CN208617964U - A kind of precision metallic mask plate and mask plate component - Google Patents
A kind of precision metallic mask plate and mask plate component Download PDFInfo
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- CN208617964U CN208617964U CN201820864260.7U CN201820864260U CN208617964U CN 208617964 U CN208617964 U CN 208617964U CN 201820864260 U CN201820864260 U CN 201820864260U CN 208617964 U CN208617964 U CN 208617964U
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Abstract
The utility model relates to field of display technology, disclosing a kind of precision metallic mask plate and mask plate component, the precision metallic mask plate includes: mask plate ontology；Mask plate ontology includes the buffer area that at least one is arranged along its length and is used to prepare effective pattern area of effective display area pattern, is set to each effective pattern area two sides along the length direction of mask plate ontology, and buffer area has negative poisson's ratio structure.In the precision metallic mask plate, setting buffers have negative poisson's ratio structure, it is possible to prevente effectively from fold occurs during throwing the net in precision metallic mask plate, improve precision of throwing the net.
Description
Technical field
The utility model relates to field of display technology, in particular to a kind of precision metallic mask plate and mask plate component.
Background technique
Currently, precision metallic mask plate plays critically important effect in the preparation process of display panel, especially exist
In the preparation process of OLED display panel, directly determine whether RGB luminous organic material can be deposited phase like clockwork
On the pixel-driving circuit answered, orderly electroluminescent is realized.
For production mask plate component, need to carry out stretching of throwing the net to precision metallic mask plate, but during stretching,
The reason of surface is easy to generation fold, generates fold is mainly: precision metallic material is generally the positive Poisson's ratio metal such as Invar
Material, and the pattern of effective display area and buffer area is positive Poisson's ratio structure, under the tensile force effect in elongatedness direction,
Lengthwise dimension becomes larger, and the size of width direction reduces, and the dimensional contraction of width direction can generate receipts in exposure mask plate face
Contracting compression, since precision metallic mask plate is very thin, bending stiffness is smaller, the meeting under the action of the contract compression of face
Out-of-plane buckling phenomenon occurs, to generate fold on its surface.Wherein, fold can seriously reduce its surface flatness, Jin Erhui
Influence the quality thrown the net and be deposited.In the design of existing precision metallic mask plate, buffering can be set around effective display area
Area, the pattern that there is full etching can etch partially for buffer area buffer the purpose of fold to reach release stress, still, due to existing
The ruler of precision metallic mask plate during stretching in the width direction can not be inhibited by having the setting for the buffer area being arranged in technology
Very little contraction still has biggish contraction compression in exposure mask plate face, therefore is not obvious to the effect of buffering fold；And delay
The design for rushing area does not have versatility, for the precision metallic mask plate of each different model, require largely emulate and
Experiment is manufactured more troublesome with features such as the size of its determining buffer area and patterns.
Therefore, a kind of can solve is needed now generates buckling problems and convenient for the precision metallic mask plate of manufacture.
Utility model content
The utility model provides a kind of precision metallic mask plate and mask plate component, in the precision metallic mask plate, delays
It rushes area and is provided with negative poisson's ratio structure, it is possible to prevente effectively from fold occurs during throwing the net in precision metallic mask plate, improve and open
Net precision.
In order to achieve the above objectives, the utility model the following technical schemes are provided:
A kind of precision metallic mask plate, comprising: mask plate ontology；
The mask plate ontology includes that at least one is arranged along its length and is used to prepare effective display area pattern
Effective pattern area, the buffer area that each effective pattern area two sides are set to along the length direction of the mask plate ontology, it is described slow
Area is rushed with negative poisson's ratio structure.
In above-mentioned precision metallic mask plate, to be laterally edge and precision metallic along the length direction of precision metallic mask plate
The vertical width direction of the length direction of mask plate is longitudinal direction, and buffer area is respectively set in the two sides in effective pattern area, wherein slow
The structure for rushing area is negative poisson's ratio structure, that is, during being thrown the net, the length direction along precision metallic mask plate is to precision
When metal mask plate carries out cross directional stretch, when the negative poisson's ratio structure of buffer area is by lateral pull, can longitudinally it generate certain
Outside tensile stress, i.e., outside tension (wherein, refer in the width direction of precision metallic mask plate in outward along longitudinal direction
The direction of heart direction avris), then it also will receive certain tensile stress along longitudinal direction in effective pattern area, so, precision metallic exposure mask
The width direction of plate can be micro outward expansion, rather than shrink, precision metallic mask plate can be made integrally open and flat, be not in
Fold can achieve elimination precision metallic mask plate and occur the effect of fold during throwing the net, improves precision of throwing the net.
