CN208634124U - Screw thread inserting type rotation is straight to drive electrohydraulic servo valve - Google Patents
Screw thread inserting type rotation is straight to drive electrohydraulic servo valve Download PDFInfo
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- CN208634124U CN208634124U CN201821279154.9U CN201821279154U CN208634124U CN 208634124 U CN208634124 U CN 208634124U CN 201821279154 U CN201821279154 U CN 201821279154U CN 208634124 U CN208634124 U CN 208634124U
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Abstract
The utility model provides that screw thread inserting type rotation is straight to drive electrohydraulic servo valve, and structure is simple, easy processing, easy to assembly, and flow and rotational angle are linear, flow gain is constant, without acceleration drift, control simple and flexible；It is also equipped with small in size, light-weight, extremely reliable convenient for integrated and service life.It includes direct current brushless servo motor, upper end cover, spool, valve pocket, lower cover, the valve pocket is set in the periphery anchor ring of the spool, the inner circumferential anchor ring radial clearance fit assembling of the periphery anchor ring and the valve pocket of the spool, the spool includes central axis, the central axis and the periphery anchor ring are respectively arranged with ring cloth and mutually disconnected P channel, the channel T, A channel, channel B, the upper and lower end of the central axis externally protrude out in the corresponding end surface of the valve pocket respectively.
Description
Technical field
The utility model relates to the technical fields of electrohydraulic servo valve, and specially screw thread inserting type rotation is straight drives electro-hydraulic servo
Valve.
Background technique
Key element of the electrohydraulic servo valve as electrohydraulic servo-controlling system, it is both electro-hydraulic converting element and power
Amplifier element, it connects electric part and hydraulic part, realizes the conversion and amplification of electro-hydraulic signal, performance is very big
The performance of entire electrohydraulic servo-controlling system is determined in degree, the feature high with its precision, response is fast is widely used in machine
The fields such as tool, automobile, ship, Aeronautics and Astronautics and robot.
Currently, widening with electrohydraulic servo system application field, the application of robot also mentions electrohydraulic servo valve
Gone out higher requirement: high frequency sound, high reliability, contamination resistance are strong, structure is simple, small in size, working service is convenient, it is low at
And this is convenient for integrated etc., and traditional electrohydraulic servo valve has been difficult to reach above-mentioned requirements again, existing market mainstream it is miniature electro-hydraulic
Servo valve product is 30 series of Moog, E024 is serial and 242 are respectively mounted complexity, and the inner elastomeric member of electrohydraulic servo valve at present
Part makes its service life not be able to satisfy the application of robot.
Summary of the invention
In view of the above-mentioned problems, the utility model provides, screw thread inserting type rotation is straight to drive electrohydraulic servo valve, structure is simple,
It is easy processing, easy to assembly, and flow and rotational angle are linear, flow gain is constant, simple without acceleration drift, control
Flexibly；It is also equipped with small in size, light-weight, extremely reliable convenient for integrated and service life.
Screw thread inserting type rotation is straight to drive electrohydraulic servo valve, it is characterised in that: it includes direct current brushless servo motor, upper end
Lid, spool, valve pocket, lower cover, the valve pocket are set in the periphery anchor ring of the spool, the periphery anchor ring of the spool and described
The inner circumferential anchor ring radial clearance fit of valve pocket assembles, and the spool includes central axis, the central axis and the periphery anchor ring
Be respectively arranged with ring cloth and mutually disconnected P channel, the channel T, A channel, channel B, the upper and lower end of the central axis is outer respectively
The convex corresponding end surface in the valve pocket, the upper end cover lid are loaded on the upper surface of the valve pocket, the convex part of the central axis
With the inner circumferential anchor ring radial clearance fit of the upper end cover, and the convex part of the central axis is connected after the central through-hole
The output end of the direct current brushless servo motor, the lower cover lid is loaded on the lower end surface of the valve pocket, in the lower cover
Convex portion radial clearance fit under the bottom of heart blind hole and the central axis, the both ends of the surface of the valve pocket are respectively and fixedly connected with the upper end
Lid, lower cover, the lower surface of the upper end cover, the upper surface of lower cover are equipped with indent work oil groove, the indent work oil groove
Working edge and the working edge cooperating that is projected of the A channel of the spool, channel B, the spool to correspond to the P logical
Road, A channel, channel B periphery anchor ring on offer corresponding first oil-through-hole respectively, be provided on the periphery of the valve pocket
Corresponding second oil-through-hole, first oil-through-hole, the second oil-through-hole position dimension ensure that servo valve in the operating condition may be used
It works normally, the outside circumferential surface of upper end cover axis is equipped with external screw thread, is used for the installation with integrated valve block and connect.
