CN208728914U - Laser smoke dust absorbing device - Google Patents

Laser smoke dust absorbing device Download PDF

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Publication number
CN208728914U
CN208728914U CN201821119376.4U CN201821119376U CN208728914U CN 208728914 U CN208728914 U CN 208728914U CN 201821119376 U CN201821119376 U CN 201821119376U CN 208728914 U CN208728914 U CN 208728914U
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China
Prior art keywords
cylinder
laser
air
outer cylinder
absorbing device
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CN201821119376.4U
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Chinese (zh)
Inventor
赖林松
陈锐
吴排青
周志伟
吴晓滨
马国东
尹建刚
高云峰
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Shenzhen Hans Semiconductor Equipment Technology Co Ltd
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Han s Laser Technology Industry Group Co Ltd
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Abstract

The utility model relates to a kind of laser smoke dust absorbing devices, for being set to the optical path of laser, the flue dust generated when removing laser cut workpieces, comprising: outer cylinder;Inner cylinder, including laser light incident end and laser emitting end, the inner cylinder and the outer cylinder are coaxial, and the inner wall interval of the outer wall of the inner cylinder and the outer cylinder, the laser light incident end and outer cylinder closing connect, and the laser emitting end is connected to the outer cylinder, to form the first airflow channel;First air-flow connector, inclination are set on the inner cylinder, and are connected to the inner cylinder, and the described one end of first air-flow connector far from the inner cylinder is towards the laser light incident end.Gas can be discharged into secondary air is formed in the first airflow channel by the utility model laser smoke dust absorbing device by the first air-flow connector for being obliquely installed, so that the flue dust on workbench is easier to enter in the gap between inner cylinder and outer cylinder, improve efficiency of dust collection.