In above-mentioned precision metallic mask plate, setting buffers have negative poisson's ratio structure, it is possible to prevente effectively from precision metallic is covered
There is fold during throwing the net in diaphragm plate, and improves precision of throwing the net.
Preferably, the negative poisson's ratio structure includes multiple minimum repetitive units of array distribution, wherein described in each
Minimum repetitive unit includes that first for extending and being oppositely arranged along line direction draws frame and second to draw frame, and described first draws frame and second
It draws and is directed away from mutual direction protrusion in the middle part of frame, and described first draws the protruding apex portion of frame to draw the convex of frame with described second
Play the top end part vertical drawing frame connection parallel with column direction by extending direction；
Along line direction, per adjacent two between minimum repetitive units, the first of previous minimum repetitive unit draw frame with
The first of the latter minimum repetitive unit draws frame connection, and the second of the previous minimum repetitive unit draw frame with it is described latter
The second of a minimum repetitive unit draws frame connection；
Along column direction, per adjacent two between minimum repetitive unit, the second of previous minimum repetitive unit draws frame
Draw one end of frame by drawing frame vertically with vertical draw frame parallel second with the first of the latter minimum repetitive unit in one end
Connection, and the second of the previous minimum repetitive unit draws the first of the other end of frame and the latter minimum repetitive unit
Draw the other end of frame by drawing frame to connect vertically with the vertical third for drawing frame parallel.
Preferably, the first drawing frame and the second drawing frame are fold-line-shaped, and described first draws frame to include position respectively
The first rake and the second rake in the protruding apex portion two sides that described first draws frame, described second draws frame to include position respectively
Third rake and the 4th rake in the protruding apex portion two sides that described second draws frame.
Preferably, the angle between first rake and second rake is more than or equal to 100 ° and to be less than
180°；
Angle between the third rake and the 4th rake is more than or equal to 100 ° and less than 180 °.
Preferably, the negative poisson's ratio structure includes multiple minimum repetitive units of array distribution, wherein described in each
Minimum repetitive unit includes that first extended along line direction draws frame and second draw frame, draw frame and the 4th along the third that column direction extends
Draw frame；The first drawing frame, the second drawing frame, third draw frame and the 4th drawing frame with a closed area is encircled into, and described first draws frame
It is respectively in the center position protrusion far from the closed area with the part for being used to form the closed area in the second drawing frame
Arc, it is in close to the closing that the third draws and is used to form the part of the closed area in frame and the 4th drawing frame respectively
The arc of the direction protrusion at the center in region；
Along line direction, per adjacent two between minimum repetitive units, the first of previous minimum repetitive unit draw frame with
The first of the latter minimum repetitive unit draw the second of frame connection and the previous minimum repetitive unit draw frame with it is described latter
Second drawing frame of a minimum repetitive unit connects to form the second closed area；
Along column direction, per adjacent two between minimum repetitive units, the third of previous minimum repetitive unit draw frame with
The third of the latter minimum repetitive unit draw the 4th of frame connection and the previous minimum repetitive unit draw frame with it is described latter
4th drawing frame of a minimum repetitive unit even forms third closed area.
Preferably, along line direction, the first of the previous minimum repetitive unit draws frame and the latter minimum to repeat
First drawing frame of unit connects the part to be formed and the second of the previous minimum repetitive unit draws frame and described the latter
Second drawing frame of minimum repetitive unit connects the part to be formed respectively and is in the direction to the center close to second closed area
The arc of protrusion；
Along column direction, the third of the previous minimum repetitive unit draws the of frame and the latter minimum repetitive unit
Three draw the 4th of the part of frame connection and the previous minimum repetitive unit to draw frame and the latter minimum repetitive unit
The 4th drawing frame connection part be in respectively to far from second closed area center direction protrusion arc.
