CN208641824U - A kind of cold-trap device - Google Patents

A kind of cold-trap device Download PDF

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Publication number
CN208641824U
CN208641824U CN201821115521.1U CN201821115521U CN208641824U CN 208641824 U CN208641824 U CN 208641824U CN 201821115521 U CN201821115521 U CN 201821115521U CN 208641824 U CN208641824 U CN 208641824U
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China
Prior art keywords
cold
condenser pipe
trap
valve
liquid nitrogen
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CN201821115521.1U
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Chinese (zh)
Inventor
安军林
曹岩德
征取
蔡延国
王海礼
魏东亮
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Qinghai Asia Silicon Silicon Material Engineering Technology Co Ltd
Asia Silicon Qinghai Co Ltd
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Qinghai Asia Silicon Silicon Material Engineering Technology Co Ltd
Asia Silicon Qinghai Co Ltd
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Priority to CN201821115521.1U priority Critical patent/CN208641824U/en
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  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)

Abstract

The utility model discloses a kind of cold-trap devices, it include cold-trap pond, condenser pipe, liquid nitrogen organization of supply, temperature sensor and temperature display and control system, temperature sensor is mounted on condenser pipe to be connected with temperature display and control system, condenser pipe is corresponding with cold-trap pond, and liquid nitrogen organization of supply connects cold-trap pond;Condenser pipe is mounted on adjutage, adjutage is mounted on lift valve, lift valve installation is in orbit, lift valve, which is connected with motor and is formed, goes up and down driving structure to it, the both ends of condenser pipe are separately installed with condenser pipe gas vent valve and condenser pipe gas inlet valve, and the two is separately connected temperature display and control system.The mutual cooperation that the utility model passes through the mechanisms such as cold-trap pond, track, lift valve, motor, adjutage, condenser pipe, liquid nitrogen bucket, temperature display and the control system of external and internal compositions, can quickly, efficiently, stably accomplish gas sensing operation, have many advantages, such as that easy to operate, small in size, quickly adjusting required temperature, stability is good.

