CN208508533U - A kind of control loop power supply circuit - Google Patents
A kind of control loop power supply circuit Download PDFInfo
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- CN208508533U CN208508533U CN201821228357.5U CN201821228357U CN208508533U CN 208508533 U CN208508533 U CN 208508533U CN 201821228357 U CN201821228357 U CN 201821228357U CN 208508533 U CN208508533 U CN 208508533U
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- power supply
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- opened contact
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Abstract
The utility model provides a kind of control loop power supply circuit, which includes the first power supply, second source, emergency stop switch and intermediate relay；Intermediate relay includes electromagnetic coil, the first normally opened contact and the second normally opened contact；First power supply is connected with second source, and emergency stop switch is connected after connecting with electromagnetic coil with second source, and emergency stop switch uses normally-closed contact；First normally opened contact is connected with the first power supply, and the second normally opened contact is connected with second source.The utility model is in the practical control of power supply circuit of semiconductor equipment control loop; when abnormal conditions occur; power-off control can be carried out to AC power source and DC power supply simultaneously by scram button; make just to export control power supply in AC power source and DC power supply while normal situation simultaneously, play a protective role to electrical equipment.
Description
Technical field
The utility model relates to semiconductor equipment control loop power supply technique fields more particularly to a kind of control loop to power
Circuit.
Background technique
In semiconductor equipment temperature control device field, segment controller part needs direct current supply, therefore power supply circuit generally wraps
Include AC power source and DC power supply.
Currently, when abnormal conditions occur, generally passing through emergency stop switch for DC power supply in the practical control of power supply circuit
It disconnects so that DC power supply power supply device powers off, and AC power source is still being powered；AC power source first end or second end are in series with
Fuse, when the electric current of AC power source current supply circuit is more than fuse rated current, fuse disconnects making AC power source
Power supply device power-off.I.e. in actually control, when abnormal conditions occur, AC power source and DC power supply is not cut off simultaneously, is made
Power supply circuit is fully powered-off, and there are security risks for power supply circuit, easily causes serious consequence to the person and property safety.Meanwhile it is logical
It crosses emergency stop switch cutting direct current supply or Alternating Current Power Supply is cut off by fuse, so that electrical equipment all standing, easily gives electrical equipment band
Carry out impact load, irreversible damage is caused to electrical equipment.
Therefore, in the practical control of the power supply circuit of semiconductor equipment control loop, need to design a kind of control loop confession
Circuit can carry out power-off control to AC power source and DC power supply simultaneously, while making alternating current when abnormal conditions occur
Just output controls power supply under source and DC power supply while normal situation, plays a protective role to electrical equipment.
Utility model content
In the practical control of power supply circuit in order to solve current semiconductor equipment control loop, abnormal conditions cannot when occurring
AC power source and DC power supply are powered off simultaneously, while just to export in AC power source and DC power supply while normal situation
The problem of controlling power supply, the utility model provides a kind of power supply control circuit, including the first power supply, second source, emergency stop are opened
Pass and intermediate relay；Intermediate relay includes electromagnetic coil, the first normally opened contact and the second normally opened contact；First power supply and
Two power supplys are connected, and emergency stop switch is connected after connecting with electromagnetic coil with second source, and emergency stop switch uses normally-closed contact；First often
It opens contact to be connected with the first power supply, the second normally opened contact is connected with second source.
Preferably, the first power supply is AC power source, and second source is direct-current switch power supply, the output voltage of second source
Absolute value is less than 36V.
Preferably, this control loop power supply circuit further includes at least one fuse, and fuse is connected on the first power supply
The second end of first end or the first power supply.
Preferably, the first normally opened contact is connected with the first end of the first power supply, and the of the second normally opened contact and second source
One end is connected.
Preferably, electromagnetic coil and the second normally opened contact are connected with the first end of second source respectively.
Preferably, the type of intermediate relay includes electromagnetic relay.
The utility model is in the practical control of power supply circuit of semiconductor equipment control loop, when abnormal conditions occur,
Power-off control can be carried out to AC power source and DC power supply simultaneously, while make AC power source and DC power supply normal feelings simultaneously
Just output controls power supply under condition, plays a protective role to electrical equipment.