Description

Laser smoke dust absorbing device
Technical field
The utility model relates to laser cutting technique fields, more particularly to a kind of laser smoke dust absorbing device.
Background technique
With the fast development of semiconductor manufacturing industry, laser cutting technique start to be widely used in panel (such as sheet metal component, Pcb board etc.) industry.Laser cutting is the laser beam heats workpiece using high-energy density, rises rapidly workpiece temperature, in turn Melt the material of workpiece.Laser cutting technique has the following advantages: cutting accuracy is high, cut surface is smooth, speed is fast, joint-cutting is narrow, Not disfiguring workpiece, do not influenced by workpiece configurations, do not influenced by the hardness of cut timber material.
However, can generate volume of smoke (such as dust, peculiar smell) during laser cutting process, flue dust can pollute eyeglass And jig, and then influence processing effect, and flue dust sucked by human body after also can to people generate greatly harm.
Utility model content
Based on this, it is necessary to volume of smoke can be led to the problem of during laser cutting process, provide a kind of laser Smoke dust absorbing device.
A kind of laser smoke dust absorbing device, for being set to the optical path of laser, generation when removing laser cut workpieces Flue dust, comprising:
Outer cylinder;
Inner cylinder, including laser light incident end and laser emitting end, the inner cylinder and the outer cylinder are coaxial, and the inner cylinder The inner wall interval of outer wall and the outer cylinder, the laser light incident end and outer cylinder closing connect, the laser emitting end and institute Outer cylinder connection is stated, to form the first airflow channel;
First air-flow connector, inclination is set on the inner cylinder, and is connected to the inner cylinder, and the first air-flow connector is remote One end from the inner cylinder is towards the laser light incident end;And
Dirt connector is taken out, is set on the outer cylinder, and be connected to first airflow channel.
The inner cylinder includes sequentially connected first cylinder, centrum and the second cylinder, institute in one of the embodiments, Stating laser light incident end is the described one end of first cylinder far from the centrum, and the laser emitting end is that second cylinder is separate The gradient of one end of the centrum, the first air-flow connector is identical as the gradient of the centrum, and first air-flow connects Head tilt is set on first cylinder, and is arranged close to the centrum, so that the air-flow from the first air-flow connector It can be flowed along the medial surface of the centrum.
First cylinder and the intersection of the centrum offer mounting groove, the peace in one of the embodiments, The inner wall of tankage includes the first inner wall and the second inner wall connected vertically, the gradient of second inner wall and inclining for the centrum Gradient is identical, and relative to second inner wall closer to the centrum, the first air-flow connector is vertically set first inner wall In on first inner wall.
The outer cylinder includes connected third cylinder and the 4th cylinder, the third cylinder in one of the embodiments, The internal diameter of body is greater than the internal diameter of the 4th cylinder, the one end of the third cylinder far from the 4th cylinder and the inner cylinder The laser light incident end seal closes connection, the laser of the 4th cylinder one end far from the third cylinder and the inner cylinder Exit end connection, the centrum are located in the third cylinder, and the both ends of second cylinder are located at the third cylinder And in the 4th cylinder.
The third cylinder is detachably connected with the 4th cylinder in one of the embodiments,.
The laser smoke dust absorbing device further includes the second air-flow connector, second air-flow in one of the embodiments, Connector is set on the outer cylinder, and relatively independent with the pumping dirt connector, and the second air-flow connector connects with first air-flow Head is connected by tracheae.
Multiple fixing grooves are offered on the outer cylinder in one of the embodiments, described one end for taking out dirt connector is equipped with First fixed plate, one end of the second air-flow connector are equipped with the second fixed plate, and first fixed plate and described second are fixed The size of plate is identical, and first fixed plate and second fixed plate are respectively arranged in the different fixing grooves.
The laser smoke dust absorbing device further includes third air-flow connector, the third air-flow in one of the embodiments, Connector is set on the outer cylinder, and, outer cylinder one end far from the laser light incident end relatively independent with the pumping dirt connector Air drain is offered, gap of the air drain respectively between the third air-flow connector and the outer cylinder and the inner cylinder is connected to, To form the second airflow channel.
The laser smoke dust absorbing device further includes lower cover plate in one of the embodiments, and the lower cover plate is set to described The one end of outer cylinder far from the laser light incident end, the lower cover plate are hollow structure, and the inner cylinder and the lower cover plate are coaxial, and The lower cover plate is equipped with the gap being connected between the air drain and the outer cylinder and the inner cylinder close to one end of the outer cylinder Step.
The laser smoke dust absorbing device further includes upper cover plate in one of the embodiments, the upper cover plate respectively with institute It states inner cylinder and the outer cylinder to be detachably connected far from the one end at the laser emitting end, the upper cover plate is hollow structure, described Inner cylinder and the upper cover plate are coaxial.
