CN208688474U - A kind of wafer flow surface smoothness detection device - Google Patents

Abstract

The utility model relates to the technical fields of wafer flow detection auxiliary equipment, more particularly to a kind of wafer flow surface smoothness detection device, it is convenient to be fixed wafer flow, and the case where prevent wafer flow from deforming due to discontinuity equalization, guarantees the accuracy of detection accuracy；The convenient surface to wafer flow carries out multidraw simultaneously, and the testing result obtained is more representative, improves practicability；Including detection case, detection data analyzer, mounting table, rotating electric machine, fixed ring, three groups of supporting rods, three groups of " C " type elastic slices, support plate, left supported plate, right supported plate, adjustment axis and worm screw, it further include shaft, the first ball bearing, the second ball bearing, third ball bearing, the 4th ball bearing, turbine, placement plate and adjusting plectane, it places and is evenly arranged with three groups of semi-circular projections on the outside of plectane, further include driving motor, lead screw, gag lever post, slide plate and detection probe, the 5th ball bearing and the 6th ball bearing.

Description

A kind of wafer flow surface smoothness detection device

Technical field

The utility model relates to the technical fields of wafer flow detection auxiliary equipment, more particularly to a kind of wafer flow table Surface evenness detection device.

Background technique

It is well known that " flow " refers to " producing as a trial " in IC design field, that is designed circuit with Afterwards, several tens are first produced, for test, if test passes through, this appearance is just shone and starts large-scale production, wafer A kind of auxiliary device that the flatness for wafer flow surface is detected of flow surface smoothness detection device, half It is widely used in a variety of applications in the field of conductor processing and manufacturing；Existing wafer flow surface smoothness detection device includes detection Case, detection case is internally provided with working chamber, and detection probe is provided on the inner roof wall of working chamber, the inner bottom wall of working chamber On be provided with mounting table, and the top of mounting table is provided with fixed device, the top of detection case is provided with detection data analysis Instrument, the signal input part of detection data analyzer and the signal output end of detection probe connect, and the front end of detection case, which is provided with, to be taken Put mouth；Existing wafer flow surface smoothness detection device passes through in use, by wafer flow as the top of mounting table Fixed device fixes wafer flow, is then detected by detection probe to the flatness to wafer flow surface, and will Detection structure passes to detection data analyzer and is analyzed, and obtains the flat of wafer flow by the data of detection data analyzer Whole degree information；It is found in existing wafer flow surface smoothness detection device use, it is right due to the thinner thickness of wafer flow It is more inconvenient when it is fixed, and wafer flow is easy to deform due to being squeezed, and influences the accuracy of testing result； Its inconvenient surface to wafer flow carries out multidraw detection simultaneously, and the structure obtained does not have representativeness, causes practical Property is lower.

Utility model content

Wafer flow is fixed in order to solve the above technical problems, the utility model provides a kind of convenience, and is prevented The case where wafer flow is deformed due to discontinuity equalization guarantees the accuracy of detection accuracy；It is convenient to wafer flow simultaneously The surface of piece carries out multidraw, and the testing result obtained is more representative, improves the wafer flow surfacing of practicability Spend detection device.