It is further characterized by:
Be arranged on the spool there are two P channel, two channels T, two orthographic projections be the A channel of arc-shaped, two just
It is projected as the channel B of arc-shaped, two P channels, two channel T compositions under orthographic projection state are intersected 90 ° and are arranged symmetrically
It strikes a bargain at the center of structure, structure and A channel, channel B that two P channels, two channels T under orthographic projection state are formed
45 ° of structures being arranged symmetrically are pitched, the outer ring surface corresponding to A channel of the spool is respectively arranged about in its initial position
The first oil-through-hole A that heart vertical plane is arranged symmetrically, the outer ring surface corresponding to channel B of the spool are respectively arranged initial about it
The symmetrical first oil-through-hole B of the center vertical plane of position, the outer ring surface corresponding to the P channel of the spool be respectively arranged about
The symmetrical first oil-through-hole P of the center vertical plane of its initial position, the outer ring surface of the valve pocket correspond to the first oil-through-hole A,
It is respectively arranged with corresponding second oil-through-hole at corresponding circumferential position under first oil-through-hole B, the first oil-through-hole P working condition,
It ensures that servo valve can work normally in the operating condition, setting while symmetrical oil inlet knot in the center vertical plane two sides of spool
Structure significantly reduces the hydraulic power of circumferencial direction when valve port opens and closes, and can effectively improve the dynamic of this form servo valve
Step response；
It is provided with ring-shaped groove in the central through-hole of the upper end cover, is embedded with Glais ring, institute in the circumferential direction groove
The upper nose for stating central axis is provided with first step axis, the radial clearance installation of the first step axis and the central through-hole
Cooperation, the inner wall of the Glais ring are close to the corresponding position region of the central axis upper end；
The lower convex end of the central axis is provided with second step axis, and the center of the second step axis and the lower cover is blind
Hole radial clearance fit；
The both ends of the surface of the valve pocket pass through the affixed upper end cover of axial bolt, lower cover respectively；
The work edge profile that the A channel, channel B are projected is fan-shaped ring structure, pair of the upper end cover, lower cover
The working edge for answering indent work oil groove is fan-shaped ring structure, the working edge and upper end cover of the spool under zero-bit state, under
Working edge corresponding to end cap is respectively cooperating with to form zero lap, and the channel P, the channel T, A channel, channel B are mutually isolated,
And it is closed due to forming linear scale for the size and flow of fan-shaped ring structure, driving direct current brushless servo motor rotational angle
System, convenient for control；
The external screw thread lower part of the upper end cover, the outside circumferential surface of axis of valve pocket are provided with ring-shaped groove, each ring
The O-ring seal of correspondingly-sized is installed, each O-ring seal is respectively perpendicular to central axis and adjacent O-shaped close in shape groove
Seal parastate arrangement；
High-precision absolute optical encoder, the brush DC servo are integrated in the direct current brushless servo motor
The output shaft of motor and the first step axis of spool are connected by yielding coupling, and the direct current brushless servo motor passes through screw
It is connected to the upper surface of upper end cover；
It is provided with perforative oil return hole in the channel T of the indent work oil groove of the lower cover, makes entire valve body
Drainback passage is located at the bottom of servo valve；
Ring position is provided with installation locating notch outside the bottom of the lower cover, pacifies convenient for the radial positioning of entire valve body
Dress.
