CN208765670U - Optical displacement sensor device and the measuring scale for using the sensor device - Google Patents
Optical displacement sensor device and the measuring scale for using the sensor device Download PDFInfo
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- CN208765670U CN208765670U CN201820539425.3U CN201820539425U CN208765670U CN 208765670 U CN208765670 U CN 208765670U CN 201820539425 U CN201820539425 U CN 201820539425U CN 208765670 U CN208765670 U CN 208765670U
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- scale
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Abstract
The utility model relates to field of measuring technique, specially a kind of optical displacement sensor device and the measuring scale for using the sensor device, it can be used to clear solutions to measure, and meet high-precision requirement, a kind of optical displacement sensor device, it includes light source portion and imaging section, light source portion includes monochromatic source and collimation lens, collimation lens is used to the light that monochromatic source issues becoming directional light, imaging section includes the imaging len sequentially arranged, diaphragm and ccd sensor, ccd sensor converts the optical signal received to the electric signal for being used for displacement measurement, seal closure is provided with outside light source portion and imaging section, measuring scale using above-mentioned optical displacement sensor device includes scale and dynamic ruler, dynamic ruler includes being set to the light source portion of scale side and being set to the imaging section of the scale other side or dynamic ruler includes It is set to light source portion in a seal closure, half-reflecting half mirror, imaging section, dynamic ruler is set to above scale.
Description
Technical field
The utility model relates to field of measuring technique, the displacement precise measurement that can be used on small scale, specially a kind of light
Displacement sensor device and the measuring scale for using the sensor device.
Background technique
Currently on the market there are many electronic digital indicator of type, the sensor mainly used has: appearance coral displacement sensor,
Magnetic coral displacement sensor, eddy current displacement sensor, magnetoresistive shift sensor etc., above-mentioned several sensors are for requirement phase
To lower, if magnetic coral displacement sensor can be used in different liquid mediums, because most of dielectric permeability is all close,
Relative to above-mentioned several sensors, the higher occasion of precision is generally all used for based on optical displacement sensor, but its for
The requirement of environment be also it is harsher, since optical path is there are refraction effect, present optical displacement sensor generally can not all be answered
For carrying out accurate displacement measurement in the media such as water oil.
Summary of the invention
Precise measurement is carried out in clear solution in order to solve the problems, such as not applying, the utility model provides a kind of
Displacement sensor device and the measuring scale for using the sensor device, it can be used to clear solutions to measure, and full
Sufficient high-precision requirement.
Its technical solution is such that a kind of optical displacement sensor device comprising light source portion and imaging section, feature
It is, the light source portion includes monochromatic source and collimation lens, and the collimation lens is used for the light for issuing the monochromatic source
Become directional light, the imaging section includes the imaging len, diaphragm and ccd sensor sequentially arranged, the ccd sensor will connect
The optical signal received is converted into the electric signal for displacement measurement, is provided with sealing outside the light source portion and the imaging section
Cover.
It is further characterized by the monochromatic source is LED monochromatic source, and the collimation lens includes being set to front end
Uniform collimation lens and rear end optically focused collimation lens；
Barn door is provided between the uniform collimation lens and the optically focused collimation lens；
The light source portion and the imaging section are in same center line arrangement,；
The center line in the light source portion and the center line of the imaging section are perpendicular, the center line in the light source portion with it is described
The point of intersection of the center line of imaging section is provided with the half-reflecting half mirror with the center line in 45 degree of angles.
A kind of measuring scale using above-mentioned optical displacement sensor device comprising scale and dynamic ruler, which is characterized in that institute
Stating ruler includes the light source portion being set in the seal closure, half-reflecting half mirror, imaging section, and the dynamic ruler is set to
Above the scale, measurement markers are provided on the ruler face of the scale, the monochromatic source issues and penetrates described half anti-half
The light of lens is vertical with the ruler face of the scale.
It is further characterized by being coated with row's sheet metal or ruler face be equipped with coarse lines on the ruler face of the scale.
A kind of measuring scale using above-mentioned optical displacement sensor device comprising scale and dynamic ruler, which is characterized in that institute
Stating ruler includes the light source portion for being set to the scale side and the imaging section for being set to the scale other side, institute
Stating scale ontology is to be provided with measurement markers on transparent configuration and ruler face, and the monochromatic source issues and penetrates the collimation lens
Light it is vertical with the ruler face of the scale.
It is further characterized by being coated with row's sheet metal on the ruler face of the scale.
It is further characterized in that the sheet metal includes at least three kinds of different in width, wherein the metal of minimum widith
Piece is period divisions line, and spacing is arranged at least two panels sheet metal of remaining width between the sheet metal of adjacent two panels minimum widith
A measurement period is formed, multiple measurement periods are uniformly distributed on the scale.
