CN208520503U - A kind of diaphragm pressure sensor - Google Patents

Abstract

A kind of diaphragm pressure sensor, including conductive circuit layer, the conductive circuit layer includes conductive pattern and the output lead for connecting conductive pattern, the diaphragm pressure sensor further includes resistive layer and the separation layer that is folded between resistive layer and conductive circuit layer, the resistive layer includes resistance corresponding with conductive pattern, the cushion chamber that the separation layer is formed with cavity and is connected to cavity, the cavity face resistance and conductive pattern, deformation space is formed between resistance and conductive pattern, the cushion chamber and cavity interval are arranged, slit is formed between cavity and cushion chamber to be connected to the two, the cushion chamber is in communication with the outside via interconnection.The cushion chamber being connected to cavity is arranged in the utility model diaphragm pressure sensor by cavity, guarantees cavity inside and outside air pressure balance, extends the path that gas enters cavity, condenses steam one step ahead before entering cavity, guarantee the sensitivity and electrical safety of sensor.

Description

A kind of diaphragm pressure sensor

Technical field

The utility model relates to sensor technical fields, more particularly to a kind of diaphragm pressure sensor.

Background technique

Diaphragm pressure sensor is the development with thin film technique and the novel pressure sensing of a kind of function admirable that is born Device is usually made of substrate with electrode and elastic conduction film, and wherein film is the mixing of elastic material and conductive material Body, with substrate space have one it is small at a distance from.When initial, film is opened with the electrode gap on substrate；When film is depressed by a user When, depressed deformation is contacted and is connected with electrode, and with the increase of film and electrode contact surface product, the electric current between electrode increases, To change the output resistance of device.

The diaphragm pressure sensor of above structure is usually formed with gas vent in the position of counter electrode, so that interior outer gas Pressure is consistent, and such film can produce corresponding deformation when being pressurized, film can rapidly restore deformation when pressure cancels, and guarantees The sensitivity of sensor.However, the setting of gas vent, but also extraneous steam can enter sensor internal corrosion electrode etc., shadow Ring the electrical safety and service life in sensor.

Summary of the invention

In view of this, providing a kind of diaphragm pressure sensor that sensitivity and electrical safety can be effectively ensured.

A kind of diaphragm pressure sensor, including conductive circuit layer, resistive layer and it is folded in resistive layer and conductive circuit layer Between separation layer, the conductive circuit layer include conductive pattern and connect conductive pattern output lead, the resistive layer Including resistance corresponding with conductive pattern, the cushion chamber that the separation layer is formed with cavity and is connected to cavity, the sky Chamber face resistance and conductive pattern form deformation space, the cushion chamber and cavity interval between resistance and conductive pattern Setting, is formed with slit and is connected to the two, the cushion chamber is in communication with the outside via interconnection between cavity and cushion chamber.

Preferably, the cushion chamber be it is separately positioned multiple, slit is formed between cushion chamber and is interconnected.

Preferably, the conductive circuit layer includes the conductive pattern of multiple dispersions, the resistive layer corresponds to each conductor figure Case forms a resistance, and the separation layer corresponds to each resistance/conductive pattern and forms a cavity, and a buffering is formed by each cavity Chamber.

Preferably, forming level 2 buffering chamber between adjacent cushion chamber, formed between the level 2 buffering chamber and cushion chamber There is slit to be connected.

Preferably, the level 2 buffering chamber is in communication with the outside by the interconnection.

Preferably, the channel be it is multiple, be symmetrically disposed on the opposite sides of level 2 buffering chamber.

Compared to the prior art, the buffering being connected to cavity is arranged in the utility model diaphragm pressure sensor by cavity Chamber incudes the pressure change of cavity, extends the path that gas enters cavity, condenses steam one step ahead before entering cavity, While guaranteeing the sensitivity of sensor, make sensor that there is preferable inoxidizability, electrical security and service life.

Detailed description of the invention

Fig. 1 is the schematic diagram of the diaphragm pressure sensor of an embodiment of the present invention.

Fig. 2 is the explosive view of diaphragm pressure sensor shown in Fig. 1.

Specific embodiment

The utility model is more fully retouched below with reference to relevant drawings for the ease of understanding the utility model, It states.One or more embodiments of the utility model are illustratively given in attached drawing, so that disclosed in the utility model The understanding of technical solution is more accurate, thorough.However, it should be understood that the utility model can be with many different forms To realize, however it is not limited to embodiments described below.

