CN208631609U - Plate chucking device - Google Patents

Abstract

The utility model discloses a kind of plate chucking device, include one first roller devices, one second roller devices and a distance-measuring device, wherein second roller devices are movable are set up on first roller devices, and the distance-measuring device can measure the second idler wheel of second roller devices and the distance between the first idler wheel of first roller devices by way of measuring electrical properties, with detect automatically plate in clamping process whether fragmentation or skidding.

Description

Plate chucking device

Technical field

The utility model relates to a kind of chucking devices, in particular to a kind of plate chucking device.

Background technique

In automation preparation flow (such as the cleaning machine (cleaner), before glass baseplate surface coating for carrying out plate Cleaning process；Or developing machine (develop), for the removing of photoresist after glass substrate coating exposure, needed for formation Pattern layer) when, the process that idler wheel is automated is usually used, such as plate is clamped by each one group of idler wheel up and down, and apply Add an external force that these idler wheels are rotated, and then drives or control the moving direction of plate.

Such one group of idler wheel each up and down is also known as double rollers (double roller) chucking device, the idler wheel being located above The upper surface of plate is mainly acted on, and then provides certain upper pressure and frictional force during plate conveying, avoids plate Part tilts or skids.

Existing double rollers chucking device generally generates plate clamping effect there are two types of mode, the first is directly to pass through The idler wheel being located above pushes down the upper surface of plate, and then is located in plate between top and the idler wheel of lower section and (is also known as self-possessed Formula double rollers chucking device)；And second is the distance between idler wheel of the idler wheel above control and lower section (between rear title idler wheel Gap (gap)) so that plate is located between top and the idler wheel of lower section (also known as adjustment clearance-type double rollers chucking device).

However, existing double rollers chucking device still has the disadvantage.Specifically, dead-weight double rollers chucking device lacks Point is: the weight of top idler wheel is fixed, so pressure can not be adjusted for different-thickness substrate；And due to only relying on top The weight of idler wheel generates chucking power, therefore while being rotated is unstable.In addition, the shortcomings that adjustment clearance-type double rollers chucking device, exists In, all need every time according to the thickness of substrate adjust roller gap, increase time cost；And when the o-ring of idler wheel generates shape After change or aging, so that the distance of roller gap is unstable, and then the risk of substrate fragmentation or skidding is produced.In addition, above-mentioned Two kinds of double rollers chucking devices all do not have any detection device can detecte plate in clamping process whether fragmentation or skidding.

Therefore, it is necessary to a kind of plate chucking device is provided, to solve the problems of prior art.

Utility model content

In view of this, the present invention provides a kind of plate chucking devices, to solve two kinds of double rollers folders in the prior art The shortcomings that holding equipment is each provided with, and can detect automatically plate in clamping process whether fragmentation or skidding.

The one of the utility model is designed to provide a kind of plate chucking device, and it includes one first roller devices, one Second wheel device and a distance-measuring device.First roller devices include: one first idler wheel；One first rotary shaft, wears In first idler wheel；One first gear, first rotary shaft are arranged in the first gear；One driving element, even First rotary shaft is connect, to drive first idler wheel and the first gear to carry out one first rotary motion；One first rolling Wheel seat carries first rotary shaft；One limited post is protrudingly placed on a upper surface of first roller mount；And a resistive conductor, It attaches and projects direction setting along the one of the limited post.Second roller devices, it is movable to be set up in first rolling The top of wheel apparatus, second roller devices include: one second idler wheel, the movable top for being set up in first idler wheel； One second rotary shaft is arranged in second idler wheel；One second gear engages the first gear, wherein second rotation Shaft is arranged in the second gear, when the first gear carries out first rotary motion, the first gear band The second gear is moved, and then second rotary shaft and second idler wheel is driven to carry out one second rotary motion, wherein institute The direction of rotation and a direction of rotation of first rotary motion for stating the second rotary motion are opposite；One second idler wheel Seat carries second rotary shaft, wherein the limited post is arranged in second roller mount；And a conduction material, it is set to institute It states in the second roller mount and the conduction material movable contact resistive conductor.The distance-measuring device is led described in being electrically connected Electric material and the resistive conductor.

In an embodiment of the utility model, the plate chucking device further includes a bearing, wherein first rolling Wheel seat clamps the bearing and first rotary shaft is arranged in the bearing.

In an embodiment of the utility model, first roller mount includes: one first bearing base, recessed with one Slot, the groove accommodate the bearing；And one first lid, it is covered on first bearing base.

In an embodiment of the utility model, the limited post is protrudingly placed on first lid.

