CN208687023U - It is a kind of suitable for high temperature, acidity, alkaline environment three-way ball valve - Google Patents

It is a kind of suitable for high temperature, acidity, alkaline environment three-way ball valve Download PDF

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Publication number
CN208687023U
CN208687023U CN201820971667.XU CN201820971667U CN208687023U CN 208687023 U CN208687023 U CN 208687023U CN 201820971667 U CN201820971667 U CN 201820971667U CN 208687023 U CN208687023 U CN 208687023U
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ball valve
valve
valve body
interface
high temperature
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杨春水
陈彦岗
司马超
张蒙
赵力行
邹昭平
蒋俊海
于浩
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Beijing Jingyi Automation Equipment Co Ltd
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Anhui Jingyi Automation Equipment Technology Co Ltd
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Abstract

The utility model discloses one kind to be suitable for high temperature, it is acid, the three-way ball valve of alkaline environment, it is related to the technical field of semiconductor equipment, including ball valve body, ball valve body rear end face is equipped with valve deck, ball valve body is left, it is right, front end face is separately installed with interface bonnet bush integral piece, interface bonnet bush integral piece includes interface valve deck end and bushing end, bushing end is equipped with valve seat, the material of valve seat is the ptfe composite containing glass fibre, the inside of ball valve body is equipped with T-valve ball, the top of T-valve ball is connected with valve rod, valve rod is mounted on the upper surface of ball valve body, the lower part of T-type ball valve is connected with positioning column, the lower part of positioning column is equipped with shop bolt, shop bolt is mounted on the lower end surface of ball valve body.The material selection of valve seat contains the ptfe composite of glass fibre in the utility model, and by interface valve deck and the integral part of bushing design, provide it is a kind of suitable for high temperature, acidity, alkaline environment three-way ball valve.

