CN208622683U - A kind of vacuum platform - Google Patents

A kind of vacuum platform Download PDF

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Publication number
CN208622683U
CN208622683U CN201821078069.6U CN201821078069U CN208622683U CN 208622683 U CN208622683 U CN 208622683U CN 201821078069 U CN201821078069 U CN 201821078069U CN 208622683 U CN208622683 U CN 208622683U
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China
Prior art keywords
boss
column
ontology
vacuum
independent
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CN201821078069.6U
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Chinese (zh)
Inventor
王成才
吴玑文
顾军
沈国强
刘仁琦
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Star Science And Technology Semiconductor (jiangyin) Co Ltd
Stats Chippac Semiconductor Jiangyin Co Ltd
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Star Science And Technology Semiconductor (jiangyin) Co Ltd
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Abstract

The utility model discloses a kind of vacuum platforms, belong to vacuum platform technical field.Its independent vacuum boss (20) includes boss ontology I (21) and boss column I (23), boss column I (23) is arranged in the lower section of boss ontology I (21), for open tubular column, through-hole (231) are equipped in it, boss ontology I (21) and boss column I (23) are structure as a whole, the center setting opening (211) of the boss ontology I (21), the opening (211) communicate with through-hole (231);Sealing ring I (25) are set in the middle part of the boss column I (23), sealing ring I (25) setting is corresponding with " O " type groove in base holes (11) in the middle part of boss column I (23);Several strong magnets I (22) are arranged in the lower section of the boss ontology I (21), are embedded in boss ontology I (21) using embedded close fit, and be tightly connected with pedestal (1).The vacuum platform is simple for structure, easy to use.

