CN208740338U - Anti-leak cabinet - Google Patents
Anti-leak cabinet Download PDFInfo
- Publication number
- CN208740338U CN208740338U CN201820184916.0U CN201820184916U CN208740338U CN 208740338 U CN208740338 U CN 208740338U CN 201820184916 U CN201820184916 U CN 201820184916U CN 208740338 U CN208740338 U CN 208740338U
- Authority
- CN
- China
- Prior art keywords
- cabinet
- air curtain
- leak
- cabinet door
- cabinet body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000007664 blowing Methods 0.000 claims abstract description 4
- 230000003287 optical effect Effects 0.000 claims description 4
- 230000006698 induction Effects 0.000 claims description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 14
- 239000007789 gas Substances 0.000 description 13
- 229910052757 nitrogen Inorganic materials 0.000 description 7
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 210000000056 organ Anatomy 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
Landscapes
- Ventilation (AREA)
Abstract
The utility model relates to a kind of anti-leak cabinet, the anti-leak cabinet includes: at least one layer of cabinet body, and the cabinet body side has opening, and the opening is provided with cabinet door；Air curtain is installed on cabinet body inside top, the edge adjacent with cabinet door, and the blowing mouth of the air curtain is towards bottom of cabinet bulk；Controller is connect with the air curtain, for controlling opening or closing for the air curtain.The cabinet can form gas curtain by air curtain when cabinet door is opened, and reduce the environment exchange inside and outside cabinet.
Description
Technical field
The utility model relates to technical field of semiconductors more particularly to a kind of anti-leak cabinets.
Background technique
In semiconductor technology factory (FAB) actual production, some utensils can be temporarily stored by cabinet.In order to avoid device
Tool is contaminated during interim storage, it will usually fill nitrogen in cabinet with keeping device.
Cabinet filled with nitrogen usually by manual operation, completes the process of access utensil, in the process operator
Member can directly contact with the nitrogen in cabinet, and the nitrogen in cabinet, which leaks, easily makes operator suffocate, to cause danger.
Also, while opening cabinet cabinet door, it will form the exchange of internal and external environment, particle contamination in external environment,
Steam, SO4 2-、NH+Deng entering in cabinet, environment in cabinet is polluted, the efficiency of cabinet can be reduced by being used for a long time.
How the above problem is avoided, is current urgent problem to be solved.
Utility model content
Technical problem to be solved by the utility model is to provide a kind of anti-leak cabinet, the energy when opening cabinet
Gas in cabinet is enough avoided to leak.
To solve the above-mentioned problems, the utility model provides a kind of anti-leak cabinet, comprising: at least one layer of cabinet body,
The cabinet body side has opening, and the opening is provided with cabinet door；Air curtain is installed on cabinet body inside top, with cabinet door phase
Adjacent edge, the blowing mouth of the air curtain is towards bottom of cabinet bulk；Controller is connect, for controlling with the air curtain
State opening or closing for air curtain.
Optionally, the controller includes: sensing module, opens or closes state for incude cabinet door；Control module,
It is connect with the sensing module, for the generation on or off closed state according to cabinet door, sends corresponding control instruction to the air curtain
Machine.
Optionally, the sensing module includes at least one of pressure sensor, optical sensor or temperature sensor.
Optionally, the cabinet door includes handle, and the sensing module is installed on the handle of cabinet door.
Optionally, the sensing module is installed in the cabinet body or outside cabinet body.
Optionally, the air curtain can form a gas curtain after opening between cabinet door and interior of the cabinet, the gas curtain
Width is equal to the opening width of the cabinet body.