In an embodiment of the utility model, the plate chucking device further includes a bearing, wherein second rolling Wheel seat clamps the bearing and second rotary shaft is arranged in the bearing.

In an embodiment of the utility model, second roller mount includes: one second bearing base, recessed with one Slot, the groove accommodate the bearing；And one second lid, it is covered on second bearing base.

In an embodiment of the utility model, the plate chucking device further includes one apart from marked element, is set to On the limited post.

In an embodiment of the utility model, the plate chucking device is further included: a nut is fixed at the limit Column；And an elastic element, it connects the nut and is set between the nut and second roller mount.

In an embodiment of the utility model, the distance-measuring device is further included: institute is electrically connected in two leads State conduction material and the resistive conductor；One power supply is electrically connected two lead；And a current measurer, it is electrically connected described two Lead and the power supply, wherein two lead, the power supply and the current measurer form a loop.

In an embodiment of the utility model, the plate chucking device further includes an at least o-ring, around described the At least one of one idler wheel and second idler wheel.

Compared with prior art, the plate chucking device of the utility model embodiment, can be filled by range measurement Set come automatic detection plate part in clamping process whether fragmentation or skidding.In addition, the plate clamping of the utility model embodiment is set Standby is the basis based on dead-weight double rollers chucking device, and collocation first gear is engaged with second gear, and then is reduced or kept away Exempt to clamp unstable disadvantage when rotation.In addition, the plate chucking device of the utility model embodiment can pass through nut and elasticity The combination of element, and then pressure is indirectly provided and gives plate, and then generates the technical effect of adjustable chucking power.

Detailed description of the invention

Figure 1A is the front-view schematic diagram of the plate chucking device of an embodiment of the present invention

Figure 1B is the front-view schematic diagram of the part amplification of the plate chucking device of an embodiment of the present invention.

Fig. 1 C is the side view perspective view of the explosion of the plate chucking device of an embodiment of the present invention.

Fig. 1 D is the side view combination schematic diagram of the plate chucking device of an embodiment of the present invention.

Fig. 1 E is the schematic side view of the part amplification of the plate chucking device of an embodiment of the present invention.

Specific embodiment

To allow the utility model above-mentioned purpose, feature and advantage to be clearer and more comprehensible, it is preferably real that the utility model is cited below particularly Example is applied, and cooperates attached drawing, is described in detail below.Furthermore the direction term that the utility model is previously mentioned, for example, above and below, top, Bottom, front, rear, left and right, inside and outside, side, surrounding, center, level, transverse direction, vertically, longitudinally, axial direction, radial direction, top layer or most Lower layer etc. is only the direction with reference to annexed drawings.Therefore, the direction term used be to illustrate and understand the utility model, Rather than to limit the utility model.

Please refer to Figure 1A to 1E, Figure 1A be the plate chucking device 10 of an embodiment of the present invention front-view schematic diagram, It is that this is practical new that Figure 1B, which is the front-view schematic diagram of the part amplification of the plate chucking device 10 of an embodiment of the present invention, Fig. 1 C, The side view perspective view of the explosion of the plate chucking device 10 of one embodiment of type, Fig. 1 D are the plate clampings of an embodiment of the present invention The side view combination schematic diagram of equipment 10；And Fig. 1 E is the part amplification of the plate chucking device 10 of an embodiment of the present invention Schematic side view.The plate chucking device 10 of an embodiment of the present invention includes one first roller devices 11, one second idler wheel Device 12 and a distance-measuring device 13.First roller devices 11 are mainly used for carrying a plate 90, the plate 90 Such as it can be a substrate (such as silicon substrate, plastic substrate or glass substrate).First roller devices 11 include one the One idler wheel 111, one first rotary shaft 112, a first gear 113, a driving element 114, the limit of one first roller mount 115, one Column 116 and a resistive conductor 117.First idler wheel 111 is generally cylindric in one, and first rotary shaft 112 is worn In first idler wheel 111 and the first gear 113.In addition, first rotary shaft 112 and the driving element 114 Connection, the driving element 114 can drive first idler wheel 111 and the first gear 113 to carry out one first rotary motion. It is in fixed relationship between first rotary shaft 112 and first idler wheel 111, therefore when the first rotary shaft in an example 112 when carrying out first rotary motion along an axial direction by the driving of the driving element 114, first rolling Wheel 111 also can be with progress first rotary motion.In another example, first rotary shaft 112 and first tooth It is in fixed relationship between wheel 113, therefore when the first rotary shaft 112 is axial along one by the driving of the driving element 114 When direction carries out first rotary motion, the first gear 113 also can be with progress first rotary motion.

