CN208690210U - A kind of natural gas annealing furnace of heat recoverable - Google Patents
A kind of natural gas annealing furnace of heat recoverable Download PDFInfo
- Publication number
- CN208690210U CN208690210U CN201821265015.0U CN201821265015U CN208690210U CN 208690210 U CN208690210 U CN 208690210U CN 201821265015 U CN201821265015 U CN 201821265015U CN 208690210 U CN208690210 U CN 208690210U
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- Prior art keywords
- annealing furnace
- thermal
- heat
- shaped pipe
- pipe
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model discloses a kind of natural gas annealing furnaces of heat recoverable of annealing furnace technical field, the annealing furnace bottom right side is provided with fire door, the annealing furnace outer wall is provided with back-shaped pipe, thermal-collecting tube is provided on the right side of the ring flange of the back-shaped pipe right hand top, the thermal-arrest bottom of the tube is provided with thermal-arrest bucket, thermal-arrest bucket inner cavity is provided with filter screen, defeated heat pipe is provided on the left of the ring flange of the back-shaped pipe left bottom, thermal-arrest tube cavity is entered by thermal-arrest bucket when the heat for furnace chamber of annealing is discharged by fire door, the heat of thermal-arrest tube cavity enters back-shaped tube cavity, partial heat is conducted to annealing furnace by the graphite guide plume of back-shaped pipe and annealing furnace junction, guarantee the heat of annealing furnace chamber, the effect of reaching heat recovery and utilization, when the most heat of back-shaped tube cavity enters drying unit by defeated heat pipe , the component of drying unit inner cavity is dried, drying cost is greatly reduced, meets use demand.
Description
Technical field
The utility model relates to annealing furnace technical field, specially a kind of natural gas annealing furnace of heat recoverable.
Background technique
Annealing furnace is a kind of technique used in semiconductor devices manufacture.Currently, annealing furnace in the market was using
It needs to carry out drying and processing to the component of annealing in journey, the thermal energy for needing the other energy to need when providing drying in drying,
Greatly improve drying cost, and when heat of existing drying furnace chamber is discharged by fire door can not be sharp by heat recovery
With energy waste being caused, for this purpose, we have proposed a kind of natural gas annealing furnaces of heat recoverable.
Utility model content
The purpose of this utility model is to provide a kind of natural gas annealing furnaces of heat recoverable, to solve above-mentioned back
The problem of being proposed in scape technology.
To achieve the above object, the utility model provides the following technical solutions: a kind of natural gas of heat recoverable
Annealing furnace, including annealing furnace, the annealing furnace bottom right side are provided with fire door, are provided at left and right sides of the annealing furnace bottom
Support column, the annealing furnace outer wall are provided with back-shaped pipe, and the back-shaped pipe left bottom and right hand top are provided with ring flange,
It is provided with thermal-collecting tube on the right side of the ring flange of the back-shaped pipe right hand top, the thermal-arrest bottom of the tube is provided with thermal-arrest bucket, the collection
Heat bucket inner cavity is provided with filter screen, and defeated heat pipe is provided on the left of the ring flange of the back-shaped pipe left bottom, and the defeated heat pipe is left
Side is provided with drying unit.
Preferably, the support column passes through the bolt to match and screw hole is bolted in annealing furnace bottom, and supports column outer wall
It is provided with insulating layer of asbestos, the support column bottom is provided with block of glass wool.
Preferably, the back-shaped pipe is socketed on annealing furnace outer wall by interference fit, and furnace outer wall bottom of annealing is provided with
The stop collar to match with back-shaped pipe, the back-shaped pipe and annealing furnace junction are evenly arranged with graphite guide plume.
Preferably, the filter screen passes through the fixture block to match and card slot is connected in the middle part of thermal-arrest bucket inner cavity, and filter screen
For vibration filter screen, the thermal-arrest bucket is welded in thermal-arrest bottom of the tube by welding manner, and thermal-arrest bucket is obliquely installed in 45 degree.
Preferably, the annealing furnace and fire door are an integral molding structure, and fire door front end face is provided with control valve, control valve
Outer wall is provided with hand guard glove by velcro.
Preferably, the defeated heat pipe is abrasive rubber heat conducting pipe, and the thermally conductive inside pipe wall of abrasive rubber is provided with insulating layer, is protected
Warm layer is adhered to defeated heat pipe inner wall by adiabatic gum.