Fig. 1 show a specific embodiment of the utility model diaphragm pressure sensor, and the sensor includes conductor wire Road floor 10, resistive layer 20 and the separation layer 30 being located between conductive circuit layer 10 and resistive layer 20.

Please refer to Fig. 2, the conductive circuit layer 10 includes first base material 12 and is formed in first base material 12 Conductive silver paste route 14.The first base material 12 is flake, has certain elasticity, and compression can have certain deformation quantity, Its material is preferably the thin film flexibles material such as PET, PI.In the first base material 12, pass through printing, etching, plating and spray The techniques such as painting form conductive silver paste route 14.The conductive silver paste route 14 includes several conductive patterns 16 and connection conductor figure The output lead 18 of case 16.16 scattering device of conductive pattern, each conductive pattern 16 include the figure of two comb teeth-shapeds, institute The figure of a company of stating comb teeth-shaped holds arrangement in ten fourchette of both hands.The output lead 18 is separately connected the two of each conductive pattern 16 A figure, and draw outward, the output port as entire sensor.

The resistive layer 20 is including the second substrate 22 and is formed in electric resistance structure 24 on the second substrate 22.Described second Substrate 22 has certain elasticity, it is therefore preferable to the thin film flexibles material such as PET, PI, shape, size phase with first base material 12 Together, first base material 12 is stacked completely with the second substrate 22 after assembling.The electric resistance structure 24 passes through the works such as printing, spraying, engraving Skill is formed on the second substrate 22, the resistance 26 including several scattering devices, each 26 face conductive silver paste route 14 of resistance One conductive pattern 16.

The separation layer 30 is similarly flake, and shape, size are identical as 12/ second substrate 22 of first base material.Assembling When, the electric resistance structure 24 on conductive silver paste route 14 and the second substrate 22 in first base material 12 is opposite, and separation layer 30 is folded in Between the electric resistance structure 24 of resistive layer 20 and the conductive silver paste route 14 of conductive circuit layer 10, by conductive silver paste route 14 and resistance Structure 24 is spaced.Preferably, the separation layer 30 is thin slice double-sided adhesive, and two sides all has good viscosity, by resistive layer 20, Conductive circuit layer 10 is bonded as one.16/ second substrate of each conductive pattern in the corresponding first base material 12 of shown separation layer 30 Each resistance 26 on 22 forms a cavity 32, provides deformation space between conductive pattern 16 and corresponding resistance 26, so When the utility model sensor is pressurized, 26 indent of conductive pattern 16 or resistance, the two is in contact and is connected, and changes the defeated of sensor Resistance value out.

Specifically, the utility model sensor when in use, applies active force in first base material 12 (or second substrate 22) On make its deformation, drive conductive pattern 16 (or resistance 26) indent, be in contact with resistance 26 (or conductive pattern 16).Active force is got over Greatly, the deformation extent of conductive pattern 16 (or resistance 26) is bigger, with the contact area of resistance 26 (or conductive pattern 16) it is bigger, connect Touching tightness degree is tighter, and the electric current flowed through is bigger, and the resistance value between output port is smaller；Otherwise active force is smaller, conductive pattern The deformation extent of 16 (or resistance 26) is smaller, and the electric current flowed through is smaller, and the resistance value between output port is bigger.When active force removes Afterwards, conductive pattern 16 (or resistance 26) restores deformation, and the resistance value between output port is restored to initial value, thus obtain pressure with Corresponding relationship between resistance 26.

In the present embodiment, each cavity 32 is corresponded on the separation layer 30, also forms a cushion chamber 34 in its vicinity, it is described Slit 36 is formed between cushion chamber 34 and corresponding cavity 32 to be connected to the two.Preferably, two adjacent cushion chambers 34 it Between substantial middle position be also formed with a level 2 buffering chamber 34 ', the level 2 buffering chamber 34 ' and corresponding two cushion chambers 34 Between be likewise formed with slit 36 three be connected.In this way, being formed with interconnected three between two adjacent cavitys 32 A cushion chamber 34 incudes the gas of cavity 32 when (or resistance 26) Inward deflection of conductive pattern 16 squeezes the air in cavity 32 Buckling guarantees the balance of 32 inner and outer air pressure of cavity, makes conductive pattern 16 (or resistance 26) compression rapid deformation, and remove in pressure Fast quick-recovery deformation after pin guarantees the sensitivity of the utility model sensor.It should be understood that ground, according to the position of cavity 32, sky The distance between chamber 32 can form multiple level 2 buffering chambers 34 ' between cushion chamber 34, however it is not limited to one in the present embodiment Level 2 buffering chamber 34 '.Cavity 32, cushion chamber 34 form slit 36 between level 2 buffering chamber 34 ' and are interconnected.In the present embodiment, The corresponding level 2 buffering chamber 34 ' of the separation layer 30 is formed with the through-hole 38 extended transversely through, connection level 2 buffering chamber 34 ' and the external world. Preferably, the through-hole 38 is 2 in the present embodiment, it is asymmetrically formed in the opposite sides of level 2 buffering chamber 34 ', can makes Gas disengaging is more smooth.

