CN208795365U - A kind of imaging detection chip of adjustable polarization and spectrum - Google Patents
A kind of imaging detection chip of adjustable polarization and spectrum Download PDFInfo
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- CN208795365U CN208795365U CN201821563280.7U CN201821563280U CN208795365U CN 208795365 U CN208795365 U CN 208795365U CN 201821563280 U CN201821563280 U CN 201821563280U CN 208795365 U CN208795365 U CN 208795365U
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Abstract
The utility model discloses the imaging detection chips of a kind of adjustable polarization and spectrum, including being arranged in parallel from top to bottom, and the identical electricity of glazed area adjusts polarization module, electricity adjusts spectroscopic module, and light-sensitive array, electricity adjusts polarization module to include electric tuningout vibration pattern electrode trace layer disposed in parallel from top to bottom, first substrate, electric tuningout vibration pattern electrode, first liquid crystal alignment layer, first liquid crystal layer, second substrate, and optical media player, electricity adjusts spectroscopic module to include third substrate disposed in parallel from top to bottom, first electricity light modulation spectrum electrode, second liquid crystal alignment layer, second liquid crystal layer, third liquid crystal alignment layer, second electricity light modulation spectrum electrode, and the 4th substrate.The utility model, which can solve, to be of limited application existing for existing polarization imaging Detection Techniques, cannot achieve the technical issues of spectrum polarization optical detection existing for the technical issues of capacity usage ratio is low, detection performance can be influenced by grating and existing spectrum light imaging detection technology.
Description
Technical field
The utility model belongs to optical precision measurement control and imaging detection technical field, can more particularly, to one kind
Adjust the imaging detection chip of polarization and spectrum.
Background technique
So far, it is seen that light and infrared focal plane imaging Detection Techniques have been obtained for fast development, and in lasting increasing
Big array scale, reduce photosensitive elemental size, using quantum photosensitive structure, improve the efficiency of light energy utilization, enhancing photoelectric sensitivity and
Noise etc. is reduced constantly to be broken through.The maximum array scale of commercial visible light and near-infrared monolithic imaging detector is current
More than hundred million Pixel-levels, infrared focal plane imaging array is more than ten million Pixel-level, the imaging detection battle array based on chip splicing
Column scale, which has reached, is only dependent upon this degree of optical system.Nevertheless, existing imaging detection technology still seriously lags
In increasingly sophisticated target acquisition and identification demand.
To solve the above-mentioned problems, researchers develop two kinds of imaging detection methods: the first is spectrum light imaging detection
Technology, the i.e. stratification based on multi-spectral imaging photosensitive structure/space-variant framework obtain can modulation spectral image information；It is for second
Polarization imaging Detection Techniques mainly pass through Pixel-level polarimetry and polarize graphic operation, obtain the adjustable of target light wave
Polarization characteristic and the image information that is orientated is vibrated from excellent based on light vector is specific.
However, above two imaging detection method haves the defects that some can not ignore: firstly, polarization imaging detects skill
Art is merely capable of working under polarization mode, is of limited application based on not powered Detection Techniques；Secondly, polarizing
As Detection Techniques generally use metal grating structure, the presence of grating will lead to some light and be blocked by it and be not used to photoelectricity
Detection operation, to reduce capacity usage ratio；In addition, the light being blocked can also become ambient noise as Crosstalk, thus shadow
Ring detection performance；Finally, cannot achieve the detection of spectrum polarised light for composing light imaging detection technology.
Utility model content
Aiming at the above defects or improvement requirements of the prior art, the utility model provides the adjustable polarization of one kind and spectrum
Imaging detection chip, it is intended that solving to be of limited application existing for existing polarization imaging Detection Techniques, energy utilization
It cannot achieve spectrum existing for the technical issues of rate is low, detection performance can be influenced by grating and existing spectrum light imaging detection technology
The technical issues of polarizing optical detection.
