CN208580219U - A kind of mask clamping fixture - Google Patents

A kind of mask clamping fixture Download PDF

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Publication number
CN208580219U
CN208580219U CN201821120696.1U CN201821120696U CN208580219U CN 208580219 U CN208580219 U CN 208580219U CN 201821120696 U CN201821120696 U CN 201821120696U CN 208580219 U CN208580219 U CN 208580219U
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CN
China
Prior art keywords
mask
fixture
clamping fixture
optical element
item
Prior art date
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Active
Application number
CN201821120696.1U
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Chinese (zh)
Inventor
刘景峰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BEIJING QIFENG LANDA OPTICAL TECHNOLOGY DEVELOPMENT CO LTD
Original Assignee
BEIJING QIFENG LANDA OPTICAL TECHNOLOGY DEVELOPMENT CO LTD
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Application filed by BEIJING QIFENG LANDA OPTICAL TECHNOLOGY DEVELOPMENT CO LTD filed Critical BEIJING QIFENG LANDA OPTICAL TECHNOLOGY DEVELOPMENT CO LTD
Priority to CN201821120696.1U priority Critical patent/CN208580219U/en
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Abstract

A kind of combined optical element mask clamping fixture comprising: chuck body is provided with the circular clamp of square hole centered on the chuck body;For in the optical element film coated mask plate for blocking the optical element in the process;With several fixture items for being detachably mounted to the mask plate in the chuck body.A kind of mask clamping fixture disclosed in the utility model, it is applied in combination by using dismountable mask plate and the circular die with square hole, it solves traditional coating clamp and is not easy to realize the problem of optical element surface different zones are coated with different film layers or different zones are coated with film layer and are not coated with film layer.In addition, the not super 0.5-1mm of bottom Mask portion thickness of mask plate, not will cause the problem of film layer is coated with middle empty film.The processing is simple for this mask clamping fixture, and performance is stablized, and chuck body and fixture item are also reusable, save the cost, the requirement being coated with particularly suitable for high-volume optical element surface exposure mask.

Description

A kind of mask clamping fixture
Technical field
The utility model relates to a kind of optical element mask clamping fixtures.Belong to optical element processing and film plating field.
Background technique
When for optical element surface plated film, it is frequently encountered optical element surface different zones and needs to be coated with different film layers Or different zones the case where being coated with film layer and not being coated with film layer.Such as: in the optical element surface only plating in a half range Film, another half range not plated film.The method for handling the above problem in the prior art is the fixture of direct engraving complexity, this method Though can satisfy the production requirement of Partial coatings, this fixture has processing, and time-consuming, fixture is not easy to be processed, fixture repeats benefit The problems such as poor with rate, increases crystal production cost.
It is complicated in the prior art, being processed for coating clamp, the problems such as can not reusing, need a kind of novel clamp Tool is to solve the above problems.
Utility model content
In order to solve above-mentioned the problems of coating clamp in the prior art, the utility model provides a kind of combined light Element mask clamping fixture is learned, by efficiently solving using dismountable fixture item and mask plate are arranged on existing coating clamp The problems such as fixture production is complicated, and recycling rate of waterused is low.
Technical solution provided by the utility model are as follows:
A kind of mask clamping fixture, comprising:
Chuck body is provided with the round coating clamp of square hole centered on the chuck body;
For in the optical element film coated mask plate for blocking the optical element in the process;With
Several fixture items for being detachably mounted to the mask plate in the chuck body.
Further, the catercorner length in the square hole is less than the diameter of the circular clamp.
Further, the mask plate is rectangular half hollow out of aluminium sheet one, the other half is the bottom plate with a thickness of 0.5-1mm.
Further, the end of the hollow-out part of the mask plate is provided with the first for fixing the optics of wide 0.5-1mm The flanging of part.
Further, the fixture item is the rectangular slab with setting thickness, and both ends are provided with for by the fixture Item is fixed on the card slot in the circular clamp.
Further, the fixture length is 10-20mm longer than the side length of the square hole.
Further, the card slot depth is 5-10mm.
Further, the fixture item is provided with for the fixture item to be fixed on the circular clamp at two side bayonet slots On fixed structure.
Further, the fixed structure includes being arranged on fixture item, and be located at threaded hole and screw at card slot.
Further, flanging is provided in two long sides of the fixture item, the flanging width is 0.5-1mm.
A kind of mask clamping fixture disclosed in the utility model, by using dismountable mask plate and the circle for having square hole Die assembly uses, and solves traditional coating clamp and is not easy to realize that optical element surface different zones are coated with different film layers, or not The problem of being coated with film layer with region and not being coated with film layer.In addition, the not super 0.5-1mm of bottom Mask portion thickness of mask plate, no It will cause the problem of film layer is coated with middle empty film.The processing is simple for this mask clamping fixture, uses stabilization, common round square hole coating clamp And fixture item is also reusable, save the cost, the requirement being coated with particularly suitable for high-volume optical element surface exposure mask.
Detailed description of the invention
Fig. 1 is a kind of mask clamping fixture structural schematic diagram of the utility model.
Fig. 2 is chuck body structural schematic diagram.
Fig. 3 is a kind of fixture bar side view of mask clamping fixture of the utility model.
Fig. 4 is a kind of fixture top view of mask clamping fixture of the utility model.
Fig. 5 is mask structure being schematic diagram.
Specific embodiment
The principles of the present invention and feature are described below in conjunction with attached drawing, example is served only for explaining that this is practical It is novel, it is not intended to limit the scope of the utility model.
As shown in Figure 1, 2, the mask clamping fixture of the utility model includes: chuck body 1, fixture item 2 and mask plate 3.
As shown in Fig. 2, chuck body 1 is to be provided with the circular clamp of square hole 4, chuck body 1 can be by existing circle Square hole is opened on clamp to be made, and can also directly be processed.Square hole 4 is for placing optical element to be coated.Square hole 4 Diagonal line should be less than the diameter of circular clamp 1.
As shown in Figure 3,4, fixture item 2 is with the rectangular strip board of setting thickness, and both ends, which have been provided with, to be used for The card slot 5 fixture item 2 being fixed in circular clamp 1.The length of fixture item 2 is greater than the side length of square hole 4, it is preferred that its Length is 10-20mm longer than the side length of square hole 4.In order to which mask plate 3 is firmly fixed, fixture item 2 further includes fixed structure, Fixed structure includes the threaded hole 7 being arranged at card slot 6 and the matched fastening screw used.Threaded hole 7 can be such as 3 figure institutes Show, is only arranged in the side of card slot 5, can also be respectively provided in the two sides of card slot 5.Preferably, the size of threaded hole 7 is M3.Certainly, The threaded hole and fastening screw of other sizes can also be selected as needed.In addition, optical element and mask plate are placed for convenience, Flanging 8 is additionally provided in two long sides of fixture item 2, flanging 8 is outwardly protruded along two long sides of fixture item 2, and thickness is less than The thickness of fixture item 2, width 0.5-1mm.
As shown in figure 5, mask plate is half hollow out, half is stayed with a thickness of the square plate of 0.5-1mm bottom plate.Mask plate is engraved Stay the bottom plate of 0.5-1mm width as the flanging of fixing optical element in empty end.
In use, as shown in Figure 1, firstly, two fixture items 2 are put into the square hole 4 of chuck body 1, alignment jig The width of item 2 is consistent with the length of mask plate 3;Then, mask plate 3 is put on fixture item 2, mask clamping fixture assembling finishes, will Piece to be coated is put into mask plate 3.
As shown in Fig. 2, mask plate 3 and fixture item 2 can be disassembled, chuck body 1 can also regard circular clamp Using use, different mask plates can also be replaced as needed, to adapt to different plated film demands.
It is preferred embodiments of the present invention above, it is noted that for those skilled in the art For, without departing from the principle of this utility model, it can also make several improvements and retouch, these improvements and modifications It should be regarded as the protection scope of the utility model.