Laser smoke dust absorbing device provided by the utility model has the advantages that
When utilizing the object on laser cutting working platform, laser is arranged in inner cylinder and acts on the object on workbench On, the flue dust that is generated on workbench by under the action of taking out dirt connector by workbench through the gap between inner cylinder and outer cylinder be discharged into Outer barrel, then be sucked out by pumping dirt connector.In this process, due to the first air-flow connector tilts down on inner cylinder and with Inner cylinder connection, the first air-flow connector can inject secondary air into the first airflow channel, so that workbench or object Flue dust on part is easier to fall off, to improve efficiency of dust collection in the gap between entrance inner cylinder and outer cylinder.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the laser smoke dust absorbing device of one embodiment of the utility model;
Fig. 2 is the top view of Fig. 1;
Fig. 3 is diagrammatic cross-section of the Fig. 2 along II-II section;
Fig. 4 is the enlarged diagram in Fig. 3 at A1;
Fig. 5 is diagrammatic cross-section of the Fig. 2 along III-III section;
Fig. 6 is the enlarged diagram in Fig. 3 at A2.
Specific embodiment
To keep the above objects, features, and advantages of the utility model more obvious and easy to understand, with reference to the accompanying drawing to this The specific embodiment of utility model is described in detail.Many details are explained in the following description in order to abundant Understand the utility model.But the utility model can be implemented with being much different from other way described herein, this field Technical staff can do similar improvement without prejudice to the utility model connotation, therefore the utility model is not by following public affairs The limitation for the specific implementation opened.
It should be noted that it can directly on the other element when element is referred to as " being fixed on " another element Or there may also be elements placed in the middle.When an element is considered as " connection " another element, it, which can be, is directly connected to To another element or it may be simultaneously present centering elements.
Unless otherwise defined, all technical and scientific terms used herein are led with the technology for belonging to the utility model The normally understood meaning of the technical staff in domain is identical.Terminology used in the description of the utility model herein only be The purpose of description specifically embodiment, it is not intended that in limitation the utility model.Term " and or " used herein includes Any and all combinations of one or more related listed items.
In conjunction with Fig. 1, Fig. 2 and Fig. 3, the laser smoke dust absorbing device 10 of one embodiment of the utility model is sharp for being set to In the optical path 20 of light device (not shown), the flue dust generated when removing laser cut workpieces avoids the mirror of smoke contamination laser Piece and jig, so as to improve the processing effect of object.Above-mentioned object can with but be not limited to sheet metal part or PCB panel Deng.
The laser smoke dust absorbing device 10 includes outer cylinder 100, inner cylinder 200, the first air-flow connector 300 and takes out dirt connector 400.
In conjunction with Fig. 1, Fig. 3 and Fig. 5, inner cylinder 200 and outer cylinder 100 are coaxial, and the inner wall of the outer wall of inner cylinder 200 and outer cylinder 100 Interval, one end of inner cylinder 200 and the connection closed at one end of outer cylinder 100, the other end of inner cylinder 200 and the other end of outer cylinder 100 connect It is logical, to form the first airflow channel 11.Wherein, one end of inner cylinder 200 and the closing connection of outer cylinder 100 is laser light incident end 201, One end that inner cylinder 200 is connected to outer cylinder 100 is laser emitting end 202.The inclination of first air-flow connector 300 is set on inner cylinder 200, and It is connected to inner cylinder 200, and first one end of air-flow connector 300 far from inner cylinder 200 is towards laser light incident end 201.Take out dirt connector 400 It is connected on outer cylinder 100, and with the first airflow channel 11.
Above-mentioned laser smoke dust absorbing device 10 when in use, is placed in the top of workbench 30 and is spaced with workbench 30, so that Laser emitting end 202 is right against workbench.When utilizing the object on laser cutting working platform 30, laser is arranged in inner cylinder It 200 and acts on the object on workbench 30, the flue dust generated on workbench 30 will be under the action of taking out dirt connector 400 by work Make platform 30 to be discharged into through the gap between inner cylinder 200 and outer cylinder 100 to outer cylinder 200, then is sucked out by pumping dirt connector 400.At this During a, tilted down on inner cylinder 200 due to the first air-flow connector 300 and be connected to inner cylinder 200, the first air-flow connector 300 can inject secondary air into the first airflow channel 11, so that the flue dust on workbench 30 or object more holds It is easy to fall off, to improve efficiency of dust collection in the gap between entrance inner cylinder 200 and outer cylinder 100.