Detailed description of the invention
Fig. 1 is the connection schematic diagram according to the control loop power supply circuit of one preferred embodiment of the utility model；
Wherein:
1, the first power supply 2, second source 3, emergency stop switch
4, electromagnetic coil 5, the first normally opened contact 6, the second normally opened contact
7, first fuse 8, second fuse.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiment of the present utility model is described in further detail.Below
Embodiment is not intended to limit the scope of the present invention for illustrating the utility model.
In the description of the present invention, it should be understood that term " connected ", " connection " shall be understood in a broad sense, for example,
It can be mechanical connection or electrical connection, the connection being also possible to inside two elements can be directly connected, can also be in
Between medium be indirectly connected, for the ordinary skill in the art, can understand the tool of above-mentioned term as the case may be
Body meaning.
Currently, abnormal conditions cannot be to exchange when occurring in the practical control of the power supply circuit of semiconductor equipment control loop
Power supply and DC power supply power off simultaneously, while just to export control electricity in AC power source and DC power supply while normal situation
The problem of source.
Fig. 1 is according to the connection schematic diagram of the control loop power supply circuit of one preferred embodiment of the utility model, such as
Shown in Fig. 1, the utility model embodiment provides a kind of power supply control circuit, including the first power supply 1, second source 2, emergency stop are opened
Close 3 and intermediate relay；Intermediate relay includes electromagnetic coil 4, the first normally opened contact 5 and the second normally opened contact 6；First power supply
1 is connected with second source 2, and emergency stop switch 3 is connected after connecting with electromagnetic coil 4 with second source 2, and emergency stop switch 3 is using normally closed
Contact；First normally opened contact 5 is connected with the first power supply 1, and the second normally opened contact 6 is connected with second source 2.
Specifically, the power supply control circuit of the utility model embodiment includes that the first power supply 1 and the combination of second source 2 supply
Electricity adds intermediate relay in current control loop power supply circuit, and the power supply control circuit is enabled to cut off simultaneously
One power supply 1 and second source 2, and just output control power supply in the first power supply 1 and second source 2 while normal situation.
Intermediate relay is used in relay protection and automatic control system, to increase the quantity and capacity of contact.It is used for
M signal is transmitted in control circuit.The intermediate relay of the utility model embodiment includes electromagnetic coil 4, the first normally opened touching
Point 5 and the second normally opened contact 6 obtain electric or power loss by electromagnetic coil 4, thus the first normally opened contact 5 of control and the second normally opened touching
The closure and disconnection of point 6 further control the on-off of the first power supply 1 and second source 2.
Under normal circumstances, scram button is not pressed, and the normally-closed contact of emergency stop switch 3 is in closed state, intermediate relay
The electromagnetic coil 4 of device obtains electric actuation, the first normally opened contact 5 and the second normally opened contact 6 closure.
And when being in an emergency, scram button is pressed, and the normally-closed contact of emergency stop switch 3 is in an off state, in
Between 4 power loss of electromagnetic coil of relay disconnect, the first normally opened contact 5 and the second normally opened contact 6 disconnect.
Based on the above embodiment, the first power supply 1 is AC power source, and second source 2 is direct-current switch power supply, second source 2
Output voltage absolute value be less than 36V.
Specifically, in the utility model embodiment, the first power supply 1 is AC power source, and second source 2 is DC power supply, the
One power supply 1 and second source 2 provide Alternating Current Power Supply and direct current supply respectively.
The control device that DC power supply is generally automatic control system is powered, in the utility model embodiment, second source 2
It powers for emergency stop switch 3 and intermediate relay.Safety when in view of control device in manual operation automatic control system,
The absolute value of the output voltage of two power supplys 2 is less than 36V, meets human safety voltage.In the utility model embodiment, second source
2 select 24V direct-current switch power supply.
Based on the above embodiment, as shown in Figure 1, this control loop power supply circuit further includes at least one fuse, fusing
Device is connected on the first end of the first power supply 1 or the second end of the first power supply 1.
Specifically, first fuse 7 is connected on the first end of the first power supply 1, and second fuse 8 is connected on the first power supply 1
Second end.
