CN208700015U - Workpiece holder, manipulator and robot with the workpiece holder - Google Patents

Abstract

The utility model, which provides one kind, can be improved conveying speed to improve productive workpiece holder, manipulator and robot with the workpiece holder, the workpiece holder is used in the manipulator of robot for keeping the holder of workpiece, set on the edge side positioned at manipulator of distribution multiple maintaining parts on a robotic arm outer rim and protruded upwards from the maintaining part, relative to a maintaining part, multiple workpiece holders are set, wherein, multiple workpiece holders be respectively provided with elastic component and for keep workpiece and have can with the elastic component engage locking teat workpiece holder ontology, the elastic component is arranged between the workpiece holder ontology and the maintaining part.

Description

Workpiece holder, manipulator and robot with the workpiece holder

Technical field

The utility model relates to a kind of workpiece holder for keeping workpiece, the manipulator with the workpiece holder and A kind of robot with the manipulator, and in particular to manipulator institute for being used to transport workpiece in the manufacturing process of electronic device Workpiece holder, the manipulator with the workpiece holder and the robot with the manipulator used.

Background technique

Back and forth, in the manufacturing process of electronic device, conveying machine people is widely used.Conveying machine people utilizes Manipulator specifically keeps the workpiece such as substrate using the workpiece holder for being set to the all-wing aircraft portion of distribution on a robotic arm. Specifically, multiple all-wing aircraft portions are distributed on a robotic arm, are respectively set on the lateral border in each of multiple all-wing aircraft portions Multiple workpiece holders for being used to keep substrate.

It is especially G6H base in substrate due to the self weight of substrate itself when keeping substrate using such workpiece holder In the case where plate, flexure can be generated in central portion and form concave shape, further, since G6H conveying machine people shakes in the longitudinal direction Maximum magnitude can reach 15mm, therefore, the contact area for generating workpiece holder and substrate is reduced and is caused because of vibration Substrate slides such situation on workpiece holder.

For such situation, since existing workpiece holder can not be with the flexure and vibration of substrate and in height side It floats upwards, the function without inhibition vibration, therefore, it is impossible to it is in contact with substrate all workpiece holders all, thus because Contact area reduces and causes the service life reduction of workpiece holder, in addition, substrate slides on workpiece holder in order to prevent, no It obtains and does not slow down conveying speed, as a result productivity is caused to reduce.

Utility model content

The utility model is precisely in order to solving the above subject and proposing, main purpose is that providing one kind can be improved Conveying speed is to improve productive workpiece holder, the manipulator with the workpiece holder and the machine with the manipulator Device people.

To achieve the goals above, the technical solution that the utility model uses is as follows:

A kind of workpiece holder is to be set to distribution for keeping the holder of workpiece used in the manipulator of robot It the outer rim of the edge side positioned at manipulator of multiple maintaining parts on a robotic arm and is protruded upwards from the maintaining part, relative to Multiple workpiece holders are arranged in one maintaining part, which is characterized in that

Multiple workpiece holders be respectively provided with elastic component and for keep workpiece and have can be with the elasticity Component locking locking teat workpiece holder ontology, the elastic component be arranged at the workpiece holder ontology with it is described Between maintaining part.

Moreover it is preferred that in the state of no holding workpiece, in the multiple institutes for being set to the same maintaining part State it is in workpiece holder, from the center of the manipulator towards on the direction of the outer rim of the maintaining part closer to outside The height of the workpiece holder ontology of the workpiece holder is higher, and the elasticity modulus of the elastic component is identical.

Moreover it is preferred that for it is in the multiple workpiece holders for being set to the same maintaining part, From the center of the manipulator towards the workpiece holder closer to outside on the direction of the outer rim of the maintaining part, if The elasticity modulus for being placed in the elastic component between the workpiece holder ontology and the maintaining part is bigger, in no holding work In the state of part, the height of the workpiece holder ontology is identical.

Moreover it is preferred that the workpiece holder ontology runs through the maintaining part.

Moreover it is preferred that the workpiece holder ontology has the head as locking teat for keeping workpiece With the body for running through the maintaining part, the diameter of the body is less than the hole for being opened in the through hole of the maintaining part Diameter, to be tilted in the state of being installed on the maintaining part.

