CN208796024U - The cooling device of even film developing machine - Google Patents
The cooling device of even film developing machine Download PDFInfo
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- CN208796024U CN208796024U CN201821605513.5U CN201821605513U CN208796024U CN 208796024 U CN208796024 U CN 208796024U CN 201821605513 U CN201821605513 U CN 201821605513U CN 208796024 U CN208796024 U CN 208796024U
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Abstract
The utility model discloses a kind of cooling devices of even film developing machine, including cold plate, each cold plate with independent cooling fluid supply system connectivity, each cooling fluid supply system includes cooling fluid supply case, heat exchanger, solution feed pump, the inlet tube of solution feed pump is extend into cooling fluid supply case, the outlet tube of solution feed pump is connected to the entrance of the first heat exchanger channels of heat exchanger, the outlet of first heat exchanger channels is connected to the entrance of the cooling duct on cold plate, the outlet of cooling duct is connected to by reflux line with the inner cavity of cooling fluid supply case, cooling device further includes fluid infusion case and fluid infusion pump, the liquid outlet of fluid infusion pump passes through liquid supplementation pipe respectively and is connected to each cooling fluid supply case, fluid infusion sensor is provided on the inner wall of cooling fluid supply case, fluid infusion stop sensor and temperature sensor.The cooling device can timely supplement coolant liquid, guarantee enough coolant liquids that circulates in cold plate, guarantee cooling efficiency.
Description
Technical field
The utility model relates to a kind of cooling device more particularly to a kind of cooling devices of even film developing machine.
Background technique
In semicon industry, photoetching and development are two important steps, and developing process is completed on developing machine, development
Process is exactly the process that the part chemically reacted in the photoresist after exposure with ultraviolet light is taken out or remained, development
Basic process be: baking → development → post bake → development detection after alignment exposure (litho machine) → exposure.And even film developing machine needs
23 DEG C or so are cooled to the silicon wafer dried after exposure, and the cooling of current even film developing machine is by multiple cold plates to silicon
Piece is cooling, is provided with cooling duct on cold plate, which is connected to cooling fluid supply system, so current this cooling device
There are a defects, and in the long-time use process of even film developing machine, coolant liquid can be lossy, and the long-term loss of coolant liquid
It will lead to cooling efficiency decline, and cooling efficiency decline causes the silicon wafer within defined cooling time that can not be cooled on cold plate
Specified temperature influences subsequent technique, and the rejection rate of silicon wafer is caused to improve.
Utility model content
The technical problem to be solved by the utility model is to provide a kind of cooling device of even film developing machine, cooling dresses
Setting timely to supplement coolant liquid, guarantee enough coolant liquids that circulates in cold plate, guarantee cooling efficiency.
In order to solve the above technical problems, the technical solution of the utility model is: a kind of cooling device of even film developing machine, packet
Several blocks of cold plates are included, are provided with cooling duct on every block of cold plate, the cooling duct and cooling fluid supply system connectivity, Mei Geleng
Plate with independent cooling fluid supply system connectivity, each cooling fluid supply system include cooling fluid supply case, heat exchanger,
Solution feed pump stores coolant liquid in the cooling fluid supply case, and the heat exchanger is provided with the first heat exchanger channels and second and changes
The passage of heat, the inlet tube of the solution feed pump are extend into cooling fluid supply case, the outlet tube of the solution feed pump and heat exchanger
The entrance of first heat exchanger channels is connected to, and the outlet of first heat exchanger channels is connected to the entrance of the cooling duct on cold plate, institute
The outlet for stating cooling duct is connected to by reflux line with the inner cavity of cooling fluid supply case, and the second heat exchange of the heat exchanger is logical
Road is connected to heat exchange liquid supply system, and the cooling device further includes fluid infusion case and fluid infusion pump, and the fluid infusion case memory is placed with cold
But the inlet tube of liquid, fluid infusion pump is extend into fluid infusion case, the liquid outlet of the fluid infusion pump pass through respectively liquid supplementation pipe with it is each cold
But liquid cassette for supplying is connected to, and is provided with fluid infusion sensor, fluid infusion stop sensor and temperature sensing on the inner wall of cooling fluid supply case
Device, the fluid infusion sensor and fluid infusion stop sensor are connect with the controller of fluid infusion pump.
