CN208545491U - A kind of self-cleaning type coke removing appts for gaseous phase deposition stove vent gas treatment - Google Patents
A kind of self-cleaning type coke removing appts for gaseous phase deposition stove vent gas treatment Download PDFInfo
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- CN208545491U CN208545491U CN201820837701.4U CN201820837701U CN208545491U CN 208545491 U CN208545491 U CN 208545491U CN 201820837701 U CN201820837701 U CN 201820837701U CN 208545491 U CN208545491 U CN 208545491U
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Abstract
A kind of self-cleaning type coke removing appts for gaseous phase deposition stove vent gas treatment, device noumenon upper end is provided with gas inlet, gas inlet side is provided with offgas outlet, device noumenon lower end is provided with outlet, open-close type baffle is provided with above outlet, baffle side is provided with valve, the first water pipe is successively vertically arranged in device noumenon from left to right, second water pipe and third water pipe, first water pipe, the upper end that device noumenon is run through in second water pipe and third water pipe upper end is in communication with the outside setting, first water pipe, several horizontal-spray mouths have been uniformly arranged on the side wall of second water pipe and third water pipe, first water pipe, the lower end of second water pipe and third water pipe is provided with vertical water jet.Using spray cooling in device, the tar generated after enabling tail gas to cool down stays in the device the utility model, then is cleaned up the tar in device by tar WATER-WASHING METHOD, avoids the trouble of tar blocking pipeline and pipeline disassembly, practical, is suitble to promote.
Description
Technical field
The utility model relates to a kind of coke removing appts, and in particular to a kind of self-cleaning for gaseous phase deposition stove vent gas treatment
Formula coke removing appts.
Background technique
Chemical vapor deposition stove is the principle using chemical vapor deposition, will participate in the substance of chemical reaction, is heated to one
Determine technological temperature, under the graviational interaction that vacuum pump extract system generates, leads to settling chamber and reacted, deposited, generate new
Solid matter.Gaseous phase deposition stove is mainly by furnace body (containing furnace bottom, lower furnace body, upper furnace body and heat screen), heater, filtering system
The composition such as system, vacuum system.
Gaseous phase deposition stove exhaust system flows in exhaust system with tail gas, and temperature gradually decreases；With tail gas
Temperature reduces, other than some hydrocarbon in addition to being difficult to liquefied molecular weight very little in tail gas is discharged in gaseous form, remaining molecular weight
Biggish hydro carbons tail gas part forms the tar of butyrous, is liable to stick in the inner wall of the pipe of exhaust system, thus can shadow
The normal use of equipment is rung, especially for collecting the device of tar, the tar content of inner wall attachment is big, and device disassembly is inconvenient,
It is difficult to clean；It accumulates over a long period, pipeline aperture can be smaller and smaller to influence pump drainage effect, can explode if blocking pipeline
Danger, disassembly pipeline cleaning is again time-consuming and laborious, increases maintenance cost.
Therefore, it is necessary to which it is above-mentioned to solve to design a kind of self-cleaning type coke removing appts for gaseous phase deposition stove vent gas treatment
Problem.
Summary of the invention
To overcome the deficiencies in the prior art described above, the utility model aim is to provide a kind of for gaseous phase deposition stove tail
The self-cleaning type coke removing appts of gas disposal.
In order to achieve the above objects and other related objects, technical solution provided by the utility model is: a kind of be used for gas phase
The self-cleaning type coke removing appts of cvd furnace vent gas treatment, including device noumenon, described device ontology upper end are provided with gas inlet,
The gas inlet side is provided with offgas outlet, and described device ontology is inverted water bottle shape, the inner wall of described device ontology
Round and smooth, described device ontology lower end is provided with outlet, is provided with open-close type baffle, the baffle side above the outlet
It is provided with valve, is successively vertically arranged with the first water pipe, the second water pipe and third water pipe, institute from left to right in described device ontology
It states the first water pipe, the second water pipe and third water pipe upper end and runs through the upper end of described device ontology and be in communication with the outside setting, it is described
Several horizontal-spray mouths, first water pipe, second have been uniformly arranged on the side wall of first water pipe, the second water pipe and third water pipe
The lower end of water pipe and third water pipe is provided with vertical water jet.
