CN208671930U - A kind of flatness detecting device based on laser interference - Google Patents

A kind of flatness detecting device based on laser interference Download PDF

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Publication number
CN208671930U
CN208671930U CN201821660178.9U CN201821660178U CN208671930U CN 208671930 U CN208671930 U CN 208671930U CN 201821660178 U CN201821660178 U CN 201821660178U CN 208671930 U CN208671930 U CN 208671930U
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laser
measurement fluorescence
socketed
bubble
horizontal
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CN201821660178.9U
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Chinese (zh)
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吴涵标
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Huizhou Micron Technology Co Ltd
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Huizhou Micron Technology Co Ltd
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Abstract

The utility model discloses a kind of flatness detecting devices based on laser interference, it is steeped including detector ontology and horizontal measurement fluorescence, fixed frame is connected in the groove that detector bodies top surface opens up, and fixed frame internal clamp is connected with horizontal measurement fluorescence bubble, horizontal measurement fluorescence bubble surface is socketed with glass tube, and glass tube surface printing has horizontal line, the glass tube is equipped with fluorescent liquid, and fluorescent liquid top surface is filled with bubble.In the utility model, the bottom of device is equipped with three supporting legs, telescopic rod surface is welded at the top of supporting leg, 360 ° of tune micro-loop bottom surfaces are connected at the top of telescopic rod, 360 ° of fine tuning ring surface sides are socketed with height adjusting handle, position and angle by supporting leg, telescopic rod, 360 ° of regulating rings and height adjusting handle convenient for detector ontology, keep laser detection head vertical with detection faces, adjustment speed, saving and regulating time are improved, working efficiency is improved.