After the measuring scale of the utility model, due to moving ruler sealed set, and the light vertical irradiation that monochromatic source issues
To related scale is determined, it will not reflect, realize and measured in clear solution, light is after scale reflects or penetrates scale
Via imaging len and diaphragm, finally it is imaged on ccd sensor, when dynamic ruler is moved a certain distance with respect to scale, imaging
Mobile corresponding displacement optical signal is also followed on ccd sensor, converts electric signal i.e. for collected displacement optical signal
Displacement measurement can be achieved, meet high-precision requirement.
Detailed description of the invention
Fig. 1 is the first structural schematic diagram of the utility model measuring scale；
Fig. 2 is second of structural schematic diagram of the utility model measuring scale；
Fig. 3 is the light path principle figure under the first structure of measuring scale；
Fig. 4 is the light path principle figure under second of structure of measuring scale；
Relational graph one of the Fig. 5 for the received light intensity of ccd sensor and the photosensitive first position CCD；
Relational graph two of the Fig. 6 for the received light intensity of ccd sensor and the photosensitive first position CCD；
Fig. 7 is image processing flow figure.
Specific embodiment
Embodiment one: as shown in Figure 1, a kind of measuring scale using above-mentioned optical displacement sensor device comprising scale
With dynamic ruler, dynamic ruler includes the light source portion being set in a seal closure, half-reflecting half mirror 5, imaging section, and imaging section includes sequentially cloth
Imaging len 6, diaphragm 7 and the ccd sensor 8 set, dynamic ruler are set to 9 top of scale, are provided with measurement mark on the ruler face of scale 9
Note, light source portion includes the monochromatic source 1 sequentially arranged, uniform collimation lens 2, barn door 3 and optically focused collimation lens 4, monochromatic light
The sending of source 1 is simultaneously vertical with the ruler face of scale 9 through the light of half-reflecting half mirror 5, and uniform collimation lens 2 is for issuing monochromatic source
Light become directional light, half-reflecting half mirror 5 will by optically focused collimation lens 4 directional light one it is semi-permeable be mapped on scale 9 again it is anti-
It is mapped to above imaging len 8, in order to improve imaging effect, the monochromatic source 1 of this side uses LED monochromatic source, with volume
It is small, the advantages that brightness is high, power saving, good monochromaticjty, small in size to can be convenient to its light through the uniform collimationization of row；Brightness height can be with
Sufficiently strong illumination is provided, reduces the time of integration of CCD imaging to improve response speed；Monochromaticjty can pass through well to avoid light
Dispersion occurs after lens and makes image blur, optically focused collimation lens 4 uses the several formation optically focused collimation lens sets being arranged side by side,
The effect of diaphragm 7 is first is that filter stray light, second is that the spherical aberration of correcting lens, makes imaging apparent, the aperture of diaphragm 7 is adjustable, CCD
Sensor 8 converts the optical signal received to the electric signal for being used for displacement measurement, can use linear CCD, have and sweep certainly
It retouches, the characteristics such as high-resolution, high sensitivity, compact-sized and location of pixels are accurate.Row's sheet metal is coated on the ruler face of scale
Or ruler face is equipped with coarse lines, sheet metal can be arbitrary geometric figure pattern, be typically chosen in rectangular metal sheet, can be with
Equidistant discharge or unequal spacing discharge, if there is coarse lines in the ruler face of scale, it is only necessary to it can identify motion track,
It can not plating metal piece.
Optical path as shown in Figure 3, when dynamic ruler is △ S with respect to scale moving distance, is imaged on ccd sensor and moves
It is displaced p, carries out processing dynamic ruler can be obtained with respect to scale moving distance being △ S by being displaced p, is equivalent to obtain displacement measurement
Value.
Embodiment two: a kind of measuring scale using above-mentioned optical displacement sensor device comprising scale 9 and dynamic ruler move
Ruler includes the light source portion for being set to scale side and the imaging section for being set to the scale other side, and scale ontology is transparent configuration and ruler
Measurement markers are provided on face, the sending of monochromatic source 2 is simultaneously vertical with the ruler face of scale 9 through the light of collimation lens, remaining sets
It sets and is the same as example 1.Row's sheet metal is coated on the ruler face of scale 9.
Its optical path as shown in Figure 4, similarly when dynamic ruler is △ S with respect to scale moving distance, is imaged on ccd sensor
On move displacement p, by be displaced p carry out processing can be obtained dynamic ruler with respect to scale moving distance be △ S, be equivalent in place
Shift measurement value.
