CN208485941U - The mounting structure and evaporation coating device of liner is deposited - Google Patents
The mounting structure and evaporation coating device of liner is deposited Download PDFInfo
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- CN208485941U CN208485941U CN201821014139.1U CN201821014139U CN208485941U CN 208485941 U CN208485941 U CN 208485941U CN 201821014139 U CN201821014139 U CN 201821014139U CN 208485941 U CN208485941 U CN 208485941U
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- permanent magnet
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Abstract
The utility model discloses a kind of mounting structure and evaporation coating device that liner is deposited, and wherein mounting structure includes the first permanent magnet, soft magnetic materials region.Soft magnetic materials region is oppositely arranged with the first permanent magnet, and connection is removably adsorbed in opposed facing one end；First permanent magnet and soft magnetic materials region are respectively distributed on two components to be fixed；Two components are the surface that the direction vapor deposition chamber inner wall face side of inner wall and vapor deposition liner of chamber is deposited.Mounting structure includes the first permanent magnet and the second permanent magnet, is symmetrically disposed on the surface of direction vapor deposition chamber inner wall face side and the inner wall of vapor deposition chamber of vapor deposition liner, and opposite side polarity is opposite.By the magnetic attraction of permanent magnet, vapor deposition liner and vapor deposition chamber inner wall face are attached together, to complete the installation of vapor deposition liner, improve installation effectiveness.Evaporation coating device includes vapor deposition chamber, vapor deposition liner and any of the above-described mounting structure, can effectively improve the installation effectiveness of vapor deposition liner.
Description
Technical field
The present invention relates to evaporation process fields, and in particular to the mounting structure and evaporation coating device of liner is deposited.
Background technique
Vapor deposition is that substance to be filmed is placed in vacuum to be evaporated or distil, and is allowed to be precipitated in workpiece or substrate surface
Process.Before vapor deposition, need for liner to be mounted in vapor deposition chamber, with the setting for object to be deposited.
Currently, vapor deposition liner is fixed on vapor deposition chamber inner wall by bolt assembly, and since vapor deposition liner is different, people
Member's installation is time-consuming and laborious；Meanwhile the liner that chamber is deposited needs to be replaced frequently because of process requirements, repeatedly disassembles and installs bolt
Component will lead to bolt fracture in chamber, can not take out, and corresponding liner also can not just be installed, and greatly reduce installation effect
Rate.
Utility model content
Therefore, the technical problem to be solved by the utility model is to the mounting structure of liner in the prior art, cause interior
Lining installation or removal are inconvenient, the low problem of liner installation effectiveness.
For this purpose, the utility model provides the mounting structure of vapor deposition liner, including
At least one first permanent magnet；
Soft magnetic materials region is oppositely arranged with first permanent magnet, and opposed facing one end removably company of absorption
It connects；
At least one described first permanent magnet and the soft magnetic materials region are respectively distributed on two components to be fixed；
Described two components are the table towards the vapor deposition chamber inner wall face side that the inner wall and the vapor deposition liner of chamber is deposited
Face.
Preferably, the mounting structure of above-mentioned vapor deposition liner, the soft magnetic materials region are protrusion；
The protrusion is arranged on the inner wall of the vapor deposition chamber, and accordingly first permanent magnet is fixed on the steaming
Plate liner towards it is described vapor deposition chamber a side surface on；Or
The protrusion be arranged in the vapor deposition liner towards on a side surface of the vapor deposition chamber, accordingly described the
One permanent magnet is fixed on the inner wall of the vapor deposition chamber.
It is further preferred that the mounting structure of above-mentioned vapor deposition liner, the soft magnetic materials region is made of steel material.
Preferably, the mounting structure of above-mentioned vapor deposition liner, further includes removably being adsorbed on the soft magnetic materials region
On the second permanent magnet, second permanent magnet is opposite with the opposed facing one end polarity of first permanent magnet.
It is further preferred that the mounting structure of above-mentioned vapor deposition liner, first permanent magnet are at least two, Suo Yousuo
State the first permanent magnet be evenly distributed on the inner wall of the vapor deposition chamber or vapor deposition liner towards the vapor deposition chamber inner wall
On the surface of face side.