Description

A kind of flatness detecting device based on laser interference
Technical field
The utility model relates to flatness detection technical field more particularly to a kind of flatness detections based on laser interference Device.
Background technique
Flatness detection is also named the detection of front degree, coplane degree detection sometimes, and planeness detection system is each dedicated for detecting The horizontal linear degree of the stitch of various electronic components such as kind of IC chip, electric power connector, coplane degree, gap, stitch width etc. Index, planeness detection system develop to double camera, three cameras, polyphaser from one camera planeness detection system and link Detection, one camera planeness detection system can reach the precision of 0.01mm or more when flatness is demarcated in detection, can be according to detection It is required that setting flatness error range.
When detecting to inclined-plane or top surface, detection device is difficult the flatness detecting device of laser interference when placing Device laser detection head is vertical with detection faces, it needs just to can be carried out test by debugging for a long time, it is time-consuming and laborious, it reduces Working efficiency, when detection, are likely to result in error and become larger, and influence the accuracy of detection, and the situation more dark in environment Under, it more difficult to laser detection head is adjusted to vertical with detection faces, makes to detect more difficult, the irradiation model of traditional laser detection head It is fixed for enclosing, and when detecting to large-area planar, can only little by little be detected, detection efficiency is low, laser detection head When long lasting for work, a large amount of heat can be generated inside laser detection head, the heat inside meeting will cause over time Electric elements heating reduces the service life of the electric elements inside laser detection head.
Utility model content
Purpose of the utility model is to solve disadvantages existing in the prior art, and the one kind proposed is dry based on laser The flatness detecting device related to.
To achieve the goals above, the utility model adopts the technical scheme that a kind of based on the smooth of laser interference Detection device is spent, including detector ontology and horizontal measurement fluorescence steep, in the groove that detector bodies top surface opens up It is connected with fixed frame, and fixed frame internal clamp is connected with horizontal measurement fluorescence bubble, horizontal measurement fluorescence bubble surface socket There is glass tube, and glass tube surface printing has horizontal line, the glass tube is equipped with fluorescent liquid, and fluorescent liquid top surface fills There is bubble, horizontal measurement fluorescence bubble lower section, which is located at detector ontology side surface inserting, 45 ° of measurement fluorescence bubbles, and 45 ° Measurement fluorescence steeps the corresponding detector body surface other side and is inlaid with vertical measurement fluorescence bubble.
Preferably, detector body surface side is plugged with laser detection head, and laser detection head table by plug Face one end is socketed with lock tube, and the lock tube interior surface spiral is connected with lock line, and locks line side and be located at laser detection head surface Annular is socketed with radiating groove, and described radiating groove one end interior surface is socketed with hot spot thickness and adjusts ring, and hot spot thickness adjusts ring End surface spiral is connected with vertical and horizontal focusing laser head, and the vertical and horizontal focusing laser head surface side middle position is bonded with glass Photoscope.
Preferably, detector body bottom portion surface side is equipped with power supply line, in detector body bottom portion surface Between position rotation be connected with 360 ° of regulating rings, and 360 ° of fine tuning ring surface sides are socketed with height adjusting handle, and described 360 ° are micro- Ring bottom surface middle position is adjusted to be connected with telescopic rod, and telescopic rod rear surface is socketed with supporting leg.
Preferably, the horizontal measurement fluorescence bubble, 45 ° of measurement fluorescence bubbles and vertical measurement fluorescence bubble are disposed as cylindrical body Structure.
Preferably, the laser detection head is set as cylindrical structure, and laser detection head surface is socketed with multiple heat dissipations Slot, and multiple radiating grooves are equally spaced, the multiple radiating groove is an integral structure.
Preferably, the telescopic rod rear surface is socketed with multiple supporting legs, and multiple supporting legs are rounded is equally spaced, described Supporting leg lower end is set as conical structure.
In conclusion by adopting the above-described technical solution, the beneficial effects of the utility model are:
1, in the utility model, which is equipped with three supporting legs, is welded on telescopic rod surface, telescopic rod at the top of supporting leg Top is connected to 360 ° of tune micro-loop bottom surfaces, and 360 ° of fine tuning ring surface sides are socketed with height adjusting handle, by supporting leg, stretch The position and angle of contracting bar, 360 ° of regulating rings and height adjusting handle convenient for detector ontology, make laser detection head and detection faces Vertically, adjustment speed, saving and regulating time are improved, working efficiency is improved;
2, in the utility model, detector body surface is equipped with horizontal measurement fluorescence bubble, 45° angle measurement fluorescence steeps and vertical Fluorescence bubble is measured, the liquid level and horizontal parallel angle of fluorescent liquid are obstructed by bubble in observation glass tube, makes laser detection Head it is vertical with detection faces, convenient for the device varying environment use, improve detector using ability and adjusting angle it is accurate Property, improve working efficiency;
3, in the utility model, laser detection head surface side is bonded with glass photoscope, laser detection head surface one end Equipped with vertical and horizontal focusing laser head, vertical and horizontal laser head side spiral of focusing is socketed with hot spot thickness and adjusts ring, and hot spot thickness adjusts ring Side annular is connected with radiating groove, adjusts the position of ring by adjusting vertical and horizontal focusing laser head and hot spot thickness, can control laser It thickness of the luminous point launched in detection faces and is radiated in detection faces irreflexive range size occurs, cooperation glass perspective Mirror uses, and improves permeability and the brightness of irradiation, convenient for detecting to different area size detection face, improves detection efficiency, Radiating groove radiates to laser detection head inside, reduces the temperature inside laser detection head, improves the use of laser detection head Service life, so that improves laser detection head continues working ability.
Detailed description of the invention
Fig. 1 be the utility model proposes a kind of flatness detecting device based on laser interference structural schematic diagram;
Fig. 2 be the utility model proposes a kind of flatness detecting device laser detection header structure based on laser interference show It is intended to;
Fig. 3 be the utility model proposes a kind of flatness detecting device horizontal measurement fluorescence based on laser interference steep knot Structure schematic diagram.
Marginal data:
1- horizontal measurement fluorescence bubble, 2- detector ontology, 3-45 ° of angular measurement fluorescence bubble, 4-360 ° of regulating ring, 5- power supply Line, 6- height adjusting handle, 7- telescopic rod, 8- supporting leg, 9- vertical measurement fluorescence bubble, 10- laser detection head, 11- radiating groove, 12- hot spot thickness adjusts ring, 13- and focuses anyhow laser head, 14- glass photoscope, 15- lock line, 16- lock tube, 17- rubbing head, 18- Bubble, 19- fixed frame, 20- horizontal line, 21- fluorescent liquid, 22- glass tube.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work Every other embodiment obtained, fall within the protection scope of the utility model.
It is in the description of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right", " perpendicular Directly ", the orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" is to be based on the orientation or positional relationship shown in the drawings, and is only For ease of description the utility model and simplify description, rather than the device or element of indication or suggestion meaning must have it is specific Orientation, be constructed and operated in a specific orientation, therefore should not be understood as limiting the present invention;Term " first ", " the Two ", " third " is used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance;In addition, unless otherwise specific Regulation and restriction, term " installation ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, be also possible to It is detachably connected, or is integrally connected;It can be mechanical connection, be also possible to be electrically connected;It can be directly connected, can also lead to It crosses intermediary to be indirectly connected, can be the connection inside two elements.It for the ordinary skill in the art, can be with Concrete condition understands the concrete meaning of above-mentioned term in the present invention.
Please refer to Fig. 1-3, a kind of flatness detecting device based on laser interference, including detector ontology 2 and horizontal survey Fluorescence bubble 1 is measured, fixed frame 19 is connected in the groove that 2 top surface of detector ontology opens up, and 19 internal clamp of fixed frame connects It is connected to horizontal measurement fluorescence bubble 1, horizontal measurement fluorescence steeps 1 surface and is socketed with glass tube 22, and 22 surface printing of glass tube has water Horizontal line 20 is equipped with fluorescent liquid 21 inside glass tube 22, and 21 top surface of fluorescent liquid is filled with bubble 18, horizontal measurement fluorescence bubble 1 Lower section, which is located at 2 side surface inserting of detector ontology, 45 ° of measurement fluorescence bubbles 3, and 45 ° of corresponding detector sheets of measurement fluorescence bubble 3 The 2 surface other side of body is inlaid with vertical measurement fluorescence bubble 9.
2 surface side of detector ontology is plugged with laser detection head 10, and 10 surface one of laser detection head by plug 17 End cap is connected to lock tube 16, and 16 interior surface spiral of lock tube is connected with lock line 15, and locks 15 side of line and be located at 10 table of laser detection head Face ring shape is socketed with radiating groove 11, and 11 one end interior surface of radiating groove is socketed with hot spot thickness and adjusts ring 12, and hot spot thickness tune Section 12 end surface spiral of ring is connected with vertical and horizontal focusing laser head 13, vertical and horizontal 13 surface side middle position of laser head bonding of focusing There is glass photoscope 14,2 bottom surface side of detector ontology is equipped with power supply line 5,2 bottom surface middle position of detector ontology Rotation is connected with 360 ° of regulating rings 4, and 360 ° of 4 surface sides of regulating ring are socketed with 6,360 ° of 4 bottoms of regulating ring of height adjusting handle Portion, middle position, surface is connected with telescopic rod 7, and 7 rear surface of telescopic rod is socketed with supporting leg 8, and horizontal measurement fluorescence steeps 1,45 ° Measurement fluorescence bubble 3 and vertical measurement fluorescence bubble 9 are disposed as cylindrical structure, and laser detection head 10 is set as cylindrical structure, And 10 surface of laser detection head is socketed with multiple radiating grooves 11, and multiple radiating grooves 11 are equally spaced, multiple radiating grooves 11 are one Body formula structure, 7 rear surface of telescopic rod are socketed with multiple supporting legs 8, and multiple supporting legs 8 are rounded is equally spaced, and 8 lower end of supporting leg is set It is set to conical structure.
Horizontal measurement fluorescence steeps 1,45 ° of measurement fluorescence bubble 3 and vertical measurement fluorescence steeps 9 surfaces and is socketed with glass tube 22, 22 surface both ends of glass tube are printed with horizontal line 20, laser detection head model SJ6000
Working principle: in use, the device to be placed on to the opposite of detection faces, powering on, which is equipped with three Supporting leg 8 is welded on 7 surface of telescopic rod at the top of supporting leg 8, can control the height of telescopic rod 7 by shaking height adjusting handle 6, It is detected convenient for the face to different height, 360 ° of tune 4 bottom surfaces of micro-loop, 360 ° of 4 tables of regulating ring is connected at the top of telescopic rod 7 Face side is socketed with height adjusting handle 6, by supporting leg 8,7,360 ° of regulating rings 4 of telescopic rod and height adjusting handle 6 convenient for inspection Survey instrument ontology 2 position and angle be adjusted, keep laser detection head 10 vertical with detection faces, improve adjustment speed, saving and Regulating time, improves working efficiency, and 2 surface of detector ontology is equipped with horizontal measurement fluorescence bubble 1,45° angle measurement fluorescence bubble 3 and hangs down Straight measurement fluorescence bubble 9 obstructs the liquid level of fluorescent liquid 21 and the parallel angle of horizontal line 20 by bubble 18 in observation glass tube 22, Keep laser detection head 10 vertical with detection faces, is used convenient for the device in varying environment, improve the use ability and tune of detector The accuracy of angle is saved, improves working efficiency, 10 surface side of laser detection head is bonded with glass photoscope 14, laser detection head 10 surfaces one end are equipped with vertical and horizontal focusing laser head 13, and vertical and horizontal 13 side spiral of laser head of focusing is socketed with hot spot thickness and adjusts ring 12, hot spot thickness adjusts 12 side annular of ring and is connected with radiating groove 11, by adjusting vertical and horizontal focusing laser head 13 and hot spot thickness The position of adjusting ring 12, thickness of the luminous point that can control Laser emission to go out in detection faces are overflow instead with generation in detection faces is radiated at The range size penetrated, cooperation glass photoscope 14 use, and improve permeability and the brightness of irradiation, convenient for examining to different area size Survey face is detected, and detection efficiency is improved, and radiating groove 11 reduces laser detection head 10 to radiating inside laser detection head 10 Internal temperature, improves the service life of laser detection head 10, to improve the ability that continues working of laser detection head 10, improves Working efficiency.
The preferable specific embodiment of the above, only the utility model, but the protection scope of the utility model is not It is confined to this, anyone skilled in the art is within the technical scope disclosed by the utility model, practical according to this Novel technical solution and its utility model design are subject to equivalent substitution or change, should all cover the protection model in the utility model Within enclosing.