As a preferred solution, being internally located at below fluid infusion sensor for the cooling fluid supply case is additionally provided with
Leakage sensor, the leakage sensor are connect with the controller that fluid infusion pumps, and the controller is connect with buzzer.
As a preferred solution, the exit of the liquid supplementation pipe extend into the inside in cooling fluid supply case, the benefit
The outlet section of liquid pipe is provided with ball-cock assembly.
As a preferred solution, the cooling duct on the cold plate includes that horizontal cooling duct and three-dimensional cooling are logical
Road, the horizontal cooling duct include the horizontal linear extended segment being sequentially connected and semicircular arc changeover portion, the horizontal linear
Extended segment and semicircular arc changeover portion have been connected to form serpentine bend shape, and the one side of the cold plate is provided with logical with horizontal cooling
The first inlet and the first liquid outlet of road connection；The three-dimensional cooling duct includes that section is extended transversely straight in several groups under
It extends transversely straight section, upper longitudinal extended connecting section, lower longitudinal extended connecting section, tail end and is vertically connected with section, above and below the tail end
Linkage section connection connects the tail end for extending transversely straight section on every group and extending transversely straight under section, and described longitudinally connected section
The head end connection of section will be extended transversely straight in adjacent sets, will extend transversely straight under adjacent sets for longitudinally connected section under described
The head end connection of section, described longitudinally connected section and under shift to install between longitudinally connected section, described longitudinally connected section from upper
Side across horizontal linear extended segment, under described longitudinally connected section from below across horizontal linear extended segment, the side of the cold plate
Face is provided with the second inlet and the second liquid outlet being connected to three-dimensional cooling duct；First inlet and the second inlet
With the outlet of first heat exchanger channels, first liquid outlet and the second liquid outlet are connected to the reflux line.
As a preferred solution, extend transversely straight on described every group section and under extend transversely straight section and be respectively positioned on two
Between horizontal linear extended segment.
As a preferred solution, the three-dimensional cooling duct is centrally located at the middle part of cold plate.
As a preferred solution, pressure sensor is provided on the reflux line
As a preferred solution, elasticity is equipped with the sensing of the contact temperature for detecting silicon wafer on the cold plate
Device.
After above-mentioned technical proposal, the effect of the utility model is: since each cooling fluid supply system includes
Cooling fluid supply case, heat exchanger, solution feed pump store coolant liquid, the heat exchanger setting in the cooling fluid supply case
There are the first heat exchanger channels and the second heat exchanger channels, the inlet tube of the solution feed pump is extend into cooling fluid supply case, the feed flow
The outlet tube of pump is connected to the entrance of the first heat exchanger channels of heat exchanger, in the outlet and cold plate of first heat exchanger channels
The entrance of cooling duct is connected to, and the outlet of the cooling duct is connected to by reflux line with the inner cavity of cooling fluid supply case, institute
The second heat exchanger channels for stating heat exchanger are connected to heat exchange liquid supply system, and the cooling device further includes fluid infusion case and fluid infusion
Pump, the fluid infusion case memory are placed with coolant liquid, and the inlet tube of the fluid infusion pump is extend into fluid infusion case, and the fluid infusion pump goes out liquid
Mouth is connected to by liquid supplementation pipe with each cooling fluid supply case respectively, and fluid infusion sensor is provided on the inner wall of cooling fluid supply case, is mended
The controller of liquid stop sensor and temperature sensor, the fluid infusion sensor and fluid infusion stop sensor with fluid infusion pump connects
It connects, therefore, in the condition of normal use, the coolant liquid in cooling fluid supply case is exchanged heat through over-heat-exchanger and cooled down by solution feed pump
It entering in the cooling duct of cold plate and cools down to silicon wafer afterwards, the coolant liquid after cooling flows back into cooling fluid supply case, when
Fluid infusion sensor detects when needing fluid infusion, then fluid infusion pump startup, is added into corresponding coolant liquid for the coolant liquid in fluid infusion case
In cassette for supplying, automatic liquid supply is realized, fluid infusion stops after fluid infusion stop sensor detects signal, which can be real
Existing automatic liquid supply, guarantees enough coolant liquids that circulates in cold plate, guarantees cooling efficiency.