When the electric current of 1 current supply circuit of the first power supply is more than the rated current of fuse, fuse trip, to guarantee tight
When anxious situation, if disconnecting the first power supply 1 in time when emergency stop switch 3 or intermediate relay break down, make the first power supply 1 and the
Two power supplys 2 disconnect, and ensure that the safe operation of this control loop power supply circuit, prevent from causing serious shadow to the person and property
It rings.
Based on the above embodiment, as shown in Figure 1, the utility model embodiment can make the first normally opened contact 5 and the first power supply 1
First end be connected, the second normally opened contact 6 is connected with the first end of second source 2.Electromagnetic coil 4 and the second normally opened contact 6 divide
It is not connected with the first end of second source 2.
Further, the wiring of this control loop power supply circuit is not limited to, other a variety of wiring can also be used, to pass through
Intermediate relay controls power supply.
Further, in the embodiments of the present invention, electromagnetic relay is can be used in intermediate relay, utilizes input circuit
Suction that interior circuit generates between electromagnet core and armature and work.
The utility model is in the practical control of power supply circuit of semiconductor equipment control loop, when abnormal conditions occur,
Power-off control can be carried out to AC power source and DC power supply simultaneously, while make AC power source and DC power supply normal feelings simultaneously
Just output controls power supply under condition, plays a protective role to electrical equipment.
Finally, the embodiments of the present invention are only preferable embodiment, it is not intended to limit the guarantor of the utility model
Protect range.Within the spirit and principle of the utility model, any modification, equivalent replacement, improvement and so on should all include
It is within the protection scope of the utility model.
Claims (6)
1. a kind of power supply control circuit, which is characterized in that including the first power supply, second source, emergency stop switch and intermediate relay；
The intermediate relay includes electromagnetic coil, the first normally opened contact and the second normally opened contact；
First power supply is connected with the second source, the emergency stop switch connect with the electromagnetic coil after with described second
Power supply is connected, and the emergency stop switch uses normally-closed contact；
First normally opened contact is connected with first power supply, and second normally opened contact is connected with the second source.
2. a kind of power supply control circuit according to claim 1, which is characterized in that first power supply is AC power source,
The second source is direct-current switch power supply, and the absolute value of the output voltage of the second source is less than 36V.
3. a kind of power supply control circuit according to claim 1, which is characterized in that further include at least one fuse, institute
It states fuse and is connected on the first end of first power supply or the second end of first power supply.
4. a kind of power supply control circuit according to claim 3, which is characterized in that first normally opened contact and described the
The first end of one power supply is connected, and second normally opened contact is connected with the first end of the second source.
5. a kind of power supply control circuit according to claim 3, which is characterized in that the electromagnetic coil and described second is often
Contact is opened to be connected with the first end of the second source respectively.
6. a kind of power supply control circuit according to claim 1, which is characterized in that the type of the intermediate relay includes
Electromagnetic relay.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821228357.5U CN208508533U (en) | 2018-08-01 | 2018-08-01 | A kind of control loop power supply circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821228357.5U CN208508533U (en) | 2018-08-01 | 2018-08-01 | A kind of control loop power supply circuit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208508533U true CN208508533U (en) | 2019-02-15 |
Family
ID=65290826
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821228357.5U Active CN208508533U (en) | 2018-08-01 | 2018-08-01 | A kind of control loop power supply circuit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208508533U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112650323A (en) * | 2020-12-25 | 2021-04-13 | 北京北方华创微电子装备有限公司 | Temperature control method and system for cleaning liquid in semiconductor cleaning equipment |
-
2018
- 2018-08-01 CN CN201821228357.5U patent/CN208508533U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112650323A (en) * | 2020-12-25 | 2021-04-13 | 北京北方华创微电子装备有限公司 | Temperature control method and system for cleaning liquid in semiconductor cleaning equipment |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 100176 block a, 14th floor, yard 8, Liangshuihe 2nd Street, Beijing Economic and Technological Development Zone, Daxing District, Beijing Patentee after: Beijing Jingyi automation equipment Technology Co.,Ltd. Address before: 100176 block a, 14 / F, courtyard 8, Liangshuihe 2nd Street, Daxing Economic and Technological Development Zone, Beijing Patentee before: BEIJING JINGYI AUTOMATION EQUIPMENT Co.,Ltd. |