To achieve the above object, according to the one aspect of the utility model, a kind of adjustable polarization and spectrum are provided
Imaging detection chip, including be arranged in parallel from top to bottom and glazed area it is identical electricity adjust polarization module, electricity light modulation spectrum mould
Block and light-sensitive array, electricity adjust polarization module to include electric tuningout vibration pattern electrode trace layer, first disposed in parallel from top to bottom
Substrate, electric tuningout vibration pattern electrode, the first liquid crystal alignment layer, the first liquid crystal layer, the second substrate and optical media player, electricity are adjusted
Spectroscopic module includes that electrode, the second liquid crystal alignment layer, the second liquid are composed in third substrate disposed in parallel, the first electricity light modulation from top to bottom
Crystal layer, third liquid crystal alignment layer, the second electricity light modulation spectrum electrode and the 4th substrate, electric tuningout vibration pattern electrode include m*n single
First electricity tuningout vibration electrode, wherein m and n is greater than or equal to 1 integer, and each unit electricity tuningout vibration electrode includes 4 opposite
In the grating that X-direction and Y direction are symmetrically arranged, the both ends of each grating are provided with a pin, a pair of of metal wire point
It is not stretched out from two pins of each grating, after passing perpendicularly through the first substrate and electric tuningout vibration pattern electrode trace layer, respectively
It is connected to external voltage signal U1, a pair of of metal wire composes electrode from the first electricity light modulation respectively and the second electricity dims the same of spectrum electrode
Side is drawn, and is connected respectively to external voltage signal U2Both ends, and have U1≠U2。
Preferably, one of grating is relative to X-direction in+45 degree, the two gratings difference adjacent with the grating
It is relative to X-direction in 90 degree and 0 degree, another grating for being in diagonal with the grating, which is relative to X-direction, is in-
45 degree；
Preferably, the imaging detection chip further comprises anti-reflection film, is set to electric tuningout vibration pattern electrode lead
The top of layer, the normal optical antireflective material by being suitable for visible ray spectral domain or infrared spectral domain are made, arrive with a thickness of 100 nanometers
800 nanometers.
Preferably, the first substrate, the second substrate, third substrate and the 4th substrate are by light transmission quartz, optics tree
Rouge, glass, and/or plastics are made, with a thickness of 1 millimeter to 5 millimeters；
Preferably, the thickness of the first liquid crystal layer and the second liquid crystal layer is between 5 microns to 500 microns, the first electricity light modulation spectrum
Electrode and the second electricity light modulation spectrum electrode are made of metal material, and thickness is between 50 nanometers to 500 nanometers.
Preferably, light-sensitive array uses visible or infrared light sensitive array, and array scale is taking for p*q, wherein p and q
Value range is between 64 to 10000.
In general, it can obtain down the above technical solutions conceived by the present invention are compared with the prior art,
Column the utility model has the advantages that
1, the utility model is by adjusting polarization module and electricity that spectroscopic module is adjusted to connect respectively from different external voltage electricity,
Mutually independent liquid crystal base electric separation electricity light modulation polarised light operation and the spectrum light wave operation of liquid crystal base electric separation electricity tune are realized, to solve
Existing polarization imaging Detection Techniques are merely capable of the technical issues of realizing polarization optical detection, and it is biggish to be that the utility model has
Application range；
2, it adjusts polarization module and electricity to adjust spectroscopic module using accurately controlled electricity due to the utility model, has high
Structure, the stability of electronics, electric light and photoelectric parameter, and have the advantages that capacity usage ratio is high, detection accuracy is high；
3, the utility model makes imaging detection by image information by surveying the imagings wave parameter such as light modulation polarization and spectrum
Control, constraint and the guidance of the factors such as reason, priori knowledge, manual intervention are arranged so as to effectively adapt to complex environment and antagonism
It applies；
4, the utility model is solidificated in two solely by the way that light polarization is surveyed conditioning function and composes light wave electric separation electricity conditioning function respectively
In vertical module and hybrid integrated, have the advantages that structure is dexterous, consolidates；
5, since the imaging detection chip body of the utility model is that the electricity being encapsulated in chip carrier adjusts polarization module, electricity
Adjust spectroscopic module and imaging light-sensitive array, be conveniently inserted in the optical path, easily with conventional visible or infrared optics, photoelectricity, machinery
The matching such as structure and coupling.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the imaging detection chip of the adjustable polarization of the utility model and spectrum；
Fig. 2 is the perspective view of the imaging detection chip of the adjustable polarization of the utility model and spectrum；
Fig. 3 is the schematic diagram of the utility model electricity tuningout vibration pattern electrode；
Fig. 4 is the arrangement angle schematic diagram of 4 gratings included by the utility model unit electricity tuningout vibration electrode.
Fig. 5 shows 4 gratings included by the utility model unit electricity tuningout vibration electrode.
In all the appended drawings, identical appended drawing reference is used to denote the same element or structure, in which:
1: anti-reflection film, 2: electric tuningout vibration pattern electrode trace layer, 3: the first substrates, 4: electric tuningout vibration pattern electrode, 5: the
One liquid crystal alignment layer, 6: the first liquid crystal layers, 7: the second substrates, 8: optical media player, 9: third substrate, 10: the first electricity light modulation spectrums
Electrode, 11: the second liquid crystal alignment layers, 12: the second liquid crystal layers, 13: third liquid crystal alignment layer, 14: the second electricity light modulation spectrum electrodes,
15: the four substrates, 16: light-sensitive array.