After the utility model, the working edge of spool and the working edge of upper end cover, lower cover, which are respectively cooperating with, to be formed zero and opens
Mouthful, when servo valve is in zero-bit, P, A, B, T mouthfuls are mutually isolated, reduce the interior dew of servo valve；When input current driving direct current without
Brush servo motor is rotated clockwise and (is seen by overlook direction) and rotates clockwise certain angle with movable valve plug, at this time P mouthfuls with A mouthfuls of phases
It is logical, B mouthfuls communicated with T mouthfuls；Conversely, P mouthfuls communicated with B mouthfuls, A mouthfuls communicated with T mouthfuls, be designed as screw thread inserting type, not only increase newly
The structure of electrohydraulic servo valve, has also widened the application of electrohydraulic servo valve, and is more conducive to the system collection of electrohydraulic servo valve
At performance；The straight internal structure inelastic component for driving electrohydraulic servo valve of this screw thread inserting type rotation, theoretically demonstrating it makes
With the extreme reliability in service life, the application of robot can satisfy completely；Its structure is simple, easy processing, easy to assembly, and
Flow is linear with rotational angle, and flow gain is constant, without acceleration drift, control simple and flexible；It is also equipped with volume
It is small, light-weight, extremely reliable convenient for integrated and service life.
Detailed description of the invention
Fig. 1 is the main view sectional structure simplified schematic diagram one under the working condition of the utility model；
Fig. 2 is the main view sectional structure simplified schematic diagram two under the working condition of the utility model；
Fig. 3 is the main view sectional structure simplified schematic diagram three under the working condition of the utility model；
Fig. 4 is the cross-sectional cut-away schematic diagram corresponding to P channel communicating position under the working condition of the utility model；
Fig. 5 is the three-dimensional figure structure schematic representation of the spool of the utility model；
Fig. 6 is the vertical view figure structure schematic representation of the spool of the utility model；
Fig. 7 is the three-dimensional figure structure schematic representation of the valve pocket of the utility model；
Fig. 8 is the three-dimensional figure structure schematic representation of the upper end cover of the utility model；
Fig. 9 is the three-dimensional figure structure schematic representation of the lower cover of the utility model；
Title corresponding to serial number is as follows in figure:
Direct current brushless servo motor 1, upper end cover 2, central through-hole 21, ring-shaped groove 22, spool 3, periphery anchor ring 31, in
Mandrel 32, first step axis 321, second step axis 322, P channel 33, the channel T 34, A channel 35, channel B 36, valve pocket 4, lower end
Lid 5, central blind hole 51, installation locating notch 52, oil return hole 53, indent function oil groove 6, O-ring seal 7, the first oil-through-hole 8,
First oil-through-hole A81, the first oil-through-hole B82, the first oil-through-hole P83, the second oil-through-hole 9, external screw thread 10, Glais ring 11, axis
To screw 12, ring-shaped groove 13.
Specific embodiment
Screw thread inserting type rotation is straight to drive electrohydraulic servo valve, and see Fig. 1-Fig. 9: it includes direct current brushless servo motor 1, upper end cover
2, spool 3, valve pocket 4, lower cover 5, valve pocket 4 are set in the periphery anchor ring 31 of spool 3, the periphery anchor ring of spool 3 and valve pocket 4
The assembling of inner circumferential anchor ring radial clearance fit, spool 3 includes central axis 32, and central axis 32 and periphery anchor ring 31 are respectively arranged with
Ring cloth and mutually disconnected P channel 33, the channel T 34, A channel 35, channel B 36, the upper and lower end of central axis 32 externally protrudes out in valve respectively
The corresponding end surface of set 4, the lid of upper end cover 2 are loaded on the upper surface of valve pocket 4, the convex part of central axis 32 and the interior chow ring of upper end cover 2
The convex part of face radial clearance fit and central axis 32 connects direct current brushless servo motor 1 after running through central through-hole 21
Output end, the lid of lower cover 5 are loaded on the lower end surface of valve pocket 4, convex portion under the central blind hole 51 of lower cover 5 and the bottom of central axis 32
Radial clearance fit, the both ends of the surface of valve pocket 4 are respectively and fixedly connected with upper end cover 2, lower cover 5, the lower surface of upper end cover 2, lower cover 5
Upper surface is equipped with indent work oil groove 6, and the working edge and the A channel 35 of spool 3, channel B 36 of indent function oil groove 6 are projected
Working edge cooperating, spool 3 correspond to P channel 33, A channel 35, channel B 36 periphery anchor ring on offer correspondence respectively
The first oil-through-hole 8, be provided with corresponding second oil-through-hole 9 on the periphery of valve pocket 4, the first oil-through-hole 8, the second oil-through-hole 9
Position dimension ensures that servo valve can work normally in the operating condition, and the outside circumferential surface of 2 axis of upper end cover is equipped with external screw thread 10, uses
It is connect in the installation with integrated valve block.