Further, in conjunction with Fig. 3 and Fig. 4, in the present embodiment, inner cylinder 200 include sequentially connected first cylinder 210, Centrum 220 and the second cylinder 230, laser light incident end 201 is first one end of cylinder 210 far from centrum 220 at this time, and laser goes out Penetrating end 202 is second one end of cylinder 230 far from centrum 220, the gradient of the first air-flow connector 300 and the inclination of centrum 220 Spend it is identical, the first air-flow connector 300 inclination be set to the first cylinder 210 on, and close to centrum 220 be arranged so that come from first The air-flow of air-flow connector 300 can be flowed along the medial surface of centrum 220.So, it is ensured that the gas from the first air-flow connector 300 Stream is unlikely to excessively disorder and influences dust removing effects when flowing to the first airflow channel 11.
Further, with reference to Fig. 4, in the present embodiment, the first cylinder 210 and the intersection of centrum 220 offer installation Slot 203, the inner wall of mounting groove 203 include the first inner wall 2031 connected vertically and the second inner wall 2032, the second inner wall 2032 Gradient is identical as the gradient of centrum 220, the first inner wall 2031 relative to the second inner wall 2032 closer to centrum 220, first Air-flow connector 300 is vertical on the first inner wall 2031.In this way, the air-flow that the first air-flow connector 300 can be realized can be along centrum 220 medial surface 221 flows.The quantity of above-mentioned first air-flow connector 300 and mounting groove 203 is multiple.Specifically, in this implementation In mode, the quantity of the first air-flow connector 300 and mounting groove 203 is all four.
Further, with reference to Fig. 1, in the present embodiment, outer cylinder 100 includes the third cylinder 110 being connected and the 4th Body 120.Specifically, in the present embodiment, third cylinder 110 is detachably connected with the 4th cylinder 120.In this way, in cutter When making the object on platform 30, the particle after cutting object can inevitably be damaged the 4th cylinder 120, so as to convenient to the Four cylinders 120 are replaced.The internal diameter of third cylinder 110 is greater than the internal diameter of the 4th cylinder 120, and third cylinder 110 is far from the 4th One end of cylinder 120 and the laser light incident end 201 of inner cylinder 200, which are closed, to be connected, the 4th cylinder 120 far from third cylinder 110 one End is connected to the laser emitting end 202 of inner cylinder 200, and centrum 220 is located in third cylinder 110, the both ends difference of the second cylinder 230 In third cylinder 110 and the 4th cylinder 120.In this way, it is logical in the first airflow channel 11 and the second air-flow to be more advantageous to air-flow Flowing in road 12 (seeing below) improves efficiency of dust collection.
Further, in the present embodiment, laser smoke dust absorbing device 10 further includes the second air-flow connector 500, the second air-flow Connector 500 is set on outer cylinder 100, and relatively independent with pumping dirt connector 400, the second air-flow connector 500 and the first air-flow connector 300 It is connected by tracheae.In this way, the gas supply to the first air-flow connector 300 can be realized by the second connector 500.Specifically, at this In embodiment, every one second air-flow connector 500 interval is set between two pumping dirt connectors 400.
Further, in the present embodiment, multiple fixing grooves 111 are offered on outer cylinder 100.Specifically, in this embodiment party In formula, fixing groove 111 is opened on third cylinder 110.The one end for taking out dirt connector 400 is equipped with the first fixed plate 410, the second air-flow One end of connector 500 is equipped with the second fixed plate 510, and the first fixed plate 410 is identical as the size of the second fixed plate 520, and first is solid Fixed board 410 and the second fixed plate 510 are respectively arranged in different fixing grooves 111.In this way, when according to actual needs, it can Dirt pipe 400 and the second air-flow connector 500 exchange installation site are taken out to facilitate.
Above-mentioned pumping dirt connector 400 can be U-tube, and the first fixed plate 410 can be square plate, and fixing groove 111 is and the The corresponding square groove of one fixed plate 410, and it is equal with the length and width of the first fixed plate 410.In this way, can not only save pumping The installation space of dirt connector 400 and the second air-flow connector 500, and can to smoke dirt connector 400 far from 100 one end of outer cylinder Interface can be turned to according to practical service environment.It is appreciated that in other embodiments, the first fixed plate 410 may be used also With but be not limited to polygon, triangle and circle etc..More specifically, in the present embodiment, the quantity of above-mentioned U-tube is Two, two U-tubes are symmetrical about the central axes of inner cylinder 200.In this way, being more advantageous to the discharge of flue dust.
Further, in conjunction with Fig. 1, Fig. 3 and Fig. 5, in the present embodiment, laser smoke dust absorbing device 10 further includes third gas Connector 600 is flowed, third air-flow connector 600 is set on outer cylinder 100, and relatively independent with dirt connector 400 is taken out.Specifically, in this reality It applies in mode, third air-flow connector 600 is set on the 4th cylinder 120.Outer cylinder 100 is opened up far from the one end at laser light incident end 201 There is air drain 121, air drain 121 is connected to third air-flow connector 600 and the gap between outer cylinder 100 and inner cylinder 200 respectively, to be formed Second airflow channel 12.In this way, the air-flow in the second airflow channel 12 can assist flue dust to arrange to dirt connector 400 is taken out, cigarette is avoided Dirt is laterally discharged from the center of workbench 30 to side.Wherein, above-mentioned air drain 121 can be multiple spaced open slots, It may be annular groove.