Specific embodiment
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation
Example, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only used to explain
The utility model is not used to limit the utility model.In addition, institute in the various embodiments of the present invention described below
The technical characteristic being related to can be combined with each other as long as they do not conflict with each other.
As depicted in figs. 1 and 2, the imaging detection chip of the adjustable polarization of the utility model and spectrum can be encapsulated in shell
It is interior, including be arranged in parallel from top to bottom and glazed area it is identical electricity adjust polarization module, electricity adjust spectroscopic module, Yi Jiguang
Sensitive array, electricity adjust polarization module to include anti-reflection film 1 disposed in parallel from top to bottom, electric tuningout vibration pattern electrode trace layer 2, first
Substrate 3, electric tuningout vibration pattern electrode 4, the first liquid crystal alignment layer 5, the first liquid crystal layer 6, the second substrate 7 and optical media player
8；Electricity adjusts spectroscopic module to include that third substrate 9, first disposed in parallel is electric from top to bottom and dims spectrum electrode 10, the second liquid crystal aligning
The 11, second liquid crystal layer 12 of layer, third liquid crystal alignment layer the 13, second electricity light modulation spectrum electrode 14 and the 4th substrate 15.
Anti-reflection film 1 is made of the normal optical antireflective material for being suitable for visible ray spectral domain or infrared spectral domain, with a thickness of
100 nanometers to 800 nanometers.
First substrate 3 is made of light transmission quartz, optical resin, glass, and/or plastic or other material, with a thickness of 1 millimeter
To 5 millimeters.
As shown in figure 3, electric tuningout vibration pattern electrode 4 includes m*n (wherein m and n is greater than the integer equal to 1) units
Electric tuningout vibration electrode.Each unit electricity tuningout vibration electrode includes 4 gratings being symmetrically arranged relative to X-direction and Y direction,
The both ends of each grating are provided with a pin, and one of grating is relative to X-direction in+45 degree, with the grating phase
Two adjacent gratings are relative to X-direction respectively in 90 degree and 0 degree, are in another grating of diagonal with the grating
Relative to X-direction in -45 degree, as shown in Figure 4 and Figure 5.Certainly, Fig. 5 can also be seen as when electric tuningout vibration pattern electrode
When only including 1 unit electricity tuningout vibration electrode, the arrangement of grating in unit electricity tuningout vibration electrode.
It should be noted that the position of four gratings can freely be set in unit electricity tuningout vibration electrode, and do not limit to
The position shown in Fig. 4 and Fig. 5.
A pair of of metal wire is stretched out from two pins of each grating respectively, passes perpendicularly through electricity tuningout vibration pattern electrode 4
After first substrate 3 of top and electric tuningout vibration pattern electrode trace layer 2, it is connected respectively to external voltage signal U1,(i,j),k；Wherein
I indicates line number of the grating in electric tuningout vibration pattern electrode, and value is 1 between m, and j indicates that the grating shakes in electric tuningout
Row number in pattern electrode, value are 1 between n, and k is angle of the grating relative to X-direction；
It should be noted that all metal wires drawn may be coupled to the same external voltage signal, also can connect
To different external voltage signals.
For example, for the 2nd row the 3rd column unit electricity tuningout vibration electrode in orientation with X-axis in+45 degree gratings and
Speech after two metal wires drawn from its both ends pin are by the first substrate 3, is drawn from electric tuningout vibration pattern electrode trace layer 2,
And it is connected respectively to external voltage signal U1,(2,3),+45。
The thickness of first liquid crystal layer 6 and the second liquid crystal layer 12 is between 5 microns to 500 microns.
Second substrate 7, third substrate 9 and the 4th substrate 15 are identical with the material of the first substrate 3.
A pair of of metal wire is drawn from the same side of the first electricity light modulation spectrum electrode 10 and the second electricity light modulation spectrum electrode 14 respectively, and
It is connected respectively to external voltage signal U2Both ends.
First electricity light modulation spectrum electrode 10 and the second electricity light modulation spectrum electrode 14 are made of metal material, such as gold, silver, aluminium
Deng thickness is between 50 nanometers to 500 nanometers.
Light-sensitive array 16 uses visible or infrared light sensitive array, and array scale is the value range of p*q, wherein p and q
It is between 64 to 10000.