The cabinet of the utility model is equipped with air curtain and controller in cabinet body opening, when opening cabinet door, control
Air curtain is opened, and internal and external environment exchange is stopped.After completing accessing operation, operator closes cabinet cabinet door, controls air curtain
Organ closes.Forming gas curtain by air curtain can prevent high pure nitrogen during accessing utensil, in cabinet etc. from leaking,
Cause the phenomenon that operator suffocates；And it can also prevent the pollution in external environment from entering in cabinet, for the ring in cabinet
Border forms pollution, reduces the efficiency of cabinet.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the anti-leak cabinet of one specific embodiment of the utility model；
Fig. 2 is the structural representation after the cabinet door of the anti-leak cabinet of one specific embodiment of the utility model is opened
Figure；
Fig. 3 is that the air curtain of the anti-leak cabinet of one specific embodiment of the utility model is formed inside and outside gas curtain blocking cabinet
The schematic illustration that environment swaps.
Specific embodiment
It elaborates with reference to the accompanying drawing to the specific embodiment of anti-leak cabinet provided by the utility model.
Referring to FIG. 1, the concrete structure schematic diagram of the anti-leak cabinet for one specific embodiment of the utility model.
In the specific embodiment, the anti-leak cabinet includes top layer cabinet body 101a and two layers totally of bottom cabinet body 101b
Cabinet body.The top layer cabinet body 101a and bottom cabinet body 101b structure having the same, here, being carried out using cabinet body 101a as example
It illustrates.
The side of the cabinet body 101a has opening, and the opening is provided with cabinet door 102.The cabinet door 102 is double opens
Cabinet door, in other specific embodiments of the utility model, the cabinet door 102 can also be singly to open cabinet door.
The cabinet further includes air curtain 104, and the specific air curtain 104 is installed on the top on the inside of cabinet body 101b
Portion, the edge adjacent with the cabinet door 102, the blowing mouth of the air curtain 104 is towards bottom of cabinet bulk, in the air curtain
When 104 unlatching, gas curtain can be formed in the cabinet body 101a opening, to stop the gas exchanges inside and outside cabinet.
The cabinet further includes controller, and is connected in the air curtain 104, for controlling the air curtain 104
It opens or closes.When operator needs to open the cabinet, the air curtain 104 can be controlled by the controller and opened
It opens, cabinet can be prevented to reduce or stop the environment inside and outside cabinet body 101a to swap by forming gas curtain in cabinet body 101a opening
Nitrogen in body 101a is also avoided that extraneous pollutant enters in cabinet body 101a to outward leakage.Fig. 2 and Fig. 3 are please referred to, for institute
After the opening of cabinet door 102 for stating cabinet body 101a, air curtain 104 opens the schematic diagram formed after gas curtain 1041.The gas curtain
1041 width is consistent with the opening width of the cabinet body 101a, to effectively reduce or stop the environment inside and outside cabinet to exchange.
In specific embodiment of the present utility model, the controller includes sensing module 103, for incuding cabinet door
102 open or close state, the opening state include opened with two states to be opened, the closed state includes
Closed state and to closed state.The sensing module 103 can be in pressure sensor, optical sensor or temperature sensor
It is at least one.In a specific embodiment of the utility model, the sensing module 103 is installed on the handle of cabinet door 102
On, the sensing module is installed on the handle of cabinet door.When operator is when opening cabinet door 102, both hands can be pressed into described
Sensing module 103 so that the sensing module 103 sense cabinet door 102 to for open state.
The controller further includes control module, is connect with the sensing module 103, the induction module 103 and control
Data connection can be carried out between module wirelessly, data connection can also be carried out by wired mode, convenient for described
Sensing module 103 is to carrying out data communication between control module.It is opened when the sensing module 103 detects that cabinet door 102 is in
When state, Xiang Suoshu control module sends corresponding signal, so that the control module is formed open command, controls the air curtain
104 open, and gas curtain are formed, so that the environment inside and outside cabinet be prevented to exchange.
In other specific embodiments of the utility model, the sensing module 103 is optical sensor, is installed on described
Inside cabinet body 101a.When cabinet door 102 is opened, the sensing module 103 inside cabinet body 101a passes through the light inside cabinet body 101a
Variation detects that cabinet door 102 is opened, and then controls the air curtain 104 by control module and open.