Continuous speech, the first roller mount 115 of first roller devices 11 carries first rotary shaft 112.Citing and Speech, first roller mount 115 can be carried on the both ends end to end of first rotary shaft 112.In one embodiment, this is practical new The plate chucking device 10 of type may include a bearing 118, wherein first roller mount 115 clamps the bearing 118, Yi Jisuo The first rotary shaft 112 is stated to be arranged in the bearing 118.The bearing 118 can provide first rotary shaft 112 carry out it is round and smooth First rotary motion, and again since first roller mount 115 clamps the bearing 118, therefore be arranged in the axis Holding 118 first rotary shaft 112 can be acted on by the carrying of first roller mount 115.In one embodiment, described One roller mount 115 may include one first bearing base 1151 and one first lid 1152 (as shown in Figure 1 C).First carrying Pedestal 1151 has a groove 1153, can be used for accommodating the bearing 118；And first lid 1152 is covered on described On one bearing base 1151.In a concrete example, first bearing base 1151 is described recessed for example in a U-shaped appearance Slot 1153 other than there is the open front (not being painted) worn for first rotary shaft 112 and after-opening (not being painted), With the upper opening (not being painted) for being put into or taking out for bearing 118, wherein the upper opening can pass through first lid 1152 Lid set and close, and then be contained in the bearing 118 in first roller mount 115.It in one embodiment, can be by extremely A few screw 1154 is so that first lid 1152 is fixed on the first bearing base 1151.It is noted that before described Opening and the size of the after-opening are smaller than the bearing 118, thus the bearing 118 will not from the open front or it is described after Opening is detached from the groove 1153 of first bearing base 1151.

The limited post 116 is protrudingly placed on a upper surface 115A of first roller mount 115.In one embodiment, institute Limited post 116 is stated to be protrudingly placed on first lid 1152.The resistive conductor 117 attaches and along the one of the limited post 116 Project direction setting.The purposes of the limited post 116 and the resistive conductor 117 paragraph will be described in detail below.

Second roller devices 12 of the plate chucking device 10 of the utility model embodiment are movable to be set up in described The top of one roller devices 11.It in one embodiment, can be by clamping the plate 90, so that second roller devices 12 At least part generate displacement, such as rough be moved upwardly by.Second roller devices 12 include one second idler wheel 121, One second rotary shaft 122, a second gear 123, one second roller mount 124 and a conduction material 125.Second idler wheel 121 is living Dynamic formula is set up in the top of first idler wheel 111.Second idler wheel 121 is generally cylindric in one, second idler wheel 121 can clamp the plate 90 with first idler wheel 111.In a concrete example, second idler wheel 121 is to pass through itself Weight (dead-weight), push down the plate 90 from top, and then generate the chucking power for the plate 90.

Second rotary shaft 122 is arranged in second idler wheel 121 and the second gear 123.In addition, described Two gears 123 engage the first gear 113, when the first gear 113 carries out first rotary motion, described first Gear 113 drives the second gear 123, and then second rotary shaft 122 and second idler wheel 121 is driven to carry out one the Two rotary motions a, wherein direction of rotation of second rotary motion and a direction of rotation of first rotary motion are phases Anti-.For example, when first rotary motion is clockwise direction, second rotary motion is counterclockwise. From the above it can be seen that by the meshing relation of the first gear 113 and the second gear 123, when the driving element 114 drives When first rotary shaft 112, second rotary shaft 112 can be also driven with the meshing relation and then indirectly.It changes Yan Zhi, the plate chucking device 10 of the utility model embodiment not only pass through the weight (dead-weight) of the second idler wheel 121 itself Clamping effect is generated, but more by the meshing relation of the first gear 113 and the second gear 123, so that clamping institute The transportational process for stating plate 90 is more stable.

Second roller mount 124 of second roller devices 12 carries second rotary shaft 122.For example, described Second roller mount 124 can be carried on the both ends end to end of second rotary shaft 122.In one embodiment, the plate of the utility model Part chucking device 10 may include a bearing 126, wherein second roller mount 124 clamps the bearing 126 and described second Rotary shaft 122 is arranged in the bearing 126.The bearing 126 can provide second rotary shaft 122 carry out it is round and smooth described Second rotary motion, and again since second roller mount 124 clamps the bearing 126, therefore it is arranged in the bearing 126 Second rotary shaft 122 can be acted on by the carrying of second roller mount 124.In one embodiment, second idler wheel Seat 124 may include one second bearing base 1241 and one second lid 1242 (as shown in Figure 1 C).Second bearing base 1241 have a groove 1243, can be used for accommodating the bearing 126；And second lid 1242 is covered on described second and holds It carries on pedestal 1241.In a concrete example, second bearing base 1241 is for example in a U-shaped appearance, the groove 1243 other than having the open front (not being painted) worn for second rotary shaft 122 and after-opening (not being painted), also have There is the upper opening (not being painted) for being put into or taking out for bearing 126, wherein the upper opening can pass through second lid 1242 Lid sets and closes, and then is contained in the bearing 126 in second roller mount 124.It in one embodiment, can be by least One screw 1244 is so that second lid 1242 is fixed on second bearing base 1241.It is noted that described The size of open front and the after-opening is smaller than the bearing 126, therefore the bearing 126 will not be from the open front or described After-opening is detached from the groove 1243 of second bearing base 1241.