Preferred technical solution are as follows: second water pipe is arranged lower than first water pipe, third water pipe, second water
The horizontal-spray mouth of the horizontal-spray mouth of pipe and first water pipe, third water pipe is not provided in the same horizontal line.
Preferred technical solution are as follows: described device inner body wall is provided with coating, and the coating material is polytetrafluoroethylene (PTFE).
Since above-mentioned technical proposal is used, the utility model has the advantage, that compared with prior art
Using spray cooling in device, the tar generated after the tail gas of gaseous phase deposition stove is cooled down stays the utility model
In the device, then by tar WATER-WASHING METHOD by the tar in device it cleans up, tail gas decoking and coke removing appts clean a step
In place, the trouble of tar blocking pipeline and pipeline disassembly is avoided, device self-cleaning after tar filtering is easy to operate, practical
Property it is strong, be suitble to promote.
Detailed description of the invention
Fig. 1 is the utility model overall schematic.
In the figures above, device noumenon 1, gas inlet 2, offgas outlet 3, outlet 4, baffle 5, valve 6, the first water pipe
7, the second water pipe 8, third water pipe 9, horizontal-spray mouth 10, vertical water jet 11.
Specific embodiment
The embodiments of the present invention is illustrated by particular specific embodiment below, those skilled in the art can be by this
Content disclosed by specification understands other advantages and effect of the utility model easily.
Please refer to Fig. 1.It should be clear that structure depicted in this specification attached drawing, ratio, size etc., only to cooperate explanation
The revealed content of book is not intended to limit the utility model enforceable so that those skilled in the art understands and reads
Qualifications, therefore do not have technical essential meaning, the modification of any structure, the change of proportionate relationship or the adjustment of size,
It does not influence under the effect of the utility model can be generated and the purpose that can reach, it is revealed should all still to fall in the utility model
Technology contents obtain in the range of capable of covering.Meanwhile it is cited such as "upper", "lower", "left", "right", " centre " in this specification
And the term of " one " etc., it is merely convenient to being illustrated for narration, rather than to limit the enforceable range of the utility model, it is opposite
Relationship is altered or modified, under the content of no substantial changes in technology, when being also considered as the enforceable scope of the utility model.
As shown in Figure 1, a kind of self-cleaning type coke removing appts for gaseous phase deposition stove vent gas treatment, including device noumenon 1,
1 upper end of device noumenon is provided with gas inlet 2, and 2 side of gas inlet is provided with offgas outlet 3, and device noumenon 1 is inverted water
The inner wall of ampuliform, device noumenon 1 is round and smooth, and 1 lower end of device noumenon is provided with outlet 4, and open-close type gear is provided with above outlet 4
Plate 5,5 side of baffle are provided with valve 6, are successively vertically arranged with the first water pipe 7, the second water pipe 8 in device noumenon 1 from left to right
With third water pipe 9, the upper end that device noumenon 1 is run through in the first water pipe 7, the second water pipe 8 and 9 upper end of third water pipe is in communication with the outside
It is arranged, has been uniformly arranged several horizontal-spray mouths 10, the first water on the side wall of the first water pipe 7, the second water pipe 8 and third water pipe 9
The lower end of pipe 7, the second water pipe 8 and third water pipe 9 is provided with vertical water jet 11.
Principle: before the tail gas of gaseous phase deposition stove enters the present apparatus, first in the first water pipe 7, the second water pipe 8, third water pipe 9
It is passed through water at low temperature to be sprayed, so that temperature reduces in the present apparatus, water completely and is closed into valve 6 from discharge outlet discharge；By gas
The tail gas of phase cvd furnace is passed through and (note: does not spray water in device when being passed through tail gas) from gas inlet 2, and meeting exists after exhaust temperature reduces
Generate tar in device noumenon 1, tar stays in device inner wall and device filters out the tail gas of tar from tail gas elsewhere
Outlet 3 enters next exhaust gas processing device；After tar filters, using WATER-WASHING METHOD in the first water pipe 7, the second water pipe 8, the
It is passed through water in three water pipes 9, a certain amount of alkali is added in the water being passed through, the effect of tar removing can be enhanced, passes through the spray of water pipe
It spills, the tar processing in device can be fallen, open baffle 5, waste water is made to be discharged into corresponding wastewater treatment dress from outlet 4
It sets, device cooperation control system is able to achieve efficient filtering and decoking, easy to operate.
