipment according to claim 1, it is characterised in that: the surrounding of the evacuated panel is equal It is even to be disposed with vacuum cups.
3. wafer with protection paper automatic stripping equipment according to claim 1, it is characterised in that: be densely covered on the evacuated panel Stomata.
4. wafer with protection paper automatic stripping equipment according to claim 3, it is characterised in that: the aperture of the stomata is 0.3mm~1mm.
5. wafer with protection paper automatic stripping equipment according to claim 1, it is characterised in that: the oblique straight line mould group is logical It crosses on the crossbeam that its mounting hole is lifted on above rack.
6. wafer with protection paper automatic stripping equipment according to claim 1, it is characterised in that: on the upper protection sheet fixture block Sensor is installed.
7. wafer with protection paper automatic stripping equipment according to claim 1, it is characterised in that: also comprising one and Z axis straight line The Z axis motor that mould group is drivingly connected.
8. wafer with protection paper automatic stripping equipment according to claim 1, it is characterised in that: also comprising one and oblique straight line The oblique motor that mould group is drivingly connected.
CN201821788451.6U 2018-11-01 2018-11-01 Wafer with protection paper automatic stripping equipment Active CN208796969U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201821788451.6U CN208796969U (en) 2018-11-01 2018-11-01 Wafer with protection paper automatic stripping equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201821788451.6U CN208796969U (en) 2018-11-01 2018-11-01 Wafer with protection paper automatic stripping equipment

Publications (1)

Publication Number Publication Date
CN208796969U true CN208796969U (en) 2019-04-26

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201821788451.6U Active CN208796969U (en) 2018-11-01 2018-11-01 Wafer with protection paper automatic stripping equipment

Country Status (1)

Country Link
CN (1) CN208796969U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109273389A (en) * 2018-11-01 2019-01-25 苏州展德自动化设备有限公司 Wafer with protection paper automatic stripping equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109273389A (en) * 2018-11-01 2019-01-25 苏州展德自动化设备有限公司 Wafer with protection paper automatic stripping equipment

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