In other specific embodiments of the utility model, the sensing module 103 can also be temperature sensor, can
To be installed on the door handle of cabinet door 102, for operator when opening cabinet door 102, finger touches the sensing module 103,
The sensing module 103 detects temperature change, to obtain the state of the unlatching of cabinet door 102, and then is controlled by control module
The air curtain 104 is opened.
In operator's end of operation, when needing to close cabinet door 102, likewise, sensing module 103 detects pressure, bright
The variation such as degree or temperature obtains the state that cabinet door 102 is closed, and then controls the air curtain 104 by control module and close.
Sensing module 103 can also be installed on outside cabinet body 101a, the switch as the air curtain 104.By described
Sensing module 103 detects the operation of operator, and then controls air curtain 104 and open or close.
Air curtain and controller are also installed in the cabinet body 101b, when the cabinet door to cabinet body 101b is opened,
Gas curtain is formed by air curtain.
The cabinet of the utility model increases air curtain and controller in cabinet body opening, when opening cabinet door, controls wind
Curtain machine is opened, and internal and external environment exchange is stopped.After completing accessing operation, operator closes cabinet cabinet door, controls air curtain
It closes.Forming gas curtain by air curtain can prevent high pure nitrogen during accessing utensil, in cabinet etc. from leaking, and draw
The phenomenon that hair operator suffocates；And it can also prevent the pollution in external environment from entering in cabinet, for the environment in cabinet
Pollution is formed, the efficiency of cabinet is reduced.
The above is only the preferred embodiment of the utility model, it is noted that for the common skill of the art
Art personnel can also make several improvements and modifications without departing from the principle of this utility model, these improvements and modifications
Also it should be regarded as the protection scope of the utility model.
Claims (6)
1. a kind of anti-leak cabinet characterized by comprising
At least one layer of cabinet body, the cabinet body side have opening, and the opening is provided with cabinet door；
Air curtain is installed on cabinet body inside top, the edge adjacent with cabinet door, and the blowing mouth of the air curtain is towards cabinet body bottom
Portion；
Controller is connect with the air curtain, for controlling opening or closing for the air curtain.
2. anti-leak cabinet according to claim 1, which is characterized in that the controller includes: sensing module, is used for
Induction cabinet door opens or closes state；Control module is connect with the sensing module, for being closed according to the generation on or off of cabinet door
State sends corresponding control instruction to the air curtain.
3. anti-leak cabinet according to claim 2, which is characterized in that the sensing module include pressure sensor,
At least one of optical sensor or temperature sensor.
4. anti-leak cabinet according to claim 2, which is characterized in that the cabinet door includes handle, the sensing mould
Block is installed on the handle of cabinet door.
5. anti-leak cabinet according to claim 2, which is characterized in that the sensing module is installed in the cabinet body
Or outside cabinet body.
6. anti-leak cabinet according to claim 1, which is characterized in that the air curtain open after can cabinet door with
A gas curtain is formed between interior of the cabinet, the width of the gas curtain is equal to the opening width of the cabinet body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820184916.0U CN208740338U (en) | 2018-02-02 | 2018-02-02 | Anti-leak cabinet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820184916.0U CN208740338U (en) | 2018-02-02 | 2018-02-02 | Anti-leak cabinet |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208740338U true CN208740338U (en) | 2019-04-16 |
Family
ID=66051899
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820184916.0U Expired - Fee Related CN208740338U (en) | 2018-02-02 | 2018-02-02 | Anti-leak cabinet |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208740338U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113133167A (en) * | 2021-05-17 | 2021-07-16 | 安徽理工大学 | Automatic light-on device opens door |
-
2018
- 2018-02-02 CN CN201820184916.0U patent/CN208740338U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113133167A (en) * | 2021-05-17 | 2021-07-16 | 安徽理工大学 | Automatic light-on device opens door |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190416 |