Compared with prior art, the utility model has the beneficial effects that
1, thermal-arrest tube cavity, thermal-arrest tube cavity are entered by thermal-arrest bucket when the heat for furnace chamber of annealing is discharged by fire door
Heat enter back-shaped tube cavity, partial heat is conducted to annealing by the graphite guide plume of back-shaped pipe and annealing furnace junction
On furnace, the effect of guaranteeing the heat of annealing furnace chamber, reach heat recovery and utilization；
2, when the most heat of back-shaped tube cavity enters drying unit by defeated heat pipe, to the component of drying unit inner cavity
It is dried, saves the energy of baking needed, greatly reduce drying cost, meet use demand.
Detailed description of the invention
FIG. 1 is a schematic structural view of the utility model.
In figure: 1 annealing furnace, 2 fire doors, 3 support columns, 4 back-shaped pipes, 5 ring flanges, 6 thermal-collecting tubes, 7 thermal-arrest buckets, 8 filter screen, 9
Defeated heat pipe, 10 drying units.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
Referring to Fig. 1, the utility model provides a kind of technical solution: a kind of natural gas annealing of heat recoverable
Furnace, including annealing furnace 1,1 bottom right side of annealing furnace are provided with fire door 2, are provided with support column 3 at left and right sides of 1 bottom of annealing furnace,
1 outer wall of annealing furnace is provided with back-shaped pipe 4, and 4 left bottom of back-shaped pipe and right hand top are provided with ring flange 5,4 right side of back-shaped pipe
Thermal-collecting tube 6 is provided on the right side of the ring flange 5 at top, 6 bottom of thermal-collecting tube is provided with thermal-arrest bucket 7, and 7 inner cavity of thermal-arrest bucket is provided with filtering
8 are sieved, defeated heat pipe 9 is provided on the left of the ring flange 5 of 4 left bottom of back-shaped pipe, is provided with drying unit 10 on the left of defeated heat pipe 9.
Wherein, support column 3 passes through the bolt to match and screw hole is bolted in 1 bottom of annealing furnace, and 3 outer wall of support column is all provided with
It is equipped with insulating layer of asbestos, 3 bottom of support column is provided with block of glass wool, and support column 3 is fixedly mounted time saving by way of being spirally connected
It is laborsaving, it can prevent the heat of annealing furnace from conducting to ground, damage ground by the mutual cooperation of insulating layer of asbestos and block of glass wool
Face；
Back-shaped pipe 4 is socketed on 1 outer wall of annealing furnace by interference fit, and 1 outer wall bottom of annealing furnace is provided with and back-shaped pipe 4
The stop collar to match, back-shaped pipe 4 and 1 junction of annealing furnace are evenly arranged with graphite guide plume, and back-shaped pipe 4 passes through interference fit
It is socketed on the compactness that 1 outer wall of annealing furnace increases junction, the heat convenient for 4 inner cavity of back-shaped pipe is conducted to annealing furnace 1, reached
To the effect of heat recovery and utilization；
Filter screen 8 passes through the fixture block to match and card slot is connected in the middle part of 7 inner cavity of thermal-arrest bucket, and filter screen 8 is to shake
Screen, thermal-arrest bucket 7 is welded in 6 bottom of thermal-collecting tube by welding manner, and thermal-arrest bucket 7 is obliquely installed in 45 degree, passes through filter screen 8
It can prevent the magazines such as dust from entering 6 inner cavity of thermal-collecting tube by thermal-arrest bucket 7, prevent the blocking of thermal-collecting tube 6 can not be to heat recovery benefit
With, filter screen 8 is installed by snap fit and is convenient for carrying out dismounting and change to it, it is time saving and energy saving；
Annealing furnace 1 and fire door 2 are an integral molding structure, and 2 front end face of fire door is provided with control valve, and control valve outer wall passes through
Velcro is provided with hand guard glove, can control the size of 2 heat dissipation of fire door by control valve, the handguard being arranged by velcro
Scald when set can prevent from rotating control valve, significantly increases security performance；
Defeated heat pipe 9 is abrasive rubber heat conducting pipe, and the thermally conductive inside pipe wall of abrasive rubber is provided with insulating layer, insulating layer by every
Hot glue is adhered to defeated 9 inner wall of heat pipe, can guarantee that the heat of defeated 9 inner cavity of heat pipe will not overflow scattered by insulating layer, pass through adiabatic gum
It can prevent insulating layer from leading to the case where falling because defeated 9 inner cavity temperature of heat pipe is excessively high, prolong the service life.