Preferably, the negative poisson's ratio structure includes embarking on journey to be distributed multiple minimum repetitive units, each minimum repetition
Unit includes three bar shaped open-celled structures around center line distribution, and the extended line of three bar shaped open-celled structures forms triangle
Shape, and each bar shaped open-celled structure in the three bar shaped open-celled structures and line direction is not parallel and out of plumb.
Preferably, in each minimum repetitive unit, the extended line of three bar shaped open-celled structures forms triangle
For acute triangle.
Preferably, the angle at each angle of the acute triangle is 60 °.
The utility model additionally provides a kind of mask plate component, including any one precision provided in above-mentioned technical proposal
Metal mask plate.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of precision metallic mask plate provided by the embodiment of the utility model；
Fig. 2 is a kind of negative poisson's ratio structural schematic diagram of buffer area provided by the embodiment of the utility model；
Fig. 3 is a kind of negative poisson's ratio structural schematic diagram of buffer area provided by the embodiment of the utility model；
Fig. 4 is a kind of negative poisson's ratio structural schematic diagram of buffer area provided by the embodiment of the utility model；
Icon: 1- mask plate ontology；The effective pattern area 11-；The buffer area 12-；121- minimum repetitive unit；1211- first
Draw frame；1212- second draws frame；1213- third draws frame；1214- the 4th draws frame；1215- draws frame vertically.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
Referring to FIG. 1, a kind of precision metallic mask plate provided by the embodiment of the utility model, comprising: mask plate ontology 1；
Mask plate ontology 1 includes that at least one is arranged along its length and is used to prepare effective pattern area of effective display area pattern
11, the buffer area 12 of each effective 11 two sides of pattern area is set to along the length direction of mask plate ontology 1, buffer area 12 has negative Poisson
Compare structure.
In above-mentioned precision metallic mask plate, to be laterally edge and precision metallic along the length direction of precision metallic mask plate
The vertical width direction of the length direction of mask plate is longitudinal direction, and buffer area 12 is respectively set in the two sides in effective pattern area 11,
In, the structure of buffer area 12 is negative poisson's ratio structure, that is, as shown in Figure 1, (wherein, the arrow in Fig. 1 is precision metallic exposure mask
Plate is in the schematic diagram of longitudinal tensile stress F) during being thrown the net, the length direction along precision metallic mask plate is to accurate gold
When belonging to mask plate progress cross directional stretch, when the negative poisson's ratio structure of buffer area 12 is by lateral pull, can longitudinally it generate certain
Outside tensile stress, i.e., outside tension (wherein, refer in the width direction of precision metallic mask plate in outward along longitudinal direction
The direction of heart direction avris), then it also will receive certain tensile stress along longitudinal direction in effective pattern area 11, so, precision metallic is covered
The width direction of diaphragm plate can be micro outward expansion, rather than shrink, precision metallic mask plate can be made integrally open and flat, will not be gone out
Existing fold can achieve elimination precision metallic mask plate and occur the effect of fold during throwing the net, improves precision of throwing the net.
In above-mentioned precision metallic mask plate, buffer area 12 is provided with negative poisson's ratio structure, it is possible to prevente effectively from precision metallic
There is fold during throwing the net in mask plate, and improves precision of throwing the net.
