CN208743201U - A kind of polysilicon chip cleaning special frame - Google Patents
A kind of polysilicon chip cleaning special frame Download PDFInfo
- Publication number
- CN208743201U CN208743201U CN201820780124.XU CN201820780124U CN208743201U CN 208743201 U CN208743201 U CN 208743201U CN 201820780124 U CN201820780124 U CN 201820780124U CN 208743201 U CN208743201 U CN 208743201U
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- CN
- China
- Prior art keywords
- polysilicon chip
- column
- special frame
- fixation
- polysilicon
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Abstract
The utility model discloses a kind of polysilicon chips to clean special frame, including wash bowl totality, fix half and activity half, the wash bowl is overall to be formed by fixing half and activity half, the bottom surface of the fixation half is installed with the second column and the first column, it is fixedly connected between second column and the first column by sliding rail, movable half bottom passes through sliding rail and is flexibly connected with fixing half, and the top of the fixation half is equipped with the flange turned down outward.The utility model uses vertical structure, and occupied area is small, and space utilization rate is high, it can be achieved that stereo rotating improves the cleaning speed and cleaning quality of polysilicon chip using the souring of cleaning solution so that wash bowl and cleaning solution generate relative motion；By wavy metal net interval between neighbouring two polysilicon chips, compartmentation both was played to polysilicon chip, while guaranteeing coming into full contact with for cleaning solution and polysilicon chip two sides, no cleaning quadrangle.
Description
Technical field
The utility model relates to polysilicon chip cleaning equipment technical field, specially a kind of polysilicon chip cleans special frame.
Background technique
Polysilicon is a kind of form of elemental silicon.When the elemental silicon of melting solidifies under the conditions of supercooling, silicon atom is with Buddha's warrior attendant
Stone lattice morphologic arrangement grows up to the different crystal grain of high preferred orientation at many nucleus, such as these nucleus, then these crystal grain combine,
Just crystallize into polysilicon.
With the development of large scale integrated circuit, the continuous improvement of integrated level, the continuous reduction of line width, to the quality of silicon wafer
It is required that it is also higher and higher, it is especially more and more tighter to the surface quality requirements of silicon wafer.If cannot have in silicon materials cleaning process
All processing is clean by the metal object being mixed in silicon material, carbon or other impurity for effect, has used these silicon materials during polycrystalline cast ingot,
Serious consequence will be will appear.Serious destructiveness, silicon material parameter serious non-compliance subsequent product will occur for the physical property of silicon material
Demand, especially " minority carrier life time " it is serious relatively low.
, there is land occupation in the bracket that polysilicon chip of taking for convenience when polysilicon cleans at present generally uses horizontal direction to extend
Space is big, and space utilization rate is low, can not rotate, can only static rinse polysilicon chip, there are cleaning dead angles, and then cause silicon wafer useless
The high problem of product rate,
Utility model content
The purpose of this utility model is to provide a kind of polysilicon chips to clean special frame, solves existing polysilicon chip land occupation
Space is big, and space utilization rate is low, can not rotate, can only static rinse polysilicon chip, there are cleaning dead angles, and then cause silicon wafer useless
The high problem of product rate.
In order to achieve the above object, the utility model is achieved by the following technical programs: a kind of polysilicon chip cleaning is special
With frame, including wash bowl it is overall, fix half and activity half, the wash bowl is overall by fixing half and movable half group
At the bottom surface of the fixation half is installed with the second column and the first column, passes through between second column and the first column
Sliding rail is fixedly connected, and movable half bottom passes through sliding rail and be flexibly connected with fixing half, the top of the fixation half
Equipped with the flange turned down outward, and the two sides for fixing half are respectively equipped with the first outer folding edge and the second outer folding edge, the activity half
The two sides of cylinder are respectively equipped with the first inside edge and the second inside edge, the varus folding face rank of second inside edge and the second outer folding edge
It connects, first inside edge is connected with the folding face of turning up of the first outer folding edge, and there are two peaces for installation on the inner wall of the fixation half
Load, two installation sheets are separately mounted to fix the top and bottom of half inner wall, and pacify between two installation sheets
Equipped with guide rail, it is arranged with several wavy metal nets on the guide rail, is placed with polysilicon chip above the wavy metal net,
The center point of half bottom of fixation is equipped with bearing.
Preferably, the fixation half and activity half are all made of 304 stainless steel materials and are made, and fix half and activity
Half shell portion is evenly equipped with mesh.
Preferably, the guide rail extends along the circumference for fixing half, and the total length of the guide rail is less than or equal to fixed half
3/4ths of cylinder circumferential length.
Preferably, hanging ring is installed, there are two the hanging ring is set altogether on the flange.
Preferably, second inside edge and the first inside edge pass through spiral shell with the second outer folding edge and the first outer folding edge respectively
Bolt is fixed together, and the quantity of the bolt is more than or equal to 2.
Preferably, the guide rail is equipped with several buffer springs, and the buffer spring is arranged in neighbouring two gold
Belong between ripple net.