Description

A kind of cold-trap device
Technical field
The utility model relates to production of polysilicon detection technique fields, and in particular to a kind of temperature controllable for gas detection Cold-trap device.
Background technique
In production of polysilicon, in tail gas the number of impurity directly represent whole system it is clean whether, work as impurity content When reaching a certain higher range, the quality of whole system and subsequent product can be seriously affected.But certain impurity are nearly all Ultra trace grade, reach that ppb range is even lower, this makes testing conditions become harsher.For this problem, existing side Method is that first foreign gas is concentrated by enrichment, to increase content convenient for detection.Cold-trap is needed to fill when being enriched with concentration It sets and condenses out gas, but existing cold-trap device volume is larger, inconvenient, cool down equal factors slowly.
Utility model content
The technical problems to be solved in the utility model be for disadvantage of the existing technology, provide a kind of structure it is simple, It is easy to operate, small in size, cooling rate is fast, stability is preferable, for the temperature adjustable cold trap device of gas detection.
In order to solve the above technical problems, the utility model adopts the following technical solution: a kind of cold-trap device includes cold-trap Pond, condenser pipe, liquid nitrogen organization of supply, temperature sensor and temperature display and control system, temperature sensor are mounted on condenser pipe On for measuring the temperature in cold-trap pond and being transmitted to temperature display and control system, condenser pipe is corresponding with cold-trap pond, liquid nitrogen Organization of supply connects cold-trap pond, it is characterised in that: the condenser pipe is mounted on an adjutage, and adjutage is mounted on a lift valve On, lift valve is mounted on a upright track, and lift valve is connected with motor and is formed and goes up and down driving structure, track installation to it Beside cold-trap pond, condenser pipe is suspended from above cold-trap pond;The both ends of condenser pipe are separately installed with condenser pipe gas vent valve and cold Solidifying pipe gas inlet valve, the two are separately connected temperature display and control system, and the different temperatures needed when according to detection can be realized Automatic controlled height.
Further, cold-trap pond is double-layer structure, includes liner and outer gallbladder, outer gallbladder is wrapped in the periphery of liner, inside It is equipped with the float valve for monitoring liquid level in gallbladder, and is filled with heat-preservation cotton between wall and outer gallbladder outside the tank;Liquid nitrogen organization of supply connects It passes in the liner in cold-trap pond and automatic addition is realized according to level condition in liner.
Further, the liquid nitrogen organization of supply includes a liquid nitrogen bucket, is arranged on the conduit that liquid nitrogen bucket is connect with cold-trap pond There are solenoid valve and valve, solenoid valve is located at liquid nitrogen bucket side, and valve is located at cold-trap pond side, by fast between solenoid valve and valve Connector connection;And the locking closure and pressure relief opening being provided on liquid nitrogen bucket dedicated for cryogenic liquid sampling.
Further, in the iron ring that is fixedly arranged at the front end with of adjutage, tetrafluoro washer is equipped among iron ring, among tetrafluoro washer The eye for being 6mm with a diameter, the eye being provided on the side wall of tetrafluoro washer one side inside a straight-through circle, on the side wall of another side together with Iron ring is equipped with the hole of a 3mm together, and the two is fixed together with the eye that screw passes through iron ring and tetrafluoro washer side wall, is being used When the end of condenser pipe is filled in the eye among tetrafluoro washer, with the screw on tetrafluoro washer side wall by condenser pipe and phenyl tetrafluoride pad Circle is fixed together.
Further, the condenser pipe uses diameter to be made of polishing pipe in the stainless steel of 6mm, and the length is 70cm, shapes Shape is round coil or U-shaped, and the filler for adsorbing contaminant is filled in pipe.
Further, the temperature sensor uses indication range for -200 DEG C to+200 DEG C of electric thermo-couple temperature, temperature Sensor is fixed on condensation tube wall, and lower end is generally aligned in the same plane with condenser pipe.
Preferably, the cold-trap pond, track and liquid nitrogen bucket are each attached on a bottom plate.
Further, it is provided with a fixinig plate in orbit, fixinig plate docks the fixation to be formed to lift valve with lift valve Mechanism.
When needing to carry out gas enrichment detection, valve and solenoid valve are opened, liquid nitrogen is automatically added to, when float valve reaches setting Height when solenoid valve be automatically closed, automatically turn on solenoid valve when liquid nitrogen liquid level is lower than float valve position, liquid nitrogen be added.It opens and rises It drops valve to place condenser pipe in cold-trap pond, opens the power switch of temperature sensor, temperature display and control system are shown currently Temperature in cold-trap pond, when temperature reaches the temperature for needing gas enrichment detection, connection sample opens condenser pipe gas vent valve With condenser pipe gas inlet valve, it is enriched with.The temperature needed simultaneously when control system sets and is enriched with, when temperature display is too low Or system feedback signal is controlled when excessively high, lift valve automatic fine tuning is raised and lowered, until stablizing to required temperature, when having detected The fixed lift valve of Bi Houyong fixinig plate and motor.