In above-mentioned precision metallic mask plate, the set-up mode of the negative poisson's ratio structure of buffer area 12 can there are many selection,
Such as:
Mode one:
In conjunction with Fig. 1, as shown in Fig. 2, negative poisson's ratio structure includes multiple minimum repetitive units 121 of array distribution, wherein
Each minimum repetitive unit 121 includes that first for extending and being oppositely arranged along line direction draws frame 1211 and second to draw frame 1212,
The middle part of first drawing frame 1211 and the second drawing frame 1212 is directed away from mutual direction protrusion, and the protrusion top of the first drawing frame 1211
End is connect with the protruding apex portion of the second drawing frame 1212 by the extending direction vertical drawing frame 1215 parallel with column direction；Along row
Direction, per adjacent two between minimum repetitive unit 121, the first of previous minimum repetitive unit 121 draws frame 1211 with after
The first of one minimum repetitive unit 121 draws frame 1211 to connect, and the second of previous minimum repetitive unit 121 draw frame 1212 with
The second of the latter minimum repetitive unit 121 draws frame 1212 to connect；Along column direction, the minimum repetitive unit 121 per adjacent two
Between, the second of previous minimum repetitive unit 121 draws one end of frame 1212 and the first of the latter minimum repetitive unit 121 to draw
One end of frame 1211 with vertical the second vertical drawing frame 1215 for drawing frame 1215 parallel by connecting, and previous minimum repetitive unit
121 second draw frame 1212 the other end and the latter minimum repetitive unit 121 first draw frame 1211 the other end by with
The vertical third for drawing frame 1215 parallel draws frame 1215 to connect vertically.The line direction of above-mentioned array distribution and precision metallic mask plate
Length direction is parallel, i.e., first draws frame 1211 and second to draw the extending direction of frame 1212 along the length direction of precision metallic mask plate
(transverse direction) setting, it is vertical to draw frame 1215 parallel with width direction (longitudinal direction) of precision metallic mask plate, due to the first drawing frame 1211
Mutual direction protrusion is faced away from the middle part of the second drawing frame 1212, i.e., first draws frame 1211 and second to draw frame 1212 for bending
Shape, first draws the middle part of frame 1211 to form the protruding apex for drawing frame 1212 away from second, and the middle part of the second drawing frame 1212
Also the protruding apex that frame 1211 is drawn away from first is formed, first draws the protruding apex of frame 1211 to draw the convex of frame 1212 with second
It plays top to be aligned along longitudinal direction, and the protruding apex of the protruding apex of the first drawing frame 1211 and the second drawing frame 1212 by drawing frame vertically
1215 connection, when transversely stretch precision metallic mask plate thrown the net when, first draw frame 1211 with second drawing frame 1212 by
Along the pulling force of extending direction, and due to drawing the support of frame 1215 then first vertically between the first drawing frame 1211 and the second drawing frame 1212
Draw frame 1211, second that frame 1212 and the vertical structure for drawing frame 1215 to be formed is drawn longitudinally to generate outside tension, then effectively
Pattern area 11 will receive outside tensile stress along longitudinal direction, effectively avoid effective pattern area 11 from generating fold, and aforesaid way is a kind of
First frame 1211, second is drawn to draw frame 1212 and the vertical structure for drawing frame 1215 to be formed simple, it is easily fabricated.
In aforesaid way one, the first drawing frame 1211 and the second drawing frame 1212 are fold-line-shaped, and the first drawing frame 1211 includes
It is located at the first rake and the second rake of the protruding apex portion two sides of the first drawing frame 1211, the second drawing frame 1212 includes
It is located at the third rake and the 4th rake of the protruding apex portion two sides of the second drawing frame 1212.First draws frame 1211 and the
Two to draw frames 1212 be fold-line-shaped, i.e., first draws the first rake of frame 1211 and the second rake and the second drawing frame 1212
Third rake and the 4th rake are linear type, structural preferable, and convenient for manufacture.
Specifically, the angle between the first rake and the second rake is more than or equal to 100 ° and less than 180 °；The
Angle between three rakes and the 4th rake is more than or equal to 100 ° and less than 180 °.It is selected between 100 °~180 °
Proper angle is as the formation angle between the first rake and the second rake and between third rake and the 4th rake
Degree can make when first draws the second of 1211 sum of frame to draw pulling force of the frame 1212 by extending direction, and first draws frame 1211, the
Two drawing frames 1212 and the vertical structure for drawing frame 1215 to be formed are being longitudinally formed suitable outside tension, are conducive to make effectively figure
Case area 11, by suitable tensile stress, is conducive to preferably avoid generating except fold, avoid since stress is improper in longitudinal direction
And generate other adverse effects.