Compared with prior art, the utility model has the beneficial effects that the utility model (1) integrally uses vertical structure,
Occupied area is small, and space utilization rate is high, generally cylindrical structure, bottom be equipped with the Bearning mechanism to integrate with shaft, it can be achieved that
Stereo rotating improves the clear of polysilicon chip using the souring of cleaning solution so that wash bowl and cleaning solution generate relative motion
Wash speed and cleaning quality.
(2) by wavy metal net interval between neighbouring two polysilicon chips, wavy metal net is ripple grid type
Structure both played compartmentation to polysilicon chip, while guaranteeing coming into full contact with for cleaning solution and polysilicon chip two sides, no cleaning four
Angle reduces the rejection rate of polysilicon chip.
(3) activity half by guide rail relative to making rotating motion in fixing half, convenient for placing and taking out polysilicon chip,
Reduce labour difficulty.
Detailed description of the invention
Fig. 1 is the top view of the utility model entirety；
Fig. 2 is the sectional side view of the utility model entirety；
Fig. 3 is the schematic enlarged-scale view at the utility model A；
Fig. 4 is the bottom view of the utility model entirety.
In figure: 1- wash bowl is overall, 2- fixes half, 21- flange, the first outer folding edge of 22-, the second outer folding edge of 23-, 3- peace
Load, 4- wavy metal net, 5- movable half, the first inside edge of 51-, the second inside edge of 52-, 6- hanging ring, the first column of 7-, 8-
Sliding rail, 9- bearing, 10- buffer spring, 11- polysilicon chip, the second column of 12-, 13- guide rail.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
Fig. 1-4 is please referred to, the utility model provides a kind of technical solution: a kind of polysilicon chip cleaning special frame, including it is clear
Washing cylinder is overall 1, fixes half 2 and activity half 5, and wash bowl overall 1 is by fixing half 2 and activity forms for half 5, activity half
5 diameter fixes half 2 bottom surface and is installed with the second column 12 and the first column 7, second is vertical greater than the diameter for fixing half 2
It is fixedly connected between column 12 and the first column 7 by sliding rail 8, the bottom that activity is half 5 passes through sliding rail 8 and fixes half 2 activity
Connection fixes half 2 top and is equipped with the flange 21 turned down outward, and the two sides for fixing half 2 are respectively equipped with the first outer folding edge
22 and second outer folding edge 23, the fold size of two flangings is consistent, and convenient for production, the two sides that activity is half 5 are respectively equipped with the
One inside edge 51 and the second inside edge 52, the blocking due to the first inside edge 51 by the first outer folding edge 22, the second inside edge 52
Infolding length be twice of the first inside edge 51, the second inside edge 52 is connected with the varus folding face of the second outer folding edge 23, first
Inside edge 51 is connected with the folding face of turning up of the first outer folding edge 22, when opening to maximum for activity half 5, the second inside edge 52 it is interior
Flanging is connected with the inside edge of the first outer folding edge 22, fixes on half 2 inner wall and installs there are two installation sheet 3, installation sheet 3 is in
L-shaped structure, and installation sheet 3 is bolted on and fixes on half 2 inner wall, two installation sheets 3 are separately mounted to fixed half
The top and bottom of 2 inner walls of cylinder, and guide rail 13 is installed between two installation sheets 3, several metal waves are arranged on guide rail 13
Line net 4, the top of wavy metal net 4 are placed with polysilicon chip 11, and the center point for fixing half 2 bottom is equipped with bearing 9.
It fixes half 2 and activity is all made of 304 stainless steel materials for half 5 and is made, and fix half 2 and activity half 5
Shell portion is evenly equipped with mesh, enters inner barrel convenient for cleaning solution, while dispersing cleaning solution to the impact force of polysilicon chip 11；
Guide rail 8 extends along the circumference for fixing half 2, and the total length of guide rail 8 is less than or equal to fix half 2 circumferential length
3/4ths；
Hanging ring 6 is installed on flange 21, it is convenient for loop wheel machine that wash bowl is 1 liter overall after cleaning there are two hanging ring 6 is set altogether
It rises；
Second inside edge 52 and the first inside edge 51 pass through bolt with the second outer folding edge 23 and the first outer folding edge 22 respectively
It is fixed together, the quantity of bolt is more than or equal to 2；
Guide rail 13 is equipped with several buffer springs 10, and buffer spring 10 is arranged in neighbouring two wavy metal nets 4
Between, wavy metal net 4 is in ripple bending structure, and wavy metal net 4 is grid type structure, is separated up and down using bending structure
Two polysilicon chips 11.
