CN208791175U - A kind of porous graphene heart sound detection sensor - Google Patents
A kind of porous graphene heart sound detection sensor Download PDFInfo
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- CN208791175U CN208791175U CN201821183864.1U CN201821183864U CN208791175U CN 208791175 U CN208791175 U CN 208791175U CN 201821183864 U CN201821183864 U CN 201821183864U CN 208791175 U CN208791175 U CN 208791175U
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- porous graphene
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Abstract
The utility model discloses a kind of porous graphene heart sound detection sensors, the porous graphene heart sound detection sensor includes strain sensitive area and electrode, the strain sensitive area includes porous graphene film and the polymer elastomer wrapping layer for wrapping up the porous graphene film, and the polymer elastomer of the polymer elastomer wrapping layer fills the gap of the porous graphene film.The problem of sensor had both had the advantages that porous graphene bring was highly sensitive, and it is excessively loose in turn avoid porous graphene structure, was easy to happen broken invalid.The utility model is especially suitable for wearable heart sound detection device.
Description
Technical field
The utility model relates to bio-signal acquisition sensor fields, detect more particularly to a kind of porous graphene heart sound
Sensor.
Background technique
With the raising of global economy level and the change of resident's eating habit, the disease incidence of a variety of cardiovascular diseases also by
It gradually rises, becomes one of the principal disease for threatening global people's life health.The diagnosis of cardiovascular disease mainly utilizes painstaking effort
Pipe functional parameter is realized.Clinic carry out cardiovascular function measurement, for guarantee measurement accuracy accuracy, mostly invasive measurement,
Very big pain and wound are brought to sufferer, and test equipment is sufficiently complex, expensive, is not suitable for promoting the use of, it is difficult to make
For wearable device, wear for a long time, detection.Therefore, noninvasive, convenient and inexpensive cardiovascular function parameter measurement side is studied
Method has very high value.
When cardiechema signals are heartbeats, due to the contraction and diastole of heart, lead to blood flow impact ventricle wall and main artery
The mechanical oscillation for waiting positions and generating, are transferred to the voice signal that the wall of the chest generates by surrounding tissue.Based on cardiechema signals
Angiocarpy detection is the vibration by detecting wall of the chest particular surface, to be detected and analyzed to human body cardiovascular function, is had
Have the advantages that convenient, noninvasive.But cardiechema signals are fainter, and frequency is higher, and needing to design has enough sensitivity, broadband
Width, Grazing condition, bio-compatibility sensor, with realize enough accurately, in real time cardiechema signals measure.
Induced with laser graphene has the characteristics that short texture, porous, fluffy, by outer as a kind of porous graphene
After power (such as pressure of wall of the chest surface mechanical oscillation), easily deformation occurs for structure, to bring greatly changing for conductive capability
Become.Induced with laser graphene has the characteristics that this high sensitivity, is the excellent sensitive material as heart sound detection sensor.
However since its structure is excessively loose, it is easy to happen broken invalid.
Utility model content
The main purpose of the utility model is to overcome the deficiencies in the prior art, provide a kind of porous graphene heart sound detection
Sensor, making it not only has the advantages that porous graphene bring high sensitivity, but also avoids porous graphene structure excessively loose,
The problem of being easy to happen broken invalid.
To achieve the above object, the utility model uses following technical scheme:
A kind of porous graphene heart sound detection sensor, including strain sensitive area and electrode, the strain sensitive area include
Porous graphene film and the polymer elastomer wrapping layer for wrapping up the porous graphene film, the polymer elastomer packet
The polymer elastomer of covering layer fills the gap of the porous graphene film.
Further:
The porous graphene film is induced with laser graphene film.
The porosity of the porous graphene film is 25%-65%.
The porous graphene film with a thickness of 40-200 μm.
The porous graphene film is formed as at least one of snakelike, vortex-like linear and linear figure.
The line width of the figure is 30-2000 μm, it is preferable that the width of the corner of serpentine pattern is 2 times to 4 of line width
Times.
The polymer elastomer is polydimethylsiloxane, silicon rubber or polyurethane rubber.
Material for generating the induced with laser graphene film is polyimides or polyetherimide.
The utility model has the following beneficial effects:
The porous graphene heart sound detection sensor of the utility model includes strain sensitive area and electrode, wherein strain sensitive
Area includes porous graphene film and the polymer elastomer wrapping layer for wrapping up the porous graphene film, and porous graphene is thin
The gap of film is filled by polymer elastomer, and therefore, which had both had the advantages that porous graphene bring was highly sensitive,
The problem of in turn avoiding that its structure is excessively loose, being easy to happen broken invalid.The structural stability of the sensor is good, and deformation can weigh
Renaturation is good, and deformable range is big, high sensitivity, and bio-compatibility is good, easy to process, at low cost.
