A kind of cold-trap device
Technical field
The utility model relates to production of polysilicon detection technique fields, and in particular to a kind of temperature controllable for gas detection
Cold-trap device.
Background technique
In production of polysilicon, in tail gas the number of impurity directly represent whole system it is clean whether, work as impurity content
When reaching a certain higher range, the quality of whole system and subsequent product can be seriously affected.But certain impurity are nearly all
Ultra trace grade, reach that ppb range is even lower, this makes testing conditions become harsher.For this problem, existing side
Method is that first foreign gas is concentrated by enrichment, to increase content convenient for detection.Cold-trap is needed to fill when being enriched with concentration
It sets and condenses out gas, but existing cold-trap device volume is larger, inconvenient, cool down equal factors slowly.
Utility model content
The technical problems to be solved in the utility model be for disadvantage of the existing technology, provide a kind of structure it is simple,
It is easy to operate, small in size, cooling rate is fast, stability is preferable, for the temperature adjustable cold trap device of gas detection.
In order to solve the above technical problems, the utility model adopts the following technical solution: a kind of cold-trap device includes cold-trap
Pond, condenser pipe, liquid nitrogen organization of supply, temperature sensor and temperature display and control system, temperature sensor are mounted on condenser pipe
On for measuring the temperature in cold-trap pond and being transmitted to temperature display and control system, condenser pipe is corresponding with cold-trap pond, liquid nitrogen
Organization of supply connects cold-trap pond, it is characterised in that: the condenser pipe is mounted on an adjutage, and adjutage is mounted on a lift valve
On, lift valve is mounted on a upright track, and lift valve is connected with motor and is formed and goes up and down driving structure, track installation to it
Beside cold-trap pond, condenser pipe is suspended from above cold-trap pond;The both ends of condenser pipe are separately installed with condenser pipe gas vent valve and cold
Solidifying pipe gas inlet valve, the two are separately connected temperature display and control system, and the different temperatures needed when according to detection can be realized
Automatic controlled height.
Further, cold-trap pond is double-layer structure, includes liner and outer gallbladder, outer gallbladder is wrapped in the periphery of liner, inside
It is equipped with the float valve for monitoring liquid level in gallbladder, and is filled with heat-preservation cotton between wall and outer gallbladder outside the tank;Liquid nitrogen organization of supply connects
It passes in the liner in cold-trap pond and automatic addition is realized according to level condition in liner.
Further, the liquid nitrogen organization of supply includes a liquid nitrogen bucket, is arranged on the conduit that liquid nitrogen bucket is connect with cold-trap pond
There are solenoid valve and valve, solenoid valve is located at liquid nitrogen bucket side, and valve is located at cold-trap pond side, by fast between solenoid valve and valve
Connector connection;And the locking closure and pressure relief opening being provided on liquid nitrogen bucket dedicated for cryogenic liquid sampling.
Further, in the iron ring that is fixedly arranged at the front end with of adjutage, tetrafluoro washer is equipped among iron ring, among tetrafluoro washer
The eye for being 6mm with a diameter, the eye being provided on the side wall of tetrafluoro washer one side inside a straight-through circle, on the side wall of another side together with
Iron ring is equipped with the hole of a 3mm together, and the two is fixed together with the eye that screw passes through iron ring and tetrafluoro washer side wall, is being used
When the end of condenser pipe is filled in the eye among tetrafluoro washer, with the screw on tetrafluoro washer side wall by condenser pipe and phenyl tetrafluoride pad
Circle is fixed together.
Further, the condenser pipe uses diameter to be made of polishing pipe in the stainless steel of 6mm, and the length is 70cm, shapes
Shape is round coil or U-shaped, and the filler for adsorbing contaminant is filled in pipe.
Further, the temperature sensor uses indication range for -200 DEG C to+200 DEG C of electric thermo-couple temperature, temperature
Sensor is fixed on condensation tube wall, and lower end is generally aligned in the same plane with condenser pipe.
Preferably, the cold-trap pond, track and liquid nitrogen bucket are each attached on a bottom plate.
Further, it is provided with a fixinig plate in orbit, fixinig plate docks the fixation to be formed to lift valve with lift valve
Mechanism.
When needing to carry out gas enrichment detection, valve and solenoid valve are opened, liquid nitrogen is automatically added to, when float valve reaches setting
Height when solenoid valve be automatically closed, automatically turn on solenoid valve when liquid nitrogen liquid level is lower than float valve position, liquid nitrogen be added.It opens and rises
It drops valve to place condenser pipe in cold-trap pond, opens the power switch of temperature sensor, temperature display and control system are shown currently
Temperature in cold-trap pond, when temperature reaches the temperature for needing gas enrichment detection, connection sample opens condenser pipe gas vent valve
With condenser pipe gas inlet valve, it is enriched with.The temperature needed simultaneously when control system sets and is enriched with, when temperature display is too low
Or system feedback signal is controlled when excessively high, lift valve automatic fine tuning is raised and lowered, until stablizing to required temperature, when having detected
The fixed lift valve of Bi Houyong fixinig plate and motor.
The utility model passes through the cold-trap pond of external and internal compositions, track, lift valve, motor, adjutage, condenser pipe, liquid nitrogen bucket
Etc. mechanisms mutual cooperation, can quickly, efficiently, stably accomplish gas sensing operation, have it is easy to operate, small in size, drop
Warm speed is fast, can quickly adjust the advantages that required temperature, stability are good.