A channel 35, two there are two 34, two, the channel the T orthographic projection of P channel 33, two for arc-shaped is set on spool 3
A orthographic projection is the channel B 36 of arc-shaped, under orthographic projection state two P channels, 33, two compositions of the channels T 34 intersect 90 ° it is right
Claim arragement construction, structure and A channel 35 that two P channels, 33, two channels T 34 under orthographic projection state are formed, channel B 36
Center is respectively arranged initial about it at 45 ° of structures being arranged symmetrically, the outer ring surface corresponding to A channel 35 of spool 3 is intersected
The outer ring surface corresponding to channel B 36 of the first oil-through-hole A81 that the center vertical plane of position is arranged symmetrically, spool 3 are respectively disposed with
The outer ring surface corresponding to the channel P 33 of the symmetrical first oil-through-hole B82 of center vertical plane about its initial position, spool 3 distinguish cloth
It is equipped with the symmetrical first oil-through-hole P83 of center vertical plane about its initial position, the outer ring surface of valve pocket 4 corresponds to the first logical oil
It is respectively arranged at corresponding circumferential position under hole A81, the first oil-through-hole B82, the first oil-through-hole P83 working condition corresponding
Second oil-through-hole 9 ensures that servo valve can work normally in the operating condition, and in the center vertical plane two sides of spool 3, setting is same
When symmetrical oil charging structure, significantly reduce the hydraulic power of circumferencial direction when valve port opens and closes, can effectively improve this
The dynamic characteristic of form servo valve；
It is provided with ring-shaped groove 22 in the central through-hole 21 of upper end cover 2, is embedded with Glais ring 11 in circumferential groove 22, in
The upper nose of mandrel 32 is provided with first step axis 321, and first step axis 321 and the radial clearance installation of central through-hole 21 are matched
It closes, the inner wall of Glais ring 11 is close to the upper end corresponding position region of central axis 32；
The lower convex end of central axis 32 is provided with second step axis 322, the central blind hole of second step axis 322 and lower cover 5
51 radial clearance fits；
The both ends of the surface of valve pocket 4 pass through the affixed upper end cover 2 of axial bolt 12, lower cover 5 respectively；
The work edge profile that A channel 35, channel B 36 are projected is fan-shaped ring structure, the correspondence of upper end cover 2, lower cover 5
The working edge of indent function oil groove 6 is fan-shaped ring structure, the working edge and upper end cover 2, lower cover of the spool 3 under zero-bit state
Working edge corresponding to 5 is respectively cooperating with to form zero lap, and P channel 33, the channel T 34, A channel 35, channel B 36 are mutually separated by
From, and due to forming linear scale for the size and flow of fan-shaped ring structure, driving 1 rotational angle of direct current brushless servo motor
Relationship, convenient for control；
The external screw thread lower part of upper end cover 2, the outside circumferential surface of axis of valve pocket 4 are provided with ring-shaped groove 13, ring-shaped groove 13
The O-ring seal 7 of correspondingly-sized is inside installed, each O-ring seal 7 is respectively perpendicular to central axis 32 and adjacent O-shaped sealing
Enclose 7 parastates arrangement；
High-precision absolute optical encoder is integrated in direct current brushless servo motor 1, direct current brushless servo motor 1
Output shaft is connect with the first step axis 321 of spool 3 by yielding coupling, and direct current brushless servo motor 3 is connected by screw to
In the upper surface of upper end cover 2；
It is provided with perforative oil return hole 53 in the channel T of the indent work oil groove of lower cover 5, makes returning for entire valve body
Oily channel is located at the bottom of servo valve；
The bottom of lower cover 5 is additionally provided with installation locating notch 52, installs convenient for the radial positioning of entire valve body.