Specifically, the strain sensitive area of the utility model sensor be under pressure, pulling force, bending or torsion the effects of when,
Deformation occurs for polymer elastomer, causes the state that contacts with each other between embedded porous graphene to change, device resistance
It can accordingly change.The strain transducer coefficient of optimization is up to 236.2.The sensor is attached at wall of the chest heartbeat, the heart
Dirty mechanical oscillation act on sensor sensing area, can bring strain transducer and resistance variations.Polymer elastomer has
Flexibility, deformability is strong, and since porous graphene structure easily deforms, flexibility, the ductility of the sensor
It is also very big with measurable range, it can be achieved that 100% deformation so that the transducer sensitivity is very high.In a preferred embodiment, it adopts
Thin polymer film is eliminated with wet-etching technology, the flexible sensor with a thickness of 40 μm can be produced, to the sound of 1400Hz
Sound signal has response.
Human heart sound signal can be converted to sensor resistance change by heart sound detection sensor described in the utility model
Change, detected cardiechema signals waveform perceived using electric signal, have high sensitivity, high flexibility, deformability it is big, it is low at
The advantages that sheet, easy processing, good bio-compatibility.The utility model is especially suitable for wearable heart sound detection device.
Detailed description of the invention
Fig. 1 is the heart sound detection sensor structural schematic diagram of the utility model embodiment；
Fig. 2 is the heart sound detection sensor sensitizing range diagrammatic cross-section of the utility model embodiment；
Fig. 3 is the heart sound detection sensor electrode diagrammatic cross-section of the utility model embodiment；
Fig. 4 is the induced with laser porous graphene SEM figure in the utility model embodiment；
Fig. 5 is the flow diagram for making the heart sound detection sensor of the utility model embodiment；
Fig. 6 is the cardiechema signals example surveyed using the sensor of the utility model embodiment.
Specific embodiment
It elaborates below to the embodiments of the present invention.It is emphasized that following the description is only example
Property, rather than in order to limit the scope of the utility model and its application.
Refering to fig. 1 to Fig. 4, in one embodiment, a kind of porous graphene heart sound detection sensor, including strain sensitive
Area and electrode district, the strain sensitive area include porous graphene film 1 and the polymer for wrapping up the porous graphene film 1
Elastomer wrapping layer, the polymer elastomer 2 of the polymer elastomer wrapping layer fill the sky of the porous graphene film 1
Gap.
Electrode district may include porous graphene, polymer elastomer, conductive silver paste 4 and the electricity formed by conductive metal
Pole 3 etc..The conductive metal of electrode 3 can be copper or aluminium etc., can also to add tin made membrane terminal convenient for wiring.
In a preferred embodiment, the porous graphene film 1 is induced with laser graphene film.
In a preferred embodiment, the porosity of the porous graphene film 1 is 25%-65%.
In a preferred embodiment, the porous graphene film 1 with a thickness of 40-200 μm.
In a preferred embodiment, the porous graphene film 1 is formed as in snakelike, vortex-like linear and linear at least
A kind of figure.
In more preferred embodiment, the line width of 1 figure of porous graphene film is 30-2000 μm.
In a kind of specific preferred embodiment, porous graphene film 1 uses the corner of serpentine pattern and serpentine pattern
The width at place is 2 times to 4 times of line width.
In a preferred embodiment, the polymer elastomer is polydimethylsiloxane, silicon rubber or polyurethane rubber
Glue.Particularly preferably use PDMS.
In a preferred embodiment, the porous graphene film 1 is generated using laser ablation of polymer film, the polymerization
The material of object film is polyimides or polyetherimide.
In more preferred embodiment, the wavelength of the laser is 405nm-10.6 μm, and power is that 4W to 10W is adjustable.
It is highly preferred that the laser is carbon dioxide laser (10.6 μm of wavelength) or blue laser (wavelength 445nm).
In more preferred embodiment, the relative motion rate of thin polymer film described in laser ablation is 50mm/s to 500mm/
s。
In a preferred embodiment, the polymer elastomer is by liquid-applied in hot on the porous graphene film 1
Curing molding.
