It is a kind of suitable for high temperature, acidity, alkaline environment three-way ball valve
Technical field
The utility model relates to the technical field of process gas processing equipment is made in semiconductor fabrication, and in particular to
It is a kind of suitable for high temperature, acidity, alkaline environment three-way ball valve.
Background technique
Valve is that one or more opening or channel are blocked come open and close or partly using a movable part, make liquid stream,
A kind of device that air stream or other air-flows or a large amount of bulk materials can be flowed out, block or be adjusted;Spool is also referred to, this
The movable part of device.The valve seat filler material of traditional three-way ball valve is PTFE, and being applicable in maximum temperature is 84 DEG C, when temperature increases
To after 120 DEG C, the valve seat mechanical performance that PTFE is done has obvious variation, is not able to satisfy 150 DEG C of semiconductor field requirements,
Traditional three-way ball valve long-term work is at 150 DEG C, and because seat hardness becomes smaller, the sealing force between valve seat and valve ball becomes smaller, and causes
Ball valve sealing performance reduces, and greatly shortens life of valve, there are valve leak risks.
Chinese Patent Application No. is that CN107781463A discloses a kind of flanged ball valve threeway, including tee tube, described three
The outer end of siphunculus is fixedly installed with ring flange, and the top of the tee tube is fixedly installed with valve body, consolidates in the inner cavity of the valve body
Dingan County is equipped with valve seat, is movably installed with sphere on the inside of the valve seat, the top of the sphere is provided with card slot described in card slot
Valve rod is fixedly connected in inner cavity, the lower outside of the valve rod is flexibly connected by sealing filler with valve body, the sealing
The second tightening nut is provided on the upside of filler, the upper end of the valve rod is fixedly installed with handle by the first tightening nut,
Non-slip mat is provided between the first tightening nut and handle.Utility model creation structure is simple, can control different
Liquid discharge overcomes the separately installed brought assembly troublesome problem of multiple valves, so that compact overall structure, solid, section
It is about made into this, and reduces a large amount of potential leakage point.
Chinese Patent Application No. is that CN207278940U discloses a kind of three-way ball valve, including T-valve body, the T-valve
Valve deck is equipped at the top of body, the valve deck two sides of the bottom are equipped with gasket, and the valve deck and T-valve body side are equipped with the first mounting hole,
It is equipped with bolt in first mounting hole, nut is equipped at the top of the bolt, the valve deck bottom is equipped with and sets dirty slot, the T-type
Valve body side is equipped with A runner and the other side is equipped with B runner.The utility model is conducive to by being equipped with dirt discharge groove and setting dirty slot
It is easy to open valve deck cleaning dirt, avoids ball valve from causing water source too much using build up of dirt for a long time or conveys the pollution of liquid,
It is set as ChamferBox by sphere section, is conducive to reduce sphere volume, so that mitigating valve rod opens dynamics, and is being revolved
Reduce resistance during turning, sphere is matched with sealing ring, and sealing effect is good.
By finding after carefully analyzing to above-mentioned two documents: valve body is integrated in documents 1, non-disconnectable
Dress, valve during fabrication, by built in valve seat and valve inner, thus, as valve itself uses the increase of time, once valve seat is and ball
Valve loses leakproofness, it is necessary to and the valve more renewed causes greatly to waste, and in documents 2, the rear end face of valve is designed to can
Dismounting, but the also inconvenient replacement when the mechanical performance of valve seat reduces or fails, meanwhile, in above-mentioned two documents, valve
The material of seat does not refer to, therefore, re-starts more rationally to the triple valve needs for environment such as high temperature, acidity, alkalinity
Design.
Utility model content
The purpose of this utility model is to provide it is a kind of suitable for high temperature, acidity, alkaline environment three-way ball valve, with solve
The above-mentioned defects caused by the prior art.