A kind of wafer flow surface smoothness detection device of the utility model, including detection case, the inside of detection case are set It is equipped with working chamber, the top of detection case is provided with detection data analyzer, and the front end of detection case is provided with pick-and-place mouth；It further include putting Set platform, rotating electric machine, fixed ring, three groups of supporting rods, three groups of " C " type elastic slices, support plate, left supported plate, right supported plate, adjustment axis and snail Bar is provided with mounting groove in the inner bottom wall of the working chamber, and the rotating electric machine is fixedly mounted in mounting groove, and in electric rotating The top output port of machine is provided with shaft, and the top of the shaft and the center bottom of support plate connect, the left supported plate and the right side The top of supporting plate is connect with the left and right side of mounting table bottom end respectively, the bottom end of left supported plate and right supported plate respectively with support plate top The left and right side at end connects, and the right end of left supported plate is provided with the first placing groove, is fixedly mounted in first placing groove There is the first ball bearing, the first installation through-hole of left and right perforation is provided on the right supported plate, and is solid in the first installation through-hole Dingan County is equipped with the second ball bearing, and the left end of the worm screw is inserted into inside the first ball bearing from the right end of left supported plate, worm screw Right end from the left end of right supported plate pass through the second ball bearing to the right side of right supported plate, the top middle portion of the support plate is provided with Second placing groove, and it is fixedly installed with third ball bearing in the inside of the second placing groove, it is provided in the middle part of the mounting table The second installation through-hole up and down, and the 4th ball bearing is fixedly installed in the second installation through-hole, the adjustment axis Bottom end passes through the 4th ball bearing to the lower section of mounting table from the top of mounting table and is inserted into inside third ball bearing, and The outer sheath of adjustment axis is equipped with turbine, and the front end of the turbine is engaged with the rear end of worm screw, and placement is provided at the top of adjustment axis Plate is fixedly installed with adjusting plectane on the outside of adjustment axis, and the adjusting plectane is between mounting table and placement plate, the fixation The bottom end of ring is fixedly connected with the top of mounting table, and one end of three groups of supporting rods is hinged with the inner ring of fixed ring, and three groups It is provided with clamp column at the top of the other end of supporting rod, and three groups of supporting rods are angularly uniformly arranged on the inner ring of fixed ring, One end of described three groups of " C " type elastic slices is connect with the outside of three groups of supporting rods respectively, and the other end of three groups of " C " type elastic slices is and solid Determine the inner ring connection of ring, three groups of semi-circular projections, three groups of semi-circular projections difference are evenly arranged on the outside of the placement plectane It is adjacent to on the inside of three groups of supporting rods；It further include driving motor, lead screw, gag lever post, slide plate and detection probe, the working chamber It is provided with third placing groove at the top of left side wall, and is fixedly installed with the 5th ball bearing in third placing groove, the detection case Right side wall on be provided with third installation through-hole, and the 6th ball bearing is fixedly installed in third installation through-hole, the drive Dynamic motor is mounted at the top of the right end of detection case, and the front and rear of the slide plate is respectively arranged with the screwed pipe of left and right perforation The left end of limit hole, the lead screw fills the left side across threaded hole to slide plate from the right end spiral shell of slide plate and is inserted into the 5th ball axis Inside is held, the right end of lead screw passes through the 6th ball bearing from working chamber and extend out to working chamber outside and the left side with driving motor It is connected at the top of the left side wall of output end transmission connection, the left end of the gag lever post and working chamber, the right end of gag lever post is from slide plate Left end passes through limit hole and connect to the right side of slide plate and with the right side wall of working chamber top, and the detection probe is mounted on slide plate Bottom end, and the signal output end of detection probe is connect with the signal input part of detection data analyzer.

A kind of wafer flow surface smoothness detection device of the utility model, three groups of clamp columns are rotatably pacified respectively Mounted in the top of three groups of supporting rods.

A kind of wafer flow surface smoothness detection device of the utility model, horizontal plane position where the placement plate bottom end The top of horizontal plane and the lower section of horizontal plane where being located at three groups of clamping top ends where three groups of clamp column bottom ends.

A kind of wafer flow surface smoothness detection device of the utility model, further include left casing, right casing, two groups it is tight Fixing bolt and two groups of travel switches, the left casing and right casing are set in the outside of gag lever post, and left casing and right set Pipe is located at the left and right side of slide plate, and the top of left casing and right casing is provided with fastening screw hole, and described two groups tight Spiral shell dress is adjacent to across two groups of fastening screw holes and with the top of gag lever post respectively for screw rod one end of fixing bolt, and two groups of strokes are opened The left end of the right end and right casing that are separately mounted to left casing is closed, two groups of travel switches are located in same level with slide plate, Two groups of travel switches are electrically connected with driving motor.

A kind of wafer flow surface smoothness detection device of the utility model, described three groups of " C " type elastic slices are angularly equal The even inside for being mounted on fixed ring.

A kind of wafer flow surface smoothness detection device of the utility model, further includes multiple groups support rod, the multiple groups Support rod is rounded to be uniformly mounted on the bottom end of support plate, and is mounted on support wheel, multiple groups institute in the bottom end of multiple groups support rod The bottom end for stating support wheel is contacted with the inner bottom wall of working chamber.

A kind of wafer flow surface smoothness detection device of the utility model, the right end of the worm screw are provided with rotation Cap.

A kind of wafer flow surface smoothness detection device of the utility model is provided with door-plate at the pick-and-place mouth, institute The front end of the left end and detection case of stating door-plate is connected by a hinge, and the right end of door-plate and the front end of detection case are connected by a snap, And peep hole is provided on door-plate, the peep hole is communicated with working chamber, and transparent baffle is equipped in peep hole.

