CN208588760U - Detection system and probe unit - Google Patents
Detection system and probe unit Download PDFInfo
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- CN208588760U CN208588760U CN201821251003.2U CN201821251003U CN208588760U CN 208588760 U CN208588760 U CN 208588760U CN 201821251003 U CN201821251003 U CN 201821251003U CN 208588760 U CN208588760 U CN 208588760U
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- probe
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Abstract
The utility model discloses detection system and probe units.A kind of probe unit and include the probe unit detection system.Probe unit includes multiple first probes and at least one second probe, and the first probe and the second probe correspond to the detection device that detection system is electrically connected by the first electric connection line and the second electric connection line.When the pin of the transistor of multiple first probe touch panels, when carrying out leakage current test, the second probe is not in contact with panel.Detection device will can generate a result information according to the measurement of the first probe and the measurement of the second probe with corresponding.Related personnel or computer equipment can more accurately learn the measurement of the first probe according to result information.
Description
Technical field
The utility model relates to a kind of detection system and probe unit, especially a kind of leakage current suitable for transistor is examined
The detection system and probe unit of survey.
Background technique
As the size of the transistor of display panel is smaller and smaller, the numerical value of the leakage current of transistor is also smaller and smaller, and
With existing associated assay devices, when carrying out leakage current test to the relatively small transistor of size, the signal of leakage current is often
It can mix in ambient noise, and be not easy to be resolved；In other words, associated computer device or personnel, and can not be from probe institute
Measure includes to isolate correct leakage current signal in the detection signal of ambient noise.So, the transistor of display panel
Substantial amounts will even if single a transistor only generates micro leakage current, but when the leakage current aggregation of all transistors generation
Display panel can be caused significantly to influence.Therefore it is opposite that size how is effectively detected out for coherent detection manufacturer
The leakage current signal of lesser transistor, becomes one of urgent problem.
The power source (motor) or the vacuum motor needed for Environmental Negative-pressure that there be equipment in the source of aforesaid environmental noise etc. are all
Necessity component of more automation equipments generates electric power variation because of drive control, thus detection wire rod is induced and can be interfered
The ambient noise of testing result；Furthermore the ambient noise system of different location is different on determinand, if merely with some quantization
Value represents the ambient noise of different location on determinand, then its measurement is not objective enough and correct.
That is, the transistor leakage flow assay device of existing display panel, can not correctly measure transistor
Leakage current, and related personnel will be unable to the related structure to display panel in the case where that can not measure the leakage current of transistor
Part carries out improvement design, the case where to control leakage current caused by each transistor.
Utility model content
The main purpose of the utility model is to provide a kind of detection system and probe units, pass through setting for the second probe
It sets, the environmental signal that detection device will can be measured by the second probe, and more effectively parses the first probe measuring part to be measured
Testing result.
To achieve the goals above, the utility model provides a kind of detection system, to carry out an inspection to a part to be measured
Operation is surveyed, which includes: a detection device, and it includes have an at least processing unit；One probe unit is electrically connected
The detection device, which includes: an ontology；Multiple first probes are set to the ontology, multiple first probes
Part exposes to the ontology, and multiple first probes are electrically connected to the detection device by multiple first electric connection lines；At least
One the second probe, is set to the ontology, which is electrically connected to the detection device by one second electric connection line；
Wherein, multiple first probes contact multiple positions to be measured of the part to be measured, to be electrically connected with the part to be measured, and carry out the inspection
When surveying operation, which is not electrically connected with the part to be measured, which can be measured according to multiple first probes
Result and second probe measured as a result, generate a result information.
Preferably, each first electric connection line and second electric connection line select same material, and each first electricity
Connecting line and the second electric connection line routing path having the same；The part of second probe exposes to the ontology.
Preferably, what which can be measured according to second probe is measured as a result, corresponding to and eliminating first probe
Partial noise present in the result of survey, to generate the result information.
Preferably, which is a panel, which includes multiple transistors, and multiple first probes are to detect
Each transistor of the panel.
Preferably, which exposes to the length of the ontology, exposes to the ontology no more than each first probe
Length；Or first probe expose to the ontology length it is identical as the length that second probe exposes to the ontology, and
Angle of the first probe of the ontology relative to the ontology is exposed to, and exposes to the second probe of the ontology relative to the ontology
Angle it is different.
