CN208690228U - A kind of alignment device and to bit platform - Google Patents
A kind of alignment device and to bit platform Download PDFInfo
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- CN208690228U CN208690228U CN201821409819.3U CN201821409819U CN208690228U CN 208690228 U CN208690228 U CN 208690228U CN 201821409819 U CN201821409819 U CN 201821409819U CN 208690228 U CN208690228 U CN 208690228U
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- motor
- screw rod
- mounting base
- guide rail
- connecting plate
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Abstract
The utility model provides a kind of alignment device and to bit platform, it is related to accurate contraposition equipment technical field, which includes: displacement platform, motor cabinet, bottom plate, fixed top plate, fixed bottom plate, fixed board, the first connecting plate, the second connecting plate, third connecting plate, the first mounting base, the second mounting base, third mounting base, first motor, the second motor, third motor, the first guide rail, the second guide rail, third guide rail, the first screw rod, the second screw rod and third screw rod；The exact position of all directions can be accurately controlled using the alignment device, XY spindle motor is mounted on same layer part, it is compact-sized, space is saved, and is driven using servo motor, each servo motor independent control, simplify algorithm and program, in the case where ensure that driving force and precision, reduce the volume of whole device, efficiency improves.
Description
Technical field
The utility model relates to precision contraposition equipment technical field, in particular to a kind of pair of bit platform and to bit platform.
Background technique
To bit platform, also referred to as UVW platform, it is widely used in semiconductor of today equipment and LCD manufacturing equipment, for
Different technique is different to the requirement to bit platform.
For liftable for bit platform, current device is that UVW platform general on the market adds elevating mechanism,
Precision is insufficient, and volume is not small enough, and the use of motor is small stepper motor, itself torque is small, is easy stuck, and is three-shaft linkage,
Programmed algorithm is complicated, it is difficult to control.
Utility model content
The purpose of this utility model is that in view of the deficiency of the prior art, a kind of alignment device and one kind are provided
To bit platform, the alignment device can accurately control the exact position of all directions, and XY spindle motor is mounted on same layer part,
It is compact-sized, space is saved, and drive using servo motor, each servo motor independent control simplifies algorithm and program,
In the case where ensure that driving force and precision, reduce the volume of whole device, efficiency improves.
To achieve the above object, the utility model embodiment the technical solution adopted is as follows:
In a first aspect, the utility model embodiment provides a kind of alignment device, comprising:
Displacement platform, motor cabinet, bottom plate, fixed top plate, fixed bottom plate, fixed board, the first connecting plate, the second connecting plate,
Third connecting plate, the first mounting base, the second mounting base, third mounting base, first motor, the second motor, third motor, first are led
Rail, the second guide rail, third guide rail, the first screw rod, the second screw rod and third screw rod；
First guide rail connects the displacement platform and the motor cabinet, for making the displacement platform and motor cabinet in X-axis
Direction is opposite to be slided；The displacement platform is being provided with the first connecting plate perpendicular to X-direction, first connecting plate and described the
The connection of one screw rod, first screw rod pass through the first mounting base, are fixedly connected with first motor, the first motor and the first peace
Dress seat is fixedly connected, and first mounting base is fixedly connected on motor cabinet；
Second guide rail connects the motor cabinet and the bottom plate, for making the motor cabinet and the bottom plate in Y-axis
Direction is opposite to be slided；The bottom plate is being provided with the second connecting plate, second connecting plate and described second perpendicular to Y direction
Screw rod connection, second screw rod pass through second mounting base, are fixedly connected with the second motor, second motor and second
Mounting base is fixedly connected, and second mounting base is fixedly connected on motor cabinet；
The one side of the fixed board is equipped with a rectangular shaped slot, and the third guide rail is by the rectangular shaped slot by described the
Three screw rods are connect with the third connecting plate, and the third connecting plate is connect with the bottom plate, for making the bottom plate in Z axis side
To opposite sliding, it being provided with fixed top plate at the top of the fixed board, the fixed board bottom is equipped with fixed bottom plate, and described the
Three screw rods are connect with the fixed top plate, and the third screw rod is connect with the fixed board, and pass through the third mounting base
It is connect with fixed bottom plate with the third motor, the third mounting base is fixedly connected with the fixed board, the third electricity
Machine is fixedly connected on fixed bottom base plate.