Preferred embodiment are as follows: as shown in Figure 1, the second water pipe 8 is arranged lower than the first water pipe 7, third water pipe 9, second
The horizontal-spray mouth 10 of the horizontal-spray mouth 10 of water pipe 8 and the first water pipe 7, third water pipe 9 is not provided in the same horizontal line.Make
It obtains and intersects water spray between horizontal-spray mouth 10, the part tar adhered on water pipe can also be cleaned up, enhance cleaning effect.
Preferred embodiment are as follows: 1 inner wall of (not shown) device noumenon is provided with coating, and coating material is polytetrafluoro
Ethylene.So that the inner wall of device noumenon 1 is not easy to adhere to tar, it is readily cleaned.
Using spray cooling in device, the tar generated after the tail gas of gaseous phase deposition stove is cooled down stays the utility model
In the device, then by tar WATER-WASHING METHOD by the tar in device it cleans up, tail gas decoking and coke removing appts clean a step
In place, the trouble of tar blocking pipeline and pipeline disassembly is avoided, device self-cleaning after tar filtering is easy to operate, practical
Property it is strong, be suitble to promote.
The above embodiments are only illustrative of the principle and efficacy of the utility model, and not for limitation, this is practical new
Type.Any person skilled in the art can all carry out above-described embodiment under the spirit and scope without prejudice to the utility model
Modifications and changes.Therefore, such as those of ordinary skill in the art without departing from the revealed essence of the utility model
All equivalent modifications or change completed under mind and technical idea, should be covered by the claim of the utility model.
Claims (3)
1. a kind of self-cleaning type coke removing appts for gaseous phase deposition stove vent gas treatment, including device noumenon, described device ontology
Upper end is provided with gas inlet, and the gas inlet side is provided with offgas outlet, it is characterised in that: described device ontology is to fall
The water bottle shape set, the inner wall of described device ontology is round and smooth, and described device ontology lower end is provided with outlet, the outlet top
It is provided with open-close type baffle, the baffle side is provided with valve, is successively vertically arranged with from left to right in described device ontology
Described device is run through in first water pipe, the second water pipe and third water pipe, first water pipe, the second water pipe and third water pipe upper end
The upper end of ontology is in communication with the outside setting, if being uniformly arranged on the side wall of first water pipe, the second water pipe and third water pipe
The lower end of the flat water jet of solid carbon dioxide, first water pipe, the second water pipe and third water pipe is provided with vertical water jet.
2. a kind of self-cleaning type coke removing appts for gaseous phase deposition stove vent gas treatment according to claim 1, feature
Be: second water pipe lower than first water pipe, third water pipe be arranged, the horizontal-spray mouth of second water pipe with it is described
First water pipe, third water pipe horizontal-spray mouth be not provided in the same horizontal line.
3. a kind of self-cleaning type coke removing appts for gaseous phase deposition stove vent gas treatment according to claim 1, feature
Be: described device inner body wall is provided with coating, and the coating material is polytetrafluoroethylene (PTFE).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820837701.4U CN208545491U (en) | 2018-05-31 | 2018-05-31 | A kind of self-cleaning type coke removing appts for gaseous phase deposition stove vent gas treatment |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201820837701.4U CN208545491U (en) | 2018-05-31 | 2018-05-31 | A kind of self-cleaning type coke removing appts for gaseous phase deposition stove vent gas treatment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111974170A (en) * | 2020-08-04 | 2020-11-24 | 烟台奥森制动材料有限公司 | C-C production line tail gas purification treatment method |
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2018
- 2018-05-31 CN CN201820837701.4U patent/CN208545491U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111974170A (en) * | 2020-08-04 | 2020-11-24 | 烟台奥森制动材料有限公司 | C-C production line tail gas purification treatment method |
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