To achieve the goals above, the utility model also provides a kind of probe unit, is electrically connected a detection device, should
Probe unit is to carry out a detection operation to a part to be measured, which includes: an ontology；Multiple first probes, set
It is placed in the ontology, the part of multiple first probes exposes to the ontology, and multiple first probes are electrically connected by multiple first
Line is electrically connected to the detection device；At least one second probe, is set to the ontology, which passes through one second electricity
Connecting line is electrically connected to the detection device；Wherein, to be measured to be electrically connected this when multiple first probes contact the part to be measured
Part, and when carrying out the detection operation to the part to be measured, which is not electrically connected with the part to be measured.
Preferably, each first electric connection line and second electric connection line select same material, and each first electricity
Connecting line and the second electric connection line routing path having the same；The part of second probe exposes to the ontology.
Preferably, which is a panel, transistor of multiple first probes to detect the panel.
Preferably, the part of second probe exposes to the ontology, and second probe exposes to the length of the ontology, no
Greater than the length that each first probe exposes to the ontology.
Preferably, the part of second probe exposes to the ontology, and second probe expose to the length of the ontology with
The length that each first probe exposes to the ontology is mutually the same, and exposes to the first probe of the ontology relative to the ontology
Angle, it is different relative to the angle of the ontology from the second probe for exposing to the ontology.
The beneficial effects of the utility model can be: pass through the second probe that will not be in contact with part to be measured (panel)
Setting, can be collected into environmental signal when the first probe carries out detection operation to part to be measured, so as to utilize environmental signal
With the resulting detection signal of the first probe measuring part to be measured, a result information is generated with corresponding, and related personnel or computer are set
It is standby, the result of the first probe measuring part to be measured can be more accurately learnt by the result information.
Detailed description of the invention
Fig. 1 is the schematic diagram of the detection system of the utility model.
Fig. 2 is the block schematic diagram of the detection system of the utility model.
Fig. 3 is that the probe unit of the utility model is contacted with the schematic diagram of part to be measured.
Fig. 4 is the schematic diagram that the probe unit of the utility model is contacted with another embodiment of part to be measured.
Specific embodiment
Also referring to Fig. 1 to Fig. 3, Fig. 1 is the schematic diagram of the detection system of the utility model, and Fig. 2 is the utility model
Detection system block schematic diagram, Fig. 3 be the utility model probe unit schematic diagram.As shown, detection system 100
Include a detection device 10 and a probe unit 20.Probe unit 20 is electrically connected detection device 10, and probe unit 20 is to measure
Survey the electrical characteristic of part D to be measured (such as transistor of display panel).Detection device 10 includes a processing unit 11, processing dress
The measurement signal that probe unit 20 is transmitted can be received by setting 11, and be analyzed accordingly, so that corresponding generate result letter
Breath 111.In a particular application, it includes display screen that detection device 10, which can be, and detection device 10 can be with data, figure
Result information 111 is presented in display screen by the modes such as formula, for related personnel's viewing.Certainly, detection device 10 is also possible to
By correlated results information 111, it is transferred to remote server, and related personnel can be and obtain result information by remote server
111.The detection device 10 is, for example, computer system etc., and signal needed for can provide test or reception probe unit 20 are passed
The signal come, it is without restriction in this.
Probe unit 20 includes an ontology 21, multiple first probes 22 and one second probe 23.Multiple first probes 22
It is set to ontology 21, the part of multiple first probes 22 exposes to ontology 21, and multiple first probes 22 are electrically connected by multiple first
Wiring 24 is electrically connected to detection device 10.Second probe 23 is set to ontology 21, and the second probe 23 passes through one second electrical connection
Line 25 is electrically connected to detection device 10.Wherein, each first electric connection line 24 and the second electric connection line 25 select same material；
Each first electric connection line 24 and the routing path having the same of the second electric connection line 25, that is to say, that each first electrically connects
Connect 24 and second electric connection line 25 to be connected to the length of detection device 10, posture (such as bending state of electric connection line) etc. all big
It causes identical.About the quantity and its size of the first probe 22, it can be and changed according to demand, it is without restriction in this；But
It must be, it is emphasized that the probe unit 20 of the present embodiment meaning be especially the probe to detect the transistor of display panel.
Since first probe 22 is electrically connected the detection device 10 by the first electric connection line 24；Second probe 23
It is electrically connected the detection device 10 by the second electric connection line 25, the part of second probe 23 exposes to ontology 21, and should
First electric connection line 24 has roughly the same length, posture with the second electric connection line 25, therefore, when the first probe 22 is being treated
When different location is measured on survey object D, which can also measure corresponding environmental signal in this position in real time.
Also, aforementioned first electric connection line 24 and the second electric connection line 25 be set to same cable track (cable track) and
Routing path having the same.