It further, further include rotating device, the rotating device includes:
Rotating electric machine, elevating lever and bearing；
The bearing is installed on the displacement platform center, the elevating lever with the bearing is concentric is fixedly connected, institute
It states rotating electric machine to be fixedly connected on the displacement platform, be rotated for band dynamic bearing and elevating lever.
Further, the rotating device further includes vacuum cups, and the rotating device is arranged in the vacuum cups
Elevating lever one end.
Further, the first motor and second motor are arranged on same layer part.
Further, the first motor, second motor and the third motor are servo motor.
Further, first guide rail, second guide rail and the third guide rail are crossed roller guide rail.
Further, first screw rod, the second screw rod, third screw rod are ball screw.
Further, the bearing is crossed roller bearing.
Further, the rotating electric machine is servo motor.
Second aspect, the utility model embodiment additionally provide a kind of pair of bit platform, including described in any one of first aspect
Alignment device.
The beneficial effects of the utility model are: the alignment device can accurately control the exact position of all directions, XY axis
Motor is mounted on same layer part, compact-sized, saves space, and drive using servo motor, each servo motor is only
Vertical control, simplifying algorithm and program, in the case where ensure that driving force and precision, reducing the volume of whole device, imitates
Rate improves.
Detailed description of the invention
It, below will be to use required in embodiment in order to illustrate more clearly of the technical solution of the utility model embodiment
Attached drawing be briefly described, it should be understood that the following drawings illustrates only some embodiments of the utility model, therefore should not be by
Regard the restriction to range as, for those of ordinary skill in the art, without creative efforts, may be used also
To obtain other relevant attached drawings according to these attached drawings.
Fig. 1 is alignment device structural representation Fig. 1 provided by the embodiment of the utility model；
Fig. 2 is alignment device structural representation Fig. 2 provided by the embodiment of the utility model；
Fig. 3 is the side view of alignment device provided by the embodiment of the utility model；
Fig. 4 is the front view of alignment device provided by the embodiment of the utility model；
Fig. 5 is the top view of alignment device provided by the embodiment of the utility model.
Icon: 100- alignment device；101- displacement platform；102- motor cabinet；103- first motor；104- first pacifies
Fill seat；The first screw rod of 105-；The first connecting plate of 106-；The second motor of 107-；The second mounting base of 108-；109- second
Bar；The second connecting plate of 110-；111- third motor；112- third mounting base；113- third screw rod；114- rotating electric machine；
The first guide rail of 115-；The second guide rail of 116-；117- third guide rail；118- bottom plate；119- third connecting plate；120- is fixed
Top plate；121- fixed board；122- fixes bottom plate；131- bearing；132- elevating lever；133- vacuum cups.
Specific embodiment
It is practical new below in conjunction with this to keep the objectives, technical solutions, and advantages of the embodiments of the present invention clearer
Attached drawing in type embodiment, the technical scheme in the utility model embodiment is clearly and completely described, it is clear that is retouched
The embodiment stated is the utility model a part of the embodiment, instead of all the embodiments.Usually here in attached drawing description and
The component of the utility model embodiment shown can be arranged and be designed with a variety of different configurations.
Therefore, requirement is not intended to limit to the detailed description of the embodiments of the present invention provided in the accompanying drawings below
The scope of the utility model of protection, but it is merely representative of the selected embodiment of the utility model.Based in the utility model
Embodiment, every other embodiment obtained by those of ordinary skill in the art without making creative efforts, all
Belong to the range of the utility model protection.
It should also be noted that similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined in a attached drawing, does not then need that it is further defined and explained in subsequent attached drawing.
It is in the description of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right", " perpendicular
Directly ", the orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" be based on the orientation or positional relationship shown in the drawings, or
The utility model product using when the orientation or positional relationship usually put, be merely for convenience of description the utility model and letter
Change description, rather than the device or element of indication or suggestion meaning must have a particular orientation, with specific orientation construct and
Operation, therefore should not be understood as limiting the present invention.In addition, term " first ", " second ", " third " etc. are only used for area
Divide description, is not understood to indicate or imply relative importance.