Measurement accuracy is further analysed below:
If photosensitive member center spacing is d on ccd sensor, the mobile photosensitive first number of marker is n, imaging len when measurement
Focal length be f, according to the multiple setting diaphragm and ccd sensor distance L of imaging amplification.Positional value before measurement is mobile is S0
(position of the i.e. dynamic ruler relative to scale before mobile), the positional value after movement is S,
Mobile distance when then measuring are as follows:
△S = nd f / L
When dynamic ruler is mobile far from zero point
S= S0+△S= S0 + nd f / L
When dynamic ruler is mobile close to zero point
S= S0-△S= S0 - nd f / L ……①
Obviously, the accuracy of measurement depends on the spacing d of the photosensitive member of CCD device, and from the point of view of measurement error, d is smaller, error
It is smaller.In order to improve measurement accuracy, the closely spaced CCD device measurement in center is preferably selected, or make using the average value repeatedly measured
For measured value.
Reachable ± the lum of the optical system measuring precision of the utility model.Ccd sensor receives to be measured as photoelectric sensor
The picture signal of part, and the optical image signal of part to be measured is converted into vision signal, each discrete voltage in vision signal
The size of signal corresponds to the power (being indicated with y-axis) of photosensitive the received light intensity of member, and the timing of signal output then corresponds to CCD light
The sequence (being indicated with x-axis) of quick member position.Then ccd sensor received light intensity and the photosensitive first position CCD relationship such as Fig. 5 institute
Show.Vision signal inputs high-speed data acquisition card, carries out A/D transformation, is converted into digital signal, then handle these numbers with software
According to the photosensitive member number for showing that marker moves is n, and then obtains the size of measurement.
After dynamic ruler is mobile preceding or mobile relative to scale, edge is imaged on ccd sensor and falls in half or three for marker
In/mono- photosensitive member, i.e. mobile non-integer is imaged in the incomplete photosensitive member of the edges cover of marker or marker
Photosensitive member.Assuming that marker moves on to B point from A point, as shown in Figure 6.
Mobile distance when measurement are as follows:
△S = adf/hL+nd f / L+bdf/hL=((a+b)/h+n)df/L
When sensor is mobile far from zero point
S= S0+△S= S0 + ((a+b)/h+n)df/L
When sensor is mobile close to zero point
S= S0-△S= S0 - ((a+b)/h+n)df/L ……②
When single measurement when occur marker be imaged on CCD edge fall in half or a photosensitive member of one third on, i.e.,
When the incomplete photosensitive member of the edges cover of marker or photosensitive first mobile non-integer of marker imaging, since CCD is photosensitive
Its error is negligible in fact when the length of unit is 2um, and in addition the error has and just also has when each traverse measurement
It is negative, it positive and negative can be balanced out from the point of view of big data.Assuming that marker on CCD when being imaged, 2mm wide when amplification factor is 1
Sheet metal be imaged on CCD for the photosensitive unit of opposite 2um be it is very big, be equivalent to and be exaggerated 1000 times, edge
It is that non-norm is pasted, so 1. more quick using formula in the case where guaranteeing precision when practical application.
In addition vernier caliper biggish for range can improve precision using the method that marker positions.
Concrete operations are as described below, and the sheet metal on scale includes at least three kinds of different in width, wherein the gold of minimum widith
Category piece is period divisions line, and spacing is arranged at least two panels metal of remaining width between the sheet metal of adjacent two panels minimum widith
Piece forms a measurement period, is uniformly distributed multiple measurement periods on scale.Can be had according to different arrangement methods following
Two schemes:
Scheme one: sheet metal is processed into 0.2-0.3mm, 0.5-0.6mm, 0.8mm-1.0mm, 1.2-1.4mm, 1.6-
The sheet metal of 1.8mm totally 5 kinds of width, each width sheet metal is according to equidistantly away from arrangement.Wherein the sheet metal of 0.2-0.3mm is
Period divisions line, 0.5-0.6mm, 0.8mm-1.0mm, 1.2-1.4mm, 1.6-1.8mm, the sheet metal of this 4 kinds of width or
Two kinds of width be combined or three in width be combined or four kinds of width are combined, form different measurement periods, each
0.2-0.3mm sheet metal is placed between measurement period carries out subregion.
If the sheet metal of 0.5-0.6mm is a, the sheet metal of 0.8mm-1.0mm is b, and the sheet metal of 1.2-1.4mm is c,
The sheet metal of 1.6-1.8mm is d, then has following arrangement mode:
Arrangement for 2 monograms, the 1st optional alphabetical number are 4, and the 2nd optional alphabetical number is also 4
It is a, therefore actual number of the arrangement is 42=16, i.e.,
Aa, ab, ac, ad, ba, bb, bc, bd, ca, cb, cc, cd, da, db, dc, dd,
Similarly, the number of permutations of 3 monograms is then are as follows: 43=64；The number of permutations of 4 monograms is then are as follows: 44=256,
So above several combinations share 16+64+256=336 kind permutation and combination when being combined together.