Specifically, in the present embodiment, the outer wall of the 4th cylinder 120 is set there are four air inlet (not shown), and third connects First 600 quantity is two, and two third connectors 600 are connected to two of them air inlet, when in use, other two air inlets It blocks.In this way, being conducive to the installation site for changing third connector 600 according to operating environment.
Further, in conjunction with Fig. 3 and Fig. 6, in the present embodiment, laser smoke dust absorbing device 10 further includes lower cover plate 700, under Cover board 700 is set to the 4th one end of cylinder 120 far from laser light incident end 11, and lower cover plate 700 is hollow structure, and inner cylinder 200 is under Cover board 700 is coaxial, and lower cover plate 700 is equipped with connection air drain 121 and third cylinder 110 and the close to one end of the 4th cylinder 120 The step 710 in the gap between four cylinders 120.It is formed by high-speed flow in this way, can be enhanced in the second airflow channel 12, is produced Raw Coanda effect, effectively to change airflow direction, so that high-speed flow smoothly drives the flue dust on workbench 30 and object Along the second airflow channel 12 flow direction and be discharged into inside outer cylinder 100, thus again by take out dirt connector 400 flue dust is extracted out, mention High efficiency of dust collection.Specifically, in the present embodiment, the height of the step 710 is 0.05mm.
Further, with reference to Fig. 1, in the present embodiment, laser smoke dust absorbing device 10 further includes upper cover plate 800, upper cover plate 800 are detachably connected with inner cylinder 200 and outer cylinder 100 far from the one end at laser emitting end 202 respectively, and upper cover plate 800 is hollow knot Structure, inner cylinder 200 and upper cover plate 800 are coaxial.Specifically, in the present embodiment, the outer diameter value of inner cylinder 200 is greater than upper cover plate 800 Inner diameter values, inner cylinder 200 be set to upper cover plate 800 close to laser emitting end 12 one end.It is appreciated that in other embodiment In, inner cylinder 200 can be interference fitted with upper cover plate 800.
With reference to Fig. 1 and Fig. 5, now the mounting means to the laser smoke dust absorbing device 10 and working principle are carried out briefly It is bright:
As shown in Figure 1, the laser smoke dust absorbing device 10 uses mounting means from bottom to top, first by the first air-flow connector 300 are mounted on second surface 2032 and connect tracheae, and lower cover plate 700 is mounted on the 4th cylinder 120 later, then by Four cylinders 120 are fixed on third cylinder 110, and inner cylinder 200 is then placed in the lower cover plate 700 being fixed together, the 4th cylinder 120 and third cylinder 110 in, and inner cylinder 200 is fixed on third cylinder 110 by upper cover plate 800, finally according to reality Use environment will take out dirt connector 400 and the second air-flow connector 500 and pass through the first fixed plate 410 and the second fixed plate 510 respectively It is installed in fixing groove 111, wherein the second air-flow connector 500 is connected to by tracheae with the first air-flow connector 300.It is actually using When, laser light incident end 201 is in the underface of laser, and lower cover plate 700 and the interval of workbench 30 are arranged, and spacing distance can be 5mm。
As shown in figure 5, at B, be air inlet at C, the place D is that flue dust exports, and the place E is for the first secondary air import, at F Two auxilairy air intakes.When utilizing the object on laser cutting operation desk 30, the flue dust generated on workbench 30 will connect taking out dirt It is arranged by workbench 30 through the gap between inner cylinder 200 and outer cylinder 100 under the action of first 400 along the flow direction of the first airflow channel 11 Enter to outer cylinder 100, then is sucked out by pumping dirt connector 400 (namely D flue dust exports).In this process, dedusting air-flow will It is sucked by two air inlet of B, C, and under the premise of the second air-flow connector 500 is connected to the tracheae of the first air-flow connector 300, to Second air-flow connector 500 injects gas, so as to pass through the first air-flow connector 300 (namely first secondary air import at E) Gas is discharged into secondary air is formed in the first airflow channel 11, so that the flue dust on workbench 30 or object is easier to enter In gap between inner cylinder 200 and outer cylinder 100.Meanwhile to third air-flow connector 600 be passed through gas (namely at F second auxiliary gas Flow into mouth), secondary air is formed so as to which gas is discharged into the second airflow channel 12 by third air-flow connector 600.By In there are the steps of 0.05mm 710 on lower cover plate 700, high speed gas is formed by so as to enhance in the second airflow channel 12 Stream generates Coanda effect, and part increases air velocity and changes airflow direction, further enhances efficiency of dust collection.
Each technical characteristic of embodiment described above can be combined arbitrarily, for simplicity of description, not to above-mentioned reality It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited In contradiction, all should be considered as described in this specification.
Above-described embodiments merely represent several embodiments of the utility model, the description thereof is more specific and detailed, But it cannot be understood as the limitations to utility model patent range.It should be pointed out that for the common skill of this field For art personnel, without departing from the concept of the premise utility, various modifications and improvements can be made, these are belonged to The protection scope of the utility model.Therefore, the scope of protection shall be subject to the appended claims for the utility model patent.