Detailed description of the invention
FIG. 1 is a schematic structural view of the utility model.
In figure, 1 is liner, and 2 be heat-preservation cotton, and 3 be float valve, and 4 be inner bladder outer wall, and 5 be outer gallbladder, and 6 be bottom plate, and 7 be track, 8
It is motor for fixinig plate, 9,10 be lift valve, and 11 be adjutage, and 12 be condenser pipe gas vent valve, and 13 be temperature display and control
System processed, 14 be condenser pipe gas inlet valve, and 15 be condenser pipe, and 16 be temperature sensor, and 17 be liquid nitrogen bucket, and 18 be solenoid valve,
19 be fast joint, and 20 be valve.
Specific embodiment
In the present embodiment, referring to Fig.1, the cold-trap device includes cold-trap pond, condenser pipe 15, liquid nitrogen organization of supply, temperature
Sensor 16 and temperature display and control system 13 are spent, temperature sensor 16 is mounted on condenser pipe 15 for measuring in cold-trap pond
Temperature and be transmitted to temperature display and control system 13, condenser pipe 15 is corresponding with cold-trap pond, liquid nitrogen organization of supply connection it is cold
Trap pond;The condenser pipe 15 is mounted on an adjutage 11, and adjutage 11 is mounted on a lift valve 10, and lift valve 10 is mounted on
On one upright track 7, and lift valve 10 is connected with the formation of motor 9 and goes up and down driving structure to it, and track 7 is mounted on by cold-trap pond
Side, condenser pipe 15 are suspended from above cold-trap pond;The both ends of condenser pipe 15 are separately installed with condenser pipe gas vent valve 12 and condenser pipe
Gas inlet valve 14, the two are separately connected temperature display and control system 13, and the different temperatures needed when according to detection can be realized
Automatic controlled height.
Cold-trap pond is double-layer structure, includes liner 1 and outer gallbladder 5, and outer gallbladder 5 is wrapped in 1 periphery of liner, sets in liner 1
There is the float valve 3 for monitoring liquid level, and is filled with heat-preservation cotton 2 between wall 4 and outer gallbladder 5 outside the tank;The connection of liquid nitrogen organization of supply
Automatic addition is realized according to level condition in liner into the liner 1 in cold-trap pond.
Liquid nitrogen organization of supply includes liquid nitrogen bucket 17, be provided on the conduit that liquid nitrogen bucket 17 is connect with cold-trap pond solenoid valve 18 and
Valve 20, solenoid valve 18 are located at 17 side of liquid nitrogen bucket, and valve 20 is located at cold-trap pond side, passes through between solenoid valve 18 and valve 20
Fast joint 19 connects;And the locking closure and pressure relief opening being provided on liquid nitrogen bucket 17 dedicated for cryogenic liquid sampling.Cold-trap pond, track
7 are each attached on a bottom plate 6 with liquid nitrogen bucket 17.
It is equipped with tetrafluoro washer among the iron ring that is fixedly arranged at the front end with of adjutage 11, iron ring, has one among tetrafluoro washer
Diameter is the eye of 6mm, the eye being provided with inside a straight-through circle on the side wall of tetrafluoro washer one side, together with iron ring one on the side wall of another side
The hole equipped with a 3mm is played, the two is fixed together with the eye that screw passes through iron ring and tetrafluoro washer side wall, it when in use will be cold
The end of solidifying pipe 15 is filled in the eye among tetrafluoro washer, with the screw on tetrafluoro washer side wall by condenser pipe 15 and tetrafluoro washer
It is fixed together.
The condenser pipe 15 uses diameter to be made of polishing pipe in the stainless steel of 6mm, and the length is 70cm, shape is circle
Coil pipe (or U-shaped) is filled with the filler for adsorbing contaminant in pipe.
The temperature sensor 16 uses indication range for -200 DEG C to+200 DEG C of electric thermo-couple temperature, temperature sensor 16
It is fixed on the tube wall of condenser pipe 15, lower end is generally aligned in the same plane with condenser pipe 15.
A fixinig plate 8 is provided on track 7, fixinig plate 8 docks the fixation machine formed to lift valve 10 with lift valve 10
Structure.
When needing to carry out gas enrichment detection, valve 20 is opened, and open solenoid valve 18 manually, is automatically added to liquid nitrogen,
When float valve 3 reaches the height of setting, solenoid valve 18 is automatically closed, and automatically turns on electromagnetism when liquid nitrogen liquid level is lower than 3 position of float valve
Liquid nitrogen is added in valve 18.Opening motor 9 drives lift valve 10 to place condenser pipe 15 in cold-trap pond, opens temperature sensor 16
Power switch, temperature display and control system 13 show the temperature in current cold-trap pond, need gas enrichment inspection when temperature reaches
Sample is connected when the temperature of survey and opens condenser pipe gas vent valve 12 and condenser pipe gas inlet valve 14, is enriched with.Exist simultaneously
The temperature needed when control system setting enrichment, system feedback signal, lift valve 10 are controlled when temperature display is too low or excessively high
Automatic fine tuning is raised and lowered, until stablizing to required temperature, with the fixed lift valve 10 of fixinig plate 8 and motor after detection
9。
The utility model is described in detail above, it is described above, only the preferred embodiment of the utility model and
, when the utility model practical range cannot be limited, i.e., all according to the made equivalent changes and modifications of the application range, it should still belong to this
In utility model covering scope.