Mode two:
In conjunction with Fig. 1, as shown in figure 3, negative poisson's ratio structure includes multiple minimum repetitive units 121 of array distribution, wherein
Each minimum repetitive unit 121 includes that the first drawing frame 1211 extended along line direction and second draw frame 1212, prolong along column direction
The third stretched draws frame 1213 and the 4th to draw frame 1214；First draws frame 1211, second to draw frame 1212, third that frame 1213 and the 4th is drawn to draw
Frame 1214 is used to form the part point of closed area with a closed area is encircled into the first drawing frame 1211 and the second drawing frame 1212
It Cheng not be drawn to the arc of the center position protrusion far from closed area, third in frame 1213 and the 4th drawing frame 1214 and be used to form envelope
The part of closed region is in the arc to the direction protrusion at the center close to closed area respectively；Along line direction, per adjacent two
Between minimum repetitive unit 121, the first of previous minimum repetitive unit 121 draws frame 1211 and the latter minimum repetitive unit
It is single that the first of 121 draws the second drawing frame 1212 of the connection of frame 1211 and previous minimum repetitive unit 121 and the latter minimum to repeat
The second of member 121 draws the connection of frame 1212 to form the second closed area；Along column direction, the minimum repetitive unit 121 per adjacent two
Between, the third of previous minimum repetitive unit 121 draws the third of frame 1213 and the latter minimum repetitive unit 121 to draw frame 1213
The 4th of the 4th drawing frame 1214 and the latter minimum repetitive unit 121 of connection and previous minimum repetitive unit 121 draws frame
1214 even form third closed area.The line direction of array distribution in aforesaid way two and the length side of precision metallic mask plate
Shape is arranged in parallel, i.e., length direction (transverse direction) extension of the first drawing frame 1211 with the second drawing frame 1212 along precision metallic mask plate is set
It sets, third draws frame 1213 and the 4th that frame 1214 is drawn to be extended along the width direction (longitudinal direction) of precision metallic mask plate, transversely
When stretching precision metallic mask plate is thrown the net, first draws frame 1211 and the second drawing frame 1212 to be used to form the part of closed area
It is curved arc structure, it is also bending that third, which draws frame 1213 and the 4th drawing frame 1214 to be used to form the part of closed area,
Arc structure, first draws frame 1211 to draw frame 1212 by lateral pulling force with second, and first draws the drawing frame 1212 of frame 1211, second
And the structure that third draws frame the 1213, the 4th that frame 1214 is drawn to be formed can generate outside tension along longitudinal direction, then effective pattern area 11
It will receive outside tensile stress along longitudinal direction, effective pattern area 11 effectively avoided to generate fold.
In aforesaid way two, along line direction, the first of previous minimum repetitive unit 121 draws frame 1211 and the latter minimum
The second of part and previous minimum repetitive unit 121 that the first of repetitive unit 121 draws the connection of frame 1211 to be formed draws frame
1212 parts for connecting formation with the second drawing frame 1212 of the latter minimum repetitive unit 121 are in close second enclosed area respectively
The arc of the direction protrusion at the center in domain；Along column direction, the third of previous minimum repetitive unit 121 draws frame 1213 and the latter
The 4th of part and previous minimum repetitive unit 121 that the third of minimum repetitive unit 121 draws frame 1213 to connect draws frame
1214 parts connecting with the 4th drawing frame 1214 of the latter minimum repetitive unit 121 are in far from the second closed area respectively
The arc of the direction protrusion at center.
Mode three:
In conjunction with Fig. 1, as shown in figure 4, negative poisson's ratio structure includes embarking on journey to be distributed multiple minimum repetitive units 121, each most
Small repetitive unit 121 includes three bar shaped open-celled structures around center line distribution, and the extension of three bar shaped open-celled structures is linear
Each bar shaped open-celled structure at triangle, and in three bar shaped open-celled structures and line direction is not parallel and out of plumb.Wherein, around
Three bar shaped open-celled structures of one center line distribution form a bar shaped groups of openings, have multirow arrangement in a row in negative poisson's ratio structure
Multiple minimum repetitive units 121 in, per two adjacent rows in each bar shaped groups of openings can be aligned setting, can not also be right
Neat setting, that is, shift to install, when each bar shaped groups of openings in two adjacent rows shifts to install, then in two adjacent rows,
With above-mentioned in adjacent two bar shaped open-celled structures and the second row in two adjacent bar shaped groups of openings in middle the first row
The corresponding bar shaped open-celled structure of adjacent two bar shaped open-celled structure in a line can form a new bar shaped aperture
Group.Negative poisson's ratio structure is formed above by bar shaped open-celled structure is opened up in buffer area 12, structure is simple, convenient for manufacture.