The utility model has the advantage of, by the functions such as the automatically controlled polarization of coupling liquid crystal base, automatically controlled spectrum and face be gust photosensitive,
Integrated photonics image detection framework is constituted, the imaging detection operation of chip-scale control light (" control " i.e. spectrum and polarization) is executed,
On the basis of measurement, modulation light polarization and spectrum etc., make photonics image detection by Image Information Processing, priori knowledge or manual intervention
Deng control, constraint or guidance, there is complex environment factor or the antagonism measure of adapting to, compatible active/passive imaging detection identification,
Micro-nano wave beam controlled efficiency is high, and light field is adaptable, and structure size and quality are small, low in energy consumption, easily with other optics, photoelectricity, machine
The advantages of tool and electronics structure Coupling.
As it will be easily appreciated by one skilled in the art that the above is only the preferred embodiment of the utility model only, not
To limit the utility model, any modification made within the spirit and principle of the present invention, equivalent replacement and change
Into etc., it should be included within the scope of protection of this utility model.
Claims (6)
1. a kind of imaging detection chip of adjustable polarization and spectrum, including be arranged in parallel from top to bottom and glazed area is complete
Identical electricity adjusts polarization module, electricity to adjust spectroscopic module and light-sensitive array, which is characterized in that
Electricity adjusts polarization module to include electric tuningout vibration pattern electrode trace layer disposed in parallel, the first substrate, electric tuningout from top to bottom
Shake pattern electrode, the first liquid crystal alignment layer, the first liquid crystal layer, the second substrate and optical media player；
It includes that third substrate disposed in parallel, the first electricity dim spectrum electrode, the second liquid crystal aligning from top to bottom that electricity, which adjusts spectroscopic module,
Layer, the second liquid crystal layer, third liquid crystal alignment layer, the second electricity light modulation spectrum electrode and the 4th substrate；
Electric tuningout vibration pattern electrode includes m*n unit electricity tuningout vibration electrode, and wherein m and n is greater than or equal to 1 integer；
Each unit electricity tuningout vibration electrode includes 4 gratings being symmetrically arranged relative to X-direction and Y direction, each grating
Both ends be provided with a pin；
A pair of of metal wire is stretched out from two pins of each grating respectively, passes perpendicularly through the first substrate and electricity adjusts pattern of polarization electricity
After the trace layer of pole, it is connected respectively to external voltage signal U1；
A pair of of metal wire is drawn from the same side of the first electricity light modulation spectrum electrode and the second electricity light modulation spectrum electrode respectively, and is separately connected
To external voltage signal U2Both ends, and have U1≠U2。
2. imaging detection chip according to claim 1, which is characterized in that one of grating is relative to X-direction
In+45 degree, two gratings adjacent with the grating are relative to X-direction respectively in 90 degree and 0 degree, are in diagonal line with the grating
Another grating in direction is relative to X-direction in -45 degree.
3. imaging detection chip according to claim 1, which is characterized in that further comprise anti-reflection film, be set to electricity
The top of tuningout vibration pattern electrode trace layer, the antireflection material by being suitable for visible ray spectral domain or infrared spectral domain are made,
With a thickness of 100 nanometers to 800 nanometers.
4. imaging detection chip according to claim 1, which is characterized in that the first substrate, the second substrate, third substrate,
And the 4th substrate be made of light transmission quartz, optical resin, glass, and/or plastics, with a thickness of 1 millimeter to 5 millimeters.
5. imaging detection chip according to claim 1, which is characterized in that
The thickness of first liquid crystal layer and the second liquid crystal layer is between 5 microns to 500 microns；
First electricity light modulation spectrum electrode and the second electricity light modulation spectrum electrode are made of metal material, and thickness is 50 nanometers to 500
Between nanometer.
6. imaging detection chip according to claim 1, which is characterized in that light-sensitive array is quick using visible or infrared light
Array, array scale are that the value range of p*q, wherein p and q are between 64 to 10000.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN201821563280.7U CN208795365U (en) | 2018-09-21 | 2018-09-21 | A kind of imaging detection chip of adjustable polarization and spectrum |
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| CN201821563280.7U CN208795365U (en) | 2018-09-21 | 2018-09-21 | A kind of imaging detection chip of adjustable polarization and spectrum |
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| CN208795365U true CN208795365U (en) | 2019-04-26 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110207818A (en) * | 2019-05-28 | 2019-09-06 | 上海集成电路研发中心有限公司 | A kind of polarized ir line detector structure |
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2018
- 2018-09-21 CN CN201821563280.7U patent/CN208795365U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110207818A (en) * | 2019-05-28 | 2019-09-06 | 上海集成电路研发中心有限公司 | A kind of polarized ir line detector structure |
| CN110207818B (en) * | 2019-05-28 | 2021-07-20 | 上海集成电路研发中心有限公司 | Polarized infrared detector structure |
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