Description

It is a kind of suitable for high temperature, acidity, alkaline environment three-way ball valve
Technical field
The utility model relates to the technical field of process gas processing equipment is made in semiconductor fabrication, and in particular to It is a kind of suitable for high temperature, acidity, alkaline environment three-way ball valve.
Background technique
Valve is that one or more opening or channel are blocked come open and close or partly using a movable part, make liquid stream, A kind of device that air stream or other air-flows or a large amount of bulk materials can be flowed out, block or be adjusted;Spool is also referred to, this The movable part of device.The valve seat filler material of traditional three-way ball valve is PTFE, and being applicable in maximum temperature is 84 DEG C, when temperature increases To after 120 DEG C, the valve seat mechanical performance that PTFE is done has obvious variation, is not able to satisfy 150 DEG C of semiconductor field requirements, Traditional three-way ball valve long-term work is at 150 DEG C, and because seat hardness becomes smaller, the sealing force between valve seat and valve ball becomes smaller, and causes Ball valve sealing performance reduces, and greatly shortens life of valve, there are valve leak risks.
Chinese Patent Application No. is that CN107781463A discloses a kind of flanged ball valve threeway, including tee tube, described three The outer end of siphunculus is fixedly installed with ring flange, and the top of the tee tube is fixedly installed with valve body, consolidates in the inner cavity of the valve body Dingan County is equipped with valve seat, is movably installed with sphere on the inside of the valve seat, the top of the sphere is provided with card slot described in card slot Valve rod is fixedly connected in inner cavity, the lower outside of the valve rod is flexibly connected by sealing filler with valve body, the sealing The second tightening nut is provided on the upside of filler, the upper end of the valve rod is fixedly installed with handle by the first tightening nut, Non-slip mat is provided between the first tightening nut and handle.Utility model creation structure is simple, can control different Liquid discharge overcomes the separately installed brought assembly troublesome problem of multiple valves, so that compact overall structure, solid, section It is about made into this, and reduces a large amount of potential leakage point.
Chinese Patent Application No. is that CN207278940U discloses a kind of three-way ball valve, including T-valve body, the T-valve Valve deck is equipped at the top of body, the valve deck two sides of the bottom are equipped with gasket, and the valve deck and T-valve body side are equipped with the first mounting hole, It is equipped with bolt in first mounting hole, nut is equipped at the top of the bolt, the valve deck bottom is equipped with and sets dirty slot, the T-type Valve body side is equipped with A runner and the other side is equipped with B runner.The utility model is conducive to by being equipped with dirt discharge groove and setting dirty slot It is easy to open valve deck cleaning dirt, avoids ball valve from causing water source too much using build up of dirt for a long time or conveys the pollution of liquid, It is set as ChamferBox by sphere section, is conducive to reduce sphere volume, so that mitigating valve rod opens dynamics, and is being revolved Reduce resistance during turning, sphere is matched with sealing ring, and sealing effect is good.
By finding after carefully analyzing to above-mentioned two documents: valve body is integrated in documents 1, non-disconnectable Dress, valve during fabrication, by built in valve seat and valve inner, thus, as valve itself uses the increase of time, once valve seat is and ball Valve loses leakproofness, it is necessary to and the valve more renewed causes greatly to waste, and in documents 2, the rear end face of valve is designed to can Dismounting, but the also inconvenient replacement when the mechanical performance of valve seat reduces or fails, meanwhile, in above-mentioned two documents, valve The material of seat does not refer to, therefore, re-starts more rationally to the triple valve needs for environment such as high temperature, acidity, alkalinity Design.
Utility model content
The purpose of this utility model is to provide it is a kind of suitable for high temperature, acidity, alkaline environment three-way ball valve, with solve The above-mentioned defects caused by the prior art.
It is a kind of suitable for high temperature, acidity, alkaline environment three-way ball valve, including bottom plate, including ball valve body, the ball valve Valve rear end face is equipped with valve deck by screw, and the ball valve body is left and right, front end face by screw is separately installed with interface valve The contact position of cover lining set integral piece, the interface bonnet bush integral piece and ball valve body is equipped with gasket seal, the ball valve The inside of body is equipped with T-type ball valve, and the upper and lower part of the T-type ball valve is respectively equipped with card slot, the top card slot of the T-type ball valve Place is equipped with valve rod, and the upper end of the valve rod and ball valve body is rotatablely connected and runs through the upper surface of ball valve body, the T-type ball valve Lower part card slot at be equipped with positioning column, the lower rotational of the positioning column is connected with shop bolt, and the shop bolt is mounted on The contact position of the lower end surface of ball valve body, the shop bolt and ball valve body is equipped with locating shim.
Preferably, the interface bonnet bush integral piece includes interface valve deck end and bushing end, the interface bonnet bush Integral piece is equipped with valve seat at bushing end, and the valve seat and T-type ball valve are in close contact, and the material of the valve seat is to contain glass fibers The ptfe composite of dimension.
Preferably, it is partially simultaneously clamped with the top card slot of T-type ball valve for rectangular block below the valve rod, the valve rod Middle section is cylinder simultaneously and the contact position of ball valve body is equipped with stem gasket, and the middle section of the valve rod is up additionally provided with One section of annular slot, be equipped at the annular slot O-ring and and ball valve body upper surface close contact, the ball valve It is equipped with a boss at the upper surface center of body, is equipped with step through-hole in boss, is additionally provided with valve between the valve rod and step through-hole Bar filler, the top of the valve stem packing are equipped with gland, and the gland compresses valve stem packing by bolt, described The upper surface of valve rod part is square column.
Preferably, the diameter of the inner passage of the interface bonnet bush integral piece and T-type ball valve is consistent simultaneously In identical level height.
Preferably, the valve deck and interface bonnet bush integral piece install spring additional when installing with ball valve body using screw Washer and flat shim.
Preferably, the gland installs spring washer and flat shim additional when installing with ball valve body using screw.