Claims (6)

1. a kind of flatness detecting device based on laser interference, including detector ontology (2) and horizontal measurement fluorescence bubble (1), It is characterized in that, being connected with fixed frame (19) in the groove that detector ontology (2) top surface opens up, and fixed frame (19) Internal clamp is connected with horizontal measurement fluorescence bubble (1), and the horizontal measurement fluorescence bubble (1) surface is socketed with glass tube (22), and Glass tube (22) surface printing has horizontal line (20), fluorescent liquid (21) is housed inside the glass tube (22), and fluorescent liquid (21) Filled with bubble (18), horizontal measurement fluorescence bubble (1) lower section is located at detector ontology (2) side surface inserting to be had top surface 45 ° of measurement fluorescence steep (3), and corresponding detector ontology (2) the surface other side of 45 ° of measurement fluorescence bubbles (3) is inlaid with vertical measurement Fluorescence steeps (9).
2. a kind of flatness detecting device based on laser interference according to claim 1, which is characterized in that the detection Instrument ontology (2) surface side is plugged with laser detection head (10) by plug (17), and one end cap of laser detection head (10) surface It is connected to lock tube (16), lock tube (16) the interior surface spiral is connected with lock line (15), and locks line (15) side and be located at laser inspection Gauge head (10) surface annular is socketed with radiating groove (11), and described radiating groove (11) one end interior surface is socketed with the adjusting of hot spot thickness Ring (12), and hot spot thickness adjusts ring (12) end surface spiral and is connected with vertical and horizontal focusing laser head (13), the vertical and horizontal focusing Laser head (13) surface side middle position is bonded with glass photoscope (14).
3. a kind of flatness detecting device based on laser interference according to claim 1, which is characterized in that the detection Instrument ontology (2) bottom surface side is equipped with power supply line (5), detector ontology (2) the bottom surface middle position rotation connection There are 360 ° of regulating rings (4), and 360 ° of regulating ring (4) surface sides are socketed with height adjusting handle (6), 360 ° of regulating rings (4) bottom surface middle position is connected with telescopic rod (7), and telescopic rod (7) rear surface is socketed with supporting leg (8).
4. a kind of flatness detecting device based on laser interference according to claim 1, which is characterized in that the level Measurement fluorescence bubble (1), 45 ° of measurement fluorescence bubbles (3) and vertical measurement fluorescence bubble (9) are disposed as cylindrical structure.
5. a kind of flatness detecting device based on laser interference according to claim 2, which is characterized in that the laser Detector (10) is set as cylindrical structure, and laser detection head (10) surface is socketed with multiple radiating grooves (11), and multiple scattered Heat channel (11) is equally spaced, and the multiple radiating groove (11) is an integral structure.
6. a kind of flatness detecting device based on laser interference according to claim 3, which is characterized in that described flexible Bar (7) rear surface is socketed with multiple supporting legs (8), and multiple supporting legs (8) are rounded is equally spaced, and supporting leg (8) lower end is set It is set to conical structure.
CN201821660178.9U 2018-10-14 2018-10-14 A kind of flatness detecting device based on laser interference Active CN208671930U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201821660178.9U CN208671930U (en) 2018-10-14 2018-10-14 A kind of flatness detecting device based on laser interference

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201821660178.9U CN208671930U (en) 2018-10-14 2018-10-14 A kind of flatness detecting device based on laser interference

Publications (1)

Publication Number Publication Date
CN208671930U true CN208671930U (en) 2019-03-29

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201821660178.9U Active CN208671930U (en) 2018-10-14 2018-10-14 A kind of flatness detecting device based on laser interference

Country Status (1)

Country Link
CN (1) CN208671930U (en)

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