Description

A kind of vacuum platform
Technical field
The utility model relates to a kind of vacuum platforms, belong to vacuum platform technical field.
Background technique
Existing FCBGA vacuum platform is customized according to product size/distribution character, and different sized/distributed products need to customize Different Special vacuum platforms, and it is more demanding to levelness and vacuum tightness degree, processing technology is complicated.FCBGA product is complicated Multiplicity need to buy more set vacuum platform to meet production capacity demand, and purchase cost/storage cost is higher.Special vacuum platform valence Lattice are higher, hand over the phase longer, are unable to satisfy the control of new product introduction period cost and compared with short delivery phase demand.Meanwhile Special vacuum platform Utilization rate is low, a kind of a kind of corresponding FCBGA product of design, restricted very big and more demanding to levelness and vacuum tightness degree, Processing technology is complicated.
Summary of the invention
The purpose of the utility model is to overcome the deficiencies of existing FCBGA vacuum platform, provide a kind of for any FCBGA Product size/distribution character vacuum platform.
Purpose of the utility model is realized as follows:
A kind of vacuum platform of the utility model comprising pedestal and base holes, the base holes are distributed in the top of pedestal, The interior bone opening of the base holes is connect in bottom with vacuum system,
It further includes independent vacuum boss, and the independent vacuum boss includes boss ontology I and boss column I, and boss column I is set It sets in the lower section of boss ontology I, is open tubular column, interior to be equipped with through-hole, boss ontology I and boss column I are structure as a whole, and are in T word Opening is arranged in the center of type, the boss ontology I, and the opening is communicated with through-hole;
Sealing ring I is set in the middle part of the boss column I, and the setting of sealing ring I is at I middle part of boss column and " O " in base holes Type groove is corresponding;
Several strong magnets I are arranged in the lower section of the boss ontology I, are embedded in boss using embedded close fit Ontology I;
The independent vacuum boss is tightly connected by its I inserted base hole of boss column and pedestal.
Optionally, the opening is in " X " font, " ten " font, " O " font or " " font.
Optionally, the strong magnet I is evenly distributed on around boss column I.
A kind of vacuum platform of the utility model further includes independent closed boss, and the independent closed boss includes boss ontology II and boss column II, boss ontology II is solid platform, and the lower section of boss ontology I is arranged in boss column II, is solid post, boss Ontology II and boss column II are structure as a whole, and are in T font, the setting of sealing ring II is in II middle part of boss column with base holes 11 " O " type groove is corresponding, and the lower section of the boss ontology II is arranged several strong magnets II, is inlayed using embedded close fit In boss ontology II, the II inserted base hole of boss column of independent closed boss, pedestal is sucked in strong magnet II, and inhales completely with pedestal Affixed conjunction.
Optionally, the strong magnet II is evenly distributed on around boss column II.
Optionally, the independent closed boss is as the size of independent vacuum boss, levelness.
A kind of vacuum platform of the utility model further includes internal lock screw, and the internal lock screw and base holes are tightly connected.
Beneficial effect
The newly-designed multi-purpose type vacuum platform of the utility model, independent vacuum boss structure is succinct, and the processing is simple, uses It is convenient, it can be used for any FCBGA product size/distribution character, can achieve the levelness and vacuum tightness degree of requirement.
Detailed description of the invention
Fig. 1 is a kind of schematic diagram of vacuum platform of the utility model;
Fig. 2 is the schematic top plan view of independent vacuum boss;
Fig. 3 is the stereoscopic schematic diagram of the independent vacuum boss in Fig. 2;
Fig. 4 is the elevational schematic view of the independent vacuum boss in Fig. 2;
Fig. 5 is the stereoscopic schematic diagram of independent closed boss;
Fig. 6 is the elevational schematic view of the independent closed boss in Fig. 5;
Fig. 7 is the schematic elevation view of internal lock screw;
Fig. 8 to Figure 13 is a kind of schematic diagram of the use state of vacuum platform of the utility model;
In figure:
Pedestal 1
Base holes 11
Independent vacuum boss 20
Boss ontology I 21
Opening 211
Strong magnet I 22
Boss column I 23
Through-hole 231
Sealing ring I 25;
Independent closed boss 30
Boss ontology II 31
Boss column II 33
Strong magnet II 32
Sealing ring II 35.
Specific embodiment
Specific embodiment of the present utility model is described in detail with reference to the accompanying drawing.
Embodiment
It is a kind of vacuum platform of the utility model referring to Fig. 1, the pedestal 1 of the vacuum platform is by one piece thick alloy sheets It is process, and magnetization treatment has been carried out to the alloy sheets.It which is provided with the base holes 11 of array distribution, interior bone connection Each base holes 11(is not shown in the figure), all interior bone openings are connected in the vacuum system of bottom and board.
Independent vacuum boss 20 includes boss ontology I 21 and boss column I 23, and boss ontology I 21 and boss column I 23 are integrated Structure, is in T font, and boss column I 23 is played a supporting role.The opening 211 of center setting " X " type of boss ontology I 21, certainly, Opening 211 can also be in cross, " O " type etc., " " font etc..The lower section of boss ontology I 21 is arranged in boss column I 23, is Open tubular column, interior to be equipped with through-hole 231, opening 211 is communicated with through-hole 231.When pumping, between independent vacuum boss 20 and pedestal 1 Gas from opening 211 flow into, as shown in Figure 2.
As shown in figure 3, the setting of sealing ring I 25 is corresponding (in figure not with " O " type groove in base holes 11 at I 23 middle part of boss column It shows).When work, extruding of the sealing ring I 25 by pedestal 1 and independent vacuum boss 20 generates certain decrement, to send out Sealing function is waved, guarantees vacuum degree.
Several strong magnets I 22 are arranged in the lower section of boss ontology I 21, are embedded in boss using embedded close fit Ontology I 21.Generally, strong magnet I 22 is evenly distributed on around boss column I 23.The boss column I 23 of independent vacuum boss 20 is inserted Enter base holes 11, pedestal 1 is sucked in strong magnet I 22, and is bonded with the absorption completely of pedestal 1, and the levelness that boss ontology I 21 provides can To meet requirement, as shown in Figure 4.
Independent closed boss 30 includes boss ontology II 31 and boss column II 33, and boss ontology II 31 is solid platform, convex The lower section of boss ontology I 21 is arranged in important actor II 33, is solid post, and boss ontology II 31 and boss column II 33 are structure as a whole, In T font, boss column II 33 is played a supporting role, as shown in Figure 5.
As shown in figure 5, the setting of sealing ring II 35 is corresponding with " O " type groove in base holes 11 (in figure at the middle part of boss column II 33 It is not shown).When work, extruding of the sealing ring II 35 by pedestal 1 and independent vacuum boss 20 generates certain decrement, from And sealing function is played, guarantee vacuum degree.
Several strong magnets II 32 are arranged in the lower section of boss ontology II 31, are embedded in using embedded close fit convex Playscript with stage directions body II 31.Generally, strong magnet II 32 is evenly distributed on around boss column II 33.The boss column of independent closed boss 30 II 33 inserted base holes 11, pedestal 1 is sucked in strong magnet II 32, and is bonded with the absorption completely of pedestal 1, what boss ontology II 31 provided Levelness can satisfy requirement, as shown in Figure 6.Size, the levelness of independent closed boss 30 and independent vacuum boss 20 Equally.
When in use, according to done product size size, such as 2*4,3*8,5*10,7*14, independent vacuum can be used Boss 20 carries out plug-in unit combination, and other not used base holes 11 are blocked using independent closed boss 30, can not only guarantee true Reciprocal of duty cycle, it can also be ensured that the levelness of vacuum platform.
Selectively, other not used base holes 11 also can be used internal lock screw 3 and block (the interior bottom of interior bone Have Design of Screw Thread), as shown in fig. 7, guaranteeing vacuum degree.
Semiconductor packaging industry, vacuum platform provided by the utility model can be applied to flip-chip machine/chip sealing Machine/automatic capping machine/automatic ball-embedding machine etc. is using in the machine of vacuum platform, and such as Fig. 8 to Figure 13, same big pedestal 1 can be with Different size of independent vacuum boss 20 and independent closed boss 30 or internal lock screw 3 are applied, it is more to solve different materials use The problem of kind different vacuum platform operations.
Above-described specific embodiment, to the purpose of this utility model, technical scheme and beneficial effects carried out into It is described in detail to one step, it should be understood that being not used to the foregoing is merely specific embodiment of the present utility model Limit the protection scope of the utility model.Within the spirit and principle of the utility model, any modification for being made equally is replaced It changes, improve, should be included within the scope of protection of this utility model.

