CN208642204U - Baking oven last row condenser - Google Patents
Baking oven last row condenser Download PDFInfo
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- CN208642204U CN208642204U CN201820962594.8U CN201820962594U CN208642204U CN 208642204 U CN208642204 U CN 208642204U CN 201820962594 U CN201820962594 U CN 201820962594U CN 208642204 U CN208642204 U CN 208642204U
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Abstract
The utility model relates to silicon wafer sintering technology fields, especially a kind of baking oven last row condenser, including the condensation cabinet with inner cavity, the exhaust pipe of baking oven is connected to the inner cavity in condensation cabinet, the gas outlet of exhaust pipe stretches in inner cavity, is equipped at intervals with several condenser pipes in inner cavity along the vertical direction；The top of condensation cabinet is equipped with the peripheral conduits being connected to inner cavity, the utility model baking oven last row condenser uses the inner cavity by the exhaust pipe of baking oven and condensation cabinet to connect, the gas for giving off baking oven imports in the inner cavity into condensation cabinet, to be exchanged heat using the cooling water in condenser pipe with gas, organic exhaust gas in gas is condensed into greasy dirt, the organic exhaust gas in gas that baking oven is discharged is purified in the condenser, purified gas enters peripheral conduits and is discharged, and greasy dirt made of condensing to the cold in peripheral conduits because of organic exhaust gas is reduced with this.
Description
Technical field
The utility model relates to silicon wafer sintering technology field, especially a kind of baking oven last row condenser.
Background technique
At present in the sintering process of silicon wafer, silicon wafer needs successively to pass through baking zone, sintering zone and the cooling of baking oven
Area, baking zone are usually the drying furnace chamber of one end supply hot wind other end connection combustion tower, and silicon wafer is when by baking zone, silicon wafer
Organic matter in upper electrocondution slurry is volatilized, and is dried the purpose for being passed through hot wind in furnace chamber and is to dry silicon wafer, and handle
The organic exhaust gas volatilized in electrocondution slurry on silicon wafer is carried to burn into combustion tower；However in baking oven baking zone it is organic
Peripheral conduits of the exhaust emission pipe needs Jing Guo very long range get to combustion tower and burn, in the process organic waste
Gas, which is easy to condense on pipeline to the cold, forms greasy dirt, and when the greasy dirt arrival condensed on pipeline is a certain amount of, greasy dirt can be along pipeline
Baking oven is flowed back to, is flowed back under the greasy dirt worst hot case of baking oven, burned, generation fire, it is therefore desirable to which staff is periodically clear is easy
The greasy dirt for managing peripheral conduits, leads to heavy workload, time-consuming and laborious, while improving human cost indirectly.
Utility model content
Technical problem to be solved by the utility model is: in order to solve the organic exhaust gas of baking oven discharge in the prior art to the cold
It is easy to condense into greasy dirt on pipeline, when the greasy dirt condensed on pipeline is easy to be back to baking oven when measuring, causes fire more, because
This, needs the greasy dirt of staff's periodic cleaning peripheral conduits, and peripheral conduits are difficult to clean up at regular intervals, leads to work
Person works measure big problem, now provide a kind of baking oven last row condenser.
The technical scheme adopted by the utility model to solve the technical problem is as follows: a kind of baking oven last row condenser, including tool
There is the condensation cabinet of inner cavity, the exhaust pipe of the baking oven is connected to the inner cavity in condensation cabinet, the outlet of the exhaust pipe
Mouth stretches in inner cavity, is equipped at intervals with several condenser pipes in the inner cavity along the vertical direction；
Each condenser pipe includes several straight pipes being spaced apart, and two neighboring straight pipe is first in same condenser pipe
Tail connects, and the two sides of the condensation cabinet are respectively arranged with water inlet pipe and outlet pipe, and the water inlet of each condenser pipe is and water inlet pipe
Connection, the water outlet of each condenser pipe is connected to outlet pipe, and all condenser pipes are respectively positioned on the upper of gas outlet on exhaust pipe
Side；
The top of the condensation cabinet is equipped with the peripheral conduits being connected to inner cavity, and it is enterprising that all condenser pipes are respectively positioned on peripheral conduits
The lower section of port；
The bottom of the inner cavity is equipped with recycling box, and the collection bucket of both ends open is fixed on the inner wall of the inner cavity, described
The inner wall of collection bucket from top to bottom slopes inwardly, and the collection bucket is located at the top of recycling box, the air inlet of the exhaust pipe
Mouth is located at the top of collection bucket.