Moreover it is preferred that the manipulator is rectangular shape.

Moreover it is preferred that the long side and short side along the manipulator are arranged with maintaining part described in multiple row respectively, on edge The manipulator long side arrangement the maintaining part on, the distance of the width direction Central Line away from the manipulator is identical Workpiece holder ontology height in the state of no holding workpiece is identical, and in the short side arrangement along the manipulator The maintaining part on, the identical workpiece holder ontology of the distance of the length direction Central Line away from the manipulator is not having There is height in the state of keeping workpiece identical.

Moreover it is preferred that the elastic component is spring or elastic rubber.

Moreover it is preferred that the workpiece holder ontology is cheese head screw.

Moreover it is preferred that the workpiece is substrate.

In addition, another technical solution that the utility model uses is as follows:

A kind of manipulator has the maintaining part for being used to keep workpiece being distributed on the manipulator, which is characterized in that

In the outer rim of the maintaining part, by from the maintaining part it is outstanding upwards in a manner of be provided with any of the above-described technical side Workpiece holder described in case.

In addition, another technical solution that the utility model uses is as follows:

A kind of robot, has: manipulator；The mechanical arm for keeping the manipulator mobile；And it is connect with the mechanical arm Robot trunk, which is characterized in that

The manipulator is manipulator described in above-mentioned technical proposal.

Utility model effect

According to the utility model, elastic component is respectively provided with by multiple workpiece holders and for keeping workpiece and having The workpiece holder ontology for the locking teat that can be engaged with the elastic component, the elastic component are arranged at the workpiece and protect Between gripping member ontology and the maintaining part, workpiece holder can be made to float in the height direction with the flexure and vibration of substrate It is dynamic, to have the function of inhibiting vibration, it is furthermore possible to increase the contact area of workpiece holder and workpiece, is protected increasing workpiece It is able to suppress substrate while the service life of gripping member to slide on holder, to accelerate to transport speed and improve productivity.

Moreover, making outer in the state of no holding workpiece by the identical situation of elasticity modulus in elastic component The height of the workpiece holder ontology of side is slightly above the height of the workpiece holder ontology of inside, or in no holding workpiece Under state, in the identical situation of the height of holder ontology, make to be set between the workpiece holder ontology and maintaining part in outside The elasticity modulus of elastic component be slightly larger than the elastic component between the workpiece holder ontology and maintaining part for being set to inside Elasticity modulus makes the deflection profile of multiple workpiece holders and substrate match, and can further increase workpiece holder and work It is sliding on holder can to further suppress substrate while the service life for further increasing workpiece holder for the contact area of part It is dynamic, to further speed up conveying speed and improve productivity.

Detailed description of the invention

Fig. 1 is the vertical view for schematically showing the manipulator for the substrate holder for applying the embodiments of the present invention 1 Figure.

Fig. 2 is the portion the A partial enlarged view of Fig. 1.

Fig. 3 is the side view of Fig. 2.

Fig. 4 is the portion the B partial enlarged view of Fig. 3.

Fig. 5 is the substrate holder and substrate of the embodiments of the present invention 1 when being shown schematically in mounting substrate The explanatory diagram of positional relationship.

Fig. 6 is to schematically show the part of the substrate holder of the embodiments of the present invention 2 corresponding with Fig. 4 to put Big figure.

Fig. 7 is to schematically show the robot of the manipulator with the substrate holder for applying the utility model to show It is intended to.

Fig. 8 is the partial enlarged view for schematically showing the substrate holder of comparative example corresponding with Fig. 4.

Fig. 9 is the explanation of the positional relationship of the substrate holder and substrate of comparative example when being shown schematically in mounting substrate Figure.

Description of symbols

1: conveying machine people；11: robot trunk；12: mechanical arm；13: manipulator；132,232: maintaining part (all-wing aircraft Portion)；133,233: substrate holder ontology；134: interconnecting piece；135: elastic component (spring)；136: nut；S, S ': substrate.

