CN208722025U - Gas compartment is vented ventilating control system - Google Patents
Gas compartment is vented ventilating control system Download PDFInfo
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- CN208722025U CN208722025U CN201821664391.7U CN201821664391U CN208722025U CN 208722025 U CN208722025 U CN 208722025U CN 201821664391 U CN201821664391 U CN 201821664391U CN 208722025 U CN208722025 U CN 208722025U
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- gas
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- pump
- host computer
- gas compartment
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Abstract
The utility model relates to a kind of gas compartments to be vented ventilating control system, comprising: mass flowmenter, gas leakage probe, pump, valve, alarm, analog module, digital module, vacuum meter and host computer；The mass flowmenter is connect with analog module, the gas leakage probe is connect with analog module, the pump is connect with digital module, the valve is connect with digital module, the alarm is connect with digital module, and the analog module, digital module and vacuum meter are connect with host computer.
Description
Technical field
The utility model relates to field of control of vacuum equipment, and in particular to a kind of gas compartment exhaust ventilating control system.
Background technique
For the needs for meeting interferometer assembly and performance test, the utility model develops gas compartment and is vented ventilating control system
System vacuumizes and is filled with a variety of quantitative specific gas for gas compartment.
General gas flow room vacuumizes and is filled with a variety of quantitative specific gas, is completed by manually controlling, causes to be filled in this way
When a variety of quantitative specific gas, due to artificial judgment, the larger and different personnel of error is generated, there is different errors in judgement,
It will cause repeat instability.Control system described in the utility model is filled with a variety of quantitative specific gas, can accurately control
The charge of each gas is made, and there is repetition stability.
Utility model content
In view of the deficiencies in the prior art, the purpose of this utility model is for trueness error caused by manual operation
Big and repetition stability difference defect, provides that a kind of structure is simple, the easy to accomplish and system that operates.
To achieve the above objectives, the technical scheme adopted by the utility model is that:
A kind of gas compartment is vented ventilating control system, comprising: mass flowmenter, gas leakage probe, pump, valve, alarm,
Analog module, digital module, vacuum meter and host computer；
The mass flowmenter is connect with analog module, and the gas leakage probe is connect with analog module, described
Pump is connect with digital module, and the valve is connect with digital module, and the alarm is connect with digital module, the simulation
Amount module, digital module and vacuum meter are connect with host computer；
The mass flowmenter is for measuring gas charge；
The gas leaks the concentration value popped one's head in for detecting gas leakage；
The analog module is used for the gas charge of acquisition quality flowmeter, and the gas charge of acquisition is uploaded
To host computer；
For acquiring the concentration value for the gas leakage that gas leakage probe is measured, and the concentration value of gas leakage is uploaded to
Host computer；
Instruction control pump, valve and the alarm that the digital module is used to be issued according to host computer；And acquire pump and valve
Switch state, feed back to host computer；
The pump is for vacuumizing gas compartment；
The valve is vacuumized and is inflated to gas compartment for controlling；
The vacuum meter is used for the vacuum degree of detection gas room, and vacuum degree is uploaded to host computer by communication interface；
The host computer is used for the gas parameter value set according to client, and control gaseous species, gas are filled with sequence and gas
Body charge；The gas charge that analog module uploads is received, if gas charge is not up to the gas parameter of client's setting
Value, then control valve continues to air inflation, if gas charge reaches the gas parameter value of client's setting, control valve stops
To air inflation；
The host computer is used to for the concentration value of the gas leakage received being compared with the alarm numerical value that client sets,
If the concentration value of gas leakage is higher than the alarm numerical value of client's setting, controls alarm and carry out alert process；
The host computer is used to receive the vacuum degree of vacuum meter upload, judges whether gas compartment reaches vacuum according to vacuum degree
It is required that if gas compartment reaches vacuum requirement, control pump and valve closed, if gas compartment is not up to vacuum requirement, control pump and
Valve continues to vacuumize.
On the basis of above scheme, the host computer includes industrial control computer and display.
On the basis of above scheme, the analog module is based on industrial field bus, the data of remote distributed
Acquisition and control product, including 8 road analog inputs and 4 road analog outputs.
On the basis of above scheme, the digital module is based on industrial field bus, the data of remote distributed
Acquisition and control product, including the input of 8 railway digital amounts and the output of 8 railway digital amounts.
On the basis of above scheme, the mass flowmenter is according to the size of aeration quantity, using FC-R7700CD or FC-
The mass flowmenter of R7800CD model.
On the basis of above scheme, the gas leakage probe includes: detection CO, NH3、CH4Probe.
On the basis of above scheme, the pump includes: molecular pump and mechanical pump, the molecular pump and mechanical pump for pair
Gas compartment vacuumizes.
On the basis of above scheme, the valve includes: mass flowmenter charge valve, mass flowmenter shut-off valve and main pumping
Feed channel slide valve, the mass flowmenter charge valve and mass flowmenter shut-off valve are connected on the front and back of mass flowmenter, use
In controlling the inflation to gas compartment, the main pump-line slide valve is located between molecular pump and gas compartment, for controlling to gas
Body room vacuumizes.