A kind of wafer flow surface smoothness detection device of the utility model, the detection probe are located at hanging down for placement plate Straight top, detection probe include sender unit and signal receiving device, and sender unit and signal receiving device Position it is identical.

Compared with prior art the utility model has the following beneficial effects: wafer flow to be placed in the top of placement plate, pass through The right end of manual rotary worm drives adjustment axis rotation by the cooperation of worm screw and turbine, and adjustment axis, which drives, adjusts plectane rotation, It adjusts the semi-circular projection on the outside of plectane and gradually releases the limit to supporting rod, three groups of supporting rods are respectively in three groups of " C " type elastic slice bullets It is mobile to the center of circle direction of fixed ring under the action of power, until three groups of clamp columns on three groups of supporting rod tops with wafer flow Outside is adjacent to, so that wafer flow be fixed, and can guarantee that the center of circle of wafer flow and the center of circle of fixed ring are located at It is convenient that wafer flow is fixed on same vertical line, make three groups of clamp columns by wafer flow by the elastic force of " C " type elastic slice The case where fixing, preventing wafer flow from deforming due to discontinuity equalization, guarantees the accuracy of detection accuracy；Pass through rotation Motor drives support plate and mounting table and wafer flow slowly to rotate, while driving lead screw rotation by driving motor, passes through The cooperation of lead screw and threaded hole makes slide plate transverse shifting in working chamber, and slide plate drives detection probe laterally to move in working chamber It is dynamic, it is matched, the surface of wafer flow can be carried out with the transverse shifting of detection probe by itself rotation of wafer flow Multidraw, the testing result obtained is more representative, improves practicability, planarization of the detection probe to wafer flow surface The information for being detected, and being will test passes to detection data analyzer and is analyzed, and obtains wafer flow surface smoothness Data.

Detailed description of the invention

Fig. 1 is the structural schematic diagram of the utility model；

Fig. 2 is the overlooking structure diagram of the utility model mounting table；

Fig. 3 is the overlooking structure diagram that the utility model lead screw, gag lever post are connected with slide plate；

Fig. 4 is the overlooking structure diagram that the utility model turbine is connected with worm screw；

Fig. 5 is the schematic perspective view of the utility model detection case；

Fig. 6 is partial enlargement structural representation at the A of the utility model Fig. 1；

It is attached marked in the figure: 1, detection case；2, detection data analyzer；3, mounting table；4, rotating electric machine；5, fixed ring；6, Supporting rod；7, " C " type elastic slice；8, support plate；9, left supported plate；10, right supported plate；11, adjustment axis；12, worm screw；13, shaft；14, First ball bearing；15, the second ball bearing；16, third ball bearing；17, the 4th ball bearing；18, turbine；19, it places Plate；20, plectane is adjusted；21, clamp column；22, semi-circular projection；23, driving motor；24, lead screw；25, gag lever post；26, slide plate； 27, detection probe；28, the 5th ball bearing；29, the 6th ball bearing；30, left casing；31, fastening bolt；32, stroke is opened It closes；33, support rod；34, support wheel；35, turncap；36, door-plate；37, transparent baffle.

Specific embodiment

With reference to the accompanying drawings and examples, specific embodiment of the present utility model is described in further detail.Below Embodiment is not intended to limit the scope of the present invention for illustrating the utility model.