Utility model has the advantages that both reducing interface valve by by interface valve deck and the integral part of bushing design Lid and difficulty of the bushing in machining and assembly, and the sealing effect of its own is significantly improved, then contain by selecting Material of the ptfe composite of glass fibre as valve seat is prevented because temperature is too high, too strong etc. originals of acid-base property Cause, leakage caused by valve seat plastic deformation is big or valve are not closed completely, improve valve base sealing effect, improve itself making for valve Use the service life.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model front view.
Fig. 2 is the structural schematic diagram of the utility model top view.
Fig. 3 is the structural schematic diagram of ball valve body upper surface in the utility model.
Fig. 4 is the structural schematic diagram of interface bonnet bush integral piece in the utility model.
Fig. 5 is the structural schematic diagram of valve seat in the utility model.
Wherein, 1, ball valve body;2, valve deck;3, interface bonnet bush integral piece;3-1, interface valve deck end;3-2, bushing End;4, gasket seal;5, valve seat;6, T-type ball valve;7, valve rod;8, positioning column;9, shop bolt;10, locating shim;11, valve rod Washer;12, O-ring;13, valve stem packing;14, gland;15, bolt.
Specific embodiment
To be easy to understand the technical means, creative features, achievement of purpose, and effectiveness of the utility model, below In conjunction with specific embodiment, the utility model is further described.
As shown in Figures 1 to 5, it is a kind of suitable for high temperature, acidity, alkaline environment three-way ball valve, including ball valve body 1, The rear end face of the ball valve body 1 is equipped with valve deck 2 by screw, and left and right, the front end face of the ball valve body 1 pass through screw It is separately installed with interface bonnet bush integral piece 3, the contact position of the interface bonnet bush integral piece 3 and ball valve body 1 is equipped with The inside of gasket seal 4, the ball valve body 1 is equipped with T type ball valve 6, and the upper and lower part of the T-type ball valve 6 is respectively equipped with card Slot, valve rod 7 is equipped at the top card slot of the T-type ball valve 6, and the valve rod 7 is rotatably installed in the upper end of ball valve body 1 and runs through The upper surface of ball valve body 1 is equipped with positioning column 8, the lower rotational of the positioning column 8 at the lower part card slot of the T-type ball valve 6 It is connected with shop bolt 9, the shop bolt 9 is mounted on the lower end surface of ball valve body 1, the shop bolt 9 and ball valve body 1 Contact position be equipped with locating shim 10.
In the present invention, the interface bonnet bush integral piece 3 includes interface valve deck end 3-1 and bushing end 3-2, The interface bonnet bush integral piece 3 is equipped with valve seat 5 in bushing end 3-2, and the valve seat 5 and T type ball valve 6 are in close contact, institute The material for stating valve seat 5 is the ptfe composite containing glass fibre.
In the present invention, it is partially simultaneously clamped with the top card slot of T-type ball valve 6 for rectangular block below the valve rod 7, The middle section of the valve rod 7 be it is cylindrical and and ball valve body 1 contact position equipped with stem gasket 11, in the valve rod 7 Between part be up additionally provided with one section of annular slot, O type circle 12, and the upper end with ball valve body 1 are installed at the annular slot Face is in close contact, and the upper surface of the ball valve body 1 is additionally provided with a boss, is equipped with step through-hole, the valve rod 7 and platform in boss Valve stem packing 13 is additionally provided between rank through-hole, the top of the valve stem packing 13 is equipped with gland 14, the gland 14 Valve stem packing 13 is compressed by bolt 15, the upper surface of described valve rod 7 part is square column.
In the present invention, the diameter of the inner passage of the interface bonnet bush integral piece 3 and T-type ball valve 6 It is consistent and is in identical level height.
In the present invention, the valve deck 2 and interface bonnet bush integral piece 3 are being pacified with ball valve body 1 using screw Install spring washer and flat shim when dress additional.
In the present invention, the gland 14 installs spring washer additional when installing with ball valve body 1 using screw And flat shim.
When the utility model is used, the material selection RPTFE of valve seat 5, RPTFE is by suspension polytetrafluoroethylene resin through mould Pressure sizing, is sintered, and RPTFE has most excellent chemical corrosion resistance and dielectric properties in known plastic, can be -250 It is used in DEG C of -+250 DEG C temperature ranges, RPTFE has minimum coefficient of friction, best corrosion resistance, warp in known plastic Crossing repeatedly test proves, the valve seat 5 that 20% glass fibre filling PTFE material is done, because material hardness is big, under the effect of certain pretightning force It is hardly formed band between valve seat 5 and T-type ball valve 6, sealing function cannot be played, when pretightning force increase, valve seat 5 and T-type ball Frictional force between valve 6 increases, and the torsion that the external world provides is not enough to turning T-type ball valve, cause valve cannot normally open and close or Open and close not tight, leakage in formation;10% glass fibre filling PTFE and pure PTFE mechanical performance are almost the same, do not have as 5 performance of valve seat It is obviously improved;The valve seat 5 of 13%~17% glass fibre filling PTFE material, by tests up to ten thousand time, mechanical performance and chemically Environment of the long-term work at 150 DEG C can be fully met.Therefore, when the substance of high temperature, acidity, alkalinity etc. flows through in the utility model When related triple valve, valve seat 5 can effectively prevent to cause valve seat 5 to be plastically deformed because temperature is too high or acid-base property is too strong and make greatly At leakage or valve be not closed completely the problem of, substantially improve 5 sealing effect of valve seat.
Interface valve deck and bushing are made of one in the utility model, effectively prevent medium from interface valve deck and bushing it Between slot leakage tradition three-way ball valve interface valve deck and bushing be separation, this structure both increases machining and assembly Difficulty, and valve leak risk is increased, meanwhile, because the interface valve deck and bushing of traditional three-way ball valve are two components, filling With needing to install a sealing ring in the process, between both parts again, prevent the intracorporal medium of valve between both parts It lets out.
Based on above-mentioned, the utility model was by both having reduced interface valve deck for interface valve deck and the integral part of bushing design With difficulty of the bushing in machining and assembly, and the sealing effect of its own is significantly improved, then contains glass by selecting Material of the ptfe composite of glass fiber as valve seat is prevented because temperature is too high, too strong etc. reasons of acid-base property, The problem of leakage caused by valve seat plastic deformation is big or valve are not closed completely, improves the sealing effect of valve seat, improves valve Itself service life.
Therefore, embodiment disclosed above, in all respects are merely illustrative, not the only.It is all Change within the scope of the invention or equivalents of the invention is included in the utility model.