Claims (10)

1. a kind of laser smoke dust absorbing device generates when removing laser cut workpieces for being set to the optical path of laser Flue dust characterized by comprising
Outer cylinder;
Inner cylinder, including laser light incident end and laser emitting end, the inner cylinder and the outer cylinder are coaxial, and the outer wall of the inner cylinder With the inner wall interval of the outer cylinder, the laser light incident end and outer cylinder closing are connected, the laser emitting end and described outer Cylinder connection, to form the first airflow channel;
First air-flow connector, inclination is set on the inner cylinder, and is connected to the inner cylinder, and the first air-flow connector is far from institute One end of inner cylinder is stated towards the laser light incident end;And
Dirt connector is taken out, is set on the outer cylinder, and be connected to first airflow channel.
2. laser smoke dust absorbing device according to claim 1, which is characterized in that the inner cylinder includes sequentially connected first Cylinder, centrum and the second cylinder, the laser light incident end are the described one end of first cylinder far from the centrum, the laser Exit end is the described one end of second cylinder far from the centrum, the gradient of the first air-flow connector and inclining for the centrum Gradient is identical, and the first air-flow tilt of joint is set on first cylinder, and is arranged close to the centrum, so that coming from The air-flow of the first air-flow connector can be flowed along the medial surface of the centrum.
3. laser smoke dust absorbing device according to claim 2, which is characterized in that the friendship of first cylinder and the centrum Offer mounting groove at boundary, the inner wall of the mounting groove includes the first inner wall and the second inner wall connected vertically, in described second The gradient of wall is identical as the gradient of the centrum, and first inner wall is relative to second inner wall closer to the vertebra Body, the first air-flow connector are vertical on first inner wall.
4. laser smoke dust absorbing device according to claim 2, which is characterized in that the outer cylinder includes connected third cylinder And the 4th cylinder, the internal diameter of the third cylinder are greater than the internal diameter of the 4th cylinder, the third cylinder is far from described the One end of four cylinders is closed with the laser light incident end seal of the inner cylinder and is connect, and the 4th cylinder is far from the third cylinder One end is connected to the laser emitting end of the inner cylinder, and the centrum is located in the third cylinder, second cylinder Both ends are located in the third cylinder and the 4th cylinder.
5. laser smoke dust absorbing device according to claim 4, which is characterized in that the third cylinder and the 4th cylinder It is detachably connected.
6. laser smoke dust absorbing device according to claim 1, which is characterized in that the laser smoke dust absorbing device further includes Two air-flow connectors, the second air-flow connector is set on the outer cylinder, and, second gas relatively independent with the pumping dirt connector Stream connector is connect with the first air-flow connector by tracheae.
7. laser smoke dust absorbing device according to claim 6, which is characterized in that offer multiple fixations on the outer cylinder Slot, described one end for taking out dirt connector are equipped with the first fixed plate, and one end of the second air-flow connector is equipped with the second fixed plate, described First fixed plate is identical as the size of second fixed plate, and first fixed plate and second fixed plate are respectively arranged on not In the same fixing groove.
8. laser smoke dust absorbing device according to claim 1, which is characterized in that the laser smoke dust absorbing device further includes Three air-flow connectors, the third air-flow connector are set on the outer cylinder, and relatively independent with the pumping dirt connector, and the outer cylinder is remote One end from the laser light incident end offers air drain, the air drain respectively with the third air-flow connector and the outer cylinder and institute The gap connection between inner cylinder is stated, to form the second airflow channel.
9. laser smoke dust absorbing device according to claim 8, which is characterized in that under the laser smoke dust absorbing device further includes Cover board, the lower cover plate are set to the one end of the outer cylinder far from the laser light incident end, and the lower cover plate is hollow structure, described Inner cylinder and the lower cover plate are coaxial, and the lower cover plate is equipped with close to one end of the outer cylinder and is connected to the air drain and the outer cylinder The step in the gap between the inner cylinder.
10. laser smoke dust absorbing device according to claim 1, which is characterized in that the laser smoke dust absorbing device further includes Upper cover plate, the upper cover plate are detachably connected with the inner cylinder and the outer cylinder far from the one end at the laser emitting end respectively, The upper cover plate is hollow structure, and the inner cylinder and the upper cover plate are coaxial.
CN201821119376.4U 2018-07-13 2018-07-13 Laser smoke dust absorbing device Active CN208728914U (en)