Claims (7)

1. a kind of vacuum platform comprising pedestal (1) and base holes (11), the base holes (11) are distributed in the upper of pedestal (1) The interior bone opening in portion, the base holes (11) is connect in bottom with vacuum system,
It is characterized in that, it further includes independent vacuum boss (20), the independent vacuum boss (20) includes boss ontology I (21) With boss column I (23), boss column I (23) setting is open tubular column in the lower section of boss ontology I (21), interior to be equipped with through-hole (231), boss ontology I (21) and boss column I (23) are structure as a whole, and are in T font, the center of the boss ontology I (21) is set It sets opening (211), the opening (211) communicates with through-hole (231);
Sealing ring I (25) are set in the middle part of the boss column I (23), sealing ring I (25) setting in the middle part of boss column I (23) with " O " type groove is corresponding in base holes (11);
Several strong magnets I (22) are arranged in the lower section of the boss ontology I (21), are embedded in using embedded close fit Boss ontology I (21);
The independent vacuum boss (20) is tightly connected by its boss column I (23) inserted base hole (11) and pedestal (1).
2. vacuum platform according to claim 1, which is characterized in that the opening (211) in " X " font, " ten " font, " O " font or " " font.
3. vacuum platform according to claim 1, which is characterized in that the strong magnet I (22) is evenly distributed on boss column I (23) around.
4. vacuum platform according to any one of claim 1 to 3, which is characterized in that further include independent closed boss (30), the independent closed boss (30) includes boss ontology II (31) and boss column II (33), and boss ontology II (31) is real Heart platform, boss column II (33) setting are solid post, boss ontology II (31) and boss column in the lower section of boss ontology I (21) II (33) are structure as a whole, and are in T font, and sealing ring II (35) setting is interior with base holes (11) in the middle part of boss column II (33) " O " type groove is corresponding, and the lower section of the boss ontology II (31) is arranged several strong magnets II (32), uses embedded tight fit Mode is embedded in boss ontology II (31), boss column II (33) inserted base hole (11) of independent closed boss (30), strong magnet II (32) are sucked pedestal (1), and are bonded with pedestal (1) absorption completely.
5. vacuum platform according to claim 4, which is characterized in that the strong magnet II (32) is evenly distributed on boss column Around II (33).
6. vacuum platform according to claim 4, which is characterized in that the independent closed boss (30) and independent vacuum are convex Size, the levelness of platform (20) are the same.
7. vacuum platform according to any one of claim 1 to 3, which is characterized in that further include internal lock screw (3), institute Internal lock screw (3) and base holes (11) are stated to be tightly connected.
CN201821078069.6U 2018-07-09 2018-07-09 A kind of vacuum platform Active CN208622683U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201821078069.6U CN208622683U (en) 2018-07-09 2018-07-09 A kind of vacuum platform

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201821078069.6U CN208622683U (en) 2018-07-09 2018-07-09 A kind of vacuum platform

Publications (1)

Publication Number Publication Date
CN208622683U true CN208622683U (en) 2019-03-19

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201821078069.6U Active CN208622683U (en) 2018-07-09 2018-07-09 A kind of vacuum platform

Country Status (1)

Country Link
CN (1) CN208622683U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110013931A (en) * 2019-04-26 2019-07-16 长江存储科技有限责任公司 Device and spraying method for BGA packages spraying
CN115106222A (en) * 2022-07-14 2022-09-27 贵州天义电器有限责任公司 Automatic paint spraying tool clamp for robot arm and using method of automatic paint spraying tool clamp

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110013931A (en) * 2019-04-26 2019-07-16 长江存储科技有限责任公司 Device and spraying method for BGA packages spraying
CN115106222A (en) * 2022-07-14 2022-09-27 贵州天义电器有限责任公司 Automatic paint spraying tool clamp for robot arm and using method of automatic paint spraying tool clamp

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