As shown in Figures 1 to 6, a kind of wafer flow surface smoothness detection device of the utility model, including detection case 1, detection case is internally provided with working chamber, and the top of detection case is provided with detection data analyzer 2, the front end setting of detection case There is pick-and-place mouth；Further include mounting table 3, rotating electric machine 4,5, three groups of fixed ring, 6, three groups of supporting rod " C " type elastic slice 7, support plate 8, Left supported plate 9, right supported plate 10, adjustment axis 11 and worm screw 12 are provided with mounting groove, the fixed peace of rotating electric machine in the inner bottom wall of working chamber Shaft 13 is provided in mounting groove, and in the top output port of rotating electric machine, in the top of shaft and the bottom end of support plate Portion's connection, the top of left supported plate and right supported plate are connect with the left and right side of mounting table bottom end respectively, left supported plate and right supported plate Bottom end is connect with the left and right side on support plate top respectively, and the right end of left supported plate is provided with the first placing groove, and first puts It sets and is fixedly installed with the first ball bearing 14 in slot, the first installation through-hole of left and right perforation is provided on right supported plate, and first The second ball bearing 15 is fixedly installed in installation through-hole, the left end of worm screw is inserted into the first ball bearing from the right end of left supported plate The right end of inside, worm screw passes through the second ball bearing to the right side of right supported plate, the top middle portion of support plate from the left end of right supported plate It is provided with the second placing groove, and is fixedly installed with third ball bearing 16 in the inside of the second placing groove, is set in the middle part of mounting table It is equipped with the second installation through-hole up and down, and is fixedly installed with the 4th ball bearing 17, adjustment axis in the second installation through-hole Bottom end from the top of mounting table pass through the 4th ball bearing to mounting table lower section and be inserted into inside third ball bearing, and It is equipped with turbine 18 in the outer sheath of adjustment axis, the front end of turbine is engaged with the rear end of worm screw, and placement is provided at the top of adjustment axis Plate 19 is fixedly installed on the outside of adjustment axis and adjusts plectane 20, adjusts plectane between mounting table and placement plate, fixed ring Bottom end is fixedly connected with the top of mounting table, and one end of three groups of supporting rods is hinged with the inner ring of fixed ring, three groups of supporting rods It is provided with clamp column 21 at the top of the other end, and three groups of supporting rods are angularly uniformly arranged on the inner ring of fixed ring, three groups " C " One end of type elastic slice is connect with the outside of three groups of supporting rods respectively, the other end of three groups of " C " type elastic slices with the inner ring of fixed ring Connection, places and is evenly arranged with three groups of semi-circular projections 22 on the outside of plectane, three groups of semi-circular projections are respectively and in three groups of supporting rods Side is adjacent to；It further include driving motor 23, lead screw 24, gag lever post 25, slide plate 26 and detection probe 27, the left side wall top of working chamber It is provided with third placing groove, and is fixedly installed with the 5th ball bearing 28 in third placing groove, is set on the right side wall of detection case It is equipped with third installation through-hole, and is fixedly installed with the 6th ball bearing 29 in third installation through-hole, driving motor is mounted on inspection At the top of the right end of measuring tank, the front and rear of slide plate is respectively arranged with the limit hole of the screwed pipe of left and right perforation, the left end of lead screw It across the left side of threaded hole to slide plate and is inserted into inside the 5th ball bearing from the right end spiral shell of slide plate dress, the right end of lead screw is from work Make intracavitary the 6th ball bearing that passes through to extend out to outside working chamber and be sequentially connected with the left side output end of driving motor, gag lever post Left end and working chamber left side wall at the top of connect, the right end of gag lever post passes through limit hole to the right side of slide plate from the left end of slide plate And connect with the right side wall of working chamber top, detection probe is mounted on the bottom end of slide plate, and the signal output end of detection probe It is connect with the signal input part of detection data analyzer；Wafer flow is placed in the top of placement plate, passes through manual rotary worm Right end, adjustment axis rotation is driven by the cooperation of worm screw and turbine, adjustment axis, which drives, adjusts plectane rotation, adjusts on the outside of plectane Semi-circular projection gradually release the limit to supporting rod, three groups of supporting rods respectively under the action of three groups of " C " type elastic slice elastic force to The center of circle direction of fixed ring is mobile, until three groups of clamp columns on three groups of supporting rod tops are adjacent to on the outside of wafer flow, from And wafer flow is fixed, and can guarantee that the center of circle of wafer flow and the center of circle of fixed ring are located at same vertical line On, it is convenient that wafer flow is fixed, three groups of clamp columns are fixed by wafer flow by the elastic force of " C " type elastic slice, are prevented The case where wafer flow is deformed due to discontinuity equalization guarantees the accuracy of detection accuracy；It is driven by rotating electric machine Support plate and mounting table and wafer flow slowly rotate, while driving lead screw rotation by driving motor, pass through lead screw and spiral shell The cooperation of pit makes slide plate transverse shifting in working chamber, and slide plate drives detection probe transverse shifting in working chamber, passes through crystalline substance Itself rotation of circular jet piece is matched with the transverse shifting of detection probe, can carry out multidraw to the surface of wafer flow, The testing result obtained is more representative, improves practicability, and detection probe detects the planarization on wafer flow surface, And the information that will test passes to detection data analyzer and is analyzed, and obtains the data of wafer flow surface smoothness.