Working principle: when needing to anneal to component, starting annealing furnace 1 by external power supply, when annealing furnace 1 works
When, extra heat is discharged by fire door 2 for annealing furnace 1, passes through thermal-arrest bucket 7 when heat is discharged by fire door 2 for heat recovery
Into 6 inner cavity of thermal-collecting tube, can prevent the impurity such as dust from entering 6 inner cavity of thermal-collecting tube by the filter screen 8 of 7 inner cavity of thermal-arrest bucket causes
The case where thermal-collecting tube 6 blocks enters 4 inner cavity of back-shaped pipe when heat passes through thermal-collecting tube 6, passes through back-shaped pipe 4 and annealing furnace 1 connects
The graphite guide plume at the place of connecing conducts partial heat to annealing furnace 1, guarantees the heat of 1 inner cavity of annealing furnace, remaining most
Heat dries component into 10 inner cavity of drying unit by defeated heat pipe 9, greatly reduces drying cost, meeting makes
Use demand.
While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art,
It is understood that these embodiments can be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaired
Change, replacement and variant, the scope of the utility model is defined by the appended claims and the equivalents thereof.
Claims (6)
1. a kind of natural gas annealing furnace of heat recoverable, including annealing furnace (1), it is characterised in that: the annealing furnace (1)
Bottom right side is provided with fire door (2), is provided with support column (3), the annealing furnace at left and right sides of annealing furnace (1) bottom
(1) outer wall is provided with back-shaped pipe (4), and back-shaped pipe (4) left bottom and right hand top are provided with ring flange (5), described
It is provided with thermal-collecting tube (6) on the right side of the ring flange (5) of back-shaped pipe (4) right hand top, thermal-collecting tube (6) bottom is provided with thermal-arrest bucket
(7), thermal-arrest bucket (7) inner cavity is provided with filter screen (8), setting on the left of the ring flange (5) of back-shaped pipe (4) left bottom
Have defeated heat pipe (9), is provided with drying unit (10) on the left of the defeated heat pipe (9).
2. a kind of natural gas annealing furnace of heat recoverable according to claim 1, it is characterised in that: the support
Column (3) passes through the bolt that matches and screw hole is bolted in annealing furnace (1) bottom, and support column (3) outer wall be provided with asbestos every
Thermosphere, support column (3) bottom are provided with block of glass wool.
3. a kind of natural gas annealing furnace of heat recoverable according to claim 1, it is characterised in that: described back-shaped
Pipe (4) is socketed on annealing furnace (1) outer wall by interference fit, and annealing furnace (1) outer wall bottom is provided with and back-shaped pipe (4) phase
The stop collar matched, the back-shaped pipe (4) and annealing furnace (1) junction are evenly arranged with graphite guide plume.
4. a kind of natural gas annealing furnace of heat recoverable according to claim 1, it is characterised in that: the filtering
Sieve (8) passes through the fixture block to match and card slot is connected in the middle part of thermal-arrest bucket (7) inner cavity, and filter screen (8) is vibration filter screen, institute
It states thermal-arrest bucket (7) and thermal-collecting tube (6) bottom is welded in by welding manner, and thermal-arrest bucket (7) is obliquely installed in 45 degree.
5. a kind of natural gas annealing furnace of heat recoverable according to claim 1, it is characterised in that: the annealing
Furnace (1) and fire door (2) are an integral molding structure, and fire door (2) front end face is provided with control valve, and control valve outer wall passes through velcro
It is provided with hand guard glove.
6. a kind of natural gas annealing furnace of heat recoverable according to claim 1, it is characterised in that: the defeated heat
Managing (9) is abrasive rubber heat conducting pipe, and the thermally conductive inside pipe wall of abrasive rubber is provided with insulating layer, and insulating layer is adhered to by adiabatic gum
Defeated heat pipe (9) inner wall.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821265015.0U CN208690210U (en) | 2018-08-07 | 2018-08-07 | A kind of natural gas annealing furnace of heat recoverable |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821265015.0U CN208690210U (en) | 2018-08-07 | 2018-08-07 | A kind of natural gas annealing furnace of heat recoverable |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208690210U true CN208690210U (en) | 2019-04-02 |
Family
ID=65884017
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821265015.0U Expired - Fee Related CN208690210U (en) | 2018-08-07 | 2018-08-07 | A kind of natural gas annealing furnace of heat recoverable |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208690210U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109975889A (en) * | 2019-04-16 | 2019-07-05 | 国网安徽省电力有限公司淮北供电公司 | A kind of underground utilities path comprehensive survey device |
-
2018
- 2018-08-07 CN CN201821265015.0U patent/CN208690210U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109975889A (en) * | 2019-04-16 | 2019-07-05 | 国网安徽省电力有限公司淮北供电公司 | A kind of underground utilities path comprehensive survey device |
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190402 Termination date: 20210807 |