Claims (10)

1. a kind of mask clamping fixture, which is characterized in that the mask clamping fixture includes:
Chuck body is provided with the circular clamp of square hole centered on the chuck body;
For blocking the mask plate of the optical element during optical element film coated;With
Several fixture items for being detachably mounted to the mask plate in the chuck body.
2. mask clamping fixture according to claim 1, which is characterized in that the catercorner length of the square hole is less than the round folder The diameter of tool.
3. mask clamping fixture according to claim 1, which is characterized in that the mask plate is rectangular half hollow out of aluminium sheet one, separately Half is the bottom plate with a thickness of 0.5-1mm.
4. mask clamping fixture according to claim 1, which is characterized in that the end of the hollow-out part of the mask plate is provided with width The flanging for being used to fix the optical element of 0.5-1mm.
5. mask clamping fixture according to claim 1, which is characterized in that the fixture item is the rectangle with setting thickness Plate, both ends are provided with the card slot for being fixed on the fixture item in the circular clamp.
6. mask clamping fixture according to claim 4, which is characterized in that the fixture length is longer than the side length of the square hole 10-20mm。
7. mask clamping fixture according to claim 5, which is characterized in that the card slot depth is 5-10mm.
8. mask clamping fixture according to claim 3, which is characterized in that the fixture item is provided with for inciting somebody to action at two side bayonet slots The fixture item is fixed on the fixed structure in the circular clamp.
9. mask clamping fixture according to claim 8, which is characterized in that the fixed structure includes setting on fixture item, and Threaded hole and screw at card slot.
10. mask clamping fixture according to claim 3, which is characterized in that it is provided with flanging in two long sides of the fixture item, The flanging width is 0.5-1mm.
CN201821120696.1U 2018-07-13 2018-07-13 A kind of mask clamping fixture Active CN208580219U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201821120696.1U CN208580219U (en) 2018-07-13 2018-07-13 A kind of mask clamping fixture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201821120696.1U CN208580219U (en) 2018-07-13 2018-07-13 A kind of mask clamping fixture

Publications (1)

Publication Number Publication Date
CN208580219U true CN208580219U (en) 2019-03-05

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201821120696.1U Active CN208580219U (en) 2018-07-13 2018-07-13 A kind of mask clamping fixture

Country Status (1)

Country Link
CN (1) CN208580219U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114182201A (en) * 2021-11-30 2022-03-15 合肥维信诺科技有限公司 Mask plate assembly

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114182201A (en) * 2021-11-30 2022-03-15 合肥维信诺科技有限公司 Mask plate assembly

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