It is entered its working principles are as follows: the lower cover of the valve body after the completion of overall package, valve pocket, upper end cover insert respectively
Need to install the working chamber of valve body, the top relative to bearing of upper end cover connects corresponding work by screw threads for fastening later
Chamber, and ensure that the O-ring seal of the outside of valve pocket, upper end cover and the inner wall of working chamber are sufficiently in close contact；The working edge of spool
Be respectively cooperating with to form zero lap with the working edge of upper end cover, lower cover, when servo valve is in zero-bit, P, A, B, T mouthfuls mutually every
From reducing the interior dew of servo valve；When input current driving direct current brushless servo motor is rotated clockwise and (seen by overlook direction) simultaneously
Band movable valve plug rotate clockwise certain angle, at this time P mouthfuls communicated with A mouthfuls, B mouthfuls communicated with T mouthfuls；Conversely, P mouthfuls communicated with B mouthfuls, A
Mouth is communicated with T mouthfuls；It is designed as screw thread inserting type, has not only increased the structure of electrohydraulic servo valve newly, has also widened electrohydraulic servo valve
Application, and be more conducive to the system integration performance of electrohydraulic servo valve；The rotation of this screw thread inserting type is straight to drive electro-hydraulic servo
The internal structure inelastic component of valve theoretically demonstrates the extreme reliability of its service life, can satisfy machine completely
The application of people.
Specific embodiment of the utility model is described in detail above, but content is only what the utility model was created
Preferred embodiment should not be construed as limiting the practical range of the utility model creation.All create according to the utility model is applied
All the changes and improvements made by range etc., shall still fall within the scope of this patent.
Claims (10)
1. screw thread inserting type rotation is straight to drive electrohydraulic servo valve, it is characterised in that: it include direct current brushless servo motor, upper end cover,
Spool, valve pocket, lower cover, the valve pocket are set in the periphery anchor ring of the spool, the periphery anchor ring and the valve of the spool
The inner circumferential anchor ring radial clearance fit of set assembles, and the spool includes central axis, the central axis and the periphery anchor ring
It is respectively arranged with ring cloth and mutually disconnected P channel, the channel T, A channel, channel B, the upper and lower end of the central axis distinguishes evagination
In the corresponding end surface of the valve pocket, the upper end cover lid is loaded on the upper surface of the valve pocket, the convex part of the central axis with
The inner circumferential anchor ring radial clearance fit of the upper end cover, and the convex part of the central axis connects institute after central through-hole
The output end of direct current brushless servo motor is stated, the lower cover lid is loaded on the lower end surface of the valve pocket, the center of the lower cover
Convex portion radial clearance fit under the bottom of blind hole and the central axis, the both ends of the surface of the valve pocket are respectively and fixedly connected with the upper end
Lid, lower cover, the lower surface of the upper end cover, the upper surface of lower cover are equipped with indent work oil groove, the indent work oil groove
Working edge and the working edge cooperating that is projected of the A channel of the spool, channel B, the spool to correspond to the P logical
Road, A channel, channel B periphery anchor ring on offer corresponding first oil-through-hole respectively, be provided on the periphery of the valve pocket pair
The second oil-through-hole answered, first oil-through-hole, the second oil-through-hole position dimension ensure that servo valve in the operating condition can be just
Often work, the outside circumferential surface of upper end cover axis are equipped with external screw thread.
2. screw thread inserting type rotation as described in claim 1 is straight to drive electrohydraulic servo valve, it is characterised in that: be arranged on the spool
It is the A channel of arc-shaped, the channel B that two orthographic projections are arc-shaped there are two P channel, two channels T, two orthographic projections, just
Two P channels under projection state, two channels T compositions intersect 90 ° and are arranged symmetrically structure, and two under orthographic projection state
The structure that the P channel, two channels T are formed and A channel, channel B center at intersecting 45 ° of structures being arranged symmetrically, it is described
The outer ring surface corresponding to A channel of spool is respectively arranged the first logical oil being arranged symmetrically about the center vertical plane of its initial position
Hole A, the outer ring surface corresponding to channel B of the spool are respectively arranged logical about the center vertical plane symmetrical first of its initial position
Oilhole B, the outer ring surface corresponding to the P channel of the spool are respectively arranged symmetrical about the center vertical plane of its initial position
The first oil-through-hole P, the outer ring surface of the valve pocket corresponds to the first oil-through-hole A, the first oil-through-hole B, the first oil-through-hole P work
Make to be respectively arranged with corresponding second oil-through-hole at the corresponding circumferential position under state, ensures that servo valve in the operating condition may be used
It works normally.