Specific embodiment

Hereinafter, being described with reference to the preferred embodiment of the utility model.But the following embodiments and the accompanying drawings is only illustratively Indicate that the preferred structure of the utility model, the scope of the utility model are not limited by these structures.In addition, the following description In, the hardware configuration of device and software configuration, process flow, manufacturing condition, size, material, shape etc. be as long as no spy It does not record not specifically, the scope of the utility model is just not limited to them.

[embodiment 1]

Fig. 1 is the vertical view for schematically showing the manipulator for the substrate holder for applying the embodiments of the present invention 1 Figure.Fig. 2 is the portion the A partial enlarged view of Fig. 1.Fig. 3 is the side view of Fig. 2.Fig. 7 be schematically show have apply it is practical The schematic diagram of the robot of the manipulator of novel substrate holder.

As shown in fig. 7, conveying machine people 1 has: robot trunk 11；The mechanical arm 12 of arm as robot, with Robot trunk 11 connects, and is in multi-joint shape, keeps aftermentioned manipulator 13 mobile；The manipulator 13 of hand as robot, peace Front end loaded on mechanical arm 12, including all-wing aircraft portion (otherwise referred to as maintaining part) 132 (referring to Fig.1).

As shown in Figure 1,13 rectangular shaped of manipulator, along the long side and short side of manipulator 13 be spaced one from it is certain between Multiple all-wing aircraft portions 132 are arranged with every ground, along the all-wing aircraft portion 132 of the short side arrangement of manipulator 13 and along the long side of manipulator 13 The cross section in the all-wing aircraft portion 132 of arrangement is interconnecting piece 134.At the end of the edge side of the manipulator 13 in each all-wing aircraft portion 132 Portion is respectively provided with the multiple substrate holder ontologies 133 for keeping substrate.By Fig. 2 and Fig. 3 it is found that in the present embodiment, 3 substrate holder ontologies 133, but its number are equipped in the end of the edge side of the manipulator 13 in each all-wing aircraft portion 132 It is without being limited thereto, it is also possible to 2 or 4 or more.In addition, in the present embodiment, the arrangement side of 3 substrate holder ontologies 133 Formula lines up two rows, one, outside, inside two inside and outside being, but its arrangement mode is also not necessarily limited to this, is also possible to inside and outside line up More than three rows, the number of the substrate holder ontology 133 of every row is also unrestricted.

In addition, multiple substrate holder ontologies of the end setting in the edge side of the manipulator 13 in each all-wing aircraft portion 132 Interval between 133 is also without special provision, as long as according to the suitable selection such as the size of substrate.

In addition, it is arranged with maintaining part 132 described in multiple row respectively along the long side and short side of the manipulator 13 in Fig. 1, Along the manipulator long side arrangement the maintaining part 132 on, the width direction Central Line away from the hand ontology away from From the identical substrate holder ontology 133, height is identical in the state of no holding workpiece, and along the machinery In the maintaining part 132 of the short side arrangement of hand, the identical base of the distance of the length direction Central Line away from the manipulator Height in the state of no holding workpiece of plate holder ontology 133 is identical.

Fig. 4 is the portion the B partial enlarged view of Fig. 3.The shape of substrate holder ontology 133 is substantially mushroom in the present embodiment Shape has head 133a and body 133b.Head 133a is semicircular arc, for keeping (bearing) substrate.Body 133b Be it is cylindric, for being connect with all-wing aircraft portion 132.In the present embodiment, substrate holder ontology 133 is cheese head screw, body 133b runs through all-wing aircraft portion 132, in body 133b after all-wing aircraft portion 132, is screwed into nut 136 from lower part.Certain substrate is protected Gripping member ontology 133 can also only be inserted into all-wing aircraft portion 132 not through all-wing aircraft portion 132.As long as in addition, substrate holder ontology 133 It is the component with head and body, shape and can be according to the thickness in all-wing aircraft portion 132 with the connection type in all-wing aircraft portion Other conditions such as degree and intensity are suitable for selection, and the shape of preferable substrate holder ontology 133 for substantially mushroom-shaped and runs through all-wing aircraft Portion.

Moreover, being equipped with the spring as elastic component between each substrate holder ontology 133 and all-wing aircraft portion 132 135, elastic component here is also possible to the component that elastic rubber etc. has certain elastic force certainly.