Scheme two: sheet metal is processed into different 0.2-0.3mm, 0.5-0.6mm, 1-1.2mm of width totally 3 kinds of width
Sheet metal is not equidistantly to arrange between sheet metal, and sheet metal spacing has two kinds of 0.5-0.6mm and 1-1.2mm, wherein 0.2-
The sheet metal of 0.3mm is period divisions line, and 0.2mm sheet metal is placed between each period and carries out subregion.If 0.5-0.6mm width
Sheet metal is a, and the sheet metal of 1-1.2mm width is b, and the spacing of 0.5-0.6mm width is A, and the spacing of 1-1.2mm width is
B.In each period in addition to period divisions sheet metal, or two sheet metal permutation and combination are put, or put three sheet metal permutation and combination
Form the different periods.Then there is following arrangement mode:
When putting the arrangement of two sheet metals such as AaAaA, AaAaB, AaAbA etc. share 25=32 kinds of combinations put three gold
When belonging to piece arrangement such as AaAaAaA, AaAaAaB etc. share 27=128 kinds of combinations.So above 2 kinds of combinations are incorporated in
32+128=160 kind permutation and combination is shared when together.
336 kinds of marker permutation and combination methods are shared in method one, wherein selection similar width and easily distinguishable combination
The period is arranged, it is assumed that the width Z that marker is imaged on main scale.Suitable width Z is selected according to the width in each period, makes to mark
Object has the complete period when being imaged on ccd sensor, and Z general value is 5 between 20mm.When marker is passed in CCD
When being imaged mobile on sensor, is calculated according to the complete period movement of segmentation line options, which is positioned according to the period
Matrix S0, records the displacement △ S in the period, to realize that measured value must calculate.Image processing flow is as shown in Figure 7.
Claims (10)
1. a kind of optical displacement sensor device comprising light source portion and imaging section, which is characterized in that the light source portion includes single
Color light source and collimation lens, the collimation lens are used to the light that the monochromatic source issues becoming directional light, the imaging section
Including the imaging len, diaphragm and ccd sensor sequentially arranged, the optical signal received is converted use by the ccd sensor
Seal closure is provided with outside the electric signal of displacement measurement, the light source portion and the imaging section.
2. a kind of optical displacement sensor device according to claim 1, which is characterized in that the monochromatic source is LED
Monochromatic source, the collimation lens include the optically focused collimation lens of the uniform collimation lens for being set to front end and rear end.
3. a kind of optical displacement sensor device according to claim 2, which is characterized in that the uniform collimation lens with
Barn door is provided between the optically focused collimation lens.
4. a kind of optical displacement sensor device according to claim 1, which is characterized in that the light source portion and it is described at
Picture portion is in same center line arrangement.
5. a kind of optical displacement sensor device according to claim 1, which is characterized in that the center line in the light source portion
It is perpendicular with the center line of the imaging section, the point of intersection setting of the center line of the center line and imaging section in the light source portion
There is the half-reflecting half mirror with the center line in 45 degree of angles.
6. a kind of measuring scale using optical displacement sensor device described in claim 1 comprising scale and dynamic ruler, it is special
Sign is, the dynamic ruler includes the light source portion being set in the seal closure, half-reflecting half mirror, imaging section, described
Dynamic ruler is set to above the scale, is provided with measurement markers on the ruler face of the scale, the monochromatic source is issued and penetrated
The light of the half-reflecting half mirror is vertical with the ruler face of the scale.
7. measuring scale according to claim 6, which is characterized in that be coated with row's sheet metal or ruler on the ruler face of the scale
Face is equipped with coarse lines.
8. a kind of measuring scale using optical displacement sensor device described in claim 1 comprising scale and dynamic ruler, it is special
Sign is that the dynamic ruler includes being set to the light source portion of the scale side and being set to the described of the scale other side
Imaging section, the scale ontology are to be provided with measurement markers on transparent configuration and ruler face, and the monochromatic source issues and penetrates institute
The light for stating collimation lens is vertical with the ruler face of the scale.
9. measuring scale according to claim 8, which is characterized in that be coated with row's sheet metal on the ruler face of the scale.
10. the measuring scale according to claim 7 or 9, which is characterized in that the sheet metal includes at least three kinds different wide
Degree, wherein the sheet metal of minimum widith is period divisions line, and spacing arranges it between the sheet metal of adjacent two panels minimum widith
At least two panels sheet metal of remaining width forms a measurement period, is uniformly distributed multiple measurement periods on the scale.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108759680A (en) * | 2018-04-17 | 2018-11-06 | 无锡天海数字测控技术有限公司 | A kind of optical displacement sensor device and the measuring scale using the sensor device |
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2018
- 2018-04-17 CN CN201820539425.3U patent/CN208765670U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108759680A (en) * | 2018-04-17 | 2018-11-06 | 无锡天海数字测控技术有限公司 | A kind of optical displacement sensor device and the measuring scale using the sensor device |
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