It, should again since being internally located at below fluid infusion sensor for the cooling fluid supply case is additionally provided with leakage sensor
Leakage sensor is connect with the controller that fluid infusion pumps, and the controller is connect with buzzer, which can determine cold
But in liquid cassette for supplying whether leakage, guarantee the reliable and stable operation of system.
Again since the exit of the liquid supplementation pipe extend into the inside in cooling fluid supply case, the outlet section of the liquid supplementation pipe is set
It is equipped with ball-cock assembly, which can further limit the magnitude of recruitment of coolant liquid, when coolant liquid supplement is excessive, ball-cock assembly
Floating ball follows liquid level and rises, the outlet of final plant closure liquid supplementation pipe, realizes mechanical closing.
Again since the cooling duct on the cold plate includes horizontal cooling duct and three-dimensional cooling duct, the horizontal cooling
Channel includes the horizontal linear extended segment being sequentially connected and semicircular arc changeover portion, the horizontal linear extended segment and semicircular arc
Changeover portion has been connected to form serpentine bend shape, and the one side of the cold plate is provided with the first feed liquor being connected to horizontal cooling duct
Mouth and the first liquid outlet；It is described three-dimensional cooling duct include extended transversely straight in several groups section and under extend transversely straight section,
Upper longitudinal direction extended connecting section, lower longitudinal extended connecting section, tail end are vertically connected with section, and the tail end is vertically connected with section connection for every group
On extend transversely straight section and extend transversely straight the tail end of section under and connect, the upper longitudinally connected section upper transverse direction by adjacent sets
The head end of linear extension connects, and connects the head end that section is extended transversely straight under adjacent sets for longitudinally connected section under described, institute
State longitudinally connected section and under shift to install between longitudinally connected section, described longitudinally connected section is prolonged from top across horizontal linear
Stretch section, under described longitudinally connected section from below across horizontal linear extended segment, the one side of the cold plate is provided with cold with three-dimensional
But the second inlet and the second liquid outlet of channel connection；First inlet and the second inlet and first heat exchange are logical
The outlet in road, first liquid outlet and the second liquid outlet are connected to the reflux line, in this way, by horizontal cooling logical
Road and three-dimensional cooling duct cool down cold plate, can accelerate the cooling of cold plate, horizontal cooling duct is for whole large-scale
Cool down to cold plate, and three-dimensional cooling duct can concentrated setting cold plate middle part, silicon wafer just places the middle part of cold plate, passes through three
Dimension cooling duct can concentrate the temperature of cooling silicon wafer placement region, in this way, by concentrating the cooling of cooling and entire scope dual
In conjunction with cooling effect is more preferable.
Again due to being provided with pressure sensor on the reflux line, which can detecte reflux line outflow
Fluid pressure, once pressure becomes larger, show to deposit in system so as to monitor the pressure in this coolant circulation system
Phenomena such as blocking, need to check in time.
Detailed description of the invention
The present invention will be further described with reference to the accompanying drawings and examples.