It is a kind of suitable for high temperature, acidity, alkaline environment three-way ball valve, including bottom plate, including ball valve body, the ball valve
Valve rear end face is equipped with valve deck by screw, and the ball valve body is left and right, front end face by screw is separately installed with interface valve
The contact position of cover lining set integral piece, the interface bonnet bush integral piece and ball valve body is equipped with gasket seal, the ball valve
The inside of body is equipped with T-type ball valve, and the upper and lower part of the T-type ball valve is respectively equipped with card slot, the top card slot of the T-type ball valve
Place is equipped with valve rod, and the upper end of the valve rod and ball valve body is rotatablely connected and runs through the upper surface of ball valve body, the T-type ball valve
Lower part card slot at be equipped with positioning column, the lower rotational of the positioning column is connected with shop bolt, and the shop bolt is mounted on
The contact position of the lower end surface of ball valve body, the shop bolt and ball valve body is equipped with locating shim.
Preferably, the interface bonnet bush integral piece includes interface valve deck end and bushing end, the interface bonnet bush
Integral piece is equipped with valve seat at bushing end, and the valve seat and T-type ball valve are in close contact, and the material of the valve seat is to contain glass fibers
The ptfe composite of dimension.
Preferably, it is partially simultaneously clamped with the top card slot of T-type ball valve for rectangular block below the valve rod, the valve rod
Middle section is cylinder simultaneously and the contact position of ball valve body is equipped with stem gasket, and the middle section of the valve rod is up additionally provided with
One section of annular slot, be equipped at the annular slot O-ring and and ball valve body upper surface close contact, the ball valve
It is equipped with a boss at the upper surface center of body, is equipped with step through-hole in boss, is additionally provided with valve between the valve rod and step through-hole
Bar filler, the top of the valve stem packing are equipped with gland, and the gland compresses valve stem packing by bolt, described
The upper surface of valve rod part is square column.
Preferably, the diameter of the inner passage of the interface bonnet bush integral piece and T-type ball valve is consistent simultaneously
In identical level height.
Preferably, the valve deck and interface bonnet bush integral piece install spring additional when installing with ball valve body using screw
Washer and flat shim.
Preferably, the gland installs spring washer and flat shim additional when installing with ball valve body using screw.
Utility model has the advantages that both reducing interface valve by by interface valve deck and the integral part of bushing design
Lid and difficulty of the bushing in machining and assembly, and the sealing effect of its own is significantly improved, then contain by selecting
Material of the ptfe composite of glass fibre as valve seat is prevented because temperature is too high, too strong etc. originals of acid-base property
Cause, leakage caused by valve seat plastic deformation is big or valve are not closed completely, improve valve base sealing effect, improve itself making for valve
Use the service life.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model front view.
Fig. 2 is the structural schematic diagram of the utility model top view.
Fig. 3 is the structural schematic diagram of ball valve body upper surface in the utility model.
Fig. 4 is the structural schematic diagram of interface bonnet bush integral piece in the utility model.
Fig. 5 is the structural schematic diagram of valve seat in the utility model.
Wherein, 1, ball valve body;2, valve deck;3, interface bonnet bush integral piece;3-1, interface valve deck end;3-2, bushing
End;4, gasket seal;5, valve seat;6, T-type ball valve;7, valve rod;8, positioning column;9, shop bolt;10, locating shim;11, valve rod
Washer;12, O-ring;13, valve stem packing;14, gland;15, bolt.
Specific embodiment
To be easy to understand the technical means, creative features, achievement of purpose, and effectiveness of the utility model, below
In conjunction with specific embodiment, the utility model is further described.
As shown in Figures 1 to 5, it is a kind of suitable for high temperature, acidity, alkaline environment three-way ball valve, including ball valve body 1,
The rear end face of the ball valve body 1 is equipped with valve deck 2 by screw, and left and right, the front end face of the ball valve body 1 pass through screw
It is separately installed with interface bonnet bush integral piece 3, the contact position of the interface bonnet bush integral piece 3 and ball valve body 1 is equipped with
The inside of gasket seal 4, the ball valve body 1 is equipped with T type ball valve 6, and the upper and lower part of the T-type ball valve 6 is respectively equipped with card
Slot, valve rod 7 is equipped at the top card slot of the T-type ball valve 6, and the valve rod 7 is rotatably installed in the upper end of ball valve body 1 and runs through
The upper surface of ball valve body 1 is equipped with positioning column 8, the lower rotational of the positioning column 8 at the lower part card slot of the T-type ball valve 6
It is connected with shop bolt 9, the shop bolt 9 is mounted on the lower end surface of ball valve body 1, the shop bolt 9 and ball valve body 1
Contact position be equipped with locating shim 10.