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Application Number Priority Date Filing Date Title
CN201821119376.4U CN208728914U (en) 2018-07-13 2018-07-13 Laser smoke dust absorbing device

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Application Number Priority Date Filing Date Title
CN201821119376.4U CN208728914U (en) 2018-07-13 2018-07-13 Laser smoke dust absorbing device

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Publication Number Publication Date
CN208728914U true CN208728914U (en) 2019-04-12

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CN201821119376.4U Active CN208728914U (en) 2018-07-13 2018-07-13 Laser smoke dust absorbing device

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111390401A (en) * 2020-03-26 2020-07-10 大族激光科技产业集团股份有限公司 Dust removal device and dust removal equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111390401A (en) * 2020-03-26 2020-07-10 大族激光科技产业集团股份有限公司 Dust removal device and dust removal equipment

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Effective date of registration: 20220728

Address after: 518000 101, building 6, Wanyan Industrial Zone, Qiaotou community, Fuhai street, Bao'an District, Shenzhen City, Guangdong Province

Patentee after: Shenzhen Han's Semiconductor Equipment Technology Co.,Ltd.

Address before: 518051 Dazu laser building, 9 new West Road, North Nanshan District high tech park, Shenzhen, Guangdong

Patentee before: HAN'S LASER TECHNOLOGY INDUSTRY GROUP Co.,Ltd.

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