It is connected in this programme using by the inner cavity of the exhaust pipe of baking oven and condensation cabinet, the gas for giving off baking oven is led
Entering into the inner cavity of condensation cabinet, gas is understood before being upwardly into peripheral conduits successively by the condenser pipe in inner cavity, thus
It is exchanged heat using the cooling water in condenser pipe with gas, the organic exhaust gas in gas is made to be condensed into greasy dirt, and greasy dirt is at itself
Weight power drops into the recycling box of intracavity bottom, so that the organic exhaust gas in the gas that baking oven is discharged is in the condenser
It is purified, purified gas enters peripheral conduits and is discharged, and is reduced in peripheral conduits because of organic exhaust gas to the cold with this
Greasy dirt made of condensation also avoids in peripheral conduits to reduce staff to the maintenance workload of peripheral conduits because of oil
Dirty risk that is excessive and flowing back to baking oven generation fire, while realizing and effective place has been carried out to the organic exhaust gas that baking oven gives off
Reason avoids being directly discharged to problem of environmental pollution that is extraneous and generating.
In order to improve the condensation effect to organic exhaust gas in gas, further, it is intervally distributed in the inner cavity several
Layer partition, the partition and condenser pipe correspond, and the condenser pipe is fixed on corresponding partition, adjacent two layers partition
Between form condensation chamber, position where the partition is located at the straight pipe of condenser pipe offers several through-holes, two neighboring cold
It is connected between solidifying chamber by the through-hole on partition.
The beneficial effects of the utility model are: the utility model baking oven last row condenser is used the exhaust pipe of baking oven
It is connected with the inner cavity of condensation cabinet, the gas for giving off baking oven imports in the inner cavity into condensation cabinet, thus using in condenser pipe
Cooling water exchanges heat with gas, and the organic exhaust gas in gas is condensed into greasy dirt, organic in the gas that baking oven is discharged
Exhaust gas is purified in the condenser, and purified gas enters peripheral conduits and is discharged, and reduces peripheral conduits with this
On condensed to the cold because of organic exhaust gas made of greasy dirt also avoided to reduce staff to the maintenance workload of peripheral conduits
It flows back to baking oven because greasy dirt is excessive in peripheral conduits the risk of fire occurs, while realizing the organic waste given off to baking oven
Gas has carried out effective processing, avoids being directly discharged to problem of environmental pollution that is extraneous and generating.
Detailed description of the invention
The present invention will be further described with reference to the accompanying drawings and examples.
Fig. 1 is the schematic diagram of the utility model baking oven last row condenser；
Fig. 2 is the partial enlargement diagram of A in Fig. 1；
Fig. 3 is the schematic diagram of condenser pipe in the utility model baking oven last row condenser；
Fig. 4 is the schematic diagram of partition in the utility model baking oven last row condenser；
Fig. 5 is the cooperation schematic diagram of condenser pipe and partition in the utility model baking oven last row condenser.
In figure: 1, condensation cabinet, 1-1, inner cavity, 1-11, condensation chamber, 2, baking oven, 3, exhaust pipe, 4, condenser pipe, 4-1,
Straight pipe, 5, peripheral conduits, 6, recycling box, 7, collection bucket, 8, partition, 8-1, through-hole, 9, water inlet pipe, 10, outlet pipe, 11, combustion
Burn tower.