In the present invention, the interface bonnet bush integral piece 3 includes interface valve deck end 3-1 and bushing end 3-2,
The interface bonnet bush integral piece 3 is equipped with valve seat 5 in bushing end 3-2, and the valve seat 5 and T type ball valve 6 are in close contact, institute
The material for stating valve seat 5 is the ptfe composite containing glass fibre.
In the present invention, it is partially simultaneously clamped with the top card slot of T-type ball valve 6 for rectangular block below the valve rod 7,
The middle section of the valve rod 7 be it is cylindrical and and ball valve body 1 contact position equipped with stem gasket 11, in the valve rod 7
Between part be up additionally provided with one section of annular slot, O type circle 12, and the upper end with ball valve body 1 are installed at the annular slot
Face is in close contact, and the upper surface of the ball valve body 1 is additionally provided with a boss, is equipped with step through-hole, the valve rod 7 and platform in boss
Valve stem packing 13 is additionally provided between rank through-hole, the top of the valve stem packing 13 is equipped with gland 14, the gland 14
Valve stem packing 13 is compressed by bolt 15, the upper surface of described valve rod 7 part is square column.
In the present invention, the diameter of the inner passage of the interface bonnet bush integral piece 3 and T-type ball valve 6
It is consistent and is in identical level height.
In the present invention, the valve deck 2 and interface bonnet bush integral piece 3 are being pacified with ball valve body 1 using screw
Install spring washer and flat shim when dress additional.
In the present invention, the gland 14 installs spring washer additional when installing with ball valve body 1 using screw
And flat shim.
When the utility model is used, the material selection RPTFE of valve seat 5, RPTFE is by suspension polytetrafluoroethylene resin through mould
Pressure sizing, is sintered, and RPTFE has most excellent chemical corrosion resistance and dielectric properties in known plastic, can be -250
It is used in DEG C of -+250 DEG C temperature ranges, RPTFE has minimum coefficient of friction, best corrosion resistance, warp in known plastic
Crossing repeatedly test proves, the valve seat 5 that 20% glass fibre filling PTFE material is done, because material hardness is big, under the effect of certain pretightning force
It is hardly formed band between valve seat 5 and T-type ball valve 6, sealing function cannot be played, when pretightning force increase, valve seat 5 and T-type ball
Frictional force between valve 6 increases, and the torsion that the external world provides is not enough to turning T-type ball valve, cause valve cannot normally open and close or
Open and close not tight, leakage in formation;10% glass fibre filling PTFE and pure PTFE mechanical performance are almost the same, do not have as 5 performance of valve seat
It is obviously improved;The valve seat 5 of 13%~17% glass fibre filling PTFE material, by tests up to ten thousand time, mechanical performance and chemically
Environment of the long-term work at 150 DEG C can be fully met.Therefore, when the substance of high temperature, acidity, alkalinity etc. flows through in the utility model
When related triple valve, valve seat 5 can effectively prevent to cause valve seat 5 to be plastically deformed because temperature is too high or acid-base property is too strong and make greatly
At leakage or valve be not closed completely the problem of, substantially improve 5 sealing effect of valve seat.
Interface valve deck and bushing are made of one in the utility model, effectively prevent medium from interface valve deck and bushing it
Between slot leakage tradition three-way ball valve interface valve deck and bushing be separation, this structure both increases machining and assembly
Difficulty, and valve leak risk is increased, meanwhile, because the interface valve deck and bushing of traditional three-way ball valve are two components, filling
With needing to install a sealing ring in the process, between both parts again, prevent the intracorporal medium of valve between both parts
It lets out.
Based on above-mentioned, the utility model was by both having reduced interface valve deck for interface valve deck and the integral part of bushing design
With difficulty of the bushing in machining and assembly, and the sealing effect of its own is significantly improved, then contains glass by selecting
Material of the ptfe composite of glass fiber as valve seat is prevented because temperature is too high, too strong etc. reasons of acid-base property,
The problem of leakage caused by valve seat plastic deformation is big or valve are not closed completely, improves the sealing effect of valve seat, improves valve
Itself service life.
Therefore, embodiment disclosed above, in all respects are merely illustrative, not the only.It is all
Change within the scope of the invention or equivalents of the invention is included in the utility model.