In addition, the terms such as term "horizontal", "vertical" are not offered as requiring component abswolute level or pendency, but can be slightly
Low dip.It is not to indicate that the structure has been had to if "horizontal" only refers to that its direction is more horizontal with respect to for "vertical"
It is complete horizontal, but can be slightly tilted.
In the description of the present invention, it should also be noted that, unless otherwise clearly defined and limited, term " is set
Set ", " installation ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection,
Or it is integrally connected；It can be mechanical connection, be also possible to be electrically connected；It can be directly connected, intermediary can also be passed through
It is indirectly connected, can be the connection inside two elements.For the ordinary skill in the art, it can be managed with concrete condition
Solve the concrete meaning of above-mentioned term in the present invention.
As shown in Figure 1, Figure 2, shown in Fig. 3, Fig. 4 and Fig. 5:
The utility model embodiment provides a kind of alignment device 100, comprising: displacement platform 101, motor cabinet 102, bottom plate 118,
Fixed top plate 120, fixed bottom plate 122, fixed board 121, the first connecting plate 106, the second connecting plate 110, third connecting plate
119；First mounting base 104, the second mounting base 108, third mounting base 112, first motor 103, the second motor 107, third electricity
Machine 111, the first guide rail 115, the second guide rail 116, third guide rail 117, the first screw rod 105, the second screw rod 109 and third screw rod
113。
Specifically, first guide rail 115 includes two pairs of sliding rails, have in each pair of sliding rail of two pairs of sliding rails a sliding rail with
The displacement platform 101 connects, and another sliding rail in each pair of sliding rail is connect with the motor cabinet 102, for making the displacement platform
101 slide in X-direction by the way that two pairs of sliding rails are opposite with motor cabinet 102；The displacement platform is arranged perpendicular to X-direction
There is the first connecting plate 106, first connecting plate 106 is L-type, and one end is fixedly connected on the displacement platform 101, and the other end is in
Down at right angles bending, connect with first screw rod 105, and first screw rod 105 passes through the first mounting base 104, with the first electricity
Machine 103 is fixedly connected, and the first motor 103 is fixedly connected with the first mounting base 104, and first mounting base 104 is U-shaped
Seat, two sides are parallel plane, are connected between two planes by an interconnecting piece, two plane is described perpendicular to the interconnecting piece
First screw rod 105 passes through two plane, and first mounting base 104 is fixedly connected on motor cabinet 102 by interconnecting piece.
Specifically, second guide rail 116 includes two pairs of sliding rails, have in each pair of sliding rail of two pairs of sliding rails a sliding rail with
The motor cabinet 102 connects, and another sliding rail in each pair of sliding rail is connect with the bottom plate 118, for make the bottom plate 118 and
The motor cabinet 102 is slided in Y direction by the way that two pairs of sliding rails are opposite；The bottom plate is provided with perpendicular to Y direction
Second connecting plate 110, second connecting plate 110 are L-type, and one end is fixedly connected on the bottom plate 118, and the other end is rectangular
It is bent upwards, is connect with second screw rod 109, second screw rod 109 passes through the second mounting base 108, with the second motor 107
It is fixedly connected, second motor 107 is fixedly connected with the second mounting base 108, and second mounting base 108 is U-shaped seat, the U
Type seat is specifically that two sides are parallel plane, is connected between two planes by an interconnecting piece, two plane is perpendicular to the connection
The structure in portion is constituted, and second screw rod 109 passes through two plane, and second mounting base 108 is solid by the interconnecting piece
Surely it is connected on motor cabinet 102.