Fig. 1 is the structural schematic diagram of the utility model embodiment；
Fig. 2 is the front schematic view of the cold plate of the utility model embodiment；
Fig. 3 is the bottom view of Fig. 2；
In attached drawing: 1. cold plates；101. horizontal cooling duct；1011. horizontal linear extended segment；1012. semicircular arc transition
Section；1013. the first inlet；1014. the first liquid outlet；102. three-dimensional cooling duct；Section is extended transversely straight under 1021.；
Section is extended transversely straight on 1022.；Longitudinal extended connecting section on 1023.；1024. lower longitudinal extended connecting sections；1025. on tail end
Lower linkage section；1026. second inlets 6；1027. the second liquid outlet；2. heat exchanger；201. first heat exchanger channels；202. the
Two heat exchanger channels；3. cooling fluid supply case；4. solution feed pump；5. temperature sensor；6. leakage sensor；7. fluid infusion sensor；8.
Fluid infusion stop sensor；9. ball-cock assembly；10. reflux line；11. pressure sensor；12. fluid infusion case；13. fluid infusion pumps；14. contact
Formula temperature sensor.
Specific embodiment
The utility model is described in further detail below by specific embodiment.
As shown in Figure 1 to Figure 3, a kind of cooling device of even film developing machine, including several blocks of cold plates 1, on every block of cold plate 1
Be provided with cooling duct, the cooling duct and cooling fluid supply system connectivity, wherein each cold plate 1 with independent cooling
The connection of liquid supply system, each cooling fluid supply system includes cooling fluid supply case 3, heat exchanger 2, solution feed pump 4, described cold
But coolant liquid is stored in liquid cassette for supplying 3, the heat exchanger 2 is provided with the first heat exchanger channels 201 and the second heat exchanger channels
202, in this implementation, preferred heat exchanger 2 is shell-and-tube heat exchanger, and the first heat exchanger channels 201 are coil pipe, the second heat exchanger channels
202 be the shell being wrapped in outside coil pipe, and the inlet tube of the solution feed pump 4 is extend into cooling fluid supply case 3, the solution feed pump
4 outlet tube is connected to the entrance of the first heat exchanger channels 201 of heat exchanger 2, the outlet of first heat exchanger channels 201 with it is cold
The entrance of cooling duct on plate 1 is connected to, and the outlet of the cooling duct is interior by reflux line 10 and cooling fluid supply case 3
Chamber connection, the second heat exchanger channels 202 of the heat exchanger 2 are connected to heat exchange liquid supply system, and the liquid supply system that exchanges heat can be with
Using water cooling or the coolant liquid of other coolants is added to exchange heat, the cooling device further includes fluid infusion case 12 and fluid infusion pump
13,12 memory of fluid infusion case is placed with coolant liquid, and the inlet tube of the fluid infusion pump 13 is extend into fluid infusion case 12, the fluid infusion pump
13 liquid outlet passes through liquid supplementation pipe respectively and is connected to each cooling fluid supply case 3, is provided with fluid infusion on the inner wall of cooling fluid supply case 3
Sensor 7, fluid infusion stop sensor 8 and temperature sensor 5, the fluid infusion sensor 7 and fluid infusion stop sensor 8 are and fluid infusion
The controller connection of pump 13.
The lower section for being internally located at fluid infusion sensor 7 of the cooling fluid supply case 3 is additionally provided with leakage sensor 6, the leakage
Liquid sensor 6 is connect with the controller of fluid infusion pump 13, and the controller is connect with buzzer.
Fluid infusion sensor 7, fluid infusion stop sensor 8 and leakage sensor 6 are liquid level sensor.
The exit of the liquid supplementation pipe extend into the inside in cooling fluid supply case 3, and the outlet section of the liquid supplementation pipe is provided with
Ball-cock assembly 9.When liquid level rises to certain altitude, ball-cock assembly 9 may turn off outlet section, thus be avoided that excessive fluid infusion, stop in fluid infusion
It being capable of mechanical closing when only sensor 8 breaks down.