A kind of wafer flow surface smoothness detection device of the utility model, three groups of clamp columns may be rotatably mounted at respectively The top of three groups of supporting rods；May be rotatably mounted at the top of three groups of supporting rods by three groups of clamp columns, it is ensured that wafer flow by Power is uniform, improves the fixed effect to wafer flow.

A kind of wafer flow surface smoothness detection device of the utility model, horizontal plane is located at three where placement plate bottom end The top of horizontal plane where group clamp column bottom end and the lower section for being located at three groups of clamping top ends place horizontal plane；Facilitate three groups of clampings Column clamps wafer flow, improves practicability.

A kind of wafer flow surface smoothness detection device of the utility model further includes left casing 30, right casing, two groups Fastening bolt 31 and two groups of travel switches 32, left casing and right casing are set in the outside of gag lever post, and left casing and the right side Casing is located at the left and right side of slide plate, and the top of left casing and right casing is provided with fastening screw hole, two groups of fastenings Spiral shell dress is adjacent to across two groups of fastening screw holes and with the top of gag lever post respectively for screw rod one end of bolt, two groups of travel switch difference It is mounted on the right end of left casing and the left end of right casing, two groups of travel switches are located in same level with slide plate, two groups of rows Cheng Kaiguan is electrically connected with driving motor；According to the diameter of wafer flow, the distance between left casing and right casing are adjusted, then Left casing and right casing are fixed with gag lever post by two groups of fastening bolts, control driving motor by two groups of travel switches, To control the stroke of detection probe, make the radius of the shift motion wafer flow of detection probe, improves real The property used.

A kind of wafer flow surface smoothness detection device of the utility model, three groups of " C " type elastic slices are angularly uniformly pacified Mounted in the inside of fixed ring；The elastic force for guaranteeing that three groups of " C " type elastic slices apply three groups of supporting rods is equal, keeps wafer flow stress equal It is even, guarantee wafer flow and fixed ring concentric.

A kind of wafer flow surface smoothness detection device of the utility model, further includes multiple groups support rod 33, multiple groups branch Strut is rounded to be uniformly mounted on the bottom end of support plate, and is mounted on support wheel 34, multiple groups branch in the bottom end of multiple groups support rod The bottom end of support wheel is contacted with the inner bottom wall of working chamber；By the cooperation of multiple groups support rod and multiple groups support wheel, improve to support The support effect of plate improves stability when support plate rotation.

A kind of wafer flow surface smoothness detection device of the utility model, the right end of worm screw are provided with turncap 35； Worm screw is rotated by the way that turncap is convenient, improves use reliability.

A kind of wafer flow surface smoothness detection device of the utility model picks and places and is provided with door-plate 36, door-plate at mouth Left end and the front end of detection case be connected by a hinge, the right end of door-plate and the front end of detection case are connected by a snap, and in door Peep hole is provided on plate, peep hole is communicated with working chamber, and transparent baffle 37 is equipped in peep hole；It can be closed when detection Door-plate is closed, the influence of outer bound pair detection operation is reduced, detection process is observed by the way that peep hole is convenient, is improved using reliable Property.

A kind of wafer flow surface smoothness detection device of the utility model, detection probe be located at placement plate it is vertical on Side, detection probe include sender unit and signal receiving device, and the position of sender unit and signal receiving device It sets identical；Facilitate detection probe to be sampled detection on the surface of whole wafer flow, signal issued by sender unit, Signal is received after wafer flow reflection by signal receiving device, thus obtain the distance between detection probe and wafer flow, By obtained apart from for statistical analysis, the flatness on you can get it wafer flow surface.