The utility model passes through the cold-trap pond of external and internal compositions, track, lift valve, motor, adjutage, condenser pipe, liquid nitrogen bucket Etc. mechanisms mutual cooperation, can quickly, efficiently, stably accomplish gas sensing operation, have it is easy to operate, small in size, drop Warm speed is fast, can quickly adjust the advantages that required temperature, stability are good.
Detailed description of the invention
FIG. 1 is a schematic structural view of the utility model.
In figure, 1 is liner, and 2 be heat-preservation cotton, and 3 be float valve, and 4 be inner bladder outer wall, and 5 be outer gallbladder, and 6 be bottom plate, and 7 be track, 8 It is motor for fixinig plate, 9,10 be lift valve, and 11 be adjutage, and 12 be condenser pipe gas vent valve, and 13 be temperature display and control System processed, 14 be condenser pipe gas inlet valve, and 15 be condenser pipe, and 16 be temperature sensor, and 17 be liquid nitrogen bucket, and 18 be solenoid valve, 19 be fast joint, and 20 be valve.
Specific embodiment
In the present embodiment, referring to Fig.1, the cold-trap device includes cold-trap pond, condenser pipe 15, liquid nitrogen organization of supply, temperature Sensor 16 and temperature display and control system 13 are spent, temperature sensor 16 is mounted on condenser pipe 15 for measuring in cold-trap pond Temperature and be transmitted to temperature display and control system 13, condenser pipe 15 is corresponding with cold-trap pond, liquid nitrogen organization of supply connection it is cold Trap pond;The condenser pipe 15 is mounted on an adjutage 11, and adjutage 11 is mounted on a lift valve 10, and lift valve 10 is mounted on On one upright track 7, and lift valve 10 is connected with the formation of motor 9 and goes up and down driving structure to it, and track 7 is mounted on by cold-trap pond Side, condenser pipe 15 are suspended from above cold-trap pond;The both ends of condenser pipe 15 are separately installed with condenser pipe gas vent valve 12 and condenser pipe Gas inlet valve 14, the two are separately connected temperature display and control system 13, and the different temperatures needed when according to detection can be realized Automatic controlled height.
Cold-trap pond is double-layer structure, includes liner 1 and outer gallbladder 5, and outer gallbladder 5 is wrapped in 1 periphery of liner, sets in liner 1 There is the float valve 3 for monitoring liquid level, and is filled with heat-preservation cotton 2 between wall 4 and outer gallbladder 5 outside the tank;The connection of liquid nitrogen organization of supply Automatic addition is realized according to level condition in liner into the liner 1 in cold-trap pond.
Liquid nitrogen organization of supply includes liquid nitrogen bucket 17, be provided on the conduit that liquid nitrogen bucket 17 is connect with cold-trap pond solenoid valve 18 and Valve 20, solenoid valve 18 are located at 17 side of liquid nitrogen bucket, and valve 20 is located at cold-trap pond side, passes through between solenoid valve 18 and valve 20 Fast joint 19 connects;And the locking closure and pressure relief opening being provided on liquid nitrogen bucket 17 dedicated for cryogenic liquid sampling.Cold-trap pond, track 7 are each attached on a bottom plate 6 with liquid nitrogen bucket 17.
It is equipped with tetrafluoro washer among the iron ring that is fixedly arranged at the front end with of adjutage 11, iron ring, has one among tetrafluoro washer Diameter is the eye of 6mm, the eye being provided with inside a straight-through circle on the side wall of tetrafluoro washer one side, together with iron ring one on the side wall of another side The hole equipped with a 3mm is played, the two is fixed together with the eye that screw passes through iron ring and tetrafluoro washer side wall, it when in use will be cold The end of solidifying pipe 15 is filled in the eye among tetrafluoro washer, with the screw on tetrafluoro washer side wall by condenser pipe 15 and tetrafluoro washer It is fixed together.
The condenser pipe 15 uses diameter to be made of polishing pipe in the stainless steel of 6mm, and the length is 70cm, shape is circle Coil pipe (or U-shaped) is filled with the filler for adsorbing contaminant in pipe.
The temperature sensor 16 uses indication range for -200 DEG C to+200 DEG C of electric thermo-couple temperature, temperature sensor 16 It is fixed on the tube wall of condenser pipe 15, lower end is generally aligned in the same plane with condenser pipe 15.
A fixinig plate 8 is provided on track 7, fixinig plate 8 docks the fixation machine formed to lift valve 10 with lift valve 10 Structure.
When needing to carry out gas enrichment detection, valve 20 is opened, and open solenoid valve 18 manually, is automatically added to liquid nitrogen, When float valve 3 reaches the height of setting, solenoid valve 18 is automatically closed, and automatically turns on electromagnetism when liquid nitrogen liquid level is lower than 3 position of float valve Liquid nitrogen is added in valve 18.Opening motor 9 drives lift valve 10 to place condenser pipe 15 in cold-trap pond, opens temperature sensor 16 Power switch, temperature display and control system 13 show the temperature in current cold-trap pond, need gas enrichment inspection when temperature reaches Sample is connected when the temperature of survey and opens condenser pipe gas vent valve 12 and condenser pipe gas inlet valve 14, is enriched with.Exist simultaneously The temperature needed when control system setting enrichment, system feedback signal, lift valve 10 are controlled when temperature display is too low or excessively high Automatic fine tuning is raised and lowered, until stablizing to required temperature, with the fixed lift valve 10 of fixinig plate 8 and motor after detection 9。
The utility model is described in detail above, it is described above, only the preferred embodiment of the utility model and , when the utility model practical range cannot be limited, i.e., all according to the made equivalent changes and modifications of the application range, it should still belong to this In utility model covering scope.