As shown in figure 3, in this present embodiment, to be with probe unit 20 only include single the second probe 23, and second
Probe 23 be correspondingly arranged at the periphery of ontology 21, but, the quantity of the second probe 23 and its relative to multiple first
The setting position of probe 22, not to be limited as shown in the figure；In different applications, ontology 21 is also possible to be provided with 2 or more
The second probe 23, and the second probe 23 is also possible to corresponding be located in multiple first probes 22.
Fig. 3 is shown as the schematic diagram that probe unit 20 detects part D to be measured (such as transistor of panel).Work as probe
When device 20 detects part D to be measured, multiple first probes 22 are contacted with multiple positions to be measured of part D to be measured by corresponding to, and
Second probe 23 will not be contacted with part D to be measured.
In specific application, the external form and its opposite length for exposing to ontology 21 of the first probe 22 and the second probe 23
Degree can be according to Demand Design, only be set up in ontology 21 in this without restriction or even second probe 23 and not expose to this
Body 21, as long as and the second probe 23 when each first probe 22 is contacted with the position to be measured of part D to be measured, the second probe 23 will not
Contact measured part, no matter the first probe 22 and the second probe 23 are which kind of external form, length, all should belong to the implementation of the utility model
In range.
Also referring to Fig. 3 and Fig. 4, it is shown as the first probe 22 and the second probe 23 is connected with ontology 21, and the
The schematic diagram of different embodiments when one probe 22 is contacted with the position to be detected of part D to be measured.As shown in figure 3, one real wherein
It applies in example, the second probe 23 exposes to the length outside ontology 21, can be the length exposed to outside ontology 21 less than the first probe 22
Degree, and when the first probe 22 is in contact with the position to be detected of part D to be measured, the second probe 23 will not connect with part D to be measured
Touching.As shown in figure 4, in another embodiment, the length that the second probe 23 and the first probe 22 expose to outside ontology 21 can be
It is roughly the same, but connection angle of second probe 23 relative to ontology 21, it is greater than the angle that the first probe 22 is connected to ontology 21
Degree, and when the first probe 22 is in contact with the position to be measured of part D to be measured, the second probe 23 is will not to be contacted with part D to be measured.When
So, how when the first probe 22 is in contact with part D to be measured, so that the second probe 23 is not contacted with the mode of part D to be measured, can be
According to changes in demand, it is not limited to the mode of above two embodiment.
It please join Fig. 1 to Fig. 3 again, when multiple first probes 22 are contacted with multiple positions to be measured of part D to be measured, to carry out correlation
When detection, each first probe 22 to part D to be measured detected corresponding to generate electric signal, will be electrically connected by corresponding first
Wiring 24 is transferred to detection device 10.Relatively, when the first probe 22 is contacted with part D to be measured, detection device 10 can also pass through
One electric connection line 24 and the first probe 22 are to transmit relevant electric signal to part D to be measured.
The detection system 100 and probe unit 20 of the utility model can be multiple transistors for detecting display panel
Leakage current.Probe unit 20 over there plate each transistor carry out leakage current test when, can be three the first probes 22
Corresponding three pins for contacting single a transistor, processing unit 11, which can be, first passes through corresponding two the first electric connection lines
24 and corresponding two the first probes 22 transmit electric signal to transistor two of them pin, then pass through another first probe
22 and corresponding first electric connection line 24 measure transistor leakage current.
The processing unit 11 of detection device 10 can receive simultaneously passes through the first electric connection line 24 from each first probe 22
The signal and the second probe 23 transmitted passes through the signal that the second electric connection line 25 is transmitted, and processing unit 11 can be according to second
The detection signal 221 that the environmental signal 231 and each first probe 22 that probe 23 is measured are measured, correspondence parse inspection
It surveys in signal 221, the leakage current signal that actual amount measures.That is, the environmental signal 231 that the second probe 23 is measured, it will
It can be used as the reference information for the noise signal that processing unit 11 parses in the detection signal 221 that the first probe 22 is measured, and locate
Reason device 11 will isolate the stream information that veritably leaks electricity in the detection signal 221 that can be measured accordingly by the first probe 22.
In a particular application, processing unit 11 according to multiple first probes 22 and the second probe 23 measured as a result, right
The result information 111 that should be generated, can be includes the information for having isolated really electric leakage stream information.That is, place
Reason device 11 can be the environmental signal 231 measured according to the second probe 23, eliminate the inspection that the first probe 22 is measured accordingly
The partial noise in the presence of signal 221 is surveyed, to generate result information 111.