Specifically, the fixed board 121 is made of mutually perpendicular two sides, and wherein one side is equipped with a rectangular shaped slot,
The third guide rail 117 includes two pairs of sliding rails, and fixed board 121 is arranged in equipped with the outer of rectangular shaped slot one side in two pairs of sliding rails
Side, wherein there is a sliding rail to pass through the rectangular shaped slot and the third screw rod 113 company with by connector in each pair of sliding rail
It connects, the third screw rod 113 is connect by connector with the third connecting plate 119；The third connecting plate 119 is L-type company
Fishplate bar, the vertical direction of the third connecting plate 119 are connect with the third screw rod 113, and horizontal direction is connect with bottom plate 118,
It is described for making the third connecting plate 119 drive bottom plate 118 and sliding with component that bottom plate 118 connects Z-direction is opposite
Fixed top plate 120 is provided at the top of fixed board 121,121 bottom of fixed board is equipped with fixed bottom plate 122, the third
Screw rod 113 is connect with the fixed top plate 120, and the third screw rod 113 is fixedly connected with the fixed board 121, and is passed through
The fixed bottom plate 122 and third mounting base 112 are connect with the third motor 111, and the third mounting base 112 is convex peace
Seat is filled, 112 bottom of third mounting base is fixedly connected with the fixed board 121, and the third screw rod 113 is across described the
The protruding portion of three mounting bases 112, the third motor 111 are fixedly connected on fixed 122 bottom of bottom plate.
Optionally, in another embodiment, third connecting plate 119 includes riser and transverse slat, and riser and transverse slat are equipped with
Locating slot and connecting hole, riser and transverse slat by locating slot group l-shaped connecting plate, and by connecting hole and connector by riser and
Transverse slat is fixedly connected, and riser is connect with third screw rod 113, and transverse slat is connect with bottom plate 118.
Further, the alignment device 100 further includes rotating device.
Specifically, the rotating device includes: rotating electric machine 114, elevating lever 132 and bearing 131.
Specifically, the bearing 131 is installed on 101 center of displacement platform, the elevating lever 132 and the bearing
131 are fixedly connected with one heart, and the rotating electric machine 114 is fixedly connected on the displacement platform 101, the motor cabinet 102 and described
Bottom plate 118 be hollow frame structure, the rotating electric machine 114 wear in the motor cabinet 102 and the bottom plate 118, with institute
The connection of bearing 131 is stated, is rotated for band dynamic bearing 131 and elevating lever 132.
Specifically, the rotating device further includes vacuum cups 133, the vacuum cups 133 is arranged in the rotating dress
132 one end of elevating lever set, for adsorbing object to be aligned.
Specifically, the first motor 103, the second motor 107 are arranged on the motor cabinet 102, the first motor
103, the second motor 107 is arranged on same layer part, makes the overall compact purpose of structure to reach.
Specifically, the first motor 103, second motor 107 and the third motor 111 are servo motor,
For servo motor for stepper motor, driving force is stronger, and precision is higher.
Specifically, first guide rail 115, second guide rail 116 and the third guide rail 117 are led for crossed roller
Rail.
Specifically, first screw rod 105, the second screw rod 109, third screw rod 113 are ball screw.
Specifically, the bearing 131 is crossed roller bearing 131.
Specifically, the rotating electric machine 114 is servo motor.
Specifically, the first motor 103, the second motor 107, third motor 111 and rotating electric machine 114 can be controlled independently
System, simplifies program and algorithm.
A kind of working principle of alignment device 100 provided by the embodiment of the utility model are as follows:
The first motor 103, the second motor 107,111 independent control of third motor drive when above-mentioned motor operation
Corresponding screw rod rotation connected to it, is oriented to by corresponding guide rail after screw rod rotation, drives corresponding component to X-axis, Y-axis
Moved with Z-direction, and by rotating electric machine 114, elevating lever 132 driven to rotate, by be adsorbed on vacuum cups 133 to
Contraposition component is sent to designated position.
Using alignment device 100 provided by the utility model, the exact position of all directions can be accurately controlled, while by
It is mounted on same layer part in XY spindle motor, it is compact-sized, space is saved, and drive using servo motor, each servo
Motor independent control, simplifies algorithm and program, in the case where ensure that driving force and precision, subtracts the volume of whole device
Small, efficiency improves.
In addition, the utility model also provides a kind of pair of bit platform, described includes described in any of the above item pair bit platform
Position device 100.
Specifically, it is described identical as 100 working principle of alignment device and beneficial effect to bit platform, it is no longer superfluous herein
It states.
The above descriptions are merely preferred embodiments of the present invention, is not intended to limit the utility model, for this
For the technical staff in field, various modifications and changes may be made to the present invention.It is all in the spirit and principles of the utility model
Within, any modification, equivalent replacement, improvement and so on should be included within the scope of protection of this utility model.