In the present embodiment, the corresponding level 2 buffering chamber 34 ' of the separation layer 30 is formed with the through-hole 38 extended transversely through, connection two Grade cushion chamber 34 ' and the external world.Preferably, the through-hole 38 is 2 in the present embodiment, it is asymmetrically formed in level 2 buffering chamber 34 ' Opposite sides, can make gas disengaging it is more smooth.

When in use, (or resistance 26) Inward deflection of conductive pattern 16 squeezes the sky in cavity 32 to the sensor of the present embodiment Gas, air are discharged after cushion chamber 34, level 2 buffering chamber 34 ' by through-hole 38, and after pressure revocation, outside air is reversed Enter in the cavity 32 of sensor via through-hole 38, level 2 buffering chamber 34 ', cushion chamber 34, guarantee 32 inside and outside air pressure balance of cavity, Guarantee the sensitivity of sensor.In addition, the setting of cushion chamber 34 extends the distance that outside air enters cavity 32, even if air In contain certain steam, enter cavity 32 road in first pass through multiple cushion chambers 34 and multistage slit 36, water Vapour is condensed in cushion chamber 34 and slit 36 one step ahead, will not be directly entered 32 corrosion resistance 26 of cavity and conductive pattern 16, be protected Demonstrate,prove the service life and electrical safety of sensor.

In short, the cushion chamber that the utility model diaphragm pressure sensor is connected to by being set to cavity 32 by cavity 32 34, the pressure change of the cavity 32 between inductive reactance 26 and conductive pattern 16 guarantees 32 inside and outside air pressure balance of cavity, guarantees to pass The normal use and sensitivity of sensor.In addition, extending gas by cushion chamber 34 enters the path of cavity 32, make steam into It is condensed one step ahead before entering cavity 32, guarantees the electrical safety of sensor.It should be noted that the utility model is not limited to Above embodiment, creative spirit according to the present utility model, those skilled in the art can also make other variations, these according to According to the variation that the creative spirit of the utility model is done, all should be included in the utility model it is claimed within the scope of.

Claims (6)

1. a kind of diaphragm pressure sensor, including conductive circuit layer, the conductive circuit layer includes that conductive pattern and connection are led The output lead of body pattern, it is characterised in that: further include resistive layer and be folded between resistive layer and conductive circuit layer every Absciss layer, the resistive layer include resistance corresponding with conductive pattern, and the separation layer is formed with cavity and is connected to cavity Cushion chamber, the cavity face resistance and conductive pattern form deformation space between resistance and conductive pattern, described slow It rushes chamber and cavity interval is arranged, slit is formed between cavity and cushion chamber and is connected to the two, the cushion chamber is via laterally logical Road is in communication with the outside.

2. diaphragm pressure sensor as described in claim 1, which is characterized in that the cushion chamber be it is separately positioned multiple, Slit is formed between cushion chamber to be interconnected.

3. diaphragm pressure sensor as described in claim 1, which is characterized in that the conductive circuit layer includes multiple dispersions Conductive pattern, the resistive layer correspond to each conductive pattern and form a resistance, and the separation layer corresponds to each resistance/conductive pattern A cavity is formed, forms a cushion chamber by each cavity.

4. diaphragm pressure sensor as claimed in claim 3, which is characterized in that form level 2 buffering between adjacent cushion chamber Chamber is formed with slit between the level 2 buffering chamber and cushion chamber and is connected.

5. diaphragm pressure sensor as claimed in claim 4, which is characterized in that the level 2 buffering chamber is logical by the transverse direction Road is in communication with the outside.

6. diaphragm pressure sensor as claimed in claim 5, which is characterized in that the channel is one or more, is set to On the outside of level 2 buffering chamber.