Claims (8)

1. a kind of cold-trap device includes cold-trap pond, condenser pipe, liquid nitrogen organization of supply, temperature sensor and temperature display and control System processed, temperature sensor are mounted on condenser pipe for measuring the temperature in cold-trap pond and being transmitted to temperature display and control system System, condenser pipe is corresponding with cold-trap pond, and liquid nitrogen organization of supply connects cold-trap pond, it is characterised in that: the condenser pipe is mounted on one On adjutage, adjutage is mounted on a lift valve, and lift valve is mounted on a upright track, and lift valve is connected with motor Formation goes up and down driving structure to it, and track installation is beside cold-trap pond;The both ends of condenser pipe are separately installed with condenser pipe gas and go out Mouth valve and condenser pipe gas inlet valve, the two are separately connected temperature display and control system.
2. cold-trap device according to claim 1, it is characterised in that: the cold-trap pond is double-layer structure, includes liner With outer gallbladder, outer gallbladder is wrapped in the periphery of liner, equipped with the float valve for monitoring liquid level in liner, and wall and outer gallbladder outside the tank Between be filled with heat-preservation cotton;The liquid nitrogen organization of supply is connected in the liner in cold-trap pond.
3. cold-trap device according to claim 1, it is characterised in that: the liquid nitrogen organization of supply includes a liquid nitrogen bucket, liquid Solenoid valve and valve are provided on the conduit that nitrogen bucket is connect with cold-trap pond, solenoid valve is located at liquid nitrogen bucket side, and valve is located at cold-trap Pond side is connected between solenoid valve and valve by fast joint;And it is provided on liquid nitrogen bucket dedicated for cryogenic liquid sampling Locking closure and pressure relief opening.
4. cold-trap device according to claim 1, it is characterised in that: be fixedly arranged at the front end with an iron ring, iron ring in adjutage Intermediate to be equipped with tetrafluoro washer, having a diameter among tetrafluoro washer is the eye of 6mm, and one is provided on the side wall of tetrafluoro washer one side directly Lead to the eye inside circle, be equipped with the hole of a 3mm on the side wall of another side together with iron ring, passes through iron ring and tetrafluoro washer side with screw The two is fixed together by the eye of wall, when in use fills in the eye among tetrafluoro washer the end of condenser pipe, uses phenyl tetrafluoride pad Condenser pipe and tetrafluoro washer are fixed together by the screw on circle side wall.
5. cold-trap device according to claim 1, it is characterised in that: the condenser pipe uses diameter for the stainless steel of 6mm Interior polishing pipe is made, and the length is 70cm, shape is round coil or U-shaped, and the filler for adsorbing contaminant is filled in pipe.
6. cold-trap device according to claim 1, it is characterised in that: the temperature sensor uses indication range for -200 DEG C to+200 DEG C of electric thermo-couple temperature, temperature sensor is fixed on condensation tube wall, and lower end and condenser pipe are located at same flat Face.
7. cold-trap device according to claim 1, it is characterised in that: the cold-trap pond, track and liquid nitrogen bucket are each attached to On one bottom plate.
8. cold-trap device according to claim 1, it is characterised in that: be provided with a fixinig plate in orbit, fixinig plate with Lift valve docks the fixed mechanism to be formed to lift valve.
CN201821115521.1U 2018-07-13 2018-07-13 A kind of cold-trap device Active CN208641824U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201821115521.1U CN208641824U (en) 2018-07-13 2018-07-13 A kind of cold-trap device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201821115521.1U CN208641824U (en) 2018-07-13 2018-07-13 A kind of cold-trap device

Publications (1)

Publication Number Publication Date
CN208641824U true CN208641824U (en) 2019-03-26

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110918001A (en) * 2019-12-13 2020-03-27 亚洲硅业(青海)股份有限公司 Method and apparatus for separating high boiling substance
CN114062586A (en) * 2021-10-30 2022-02-18 泊菲莱(镇江)智能设备有限公司 Integrated control type high-efficiency catalyst activity detection device
CN116413104A (en) * 2023-03-31 2023-07-11 中国地质科学院矿产资源研究所 System and method for in-situ analysis of carbonate carbon-oxygen isotope micro-region by ultraviolet laser ablation-gas isotope mass spectrometry

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110918001A (en) * 2019-12-13 2020-03-27 亚洲硅业(青海)股份有限公司 Method and apparatus for separating high boiling substance
CN114062586A (en) * 2021-10-30 2022-02-18 泊菲莱(镇江)智能设备有限公司 Integrated control type high-efficiency catalyst activity detection device
CN116413104A (en) * 2023-03-31 2023-07-11 中国地质科学院矿产资源研究所 System and method for in-situ analysis of carbonate carbon-oxygen isotope micro-region by ultraviolet laser ablation-gas isotope mass spectrometry
CN116413104B (en) * 2023-03-31 2024-01-30 中国地质科学院矿产资源研究所 System and method for in-situ analysis of carbonate carbon-oxygen isotope micro-region by ultraviolet laser ablation-gas isotope mass spectrometry

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Address after: 810007 No.1, Jinsi Road, Chengdong economic and Technological Development Zone, Xining City, Qinghai Province

Co-patentee after: QINGHAI ASIA SILICON SILICON MATERIAL ENGINEERING TECHNOLOGY Co.,Ltd.

Patentee after: Asia silicon (Qinghai) Co.,Ltd.

Address before: 810007 Qinghai city of Xining Province Economic and Technological Development Zone No. 1 gold Guilu

Co-patentee before: QINGHAI ASIA SILICON SILICON MATERIAL ENGINEERING TECHNOLOGY Co.,Ltd.

Patentee before: ASIA SILICON (QINGHAI) Co.,Ltd.