The conduction material 125 of second roller devices 12 is set in second roller mount 124 and the conduction material 125 The movable contact resistive conductor 117.The effect of the conduction material 125 paragraph will be described in detail below.

The distance-measuring device 13 of the plate chucking device 10 of the utility model embodiment is electrically connected the conduction material 125 And the resistive conductor 117, first idler wheel 111 and second idler wheel are judged mainly by way of electrically measuring The distance between 121, and then assess and be now subjected to plate 90 clamped by the plate chucking device 10 of the utility model embodiment State.Specifically, since the second roller devices 12 of the plate chucking device 10 of the utility model are movable are set up in Whether the top of first roller devices 11 so second roller devices 12 can be because of the thickness of plate 90, and presss from both sides The condition of plate 90 etc. is held, and then generates the difference in height.Furthermore and since the limited post 116 is through at described second Roller mount 124, so difference of the actually described meeting of second roller devices 12 because of above-mentioned condition, and then it is corresponding along described Limited post 124 carries out mobile (such as moving up and down).Continuous speech, when second roller devices 12 move up and down, institute Stating conduction material 125 also can and then move up and down, and then the resistive conductor 117 of movable contact different location.Therefore, because contact The resistive conductor 117 of different location, generated resistance is different, therefore described the can be judged by way of electrically measuring The distance between one idler wheel 111 and second idler wheel 112.In one embodiment, the distance-measuring device 13 may include two Lead 131 and 132, one power supply 133 and a current measurer 134, two lead 131 and 132 can be electrically connected described Conduction material 125 and the resistive conductor 117 (such as bottom of resistive conductor 117).In addition, the power supply 133 be electrically connected it is described Two leads 131 and 132 and the current measurer 134 are electrically connected two lead 131 and 132 and the power supply 133, Wherein two lead 131 and 132, the power supply 133 and the current measurer 134 form a loop.From the above it can be seen that It can judge that first idler wheel 111 at a distance from second idler wheel 121, and then studies and judges current plate 90 by the size of electric current Clamp position.Such as in the present embodiment, when electric current is bigger, then it represents that the thickness of plate 90 is smaller.This is because plate The distance of the smaller situation of 90 thickness of material, the resistive conductor 117 of the loop passed through is smaller, therefore resistance is smaller, thus Final result is that electric current is bigger.In another example if the plate 90 should belong to clamped state, but measured electric current It is the state for belonging to and not clamping, then can studies and judges the plate 90 and be not affected by correct clamping or the plate 90 is broken Damage, broken or skidding.Therefore, by the above-mentioned means, the plate chucking device 10 of the utility model can pass through distance-measuring device 13 automatic detection plate parts 90 in clamping process whether fragmentation or skidding.

In one embodiment, the plate chucking device 10 may include one apart from marked element 14 (as referring to figure 1E), if It is placed in 116 on the limited post.For example, the distance mark 10, member can be a graduated scale, it can be used for the current plate of rough estimate The clamping condition of material 90.

In one embodiment, the plate chucking device 10 may include a nut 15 and an elastic element 16 (such as Fig. 1 E institute Show).The nut 15 is fixed at the limited post 116；And the elastic element 16 connects the nut 15 and is set to described Between nut 15 and second roller mount 124, wherein the nut 15 and the combination of the elastic element 16 can be used for providing One external force gives second roller mount 124.Specifically, the limited post 116 can be equipped with the screw thread corresponding to the nut 15 1161 so that the nut 15 can spiral shell be set to the limited post 116 on.In addition, again described in the elastic element 16 is set to Between nut 15 and second roller mount 124, therefore when the nut 15 is screwed togather towards second roller mount 124 When, the elastic element 16 is accessible and pushes second roller mount 124, and then makes second idler wheel 121 towards described the One idler wheel 111 is mobile, therefore can increase the chucking power to plate 90.