Also, the probe unit 20 may be selected to be set to a mobile mechanism (figure is not shown), and be somebody's turn to do in aforementioned each embodiment
Mobile mechanism can be a multi-axis mechanical arm or gantry mechanism, and the probe unit 20 can be enabled mobile relative to part D to be measured.
Claims (10)
1. a kind of detection system, which is characterized in that the detection system is to carry out a detection operation, the inspection to a part to be measured
Examining system includes:
One detection device includes an at least processing unit；
One probe unit is electrically connected the detection device, and the probe unit includes:
One ontology；
Multiple first probes, are set to the ontology, and a part of first probe exposes to the ontology, and multiple described
One probe is electrically connected to the detection device by multiple first electric connection lines；
At least one second probe, is set to the ontology, and second probe is electrically connected to by one second electric connection line
The detection device；
Wherein, multiple first probes contact multiple positions to be measured of the part to be measured, to be electrically connected with the part to be measured,
When carrying out the detection operation, second probe is not electrically connected with the part to be measured, and the processing unit can be according to multiple
It is that the result and second probe that first probe is measured are measured as a result, generate a result information.
2. detection system according to claim 1, which is characterized in that each first electric connection line and second electricity
Connecting line selects same material, and each first electric connection line and the second electric connection line wiring topology having the same
Diameter；A part of second probe exposes to the ontology.
3. detection system according to claim 1, which is characterized in that the processing unit can be according to the second probe institute
It is measuring to eliminate partial noise present in the result that first probe is measured as a result, corresponding to, to generate the result letter
Breath.
4. detection system according to claim 1, which is characterized in that the part to be measured is a panel, and the panel includes
There are multiple transistors, each transistor of multiple first probes to detect the panel.
5. detection system according to claim 1, which is characterized in that the part of second probe exposes to described
Body, and second probe exposes to the length that the length of the ontology exposes to the ontology no more than each first probe
Degree；Or first probe exposes to the length of the ontology and exposes to the length phase of the ontology with second probe
Together, angle of the first probe of the ontology relative to the ontology is exposed to, with the second probe phase for exposing to the ontology
It is different for the angle of the ontology.
6. a kind of probe unit, which is characterized in that the probe unit is electrically connected a detection device, the probe unit to
One detection operation is carried out to a part to be measured, the probe unit includes:
One ontology；
Multiple first probes, are set to the ontology, and a part of first probe exposes to the ontology, and multiple described
One probe is electrically connected to the detection device by multiple first electric connection lines；
At least one second probe, is set to the ontology, and second probe is electrically connected to by one second electric connection line
The detection device；
Wherein, when multiple first probes contact the part to be measured, to be electrically connected the part to be measured, to the part to be measured into
When the row detection operation, second probe is not electrically connected with the part to be measured.
7. probe unit according to claim 6, which is characterized in that each first electric connection line and second electricity
Connecting line selects same material, and each first electric connection line and the second electric connection line wiring topology having the same
Diameter；A part of second probe exposes to the ontology.
8. probe unit according to claim 6, which is characterized in that the part to be measured be a panel, multiple described first
Transistor of the probe to detect the panel.
9. probe unit according to claim 6, which is characterized in that a part of second probe exposes to described
Body, and second probe exposes to the length that the length of the ontology exposes to the ontology no more than each first probe
Degree.
10. probe unit according to claim 6, which is characterized in that a part of second probe exposes to described
Ontology, and second probe exposes to the length of the ontology and each first probe exposes to the length of the ontology
It is mutually the same, and expose to angle of the first probe of the ontology relative to the ontology, and expose to the of the ontology
Two probes are different relative to the angle of the ontology.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821251003.2U CN208588760U (en) | 2018-08-03 | 2018-08-03 | Detection system and probe unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821251003.2U CN208588760U (en) | 2018-08-03 | 2018-08-03 | Detection system and probe unit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208588760U true CN208588760U (en) | 2019-03-08 |
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ID=65542958
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821251003.2U Withdrawn - After Issue CN208588760U (en) | 2018-08-03 | 2018-08-03 | Detection system and probe unit |
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| CN (1) | CN208588760U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110850126A (en) * | 2018-08-03 | 2020-02-28 | 均豪精密工业股份有限公司 | Detection system, probe device and panel detection method |
-
2018
- 2018-08-03 CN CN201821251003.2U patent/CN208588760U/en not_active Withdrawn - After Issue
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110850126A (en) * | 2018-08-03 | 2020-02-28 | 均豪精密工业股份有限公司 | Detection system, probe device and panel detection method |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20190308 Effective date of abandoning: 20221227 |
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| AV01 | Patent right actively abandoned |
Granted publication date: 20190308 Effective date of abandoning: 20221227 |