In addition, in the present embodiment, the shape of substrate holder ontology 133 is substantially mushroom-shaped, have head 133a and Body 133b, but substrate holder ontology is not limited to the embodiment, as long as having can engage with elastic component Function locking teat.

Described substrate holder in the present embodiment, including substrate holder ontology and elastic component.

In the present embodiment, the elasticity modulus (elasticity modulus or intensity of i.e. each elastic component) of each spring 135 is identical.It is logical Cross Fig. 2 it is found that be located at outside (centrally located in Fig. 4) substrate holder ontology 133 height it is higher, two sides The height of the substrate holder ontology 133 of (i.e. inside in Fig. 2) is lower.

Fig. 5 is the substrate holder and substrate of the embodiments of the present invention 1 when being shown schematically in mounting substrate The explanatory diagram of positional relationship.By setting as in Example 1, when loading substrate S, due in each substrate holder sheet Spring 135 is equipped between body 133 and all-wing aircraft portion 132, when substrate S is placed in substrate holder ontology 133, due to spring 135 effect, the vibration of flexure and manipulator that substrate holder ontology 133 can generate due to self weight with substrate and in height Degree floats on direction.According to such setting structure, contact portion caused by the vibration of robot in the longitudinal direction itself is avoided Area reduces, so as to inhibit sliding of the substrate on substrate holder.Therefore, it can be improved conveying speed to improve life Production property.Moreover, because configuration mode and the shape of substrate center portion recess that the low outside in inside of multiple substrate holder ontologies is high Shape matches, therefore can further increase the contact area of substrate holder ontology and substrate, so as to reduce stress collection In, extend the service life of substrate holder, and sliding of the substrate on substrate holder can be further suppressed, it can be further Conveying speed is improved to improve productivity.

[embodiment 2]

In example 2, as shown in Figure 6, in addition to make no matter to be located inside or on the outside of substrate holder ontology 133 It is highly all the same, and the elasticity modulus of each spring 135 (elasticity modulus or intensity of i.e. each elastic component) is set as positioned at outer The elasticity modulus of the spring 135 of side (centrally located in Fig. 6) is larger, the elasticity of the spring 135 of two sides (i.e. inside) Except modulus is smaller, other structures are same as Example 1, therefore omit the description here.

According to this structure, although the height of the interior each substrate holder ontology 133 in outside is identical before loading substrate S, But since the elasticity modulus of the spring in outside 135 is larger, and the elasticity modulus of the spring 135 of inside is smaller, therefore in mounting base When plate, it is also capable of forming the positional relationship of, substrate holder identical with Fig. 5 and substrate.

Therefore, technical effect same as Example 1 can be obtained.

[variation]

In addition, as embodiment 1 or the variation of embodiment 2, by the body 133b for making substrate holder ontology 133 Diameter be slightly less than its perforative through hole aperture, substrate holder ontology 133 load substrate when, substrate can be made to protect Gripping member ontology 133 horizontally generates small inclination, thus further increases the contact area with substrate and further suppresses Sliding of the substrate on substrate holder.Therefore, conveying speed can be further increased, productivity is further increased.

[comparative example]

For the technical effect of clear the utility model, Fig. 8 and figure below used as comparative example (prior art) 9, the technical effect of comparative descriptions the utility model compared with the existing technology.

Fig. 8 is the partial enlarged view for schematically showing the substrate holder of comparative example corresponding with Fig. 4.Fig. 9 is to show Indicate to meaning property the explanatory diagram of the positional relationship of the substrate holder and substrate of comparative example when loading substrate.

By Fig. 8 and Fig. 9 it is found that each substrate holder ontology 233 has head 233a and body 233b, make head 233a is formed as trapezoidal (i.e. imparting taper), and the height of each substrate holder ontology 233 is identical.In each substrate holder ontology The elastic components such as not set spring between 233 and all-wing aircraft portion 232.In this way, when loading substrate, substrate holder ontology 233 is small with the contact area of substrate S ', and especially in the case where robot vibrates in the longitudinal direction, substrate is very easy to skid, To cause conveying speed slow, productivity is reduced, and will also result in the service life reduction of substrate holder.