Refering to Fig. 5, a method of making the porous graphene heart sound detection sensor, comprising the following steps:
S1, Kapton 6 is covered on 5 surface of silicon wafer；
S2, pass through Kapton 6 described in laser ablation, inductive formation induced with laser graphene film, i.e. porous stone
Black alkene film 1；
S3, the spin coating PDMS on the induced with laser graphene film are formed after solidification and are coated the induced with laser graphite
PDMS film, that is, polymer elastomer 2 of the one side of alkene film；
S4, by the Kapton 6 with the induced with laser graphene film, the PDMS film from the silicon wafer
It is stripped down on 5, then removes the Kapton from the part under removing, in the induced with laser graphite exposed
The surface of alkene film makes electrode；And it is also another in region of the surface of the porous graphene film 1 exposed in addition to electrode district
External key unifies layer PDMS film, and PDMS film wraps up porous graphene film 1 from two sides jointly, forms strain sensitive area.
In step S3-S4, it is solid that spin coating, solidification PDMS, which are by liquid thermoset, for permeating, covering porous graphite
Alkene forms the package of side, and the other side passes through the PDMS film being cured and device carries out bonding technology, realizes device bilateral envelope
Dress.Bonding technology can be covered to avoid electrode by PDMS.Preferably, bonding technology has induced with laser using oxygen plasma treatment
The surface to be bonded of the sensor of graphene film and another cured PDMS film of layer, handling duration are about 2 minutes to 3 points
The oxygen plasma treatment surface of the two is bonded rapidly by clock, after treatment, and small using 80 DEG C of bakings 2 in baking oven
When.
The feature and advantage of specific embodiment are further described below in conjunction with attached drawing.
As shown in Figure 1, the embodiment of the sensor includes (porous with polymer elastomer 2 and induced with laser graphene
Graphene film 1) composition strain sensitive area and porous graphene film 1, polymer elastomer 2, metal electrode 3 and lead
The electrode district that electric silver paste 4 forms.The cross-sectional view of sensitizing range is as shown in Fig. 2, polymer elastomer includes covering porous stone from one side
The polymer elastomer 2 of black alkene film 1 and the polymer elastomer 2 of bonding protection, cover the polymerization of porous graphene film 1
The polymer elastomer of package porous graphene film 1 is collectively formed in object elastomer 2 and the polymer elastomer 2 of bonding protection
Wrapping layer；The cross-sectional view of electrode district is as shown in figure 3, include porous graphene film 1, the polymer elasticity as electrode district part
The electrode 3 of body 2, conductive silver paste 4 and metal.Conductive silver paste 4 is by a part coated on porous graphene film 1, then toasts
Solidification, can provide better electrical contact for the deposition of the electrode 3 of metal or attaching.
In a particular embodiment, porous graphene film 1 be induced with laser graphene, have the characteristics that it is loose, porous (such as
Shown in Fig. 4), it is generated using the specific thin polymer film of laser ablation (such as polyimides, polyetherimide).The wavelength of laser,
Power and Recession rate can be adjusted as needed.
In some preferred embodiments, the sensor sensing area figure of laser ablation is straight line, snakelike or vortex-like linear.
Line width can be selected at 30 μm to 2mm according to laser precision.The corner width of serpentine pattern can be 2 times to 4 of line width
Times.
In other preferred embodiments, the porosity of the porous graphene film as sensitive layer is 25%-65%,
With a thickness of 40-200 μm, more preferably with a thickness of 40 μm.The polymer elastomer be PDMS silicon rubber or polyurethane rubber, it is excellent
Choosing is PDMS.
As shown in figure 5, attaching Kapton 6 in specific production on smooth 5 surface of silicon wafer first, then passing through
7 laser ablation of laser, inductive formation induced with laser graphene, i.e. generation sensor porous graphene film pattern, using just
Hexane dilutes PDMS, then is cast in patterned surface, and spin coating PDMS film after standing controls sensor thickness by revolving speed.It is preferred that
, n-hexane and PDMS 1:1 in mass ratio dilute, and spin coating revolving speed is 1000rpm.It will be thin with induced with laser graphene, PDMS
The Kapton 6 of film is stripped down from silicon wafer 5, by wet etching, removes Kapton 6.Wet etchant
The alkaline solution prepared using ethanol amine, KOH, deionized water.By heating water bath, polyimide through hydrolysis can be etched, be left
The colorimetric sensor films of PDMS, induced with laser graphene composition.Conductive silver paste 4 is coated in the electrode area surfaces of etching exposure again,
Conductive tape, production electrode 3 are attached after solidification.
Preferably, it can choose different sensor sensing area figures, it is such as snakelike or vortex-like linear, measure different characteristic
Signal.It can be according to a variety of electrode connection modes of distinct interface formal character of external circuits, such as conductive metal, cover connectors
Deng.
Shown in Fig. 6, for the cardiechema signals example for using the heart sound detection sensor to measure.