Specific embodiment
The utility model is described in further detail presently in connection with attached drawing.These attached drawings are simplified schematic diagram,
Only illustrate the basic structure of the utility model in a schematic way, therefore it only shows composition related with the utility model, direction
It can be only used for helping the description to the feature in attached drawing with referring to (for example, upper and lower, left and right, etc.).Therefore, it is not limiting
Following specific embodiments are used in property meaning processed, and are only requested by appended claims and its equivalent form to limit
The range of the theme of protection.
Embodiment 1
As shown in Figs. 1-5, a kind of baking oven last row condenser, including the condensation cabinet 1 with inner cavity 1-1, the baking oven 2 gives up
Gas delivery pipe 3 is connected to the inner cavity 1-1 in condensation cabinet 1, and the gas outlet of the exhaust pipe 3 stretches in the 1-1 of inner cavity, described
Several condenser pipes 4 are equipped at intervals in the 1-1 of inner cavity along the vertical direction；
Each condenser pipe 4 includes several straight pipe 4-1 being spaced apart, two neighboring straight in same condenser pipe 4
Pipeline section 4-1 is end to end, and the two sides of the condensation cabinet 1 are respectively arranged with water inlet pipe 9 and outlet pipe 10, each condenser pipe 4 into
The mouth of a river is connected to water inlet pipe 9, and the water outlet of each condenser pipe 4 is connected to outlet pipe 10, and all condenser pipes 4 are respectively positioned on exhaust gas
The top of gas outlet on delivery pipe 3；
The top of the condensation cabinet 1 is equipped with the peripheral conduits 5 being connected to inner cavity 1-1, and all condenser pipes 4 are respectively positioned on peripheral tube
The lower section of the enterprising port in road 5；
The bottom of the inner cavity 1-1 is equipped with recycling box 6, and the collection of both ends open is fixed on the inner wall of the inner cavity 1-1
Bucket 7, the inner wall of the collection bucket 7 from top to bottom slopes inwardly, and the collection bucket 7 is located at the top of recycling box 6, the exhaust gas row
The air inlet for putting pipe 3 is located at the top of collection bucket 7.
Several layers partition 8 is intervally distributed in the inner cavity 1-1, the partition 8 is corresponded with condenser pipe 4, described cold
Solidifying pipe 4 is fixed on corresponding partition 8, and condensation chamber 1-11 is formed between adjacent two layers partition 8, and the partition 8 is located at cold
Position where the straight pipe 4-1 of solidifying pipe 4 offers several through-hole 8-1, passes through on partition 8 between two neighboring condensation chamber 1-11
Through-hole 8-1 connection, the purpose that partition 8 is arranged, which essentially consists in, to be improved to the condensation effect of organic exhaust gas, on the one hand due to condensation
Pipe 4 is arranged on partition 8, therefore the cooling capacity on condenser pipe 4 can pass to partition 8, can also produce when organic exhaust gas encounters partition 8
Raw food is solidifying, to improve the area that organic exhaust gas coagulates；On the other hand only pass through between two neighboring condensation chamber 1-11
Through-hole 8-1 connection on partition 8, and through-hole 8-1 is opposite with the straight pipe 4-1 of condenser pipe 4, that is to say, that underlying condensation
Gas in chamber 1-11 must can be just entered from the through-hole 8-1 on partition 8 in the condensation chamber 1-11 of top, therefore can be realized cold
All gas in solidifying chamber 1-11 must be all by the straight pipe 4-1 of condenser pipe 4, it is evident that gas can be greatly improved
With the contact probability of condenser pipe 4, to improve the condensation effect to organic exhaust gas.
