CN208776834U - A kind of filming equipment - Google Patents
A kind of filming equipment Download PDFInfo
- Publication number
- CN208776834U CN208776834U CN201821201263.9U CN201821201263U CN208776834U CN 208776834 U CN208776834 U CN 208776834U CN 201821201263 U CN201821201263 U CN 201821201263U CN 208776834 U CN208776834 U CN 208776834U
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- Prior art keywords
- hydrogen
- detecting element
- filming equipment
- exhaust pipe
- detection
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Abstract
The utility model discloses a kind of filming equipment, is related to hydrogen detection technique field, designs whether to have hydrogen in the transport chamber in detection filming equipment.The filming equipment includes: hydrogen gas detector；The hydrogen gas detector includes: detection pipe, and one end of the detection pipe is connected to the exhaust pipe；Hydrogen detecting element, the other end of the detection pipe are connected to the hydrogen detecting element；Element is prompted, the prompt element is electrically connected with the hydrogen detecting element, and is configured to prompt have hydrogen in the detection pipe.Filming equipment provided by the utility model has hydrogen detection function.
Description
Technical field
The utility model relates to hydrogen detection technique fields more particularly to a kind of plated film with hydrogen detection function to set
It is standby.
Background technique
Existing filming equipment, such as: chemical vapor deposition (CVD) filming equipment, low-pressure chemical vapor deposition (LPCVD)
Filming equipment, aumospheric pressure cvd (APCVD) or plasma enhanced chemical vapor deposition (PECVD) filming equipment
The not set hydrogen gas detector of transport chamber, but utilize exhaust pipe by the gas extraction in transport chamber and direct emission, reality
In, transport chamber may remain the hydrogen of reaction chamber leakage, and the heated easy firing of hydrogen even explodes, if by the gas with hydrogen
Direct emission can have security risk；Hydrogen under high temperature environment easily damages vacuum equipment, reduces equipment and uses the longevity
Life.
Utility model content
The embodiments of the present invention provide a kind of filming equipment, and main purpose is that whether have hydrogen in detection transport chamber
Gas.
In order to achieve the above objectives, the embodiments of the present invention adopt the following technical scheme that
A kind of filming equipment, the filming equipment include exhaust pipe and transport chamber, and the exhaust pipe and the transport chamber connect
It is logical, the filming equipment further include: hydrogen gas detector；The hydrogen gas detector includes:
Detection pipe, one end of the detection pipe are connected to the exhaust pipe；
Hydrogen detecting element, the other end of the detection pipe are connected to the hydrogen detecting element；
Element is prompted, the prompt element is electrically connected with the hydrogen detecting element, and is configured to prompt the detection pipe
It is interior that there is hydrogen.
Filming equipment provided by the embodiment of the utility model, can be in real-time detection exhaust pipe by hydrogen gas detector
Whether there is hydrogen, and then determines whether there is hydrogen in transport chamber, and standby signal is issued by prompt element, thus may be used
It avoids for the gas direct emission containing hydrogen being also convenient for existing between the transport chamber and reaction chamber of discovery filming equipment in time and let out
Leak phenomenon.
Optionally, the hydrogen detecting element is removably mounted on the exhaust pipe.
Optionally, the hydrogen detecting element is mounted on the exhaust pipe by U-bolt.
Optionally, the hydrogen detecting element is fixed on the base, and the pedestal is mounted on described by the U-bolt
On exhaust pipe.
Optionally, the hydrogen detecting element and the prompt element are integrated into hydrogen detection alarm.
Optionally, the hydrogen gas detector further include: dust filtering device, the entrance of the dust filtering device and institute
Detection pipe connection is stated, the outlet of the dust filtering device is connected to the hydrogen detecting element.
Optionally, the hydrogen gas detector further include: methane collection device, the entrance of the methane collection device and institute
The outlet of dust filtering device is stated, the outlet of the methane collection device is connected to the hydrogen detecting element.
Optionally, the hydrogen gas detector further include: drying device, the entrance of the drying device and the methane are received
The outlet of acquisition means, the outlet of the drying device are connected to the hydrogen detecting element.
Optionally, the detection pipe is threaded on the exhaust pipe.
Optionally, thread measurement hole is offered on the exhaust pipe, and the thread measurement hole is configured with dismountable stifled
Plug member.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of hydrogen gas detector provided by the embodiment of the utility model；
Fig. 2 is a kind of structural schematic diagram of filming equipment provided by the embodiment of the utility model.
Specific embodiment
The utility model embodiment filming equipment is described in detail with reference to the accompanying drawing.
Term " first ", " second " are used for description purposes only in the description of the present invention, and should not be understood as indicating
Or it implies relative importance or implicitly indicates the quantity of indicated technical characteristic." first ", " second " are defined as a result,
Feature can explicitly or implicitly include one or more of the features.In the description of the present invention, unless otherwise
Illustrate, the meaning of " plurality " is two or more.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " is pacified
Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally
Connection；It can be mechanical connection, be also possible to be electrically connected；Can be directly connected, can also indirectly connected through an intermediary,
It can be the connection of two element inner segments.For the ordinary skill in the art, above-mentioned art can be understood with concrete condition
The concrete meaning of language in the present invention.