A kind of wafer flow surface smoothness detection device of the utility model completes above-mentioned movement at work Before, it is moved into the position of user's needs first, wafer flow is placed in the top of placement plate, passes through manual rotary worm The turncap of right end drives worm screw rotation, drives adjustment axis rotation by the cooperation of worm screw and turbine, adjustment axis, which drives, adjusts circle Plate rotation adjusts the semi-circular projection on the outside of plectane and gradually releases the limit to supporting rod, and three groups of supporting rods are respectively in three groups of " C " types It is mobile to the center of circle direction of fixed ring under the action of elastic slice elastic force, until three groups of clamp columns on three groups of supporting rod tops are and wafer It is adjacent on the outside of flow, so that wafer flow be fixed, and can guarantee the center of circle of wafer flow and the circle of fixed ring The heart is located on same vertical line, convenient that wafer flow is fixed, and makes three groups of clamp columns will be brilliant by the elastic force of " C " type elastic slice The case where circular jet piece is fixed, and prevents wafer flow from deforming due to discontinuity equalization, guarantees the accuracy of detection accuracy, three Group clamp column may be rotatably mounted at the top of three groups of supporting rods, it is ensured that wafer flow uniform force, according to the straight of wafer flow Diameter adjusts the distance between left casing and right casing, then by two groups of fastening bolts by left casing and right casing with limit Bar is fixed, and controlling driving motor by two groups of travel switches makes detection probe so that the stroke to detection probe controls Shift motion is the radius of wafer flow, drives support plate and mounting table and wafer flow slowly to revolve by rotating electric machine Turn, while lead screw rotation is driven by driving motor, moves slide plate laterally in working chamber by the cooperation of lead screw and threaded hole Dynamic, slide plate drives detection probe transverse shifting in working chamber, passes through the transverse direction of itself rotation and detection probe of wafer flow Movement matches, and can carry out multidraw to the surface of wafer flow, the testing result obtained is more representative, passes through letter Number emitter issues signal, and signal is received after wafer flow reflection by signal receiving device, thus obtain detection probe with The distance between wafer flow, you can get it wafer flow for statistical analysis to detection information by detection data analyzer The flatness on surface improves the support effect to support plate by the cooperation of multiple groups support rod and multiple groups support wheel, improves support Stability when plate rotates.

The above is only the preferred embodiment of the utility model, it is noted that for the common skill of the art For art personnel, without deviating from the technical principle of the utility model, several improvements and modifications can also be made, these change It also should be regarded as the protection scope of the utility model into modification.

Claims (9)

1. a kind of wafer flow surface smoothness detection device, including detection case (1), detection case (1) are internally provided with work Chamber, the top of detection case (1) are provided with detection data analyzer (2), and the front end of detection case (1) is provided with pick-and-place mouth；Its feature It is, further includes mounting table (3), rotating electric machine (4), fixed ring (5), three groups of supporting rods (6), three groups of " C " type elastic slices (7), branch Fagging (8), left supported plate (9), right supported plate (10), adjustment axis (11) and worm screw (12) are provided in the inner bottom wall of the working chamber Mounting groove, the rotating electric machine (4) are fixedly mounted in mounting groove, and are provided with and turn in the top output port of rotating electric machine (4) The top of axis (13), the shaft (13) is connect with the center bottom of support plate (8), the left supported plate (9) and right supported plate (10) Top connect respectively with the left and right side of mounting table (3) bottom end, the bottom end of left supported plate (9) and right supported plate (10) respectively with branch The left and right side on fagging (8) top connects, and the right end of left supported plate (9) is provided with the first placing groove, and described first places It is fixedly installed in slot the first ball bearing (14), the first installation through-hole of left and right perforation is provided on the right supported plate (10), And the second ball bearing (15) are fixedly installed in the first installation through-hole, the left end of the worm screw (12) is from left supported plate (9) Right end is inserted into the first ball bearing (14) inside, and the right end of worm screw (12) passes through the second ball axis from the left end of right supported plate (10) The right side of (15) to right supported plate (10) is held, the top middle portion of the support plate (8) is provided with the second placing groove, and places second The inside of slot is fixedly installed with third ball bearing (16), and the second peace up and down is provided in the middle part of the mounting table (3) Through-hole is filled, and is fixedly installed with the 4th ball bearing (17) in the second installation through-hole, the bottom end of the adjustment axis (11) is put certainly The top for setting platform (3) passes through the 4th ball bearing (17) to the lower section of mounting table (3) and is inserted into third ball bearing (16) Portion, and turbine (18) are equipped in the outer sheath of adjustment axis (11), the front end of the turbine (18) is engaged with the rear end of worm screw (12), It is provided at the top of adjustment axis (11) placement plate (19), is fixedly installed on the outside of adjustment axis (11) and adjusts plectane (20), it is described It adjusts plectane (20) to be located between mounting table (3) and placement plate (19), the bottom end of the fixed ring (5) and the top of mounting table (3) End is fixedly connected, and one end of three groups of supporting rods (6) is hinged with the inner ring of fixed ring (5), three groups of supporting rods (6) it is another End top is provided with clamp column (21), and three groups of supporting rods (6) are angularly uniformly arranged on the inner ring of fixed ring (5), institute The one end for stating three groups of " C " type elastic slices (7) is connect with the outside of three groups of supporting rods (6) respectively, three groups of " C " type elastic slices (7) it is another End is connect with the inner ring of fixed ring (5), is evenly arranged with three groups of semi-circular projections (22) on the outside of the adjusting plectane, and described three Group semi-circular projection (22) is adjacent to on the inside of three groups of supporting rods (6) respectively；It further include driving motor (23), lead screw (24), limit The left side wall top of bar (25), slide plate (26) and detection probe (27), the working chamber is provided with third placing groove, and in third It is fixedly installed with the 5th ball bearing (28) in placing groove, is provided with third installation through-hole on the right side wall of the detection case (1), And the 6th ball bearing (29) is fixedly installed in third installation through-hole, the driving motor (23) is mounted on detection case (1) Right end at the top of, the front and rear of the slide plate (26) be respectively arranged with left and right perforation screwed pipe limit hole, the silk The left end of thick stick (24) fills the left side across threaded hole to slide plate (26) from the right end spiral shell of slide plate (26) and is inserted into the 5th ball axis Hold (28) it is internal, the right end of lead screw (24) passed through from working chamber the 6th ball bearing (29) extend out to outside working chamber and with drive The left side output end transmission connection of dynamic motor (23), the left end of the gag lever post (25) and the left side wall top of working chamber connect, The right end of gag lever post (25) from the left end of slide plate (26) pass through limit hole to slide plate (26) right side and with the right side wall of working chamber Top connection, the detection probe (27) are mounted on the bottom end of slide plate (26), and the signal output end of detection probe (27) with The signal input part of detection data analyzer (2) connects.