Make example
Use conductive copper adhesive tape as electrode in this example, as shown in figure 5, the heart sound detection sensor manufacturing process is as follows:
S1 is cleaned by ultrasonic 4 cun of silicon wafers using ethyl alcohol, deionized water solution, is dried with after being dried with nitrogen.Use acetone, different
Propyl alcohol, deionized water solution are cleaned by ultrasonic the Kapton of 80 μ m-thicks, are dried with after being dried with nitrogen.Using PDMS by polyamides
Imines film 6 is attached on silicon wafer 5, and is heating and curing.
S2, using the carbon dioxide laser 7 of 10.6 mum wavelengths, according to power 4.2W, the ginseng of Recession rate 250mm/s
Number, ablation generate length 20mm, and the induced with laser graphene of the rectangular graph of width 2mm is as sensor sensing material.
S3 dilutes PDMS with n-hexane 1:1 in mass ratio, and revolves the PDMS solution after dilution by the revolving speed of 1000rpm
It is coated in sensor surface.30 minutes are stood, in using 80 DEG C of heating 10 minutes on hot plate, then full wafer device is placed in 80 DEG C of baking ovens
Heating 2 hours, makes PDMS be formed by curing PDMS film.
Polyimides and colorimetric sensor films are stripped down from silicon wafer 5, use ethanol amine, potassium hydroxide, deionization by S4
Kapton is etched and is removed under 80 DEG C of water bath conditions by the alkaline solution of water 2:3:5 in mass ratio mixing.Etching is sudden and violent
The sensor electrode surface of exposing coats conductive silver paste 4, and solidifies.Conductive copper adhesive tape is attached in silver paste as electrode 3.According to
The parameter that PDMS film makes in step S3 is solidified with 4000rpm revolving speed and is made the thinner PDMS film of another layer.Use oxygen
The surface to be bonded of sensor and another layer cured PDMS film of the plasma treatment with induced with laser graphene film,
Handling duration is about 2 minutes to 3 minutes, and two-part oxygen plasma treatment surface is bonded rapidly by after treatment, and
It is toasted 2 hours in baking oven using 80 DEG C.Complete sensor production.
The above content is specific/preferred embodiment further detailed description of the utility model is combined, no
It can assert that the specific implementation of the utility model is only limited to these instructions.For the common skill of the utility model technical field
For art personnel, without departing from the concept of the premise utility, the embodiment that these have been described can also be made
Some replacements or modifications, and these substitutions or variant all shall be regarded as belonging to the protection scope of the utility model.
Claims (8)
1. a kind of porous graphene heart sound detection sensor, which is characterized in that described to answer including strain sensitive area and two electrodes
Become the polymer elastomer wrapping layer that sensitizing range includes porous graphene film and the package porous graphene film, it is described poly-
The polymer elastomer for closing object elastomer wrapping layer fills the gap of the porous graphene film, the strain sensitive Qu Weichang
Strip structure, described two electrodes are respectively formed at the both ends in the strain sensitive area of string configuration, one of electrode
It is connected to another electrode by the strain sensitive area of string configuration, described two electrodes are thin from the porous graphene
One side surface of film is covered on the electrode district of the porous graphene film, the porous graphene film except electrode district it
The package porous stone is collectively formed in outer region, the polymer elastomer for covering the porous graphene film from both side surface
The polymer elastomer wrapping layer of black alkene film.
2. porous graphene heart sound detection sensor as described in claim 1, which is characterized in that the porous graphene film
For induced with laser graphene film.
3. porous graphene heart sound detection sensor as claimed in claim 1 or 2, which is characterized in that the porous graphene
The porosity of film is 25%-65%.
4. porous graphene heart sound detection sensor as claimed in claim 1 or 2, which is characterized in that the porous graphene
Film with a thickness of 40-200 μm.
5. porous graphene heart sound detection sensor as claimed in claim 1 or 2, which is characterized in that the porous graphene
Film is formed as at least one of snakelike, vortex-like linear and linear figure.
6. porous graphene heart sound detection sensor as claimed in claim 5, which is characterized in that the line width of the figure is
30-2000μm。
7. porous graphene heart sound detection sensor as claimed in claim 1 or 2, which is characterized in that the polymer elasticity
Body is polydimethylsiloxane, silicon rubber or polyurethane rubber.
8. porous graphene heart sound detection sensor as claimed in claim 2, which is characterized in that lured for generating the laser
The material for leading graphene film is polyimides or polyetherimide.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201821183864.1U CN208791175U (en) | 2018-07-25 | 2018-07-25 | A kind of porous graphene heart sound detection sensor |
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| CN201821183864.1U CN208791175U (en) | 2018-07-25 | 2018-07-25 | A kind of porous graphene heart sound detection sensor |
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| CN208791175U true CN208791175U (en) | 2019-04-26 |
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