On the basis of above scheme, the mass flowmenter is located proximate to gas compartment.
The gas compartment exhaust mentioned in text refers to vacuumizing gas compartment.
Further, the man-machine interface of host computer, there is following functions:
1, the record and operation log of vacuum degree data and technological parameter can be carried out.
2, historical operation can be recalled before starting operation next time to be analyzed.
3, you can recall institute's setting parameter at any time and be observed inspection in the process of running.
4, safe operation, equipment interlock function.
5, the setting function of technological parameter.
6, air inflation AutoPlay function.
7, fault alarm function.
The utility model has the advantages that
Control system provided by the utility model compares manual operation and has the advantage that this system is using high-precision
Gas mass flow meter carries out multiple gases to gas compartment and is optionally combined, precise quantitative inflation.Comparison manual operation, this system according to
By host computer man-machine interface, have that easy to operate, control is accurate, automatic inflating may be implemented, save manpower, increases efficiency.Especially
It can be improved the precision of gas charge and have better repetition stability for inflation.
Detailed description of the invention
The utility model has following attached drawing:
Fig. 1 is the utility model control system architecture schematic diagram.
Specific embodiment
The utility model is described in further detail below in conjunction with attached drawing.
As shown in Figure 1, a kind of system for vacuumizing and being filled with quantitative specific gas for gas compartment, including host computer,
Analog module, digital module, vacuum meter, mass flowmenter, gas leak probe, pump, valve, alarm.
The mass flowmenter is connect with analog module, and the gas leakage probe is connect with analog module, described
Pump is connect with digital module, and the valve is connect with digital module, and the alarm is connect with digital module, the simulation
Amount module, digital module and vacuum meter are connect with host computer；
The mass flowmenter is for measuring gas charge；
The gas leaks the concentration value popped one's head in for detecting gas leakage；
The analog module is used for the gas charge of acquisition quality flowmeter, and the gas charge of acquisition is uploaded
To host computer；
For acquiring the concentration value for the gas leakage that gas leakage probe is measured, and the concentration value of gas leakage is uploaded to
Host computer；
Instruction control pump, valve and the alarm that the digital module is used to be issued according to host computer；And acquire pump and valve
Switch state, feed back to host computer；
The pump is for vacuumizing gas compartment；
The valve is vacuumized and is inflated to gas compartment for controlling；
The vacuum meter is used for the vacuum degree of detection gas room, and vacuum degree is uploaded to host computer by communication interface；
The host computer is used for the gas parameter value set according to client, and control gaseous species, gas are filled with sequence and gas
Body charge receives the gas charge that analog module uploads, if gas charge is not up to the gas parameter of client's setting
Value, then control valve continues to air inflation, if gas charge reaches the gas parameter value of client's setting, control valve stops
To air inflation；
The host computer is used to for the concentration value of the gas leakage received being compared with the alarm numerical value that client sets,
If the concentration value of gas leakage is higher than the alarm numerical value of client's setting, controls alarm and carry out alert process；
The host computer is used to receive the vacuum degree of vacuum meter upload, judges whether gas compartment reaches vacuum according to vacuum degree
It is required that if gas compartment reaches vacuum requirement, control pump and valve closed, if gas compartment is not up to vacuum requirement, control pump and
Valve continues to vacuumize.
On the basis of above scheme, the host computer includes industrial control computer and display
On the basis of above scheme, the analog module is based on industrial field bus (RS485), remote distributed
Data acquisition and control product, including 8 road analog inputs and 4 road analog outputs.
On the basis of above scheme, the digital module is based on industrial field bus (RS485), remote distributed
Data acquisition and control product, including 8 railway digital amounts input and 8 railway digital amounts output.
On the basis of above scheme, the mass flowmenter is according to the size of aeration quantity, using FC-R7700CD or FC-
R7800CD。
On the basis of above scheme, the gas leakage probe includes: detection CO, NH3、CH4Probe.
On the basis of above scheme, the pump includes: molecular pump and mechanical pump, the molecular pump and mechanical pump for pair
Gas compartment vacuumizing and exhausting.
On the basis of above scheme, the valve includes mass flowmenter charge valve and shut-off valve, main pump-line flashboard
Valve.The mass flowmenter charge valve and mass flowmenter shut-off valve are connected on the front and back of mass flowmenter, for controlling to gas
The inflation of body room, the main pump-line slide valve are located between molecular pump and gas compartment, are vacuumized for controlling to gas compartment.
On the basis of above scheme, the mass flowmenter is located proximate to gas compartment.
In the vacuum parameters that control system described in the utility model, host computer are set according to client, vacuum is acquired in real time
The vacuum degree provided is counted, control pumps and valve (slide valve), reaches client's vacuum requirement.According to customer process setup parameter ----matter
It measures flow meter settings circulation and sequence and setting gas is successively filled with by acquisition control analog module and digital module
Type and flow.During operation, host computer collect gas leakage probe data, higher than client setting alarm numerical value,
Alarm generates alarm signal.