2. a kind of wafer flow surface smoothness detection device as described in claim 1, which is characterized in that three groups of clampings Column (21) may be rotatably mounted at the top of three groups of supporting rods (6) respectively.

3. a kind of wafer flow surface smoothness detection device as claimed in claim 2, which is characterized in that the placement plate (19) horizontal plane where bottom end is located at the top of three groups of clamp column (21) bottom ends place horizontal plane and is located at three groups of clamp columns (21) The lower section of horizontal plane where top.

4. a kind of wafer flow surface smoothness detection device as claimed in claim 3, which is characterized in that further include left casing (30), right casing, two groups of fastening bolts (31) and two groups of travel switches (32), the left casing (30) and right casing are set in The outside of gag lever post (25), and left casing (30) and right casing are located at the left and right side of slide plate (26), and in left set The top of pipe (30) and right casing is provided with fastening screw hole, screw rod one end difference spiral shell of two groups of fastening bolts (31) fill across Two groups of fastening screw holes and top with gag lever post (25) is adjacent to, two groups of travel switches (32) are separately mounted to left casing (30) left end of right end and right casing, two groups of travel switches (32) are located in same level with slide plate (26), two groups of rows Cheng Kaiguan (32) is electrically connected with driving motor (23).

5. a kind of wafer flow surface smoothness detection device as claimed in claim 4, which is characterized in that three groups " C " Type elastic slice (7) is angularly uniformly mounted on the inside of fixed ring (5).

6. a kind of wafer flow surface smoothness detection device as claimed in claim 5, which is characterized in that further include multiple groups branch Strut (33), the rounded bottom end for being uniformly mounted on support plate (8) of the multiple groups support rod (33), and in multiple groups support rod (33) Bottom end be mounted on support wheel (34), the bottom end of support wheel (34) described in multiple groups is contacted with the inner bottom wall of working chamber.

7. a kind of wafer flow surface smoothness detection device as claimed in claim 6, which is characterized in that the worm screw (12) Right end be provided with turncap (35).

8. a kind of wafer flow surface smoothness detection device as claimed in claim 7, which is characterized in that at the pick-and-place mouth It is provided with door-plate (36), the left end of the door-plate (36) and the front end of detection case (1) are connected by a hinge, the right end of door-plate (36) It is connected by a snap with the front end of detection case (1), and is provided with peep hole on door-plate (36), the peep hole and working chamber phase It is logical, and transparent baffle (37) are installed in peep hole.

9. a kind of wafer flow surface smoothness detection device as claimed in claim 8, which is characterized in that the detection probe (27) it is located at the vertical direction of placement plate (19), detection probe (27) includes sender unit and signal receiving device, and Sender unit is identical with the position of signal receiving device.