The utility model embodiment provides a kind of filming equipment, and referring to Fig. 2, the filming equipment 1 includes transport chamber
102, substrate when specific plated film, is sent into transport chamber 102 by delivery port 103, then send by reaction chamber 101 and hydrogen gas detector
Enter the plated film that reaction chamber 101 carries out the substrate, the transport chamber 102 is connected to vacuum pump 2, is extracted and is transported by vacuum pump 2
Gas in chamber 102 makes transport chamber 102 be in vacuum, and using the exhaust pipe 3 connecting with the vacuum pump 2 by the gas of extraction
Body discharge, during plated film, can have hydrogen in the reaction chamber 101, if depositing between reaction chamber 101 and transport chamber 102
In leakage, can by hydrogen gas leakage to the transport chamber 102, the hydrogen gas detector that is provided by present embodiment can and
When detect the hydrogen of 102 internal leakage of transport chamber.
Referring to Fig.1, the hydrogen gas detector includes: detection pipe 4, and one end of the detection pipe 4 and the exhaust pipe 3 connect
It is logical；Hydrogen detecting element, the other end of the detection pipe 4 are connected to the hydrogen detecting element；Prompt element, the prompt member
Part is electrically connected with the hydrogen detecting element, and is configured to prompt have hydrogen in the detection pipe 4.
Specifically, the gas circulated in the exhaust pipe 3 enters after detection pipe 4 and flows into the hydrogen detecting element,
Detect in the gas whether have hydrogen by hydrogen detecting element, if there being hydrogen, so that it may issue by the prompt element
Standby signal, to inform operator.Exemplary, the hydrogen detecting element can be concentration sensor, the prompt element
It can be alarm, be also possible to illuminating part, be also possible to the sub-assembly of alarm and illuminating part, other kinds of hydrogen detection
Element and prompt element are also within the protection scope of the disclosure.
If there being hydrogen in transport chamber 102, the prompt element will issue standby signal, and such operator will obtain
Know there is hydrogen in the gas to circulate in exhaust pipe, exhaust approach easy to adjustment in time can also remind operator's transport chamber
Leakage phenomenon occurs, between reaction chamber convenient for handling in time the sealing structure between transport chamber and reaction chamber.
Exemplary, the detection pipe 4 can be hard tube, be also possible to hose, specific material without limitation, and detection pipe
Specific structure is also without limitation.
In order to facilitate replacing, repairing the hydrogen detecting element, the hydrogen detecting element is removably mounted at the row
Exemplary on tracheae 3, the hydrogen detecting element can be mounted on the exhaust pipe by clamping structure, exemplary, reference
Fig. 1, the hydrogen detecting element can be mounted on the exhaust pipe 3 by U-bolt 9.U-bolt materials are convenient, can
Reduce manufacturing cost, the fixation hydrogen detecting element that mainly U-bolt can be stable.
In order to be stably mounted at hydrogen detecting element on the exhaust pipe 3, first the hydrogen detecting element is passed through
Bolt is mounted on pedestal 10, then pedestal 10 is fixed on exhaust pipe 3 by U-bolt 9.Exemplary, the pedestal 10 can
To be steel plate, it is also possible to rubber slab, the concrete shape of the pedestal, material are without limitation.
Specifically, the hydrogen detecting element and the prompt element are integrated into hydrogen detection alarm 8, examined by hydrogen
Detection and prompt that alarm 8 realizes hydrogen are surveyed, the structure of entire hydrogen gas detector is simplified.
When specific detection, the gas extracted in exhaust pipe 3 may contain dust, in order to improve the hydrogen detecting element
The accuracy of measurement extends the service life of hydrogen detecting element, referring to Fig. 2, the hydrogen gas detector further include: dust mistake
Device 5 is filtered, the entrance of the dust filtering device 5 is connected to the detection pipe 3, the outlet of the dust filtering device 5 and institute
State the connection of hydrogen detecting element.In this way before gas enters hydrogen detecting element, 5 pairs of gas of the dust filtering device are first passed through
Body is filtered, and the dust particles in gas are filtered out, and avoiding dust particles from entering hydrogen detecting element influences the hydrogen
The performance of detecting element, and then influence measurement accuracy.Exemplary, the dust filtering device 5 is generally used in filtering gas
Silane dust.The dust filtering device includes strainer, and the aperture of strainer is less than the partial size of silane dust.