The working principle of above-mentioned baking oven last row condenser is as follows:
Cooling water is pumped into water inlet pipe 9 using water pump, and cooling water is distributed into each condenser pipe 4 by water inlet pipe 9, it is each
Cooling water in condenser pipe 4 all flows to outlet pipe 10, then flows out from outlet pipe 10；
The gas that baking oven 2 gives off is imported using exhaust pipe 3 into the inner cavity 1-1 of condensation cabinet 1, and gas is in Xiang Shangjin
Enter to before peripheral conduits 5, it can be successively by the condenser pipe 4 in the 1-1 of inner cavity, to utilize cooling water and gas in condenser pipe 4
Body exchanges heat, and the organic exhaust gas in gas is made to be condensed into greasy dirt, and greasy dirt drops into collection bucket 7 in own wt power, and
Through importing from collection bucket 7 into recycling box 6, so that the organic exhaust gas in the gas that baking oven 2 is discharged obtains in the condenser
To purification, purified gas enters peripheral conduits 5 and carries out being expelled to combustion tower 11, using combustion tower 1 by its in gas
He carries out burning disposal by substance.
The above-mentioned desirable embodiment according to the utility model is enlightenment, through the above description, relevant staff
Completely various changes and amendments can be carried out in the range of without departing from this item utility model technical idea.This item is practical
Novel technical scope is not limited to the contents of the specification, it is necessary to determine that its is technical according to scope of the claims
Range.
Claims (2)
1. a kind of baking oven last row condenser, it is characterised in that: including the condensation cabinet (1) with inner cavity (1-1), the baking oven (2)
Exhaust pipe (3) be connected to the inner cavity (1-1) in condensation cabinet (1), the gas outlet of the exhaust pipe (3) stretches to interior
In chamber (1-1), it is equipped at intervals with several condenser pipes (4) along the vertical direction in the inner cavity (1-1)；
Each condenser pipe (4) includes several straight pipes (4-1) being spaced apart, two neighboring in same condenser pipe (4)
Straight pipe (4-1) is end to end, and the two sides of condensation cabinet (1) are respectively arranged with water inlet pipe (9) and outlet pipe (10), Mei Geleng
The water inlet of solidifying pipe (4) is connected to water inlet pipe (9), and the water outlet of each condenser pipe (4) is connected to outlet pipe (10), is owned
Condenser pipe (4) is respectively positioned on the top of gas outlet on exhaust pipe (3)；
The top of condensation cabinet (1) is equipped with the peripheral conduits (5) being connected to inner cavity (1-1), and all condenser pipes (4) are respectively positioned on outer
The lower section of bustle pipe road (5) enterprising port；
The bottom of the inner cavity (1-1) is equipped with recycling box (6), and the receipts of both ends open are fixed on the inner wall of the inner cavity (1-1)
Collection bucket (7), the inner wall of the collection bucket (7) from top to bottom slope inwardly, and the collection bucket (7) is located at the top of recycling box (6),
The air inlet of the exhaust pipe (3) is located at the top of collection bucket (7).
2. baking oven last row condenser according to claim 1, it is characterised in that: be intervally distributed in the inner cavity (1-1)
Several layers partition (8), the partition (8) and condenser pipe (4) correspond, the condenser pipe (4) be fixed on it is corresponding every
On plate (8), condensation chamber (1-11) is formed between adjacent two layers partition (8), the partition (8) is located at the straight pipe of condenser pipe (4)
Position where (4-1) offers several through-holes (8-1), by logical on partition (8) between two neighboring condensation chamber (1-11)
Hole (8-1) connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820962594.8U CN208642204U (en) | 2018-06-20 | 2018-06-20 | Baking oven last row condenser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820962594.8U CN208642204U (en) | 2018-06-20 | 2018-06-20 | Baking oven last row condenser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208642204U true CN208642204U (en) | 2019-03-26 |
Family
ID=65781740
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820962594.8U Active CN208642204U (en) | 2018-06-20 | 2018-06-20 | Baking oven last row condenser |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208642204U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111631658A (en) * | 2020-05-28 | 2020-09-08 | 珠海格力电器股份有限公司 | Dish washing machine |
-
2018
- 2018-06-20 CN CN201820962594.8U patent/CN208642204U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111631658A (en) * | 2020-05-28 | 2020-09-08 | 珠海格力电器股份有限公司 | Dish washing machine |
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