As shown in Figures 2 and 3, the cooling duct on the cold plate 1 includes that horizontal cooling duct 101 and three-dimensional cooling are logical
Road 102, the horizontal cooling duct 101 include the horizontal linear extended segment 1011 being sequentially connected and semicircular arc changeover portion
1012, the horizontal linear extended segment 1011 and semicircular arc changeover portion 1012 have been connected to form serpentine bend shape, the cold plate 1
One side be provided with the first inlet 1013 and the first liquid outlet 1014 being connected to horizontal cooling duct 101；The three-dimensional
Cooling duct 102 includes extending transversely straight section 1022 in several groups to extend transversely straight section 1021, upper longitudinal extension company under
It connects section 1023, lower longitudinal extended connecting section 1024, tail end and is vertically connected with section 1025, the tail end is vertically connected with the connection of section 1025 will
Section 1022 is extended transversely straight on every group extend transversely straight the tail end of section 1021 under and connect, wherein as shown in Fig. 2, upper transverse direction
The length that the length of linear extension 1022 extends transversely straight section 1021 than under is short, and described longitudinally connected section by adjacent sets
On extend transversely straight section 1022 head end connection, section 1021 will be extended transversely straight under adjacent sets for longitudinally connected section under described
Head end connection, described longitudinally connected section and under shift to install between longitudinally connected section, described longitudinally connected section from top
Across horizontal linear extended segment 1011, under described longitudinally connected section from below across horizontal linear extended segment 1011, the cold plate 1
One side be provided with the second inlet 1026 and the second liquid outlet 1027 being connected to three-dimensional cooling duct 102；Described first
The outlet of inlet 1013 and the second inlet 1026 and first heat exchanger channels 201, first liquid outlet 1014
It is connected to the second liquid outlet 1027 with the reflux line 10.Section 1022 is extended transversely straight on described every group and lower transverse direction is straight
Line extended segment 1021 is respectively positioned between two horizontal linear extended segments 1011.The three-dimensional cooling duct 102 is centrally located at cold plate 1
Middle part.Pressure sensor 11 is provided on the reflux line, elasticity is equipped with for detecting connecing for silicon wafer on the cold plate 1
Touch temperature sensor 14.It is contacted when silicon wafer is put into placement region with contact type temperature sensor 14, and then directly detects silicon
Piece temperature.
Automatic liquid supply may be implemented in the cooling device, guarantees enough coolant liquids that circulates in cold plate 1, guarantees cooling efficiency.
Solution feed pump 4, fluid infusion pump 13 and each sensor technology mentioned in the present embodiment are current routine techniques,
Detailed description in " mechanical design handbook the 5th edition " of the 5th edition the 28th printing in April, 2008 Beijing, belongs to existing skill
Art, structure are cheer and bright.
Embodiment described above is only the description to the preferred embodiment of the present invention, not as the limit to the scope of the invention
It is fixed, on the basis of not departing from design spirit of the present invention, to various modifications and transformation that technical solution of the present invention is made, it should all fall
Enter in the protection scope that claims of the present invention determines.
Claims (8)
1. a kind of cooling device of even film developing machine, including several blocks of cold plates, it is provided with cooling duct on every block of cold plate, this is cold
But channel and cooling fluid supply system connectivity, it is characterised in that: each cold plate with independent cooling fluid supply system connectivity, often
A cooling fluid supply system includes cooling fluid supply case, heat exchanger, solution feed pump, is stored in the cooling fluid supply case cold
But liquid, the heat exchanger are provided with the first heat exchanger channels and the second heat exchanger channels, and the inlet tube of the solution feed pump extend into cold
But in liquid cassette for supplying, the entrance of the first heat exchanger channels of the outlet tube and heat exchanger of the solution feed pump is connected to, and described first changes
The outlet of the passage of heat is connected to the entrance of the cooling duct on cold plate, and the outlet of the cooling duct passes through reflux line and cooling
The inner cavity of liquid cassette for supplying is connected to, and the second heat exchanger channels of the heat exchanger are connected to heat exchange liquid supply system, the cooling dress
Setting further includes fluid infusion case and fluid infusion pump, and the fluid infusion case memory is placed with coolant liquid, and the inlet tube of the fluid infusion pump extend into fluid infusion
In case, the liquid outlet of the fluid infusion pump passes through liquid supplementation pipe respectively and is connected to each cooling fluid supply case, the inner wall of cooling fluid supply case
On be provided with fluid infusion sensor, fluid infusion stop sensor and temperature sensor, the fluid infusion sensor and fluid infusion stop sensor
It is connect with the controller of fluid infusion pump.