In one embodiment, the plate chucking device 10 may include an at least o-ring 17 (as shown in Figure 1A), around institute State at least one of the first idler wheel 111 and second idler wheel 121.The o-ring 17 can be used as a buffer element, for delaying The contact (such as not yet described in sandwiched the case where plate 90) between first idler wheel 111 and second idler wheel 121 is rushed, or Person buffers the contact between the plate 90 and first idler wheel 111 (and/or described second idler wheel 112).It is worth mentioning It is, since the plate chucking device 10 of the utility model is the improvement carried out using similar dead-weight double rollers chucking device, So not having similar to caused by the aging or deformation in existing adjustment clearance-type double rollers chucking device because of o-ring 17 The unstable problem of the distance of roller gap.

In conclusion the plate chucking device of the utility model embodiment can be detected automatically by distance-measuring device Plate in clamping process whether fragmentation or skidding.In addition, the plate chucking device of the utility model embodiment is based on self weight The basis of formula double rollers chucking device, collocation first gear and second gear engage, and then clamping when rotation is reduced or avoided Unstable disadvantage.In addition, the plate chucking device of the utility model embodiment can by the combination of nut and elastic element, into And pressure is indirectly provided and gives plate, and then generates the technical effect of adjustable chucking power.

The utility model is described by above-mentioned related embodiment, however above-described embodiment is only to implement the utility model Example.It must be noted that, it has been disclosed that embodiment be not limiting as the scope of the utility model.On the contrary, being contained in right The modification of the spirit and scope of claim and impartial setting are included in the scope of the utility model.

Claims (10)

1. a kind of plate chucking device, it is characterised in that: the plate chucking device Bao Han ︰

One first roller devices include:

One first idler wheel；

One first rotary shaft is arranged in first idler wheel；

One first gear, first rotary shaft are arranged in the first gear；

One driving element connects first rotary shaft, to drive first idler wheel and the first gear to carry out one first Rotary motion；

One first roller mount carries first rotary shaft；

One limited post is protrudingly placed on a upper surface of first roller mount；And

One resistive conductor attaches and projects direction setting along the one of the limited post；

One second roller devices, the movable top for being set up in first roller devices, second roller devices include:

One second idler wheel, the movable top for being set up in first idler wheel；

One second rotary shaft is arranged in second idler wheel；

One second gear engages the first gear, wherein second rotary shaft is arranged in the second gear, when described When first gear carries out first rotary motion, the first gear drives the second gear, and then drives described second Rotary shaft and second idler wheel carry out one second rotary motion, wherein a direction of rotation of second rotary motion with it is described One direction of rotation of the first rotary motion is opposite；

One second roller mount carries second rotary shaft, wherein the limited post is arranged in second roller mount；And

One conduction material, is set in second roller mount and the conduction material movable contact resistive conductor；And

One distance-measuring device is electrically connected the conduction material and the resistive conductor.

2. plate chucking device as described in claim 1, it is characterised in that: the plate chucking device further includes a bearing, Wherein first roller mount clamps the bearing and first rotary shaft is arranged in the bearing.

3. plate chucking device as claimed in claim 2, it is characterised in that: first roller mount includes:

One first bearing base, has a groove, and the groove accommodates the bearing；And

One first lid is covered on first bearing base.

4. plate chucking device as claimed in claim 3, it is characterised in that: the limited post is protrudingly placed on first lid On.

5. plate chucking device as described in claim 1, it is characterised in that: the plate chucking device further includes a bearing, Wherein second roller mount clamps the bearing and second rotary shaft is arranged in the bearing.

6. plate chucking device as claimed in claim 5, it is characterised in that: second roller mount includes:

One second bearing base, has a groove, and the groove accommodates the bearing；And

One second lid is covered on second bearing base.

7. plate chucking device as described in claim 1, it is characterised in that: the plate chucking device further includes a distance mark Show element, is set on the limited post.

8. plate chucking device as described in claim 1, it is characterised in that: the plate chucking device further includes:

One nut is fixed at the limited post；And

One elastic element connects the nut and is set between the nut and second roller mount.

9. plate chucking device as described in claim 1, it is characterised in that: the distance-measuring device further includes:

The conduction material and the resistive conductor is electrically connected in two leads；

One power supply is electrically connected two lead；And

One current measurer is electrically connected two lead and the power supply, wherein two lead, the power supply and the electricity Flow measurer forms a loop.

10. plate chucking device as described in claim 1, it is characterised in that: the plate chucking device further includes an at least O Type ring, around at least one of first idler wheel and second idler wheel.