It should be noted that above embodiment is the utility model preferred embodiment, the utility model is not It is defined in this.As long as multiple workpiece holders are respectively provided with the workpiece holder ontology and elastic component for having locking teat, The elastic component is arranged between workpiece holder ontology and maintaining part, it will be able to realize the function of the utility model.

In addition, substrate holder ontology is preferably shaped to the semicircular arc substantially mushroom-shaped in head, certain substrate is protected The shape of gripping member ontology is also not necessarily limited to this, for example, substrate holder ontology itself may not be substantially mushroom-shaped, but slightly The component of rubber is installed on the head of the trapezoidal substrate holder ontology with taper.

It should be appreciated that above-mentioned embodiment is merely exemplary, and not restrictive, without departing from the utility model In the case where basic principle, those skilled in the art is directed to the various apparent or equivalent modification or replace that above-mentioned details is made It changes in the scope of the claims for being all included in the utility model.

Claims (12)

1. It is for keeping the holder of workpiece used in the manipulator of robot, set on being distributed in 1. a kind of workpiece holder It the outer rim of the edge side positioned at manipulator of multiple maintaining parts on manipulator and is protruded upwards from the maintaining part, relative to one Multiple workpiece holders are arranged in a maintaining part, which is characterized in that

   Multiple workpiece holders be respectively provided with elastic component and for keep workpiece and have can be with the elastic component The workpiece holder ontology of the locking teat of locking, the elastic component are arranged at the workpiece holder ontology and the holding Between portion.
2. 2. workpiece holder according to claim 1, which is characterized in that

   In the state of no holding workpiece, in the multiple workpiece holders for being set to the same maintaining part, From the center of the manipulator towards the workpiece holder closer to outside on the direction of the outer rim of the maintaining part The height of the workpiece holder ontology is higher,

   The elasticity modulus of the elastic component is identical.
3. 3. workpiece holder according to claim 1, which is characterized in that

   For it is in the multiple workpiece holders for being set to the same maintaining part, at the center from the manipulator Towards the workpiece holder closer to outside on the direction of the outer rim of the maintaining part, it is set to the workpiece holder sheet The elasticity modulus of the elastic component between body and the maintaining part is bigger,

   In the state of no holding workpiece, the height of the workpiece holder ontology is identical.
4. 4. workpiece holder described in any one of claim 1 to 3, which is characterized in that

   The workpiece holder ontology runs through the maintaining part.
5. 5. workpiece holder according to claim 4, which is characterized in that

   The workpiece holder ontology is with for keeping the head of the locking teat as described in of workpiece and for through described The body of maintaining part, the diameter of the body is less than the aperture for being opened in the through hole of the maintaining part, to be installed on It can be tilted in the state of the maintaining part.
6. 6. workpiece holder described in any one of claim 1 to 3, which is characterized in that

   The manipulator is rectangular shape.
7. 7. workpiece holder according to claim 6, which is characterized in that

   It is arranged with maintaining part described in multiple row respectively along the long side and short side of the manipulator, in the long side along the manipulator In the maintaining part of arrangement, the identical workpiece holder ontology of the distance of the width direction Central Line away from the manipulator Height is identical in the state of no holding workpiece, and in the maintaining part of the short side arrangement along the manipulator, away from The identical workpiece holder ontology of the distance of the length direction Central Line of the manipulator is in no state for keeping workpiece Lower height is identical.
8. 8. workpiece holder described in any one of claim 1 to 3, which is characterized in that

   The elastic component is spring or elastic rubber.
9. 9. workpiece holder described in any one of claim 1 to 3, which is characterized in that

   The workpiece holder ontology is cheese head screw.
10. 10. workpiece holder described in any one of claim 1 to 3, which is characterized in that

    The workpiece is substrate.
11. 11. a kind of manipulator has the maintaining part for being used to keep workpiece being distributed on the manipulator, which is characterized in that

    In the outer rim of the maintaining part, by from the maintaining part it is outstanding upwards in a manner of be provided with it is any in claim 1~10 Workpiece holder described in.
12. 12. a kind of robot, has: manipulator；The mechanical arm for keeping the manipulator mobile；And connect with the mechanical arm Robot trunk, which is characterized in that

    The manipulator is manipulator described in claim 11.