Claims (10)
1. a kind of alignment device, which is characterized in that the alignment device includes:
Displacement platform, motor cabinet, bottom plate, fixed top plate, fixed bottom plate, fixed board, the first connecting plate, the second connecting plate, third
Connecting plate, the first mounting base, the second mounting base, third mounting base, first motor, the second motor, third motor, the first guide rail,
Second guide rail, third guide rail, the first screw rod, the second screw rod and third screw rod；
First guide rail connects the displacement platform and the motor cabinet, for making the displacement platform and motor cabinet in X-direction
Opposite sliding；The displacement platform is being provided with the first connecting plate perpendicular to X-direction, first connecting plate with described first
Bar connection, first screw rod pass through the first mounting base, are fixedly connected with first motor, the first motor and the first mounting base
Connection, first mounting base are fixedly connected on motor cabinet；
Second guide rail connects the motor cabinet and the bottom plate, for making the motor cabinet and the bottom plate in Y direction
Opposite sliding；The bottom plate is being provided with the second connecting plate, second connecting plate and second screw rod perpendicular to Y direction
Connection, second screw rod pass through second mounting base, are fixedly connected with the second motor, second motor and the second installation
Seat connection, second mounting base are fixedly connected on motor cabinet；
The one side of the fixed board is equipped with a rectangular shaped slot, the third screw rod and third guide rail by the rectangular shaped slot with
The third connecting plate connection, the third connecting plate are connect with the bottom plate, for keeping the bottom plate relatively sliding in Z-direction
It is dynamic, be provided with fixed top plate at the top of the fixed board, the fixed board bottom is equipped with fixed bottom plate, the third screw rod with
The fixed top plate connection, the third screw rod is connect with the fixed board, and passes through the third mounting base and fixed bottom
Plate is connect with the third motor, and the third mounting base is fixedly connected with the fixed board, and the third motor is fixed to be connected
It connects in fixed bottom base plate.
2. alignment device according to claim 1, which is characterized in that further include rotating device, the rotating device includes:
Rotating electric machine, elevating lever and bearing；
The bearing is installed on the displacement platform center, the elevating lever with the bearing is concentric is fixedly connected, the rotation
Rotating motor is fixedly connected on displacement platform, is rotated for band dynamic bearing and elevating lever.
3. alignment device according to claim 2, which is characterized in that the rotating device further includes vacuum cups, described true
Elevating lever one end of the rotating device is arranged in suction head.
4. alignment device according to claim 1, which is characterized in that the first motor, the second motor are arranged in same layer
On part.
5. alignment device according to claim 1, which is characterized in that the first motor, second motor and described
Three motors are servo motor.
6. alignment device according to claim 1, which is characterized in that first guide rail, second guide rail and described
Three guide rails are crossed roller guide rail.
7. alignment device according to claim 1, which is characterized in that first screw rod, the second screw rod, third screw rod are rolling
Ballscrew.
8. alignment device according to claim 2, which is characterized in that the bearing is crossed roller bearing.
9. alignment device according to claim 2, which is characterized in that the rotating electric machine is servo motor.
10. a kind of pair of bit platform, which is characterized in that including the described in any item alignment devices of claim 1-9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821409819.3U CN208690228U (en) | 2018-08-29 | 2018-08-29 | A kind of alignment device and to bit platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821409819.3U CN208690228U (en) | 2018-08-29 | 2018-08-29 | A kind of alignment device and to bit platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208690228U true CN208690228U (en) | 2019-04-02 |
Family
ID=65887343
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821409819.3U Active CN208690228U (en) | 2018-08-29 | 2018-08-29 | A kind of alignment device and to bit platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208690228U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110491802A (en) * | 2019-07-16 | 2019-11-22 | 盐城华昱光电技术有限公司 | For the heat dissipation equipment during integrated antenna package |
-
2018
- 2018-08-29 CN CN201821409819.3U patent/CN208690228U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110491802A (en) * | 2019-07-16 | 2019-11-22 | 盐城华昱光电技术有限公司 | For the heat dissipation equipment during integrated antenna package |
| CN110491802B (en) * | 2019-07-16 | 2022-03-01 | 盐城瑾诚科技有限公司 | Heat dissipation device used in integrated circuit packaging process |
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Effective date of registration: 20211019 Granted publication date: 20190402 |