3. screw thread inserting type rotation as described in claim 1 is straight to drive electrohydraulic servo valve, it is characterised in that: in the upper end cover
It is provided with ring-shaped groove in heart through hole, is embedded with Glais ring in the circumferential direction groove, the upper nose of the central axis is provided with
The radial clearance of first step axis, the first step axis and the central through-hole, which is installed, to be cooperated, the inner wall of the Glais ring
It is close to the corresponding position region of the central axis upper end.
4. screw thread inserting type rotation as claimed in claim 3 is straight to drive electrohydraulic servo valve, it is characterised in that: under the central axis
Nose is provided with second step axis, the central blind hole radial clearance fit of the second step axis and the lower cover.
5. screw thread inserting type rotation as described in claim 1 is straight to drive electrohydraulic servo valve, it is characterised in that: the both ends of the valve pocket
Face passes through the affixed upper end cover of axial bolt, lower cover respectively.
6. screw thread inserting type rotation as described in claim 1 is straight to drive electrohydraulic servo valve, it is characterised in that: the A channel, B are logical
The work edge profile that road is projected be fan-shaped ring structure, the upper end cover, lower cover correspondence indent work oil groove work
Side is fan-shaped ring structure, working edge and the working edge corresponding to upper end cover, lower cover point of the spool under zero-bit state
Zero lap is not cooperatively formed, and P channel, the channel T, A channel, channel B are mutually isolated.
7. screw thread inserting type rotation as described in claim 1 is straight to drive electrohydraulic servo valve, it is characterised in that: outside the upper end cover
Thread portions, valve pocket the outside circumferential surface of axis be provided with ring-shaped groove, correspondingly-sized is installed in each ring-shaped groove
O-ring seal, each O-ring seal is respectively perpendicular to central axis and adjacent O-ring seal parastate arrangement.
8. screw thread inserting type rotation as described in claim 1 is straight to drive electrohydraulic servo valve, it is characterised in that: the brush DC is watched
It takes and is integrated with high-precision absolute optical encoder in motor, the of the output shaft of the direct current brushless servo motor and spool
One Step Shaft is connected by yielding coupling, and the direct current brushless servo motor is connected by screw in the upper surface of upper end cover.
9. screw thread inserting type rotation as described in claim 1 is straight to drive electrohydraulic servo valve, it is characterised in that: the lower cover indent
Perforative oil return hole is provided in the channel T of work oil groove.
10. screw thread inserting type rotation as described in claim 1 is straight to drive electrohydraulic servo valve, it is characterised in that: the lower cover
Ring position is provided with installation locating notch outside bottom.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821279154.9U CN208634124U (en) | 2018-08-09 | 2018-08-09 | Screw thread inserting type rotation is straight to drive electrohydraulic servo valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821279154.9U CN208634124U (en) | 2018-08-09 | 2018-08-09 | Screw thread inserting type rotation is straight to drive electrohydraulic servo valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208634124U true CN208634124U (en) | 2019-03-22 |
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ID=65740897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821279154.9U Active CN208634124U (en) | 2018-08-09 | 2018-08-09 | Screw thread inserting type rotation is straight to drive electrohydraulic servo valve |
Country Status (1)
| Country | Link |
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| CN (1) | CN208634124U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108757619A (en) * | 2018-08-09 | 2018-11-06 | 江苏钧微动力科技有限公司 | Screw thread inserting type rotation is straight to drive electrohydraulic servo valve |
-
2018
- 2018-08-09 CN CN201821279154.9U patent/CN208634124U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108757619A (en) * | 2018-08-09 | 2018-11-06 | 江苏钧微动力科技有限公司 | Screw thread inserting type rotation is straight to drive electrohydraulic servo valve |
| CN108757619B (en) * | 2018-08-09 | 2024-05-10 | 江苏钧微动力科技有限公司 | Screw thread plug-in type rotary direct-drive electrohydraulic servo valve |
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