In aforesaid way three, in each minimum repetitive unit 121, the extended line of three bar shaped open-celled structures forms triangle
For acute triangle.
Specifically, the angle at each angle of acute triangle is 60 °.The extended line of three bar shaped open-celled structures intersects shape
At equilateral triangle, forms shape and compare specification, convenient for the manufacture of three bar shaped open-celled structures.
The utility model embodiment additionally provides a kind of mask plate component, including any one provided in above-described embodiment
Precision metallic mask plate.
Obviously, those skilled in the art the utility model embodiment can be carried out various modification and variations without departing from
The spirit and scope of the utility model.In this way, if these modifications and variations of the present invention belong to the utility model right
It is required that and its within the scope of equivalent technologies, then the utility model is also intended to include these modifications and variations.
Claims (10)
1. a kind of precision metallic mask plate characterized by comprising mask plate ontology；
The mask plate ontology includes that at least one is arranged along its length and is used to prepare the effective of effective display area pattern
Pattern area, the buffer area that each effective pattern area two sides are set to along the length direction of the mask plate ontology, the buffer area
With negative poisson's ratio structure.
2. precision metallic mask plate according to claim 1, which is characterized in that the negative poisson's ratio structure includes array point
Multiple minimum repetitive units of cloth, wherein each described minimum repetitive unit includes extending and being oppositely arranged along line direction
First draws frame and the second drawing frame, is directed away from mutual direction protrusion in the middle part of the first drawing frame and the second drawing frame, and described
First draws the protruding apex portion of frame to draw the protruding apex portion of frame to pass through vertical parallel with column direction of extending direction with described second
Draw frame connection；
Along line direction, per adjacent two between minimum repetitive units, the first of previous minimum repetitive unit draw frame with it is latter
The first of a minimum repetitive unit draws frame connection, and the second of the previous minimum repetitive unit draws frame and described the latter most
The second of small repetitive unit draws frame connection；
Along column direction, per adjacent two between minimum repetitive unit, the second of previous minimum repetitive unit draws one end of frame
With one end of the first drawing frame of the latter minimum repetitive unit by being connect with the vertical second vertical drawing frame for drawing frame parallel,
And the second of the previous minimum repetitive unit draws the other end of frame and the first of the latter minimum repetitive unit to draw frame
The other end by vertical the parallel third of frame being drawn to draw frame to connect vertically with described.
3. precision metallic mask plate according to claim 2, which is characterized in that described first draws frame and described second to draw frame
It is fold-line-shaped, and the first drawing frame includes the first rake for being located at the protruding apex portion two sides that described first draws frame
With the second rake, the second drawing frame includes the third rake for being located at the protruding apex portion two sides that described second draws frame
With the 4th rake.
4. precision metallic mask plate according to claim 3, which is characterized in that first rake inclines with described second
Angle between inclined portion is more than or equal to 100 ° and less than 180 °；
Angle between the third rake and the 4th rake is more than or equal to 100 ° and less than 180 °.
5. precision metallic mask plate according to claim 1, which is characterized in that the negative poisson's ratio structure includes array point
Multiple minimum repetitive units of cloth, wherein each described minimum repetitive unit include first extended along line direction draw frame and
Second draws frame, draws frame and the 4th to draw frame along the third that column direction extends；Described first draws frame, second that frame, third is drawn to draw frame and the
Four drawing frames are used to form the part point of the closed area with a closed area is encircled into the first drawing frame and the second drawing frame
It Cheng not be drawn to the arc of the center position protrusion far from the closed area, the third in frame and the 4th drawing frame and be used to form institute
State closed area part be in respectively to close to the closed area center direction protrusion arc；
Along line direction, per adjacent two between minimum repetitive units, the first of previous minimum repetitive unit draw frame with it is latter
The first of a minimum repetitive unit draws the second of frame connection and the previous minimum repetitive unit to draw frame and described the latter most
Second drawing frame of small repetitive unit connects to form the second closed area；
Along column direction, per adjacent two between minimum repetitive units, the third of previous minimum repetitive unit draw frame with it is latter
The third of a minimum repetitive unit draws the 4th of frame connection and the previous minimum repetitive unit to draw frame and described the latter most
4th drawing frame of small repetitive unit even forms third closed area.