Working principle: when cleaning to polysilicon chip, polysilicon chip 11 is placed on the upper of wavy metal net 4 first
Surface, the top and bottom are wavy metal net 4, for limiting the movement of polysilicon chip 11, are piled up one by one, buffering elastic
Spring 10 offsets wavy metal net 4 and pitches the active force of generation, then by activity half 5 by sliding rail 8 to the second outer folding edge
The sliding of 23 directions, until the second inside edge 52 is connected with the second outer folding edge 23, the first outer folding edge 22 and the first inside edge 51 at this time
Linking, after both sides are locked using bolt, loop wheel machine is sling overall 1 entirety of wash bowl using hanging ring 6, and is put into service sink
In, the shaft in service sink can integrate with bearing 9, drive wash bowl overall 1 to rotate by power-equipment, overall 1 surface of wash bowl
It is mesh-structured guarantee that cleaning solution enters inside, while dispersing cleaning solution to the impact force of polysilicon chip 11, polysilicon chip 11 with
Cleaning solution does relative motion, and improves cleaning efficiency, equally using hanging ring 6 that wash bowl overall 1 is whole by loop wheel machine after cleaning
Body is sling, and the bolt at flanging is taken out, and by activity, half 5 is rotated up in second along guide rail 13 to 22 direction of the first outer folding edge
Flanging 52 resists the first outer folding edge 22, and cleaned polysilicon chip 11 is taken out.
It is obvious to a person skilled in the art that the present invention is not limited to the details of the above exemplary embodiments, and
And without departing substantially from the spirit or essential attributes of the utility model, it can realize that this is practical new in other specific forms
Type.Therefore, in all respects, the present embodiments are to be considered as illustrative and not restrictive, this is practical new
The range of type is indicated by the appended claims rather than the foregoing description, it is intended that containing for the equivalent requirements of the claims will be fallen in
All changes in justice and range are embraced therein.It should not treat any reference in the claims as limiting
Related claim.
Claims (6)
1. a kind of polysilicon chip cleans special frame, including wash bowl overall (1), fix half (2) and movable half (5), spy
Sign is: the wash bowl overall (1) is formed by fixing half (2) and activity half (5), the bottom surface of the fixation half (2)
It is installed with the second column (12) and the first column (7), passes through sliding rail (8) between second column (12) and the first column (7)
It is fixedly connected, the bottom of movable half (5) passes through sliding rail (8) and is flexibly connected with half (2) are fixed, the fixation half
(2) top is equipped with the flange (21) that turns down outward, and the two sides for fixing half (2) are respectively equipped with the first outer folding edge (22) and the
Two outer folding edges (23), the two sides of movable half (5) are respectively equipped with the first inside edge (51) and the second inside edge (52), described
Second inside edge (52) is connected with the varus folding face of the second outer folding edge (23), first inside edge (51) and the first outer folding edge
(22) folding face linking of turning up, there are two installation sheet (3), two installation sheets for installation on the inner wall of the fixation half (2)
(3) it is separately mounted to fix the top and bottom of half (2) inner wall, and guide rail is installed between two installation sheets (3)
(13), it is arranged with several wavy metal nets (4) on the guide rail (13), is placed with above the wavy metal net (4) more
The center point of crystal silicon chip (11), half (2) bottom of the fixation is equipped with bearing (9).
2. a kind of polysilicon chip according to claim 1 cleans special frame, which is characterized in that the fixation half (2) and
Movable half (5) are all made of 304 stainless steel materials and are made, and the shell portion for fixing half (2) and movable half (5) is evenly equipped with
Mesh.
3. a kind of polysilicon chip according to claim 1 cleans special frame, which is characterized in that the sliding rail (8) is along solid
Fixed half (2) circumference extends, and the total length of the sliding rail (8) is less than or equal to fix 3/4ths of half (2) circumferential length.
4. a kind of polysilicon chip according to claim 1 cleans special frame, which is characterized in that installed on the flange (21)
Have hanging ring (6), there are two the hanging ring (6) sets altogether.
5. a kind of polysilicon chip according to claim 1 cleans special frame, which is characterized in that second inside edge (52)
It is bolted on together with the second outer folding edge (23) and the first outer folding edge (22) respectively with the first inside edge (51), it is described
The quantity of bolt is more than or equal to 2.
6. a kind of polysilicon chip according to claim 1 cleans special frame, which is characterized in that the guide rail (13) is equipped with
Several buffer springs (10), the buffer spring (10) are arranged between neighbouring two wavy metal nets (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820780124.XU CN208743201U (en) | 2018-05-24 | 2018-05-24 | A kind of polysilicon chip cleaning special frame |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820780124.XU CN208743201U (en) | 2018-05-24 | 2018-05-24 | A kind of polysilicon chip cleaning special frame |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208743201U true CN208743201U (en) | 2019-04-16 |
Family
ID=66053021
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820780124.XU Expired - Fee Related CN208743201U (en) | 2018-05-24 | 2018-05-24 | A kind of polysilicon chip cleaning special frame |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208743201U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113578849A (en) * | 2021-09-27 | 2021-11-02 | 邳州众鑫机械有限公司 | Special cleaning equipment for diode device |
-
2018
- 2018-05-24 CN CN201820780124.XU patent/CN208743201U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113578849A (en) * | 2021-09-27 | 2021-11-02 | 邳州众鑫机械有限公司 | Special cleaning equipment for diode device |
| CN113578849B (en) * | 2021-09-27 | 2021-12-14 | 邳州众鑫机械有限公司 | Special cleaning equipment for diode device |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190416 Termination date: 20200524 |
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| CF01 | Termination of patent right due to non-payment of annual fee |