2. a kind of cooling device of even film developing machine as described in claim 1, it is characterised in that: the cooling fluid supply case
It is internally located at below fluid infusion sensor and is additionally provided with leakage sensor, which connect with the controller that fluid infusion pumps,
The controller is connect with buzzer.
3. a kind of cooling device of even film developing machine as claimed in claim 2, it is characterised in that: the exit of the liquid supplementation pipe
It is extend into the inside in cooling fluid supply case, the outlet section of the liquid supplementation pipe is provided with ball-cock assembly.
4. a kind of cooling device of even film developing machine as described in any one of claims 1 to 3, it is characterised in that: the cold plate
On cooling duct include horizontal cooling duct and three-dimensional cooling duct, the horizontal cooling duct includes the level being sequentially connected
Linear extension and semicircular arc changeover portion, the horizontal linear extended segment and semicircular arc changeover portion have been connected to form snakelike curved
Curved, the one side of the cold plate is provided with the first inlet and the first liquid outlet being connected to horizontal cooling duct；Described three
Dimension cooling duct include extended transversely straight in several groups section and under extend transversely straight section, upper longitudinal extended connecting section, lower vertical
It is vertically connected with section to extended connecting section, tail end, the tail end, which is vertically connected with section connection, will extend transversely straight section under on every group
The tail end connection of section is extended transversely straight, described longitudinally connected section connects the head end that section is extended transversely straight in adjacent sets
It connects, is connected the head end for extending transversely straight section under adjacent sets for longitudinally connected section under described, described longitudinally connected section under
Shifted to install between longitudinally connected section, described longitudinally connected section from top across horizontal linear extended segment, the lower longitudinal direction connects
Connect section from below across horizontal linear extended segment, the one side of the cold plate be provided be connected to three-dimensional cooling duct second into
Liquid mouth and the second liquid outlet；The outlet of first inlet and the second inlet and first heat exchanger channels, it is described
First liquid outlet and the second liquid outlet are connected to the reflux line.
5. a kind of cooling device of even film developing machine as claimed in claim 4, it is characterised in that: lateral straight line on described every group
Extended segment and under extend transversely straight section and be respectively positioned between two horizontal linear extended segments.
6. a kind of cooling device of even film developing machine as claimed in claim 5, it is characterised in that: three-dimensional cooling duct collection
In be located at cold plate middle part.
7. a kind of cooling device of even film developing machine as claimed in claim 6, it is characterised in that: be arranged on the reflux line
There is pressure sensor.
8. a kind of cooling device of even film developing machine as claimed in claim 7, it is characterised in that: elasticity installation on the cold plate
There is the contact type temperature sensor for detecting silicon wafer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821605513.5U CN208796024U (en) | 2018-09-29 | 2018-09-29 | The cooling device of even film developing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821605513.5U CN208796024U (en) | 2018-09-29 | 2018-09-29 | The cooling device of even film developing machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208796024U true CN208796024U (en) | 2019-04-26 |
Family
ID=66211317
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821605513.5U Active CN208796024U (en) | 2018-09-29 | 2018-09-29 | The cooling device of even film developing machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208796024U (en) |
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2018
- 2018-09-29 CN CN201821605513.5U patent/CN208796024U/en active Active
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Address after: 215600 Fuxin Road, Zhangjiagang economic and Technological Development Zone, Suzhou, Jiangsu 2 Patentee after: Jiangsu jinyuda Semiconductor Co.,Ltd. Address before: 215600 Suzhou jinyuda Industrial Co., Ltd., No.2, Fuxin Road, Zhangjiagang Economic and Technological Development Zone, Suzhou City, Jiangsu Province Patentee before: SUZHOU JYD INDUSTRIAL Co.,Ltd. |