It is contaminated with methane in the gas usually circulated in the exhaust pipe, in order to collect the methane of not dust, reference
Fig. 2, the hydrogen gas detector further include: methane collection device 6, the entrance of the methane collection device 6 and the dust mistake
The outlet of device 5 is filtered, the outlet of the methane collection device 6 is connected to the hydrogen detecting element, passes through methane collection
Device collects the methane in gas, while also can be avoided influence of the methane to measurement data, specifically, the methane collection fills
Set including collection tank, there is in the collection tank organic solvent for dissolving in methane, by methane be dissolved in organic solvent with
By methane collection.
Also vapor can be contaminated in the gas circulated in the exhaust pipe, vapor influences measurement data in order to prevent
Accuracy, referring to Fig. 2, the hydrogen gas detector further include: drying device 7, the entrance of the drying device 7 and the first
The outlet of alkane collection device 6, the outlet of the drying device 7 are connected to the hydrogen detecting element, the drying device
Can be by the water vapor absorption in gas, exemplary, the drying device includes at least drying chamber and adsorbent.
Exemplary, the detection pipe 4 has two, and two are used to introduce gas into the hydrogen detecting element, when it
In detection pipe when leaking, another can also guarantee real-time detection to whether having hydrogen, two detection pipes
It is threaded on the exhaust pipe, is opened up on the exhaust pipe 3 there are two thread measurement hole 301, be threadedly coupled as a kind of
It is detachably connected, manufacturing process is easy, and practicability is good.The thread measurement hole is configured with dismountable type of tamper evidence, works as detection pipe
Be disassembled it is lower after, the thread measurement hole is blocked by the type of tamper evidence, avoids the gas leak in exhaust pipe.
In the description of this specification, particular features, structures, materials, or characteristics can be real in any one or more
Applying can be combined in any suitable manner in example or example.
Above description is only a specific implementation of the present invention, but the protection scope of the utility model is not limited to
In this, anyone skilled in the art within the technical scope disclosed by the utility model, can readily occur in variation
Or replacement, it should be covered within the scope of the utility model.Therefore, the protection scope of the utility model should be with the power
Subject to the protection scope that benefit requires.
Claims (10)
1. a kind of filming equipment, the filming equipment includes exhaust pipe and transport chamber, and the exhaust pipe is connected to the transport chamber,
It is characterized in that, the filming equipment further include: hydrogen gas detector；The hydrogen gas detector includes:
Detection pipe, one end of the detection pipe are connected to the exhaust pipe；
Hydrogen detecting element, the other end of the detection pipe are connected to the hydrogen detecting element；
Element is prompted, the prompt element is electrically connected with the hydrogen detecting element, and is configured to prompt tool in the detection pipe
There is hydrogen.
2. filming equipment according to claim 1, which is characterized in that the hydrogen detecting element is removably mounted at described
On exhaust pipe.
3. filming equipment according to claim 2, which is characterized in that the hydrogen detecting element is installed by U-bolt
On the exhaust pipe.
4. filming equipment according to claim 3, which is characterized in that the hydrogen detecting element is fixed on the base, institute
Pedestal is stated to be mounted on the exhaust pipe by the U-bolt.
5. filming equipment according to claim 1, which is characterized in that the hydrogen detecting element and the prompt element collection
Alarm is detected as hydrogen.
6. filming equipment according to claim 1, which is characterized in that the hydrogen gas detector further include:
Dust filtering device, the entrance of the dust filtering device are connected to the detection pipe, and the dust filtering device goes out
Mouth is connected to the hydrogen detecting element.
7. filming equipment according to claim 6, which is characterized in that the hydrogen gas detector further include:
Methane collection device, the entrance of the methane collection device and the outlet of the dust filtering device, the methane
The outlet of collection device is connected to the hydrogen detecting element.
8. filming equipment according to claim 7, which is characterized in that the hydrogen gas detector further include:
Drying device, the outlet of the entrance of the drying device and the methane collection device, the drying device go out
Mouth is connected to the hydrogen detecting element.
9. filming equipment according to claim 1, which is characterized in that the detection pipe is threaded in the exhaust pipe
On.
10. filming equipment according to claim 9, which is characterized in that thread measurement hole is offered on the exhaust pipe, and
The thread measurement hole is configured with dismountable type of tamper evidence.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821201263.9U CN208776834U (en) | 2018-07-26 | 2018-07-26 | A kind of filming equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821201263.9U CN208776834U (en) | 2018-07-26 | 2018-07-26 | A kind of filming equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208776834U true CN208776834U (en) | 2019-04-23 |
Family
ID=66154941
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821201263.9U Active CN208776834U (en) | 2018-07-26 | 2018-07-26 | A kind of filming equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208776834U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114318518A (en) * | 2021-12-31 | 2022-04-12 | 季华实验室 | Epitaxial furnace hydrogen absorption system and method, electronic equipment and storage medium |
-
2018
- 2018-07-26 CN CN201821201263.9U patent/CN208776834U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114318518A (en) * | 2021-12-31 | 2022-04-12 | 季华实验室 | Epitaxial furnace hydrogen absorption system and method, electronic equipment and storage medium |
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