Claims (6)

1. it is a kind of suitable for high temperature, acidity, alkaline environment three-way ball valve, it is characterised in that: it is described including ball valve body (1) The rear end face of ball valve body (1) is equipped with valve deck (2) by screw, and left and right, the front end face of the ball valve body (1) pass through spiral shell Nail is separately installed with interface bonnet bush integral piece (3), and the interface bonnet bush integral piece (3) and ball valve body (1) connect Synapsis is equipped with gasket seal (4), and the inside of the ball valve body (1) is equipped with T-type ball valve (6), the top of the T-type ball valve (6) It is respectively equipped with card slot with lower part, is equipped with valve rod (7), the valve rod (7) and ball valve at the top card slot of the T-type ball valve (6) The upper end of body (1) is rotatablely connected and runs through the upper surface of ball valve body (1), and it is fixed to be equipped at the lower part card slot of the T-type ball valve (6) Position column (8), the lower rotational of the positioning column (8) are connected with shop bolt (9), and the shop bolt (9) is mounted on ball valve The contact position of the lower end surface of body (1), the shop bolt (9) and ball valve body (1) is equipped with locating shim (10).
2. it is according to claim 1 it is a kind of suitable for high temperature, acidity, alkaline environment three-way ball valve, which is characterized in that institute Stating interface bonnet bush integral piece (3) includes interface valve deck end (3-1) and bushing end (3-2), the interface bonnet bush one Part (3) is equipped with valve seat (5) at bushing end (3-2), and the valve seat (5) and T-type ball valve (6) are in close contact, the valve seat (5) Material is the ptfe composite containing glass fibre.
3. it is according to claim 1 it is a kind of suitable for high temperature, acidity, alkaline environment three-way ball valve, which is characterized in that institute It states and is partially simultaneously clamped with the top card slot of T-type ball valve (6) for rectangular block below valve rod (7), the middle section of the valve rod (7) For it is cylindrical and and ball valve body (1) contact position equipped with stem gasket (11), the middle section of the valve rod (7) is up also set There is one section of annular slot, O-ring (12) be installed at the annular slot and is simultaneously in close contact with the upper surface of ball valve body (1), It is up equipped with boss at the upper surface center of ball valve body (1), step through-hole is equipped in boss, the valve rod (7) and step are logical It is additionally provided between hole valve stem packing (13), the top of the valve stem packing (13) is equipped with gland (14), the gland (14) valve stem packing (13) are compressed by bolt (15), the upper surface of described valve rod (7) part is square column.
4. it is according to claim 1 it is a kind of suitable for high temperature, acidity, alkaline environment three-way ball valve, which is characterized in that institute It is identical with the diameter of inner passage of T-type ball valve (6) and high in identical level to state interface bonnet bush integral piece (3) Degree.
5. it is according to claim 1 it is a kind of suitable for high temperature, acidity, alkaline environment three-way ball valve, which is characterized in that institute Valve deck (2) and interface bonnet bush integral piece (3) is stated to install with ball valve body (1) using screw and installing spring washer peace additional Gasket.
6. it is according to claim 3 it is a kind of suitable for high temperature, acidity, alkaline environment three-way ball valve, which is characterized in that institute Gland (14) is stated to install with ball valve body (1) using screw and installing spring washer and flat shim additional.
CN201820971667.XU 2018-06-23 2018-06-23 It is a kind of suitable for high temperature, acidity, alkaline environment three-way ball valve Active CN208687023U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108547979A (en) * 2018-06-23 2018-09-18 安徽京仪自动化装备技术有限公司 It is a kind of suitable for high temperature, acidity, alkaline environment three-way ball valve

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108547979A (en) * 2018-06-23 2018-09-18 安徽京仪自动化装备技术有限公司 It is a kind of suitable for high temperature, acidity, alkaline environment three-way ball valve

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Effective date of registration: 20200716

Address after: 102600 block a, building 14, yard 8, Liangshuihe 2nd Street, Daxing District, Beijing

Patentee after: BEIJING JINGYI AUTOMATION EQUIPMENT Co.,Ltd.

Address before: 241000 403-J room, B building, Jiangbei industrial concentration zone, Wuhu, Anhui

Patentee before: ANHUI JINGYI AUTOMATION EQUIPMENT TECHNOLOGY Co.,Ltd.

TR01 Transfer of patent right
CP03 Change of name, title or address

Address after: 100176 block a, 14th floor, yard 8, Liangshuihe 2nd Street, Beijing Economic and Technological Development Zone, Daxing District, Beijing

Patentee after: Beijing Jingyi automation equipment Technology Co.,Ltd.

Address before: 102600 block a, building 14, yard 8, Liangshuihe Second Street, Beijing Economic and Technological Development Zone, Daxing District, Beijing

Patentee before: BEIJING JINGYI AUTOMATION EQUIPMENT Co.,Ltd.

CP03 Change of name, title or address