6. precision metallic mask plate according to claim 5, which is characterized in that along line direction, the previous minimum weight
First drawing frame of multiple unit draws frame to connect the part to be formed and described previous with the first of the latter minimum repetitive unit
Second drawing frame of a minimum repetitive unit connect the part to be formed with the second drawing frame of the latter minimum repetitive unit and distinguishes
In the arc of the direction protrusion to the center close to second closed area；
Along column direction, the third of the previous minimum repetitive unit draws the third of frame and the latter minimum repetitive unit to draw
The 4th of the part of frame connection and the previous minimum repetitive unit draws the of frame and the latter minimum repetitive unit
The part of four drawing frame connections is in the arc to the direction protrusion at the center far from second closed area respectively.
7. precision metallic mask plate according to claim 1, which is characterized in that the negative poisson's ratio structure includes embarking on journey point
Multiple minimum repetitive units of cloth, each minimum repetitive unit include three bar shaped aperture knots around center line distribution
Structure, the extended line of three bar shaped open-celled structures form triangle, and each bar shaped in three bar shaped open-celled structures
Open-celled structure and the minimum repetitive unit embark on journey distribution line direction is not parallel and out of plumb.
8. precision metallic mask plate according to claim 7, which is characterized in that in each minimum repetitive unit, institute
It is acute triangle that the extended line for stating three bar shaped open-celled structures, which forms triangle,.
9. precision metallic mask plate according to claim 8, which is characterized in that the angle at each angle of the acute triangle
Degree is 60 °.
10. a kind of mask plate component, which is characterized in that including the described in any item precision metallic mask plates of such as claim 1-9.
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| CN201820864260.7U CN208617964U (en) | 2018-06-05 | 2018-06-05 | A kind of precision metallic mask plate and mask plate component |
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| CN201820864260.7U CN208617964U (en) | 2018-06-05 | 2018-06-05 | A kind of precision metallic mask plate and mask plate component |
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| CN111411323A (en) * | 2020-03-31 | 2020-07-14 | 云谷（固安）科技有限公司 | Mask plate |
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| CN114807844A (en) * | 2022-04-25 | 2022-07-29 | 维信诺科技股份有限公司 | Mask plate and mask plate assembly |
| CN115261785A (en) * | 2022-08-04 | 2022-11-01 | 常州高光半导体材料有限公司 | Mask and mask assembly |
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| CN110257767A (en) * | 2019-05-06 | 2019-09-20 | 京东方科技集团股份有限公司 | The production method of the acquisition methods of mask strips material properties, device and mask plate |
| CN110257767B (en) * | 2019-05-06 | 2021-05-07 | 京东方科技集团股份有限公司 | Mask strip material attribute obtaining method and device and mask plate manufacturing method |
| CN111411323A (en) * | 2020-03-31 | 2020-07-14 | 云谷（固安）科技有限公司 | Mask plate |
| CN111696442A (en) * | 2020-06-17 | 2020-09-22 | 合肥维信诺科技有限公司 | Flexible screen folding cover plate, preparation method thereof and flexible display module |
| CN111850466A (en) * | 2020-07-30 | 2020-10-30 | 昆山国显光电有限公司 | Mask and evaporation device |
| CN111850467A (en) * | 2020-08-04 | 2020-10-30 | 京东方科技集团股份有限公司 | Metal mask plate assembly, OLED display panel and display device |
| CN111850467B (en) * | 2020-08-04 | 2022-08-02 | 京东方科技集团股份有限公司 | Metal mask plate assembly, OLED display panel and display device |
| CN114807844A (en) * | 2022-04-25 | 2022-07-29 | 维信诺科技股份有限公司 | Mask plate and mask plate assembly |
| CN115261785A (en) * | 2022-08-04 | 2022-11-01 | 常州高光半导体材料有限公司 | Mask and mask assembly |
| CN115261785B (en) * | 2022-08-04 | 2024-04-19 | 常州高光半导体材料有限公司 | Mask plate and mask plate assembly |
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