In conclusion the utility model control system, realizes automatic control and vacuumizes and be filled with quantitative specific gas.Than
Compared with manual operation, there is high precision and stability.
The content being not described in detail in this specification belongs to the prior art well known to professional and technical personnel in the field.
Claims (8)
1. a kind of gas compartment is vented ventilating control system characterized by comprising mass flowmenter, gas leakage probe, pump,
Valve, alarm, analog module, digital module, vacuum meter and host computer；
The mass flowmenter is connect with analog module, and the gas leakage probe connect with analog module, it is described pump and
Digital module connection, the valve are connect with digital module, and the alarm is connect with digital module, the analog quantity mould
Block, digital module and vacuum meter are connect with host computer；
The mass flowmenter is for measuring gas charge；
The gas leaks the concentration value popped one's head in for detecting gas leakage；
The analog module is used for the gas charge of acquisition quality flowmeter, and the gas charge of acquisition is uploaded to
Position machine；
The concentration value of gas leakage measured for acquiring gas leakage probe, and the concentration value of gas leakage is uploaded to upper
Machine；
Instruction control pump, valve and the alarm that the digital module is used to be issued according to host computer；And acquire opening for pump and valve
Off status feeds back to host computer；
The pump is for vacuumizing gas compartment；
The valve is vacuumized and is inflated to gas compartment for controlling；
The vacuum meter is used for the vacuum degree of detection gas room, and vacuum degree is uploaded to host computer by communication interface；
The host computer is used for the gas parameter value set according to client, and control gaseous species, gas are filled with sequence and gas fills
Enter amount；The gas charge that analog module uploads is received, if gas charge is not up to the gas parameter value of client's setting,
Control valve continues to air inflation, if gas charge reaches the gas parameter value of client's setting, control valve stops to gas
The inflation of body room；
The host computer is for the concentration value of the gas leakage received to be compared with the alarm numerical value that client sets, if letting out
The concentration value of gas leakage body is higher than the alarm numerical value of client's setting, then controls alarm and carry out alert process；
The host computer is used to receive the vacuum degree of vacuum meter upload, judges whether gas compartment reaches vacuum and want according to vacuum degree
It asks, if gas compartment reaches vacuum requirement, controls pump and valve is closed, if gas compartment is not up to vacuum requirement, control pump and valve
Continue to vacuumize.
2. gas compartment as described in claim 1 is vented ventilating control system, which is characterized in that the host computer includes industry control meter
Calculation machine and display.
3. gas compartment as described in claim 1 is vented ventilating control system, which is characterized in that the analog module is to be based on
Industrial field bus, the data acquisition and control product of remote distributed, including 8 road analog inputs and 4 road analog outputs.
4. gas compartment as described in claim 1 is vented ventilating control system, which is characterized in that the digital module is to be based on
Industrial field bus, the data acquisition and control product of remote distributed, including the input of 8 railway digital amounts and the output of 8 railway digital amounts.
5. gas compartment as described in claim 1 is vented ventilating control system, which is characterized in that the mass flowmenter is according to filling
The size of tolerance, using the mass flowmenter of FC-R7700CD or FC-R7800CD model.
6. gas compartment as described in claim 1 is vented ventilating control system, which is characterized in that the gas leakage probe packet
It includes: detection CO, NH3、CH4Probe.
7. gas compartment as described in claim 1 is vented ventilating control system, which is characterized in that the pump include: molecular pump and
Mechanical pump, the molecular pump and mechanical pump are for vacuumizing gas compartment.
8. gas compartment as described in claim 1 is vented ventilating control system, which is characterized in that the valve includes: mass flow
Count charge valve, mass flowmenter shut-off valve and main pump-line slide valve, the mass flowmenter charge valve and mass flowmenter
Shut-off valve is connected on the front and back of mass flowmenter, and for controlling the inflation to gas compartment, the main pump-line slide valve is located at
Between molecular pump and gas compartment, gas compartment is vacuumized for controlling.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821664391.7U CN208722025U (en) | 2018-10-15 | 2018-10-15 | Gas compartment is vented ventilating control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821664391.7U CN208722025U (en) | 2018-10-15 | 2018-10-15 | Gas compartment is vented ventilating control system |
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| Publication Number | Publication Date |
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| CN208722025U true CN208722025U (en) | 2019-04-09 |
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| CN201821664391.7U Active CN208722025U (en) | 2018-10-15 | 2018-10-15 | Gas compartment is vented ventilating control system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112030226A (en) * | 2020-08-04 | 2020-12-04 | 西安电子科技大学 | Diamond growth process control method and device based on PLC |
-
2018
- 2018-10-15 CN CN201821664391.7U patent/CN208722025U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112030226A (en) * | 2020-08-04 | 2020-12-04 | 西安电子科技大学 | Diamond growth process control method and device based on PLC |
| CN112030226B (en) * | 2020-08-04 | 2022-02-18 | 西安电子科技大学 | Diamond growth process control method and device based on PLC |
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