More preferably preferably, the mounting structure of above-mentioned vapor deposition liner, further includes being arranged in one side surface of vapor deposition liner
On indicia patterns and/or coding, for identifying the vapor deposition liner.
It is further preferred that the mounting structure of above-mentioned vapor deposition liner, the shape of the indicia patterns and the vapor deposition
The shape of liner is consistent.
The utility model provides the mounting structure of vapor deposition liner, including
At least one first permanent magnet；
Second permanent magnet is oppositely arranged with first permanent magnet, and opposed facing one end polarity is opposite；
At least one described first permanent magnet and second permanent magnet are respectively distributed on two components to be fixed；Institute
Stating two components is the surface towards the vapor deposition chamber inner wall face side that the inner wall and the vapor deposition liner of chamber is deposited.
The utility model also provides evaporation coating device, including
Chamber is deposited, there is inner cavity；
Liner is deposited, is at least one；
The mounting structure of vapor deposition liner described in any of the above embodiments, corresponds with the vapor deposition liner, and being used for will be described
Vapor deposition liner splices and is removably adsorbed on the inner wall of the vapor deposition chamber.
Technical solution provided by the utility model, has the advantages that
1. vapor deposition liner mounting structure provided by the utility model, including at least one permanent magnet and soft magnetic materials region,
Wherein soft magnetic materials region is oppositely arranged with the first permanent magnet, and connection is removably adsorbed in opposed facing one end；At least one
A first permanent magnet and soft magnetic materials region are respectively distributed on two components to be fixed；Two components are the interior of vapor deposition chamber
The surface of the direction vapor deposition chamber inner wall face side of wall surface and vapor deposition liner.
The vapor deposition liner mounting structure of this structure, due to the first permanent magnet and soft magnetic materials region is oppositely arranged and difference position
In on two components to be fixed, which is vapor deposition liner and vapor deposition chamber inner wall face, is needing to pacify vapor deposition liner
When mounted in vapor deposition chamber inner wall face, the first permanent magnet on the two neighboring component need to be only adsorbed at corresponding position
Soft magnetic materials region, so that it may vapor deposition liner and vapor deposition chamber absorption be fixed, the installation process of vapor deposition liner is completed；It is needing to tear open
When unloading vapor deposition liner, the active force of outer bound pair vapor deposition liner is only needed to be greater than the absorption between the first permanent magnet and soft magnetic materials region
Power, so that it may vapor deposition liner be taken off from vapor deposition chamber inner wall face, liner and chamber inner wall face will not be caused any broken
It is bad, consequently facilitating the installation and removal in vapor deposition, effectively improve the efficiency of liner installation.
2. vapor deposition liner mounting structure provided by the utility model, the soft magnetic materials region is protrusion, is facilitated in vapor deposition
When lining installation, the first permanent magnet is correctly aligned with soft magnetic materials region, further increases the installation effectiveness of vapor deposition liner.
3. vapor deposition liner mounting structure provided by the utility model further includes removably being adsorbed on the soft magnetic materials area
The second permanent magnet on domain, second permanent magnet and the opposed facing one end polarity of first permanent magnet are on the contrary, pass through the
Vapor deposition liner is adsorbed on vapor deposition chamber inner wall face by the adsorption capacity between one permanent magnet and the second permanent magnet, can be further
Improve the reliability of absorption fixed form.
4. vapor deposition liner mounting structure provided by the utility model further includes being arranged on one side surface of vapor deposition liner
Indicia patterns and/or coding, for identifying the vapor deposition liner.The setting of indicia patterns and coding can facilitate installation
Personnel efficiently find liner and the mutual corresponding relationship in soft magnetic materials region to be installed in time, to improve installation effectiveness.
5. another vapor deposition liner mounting structure provided by the utility model, including at least one first permanent magnet and second
Permanent magnet, wherein the second permanent magnet, is oppositely arranged with first permanent magnet, and opposed facing one end polarity is opposite；It is described
At least one first permanent magnet and second permanent magnet are respectively distributed on two components to be fixed；Described two components are
The inner wall of chamber and the surface towards the vapor deposition chamber inner wall face side of the vapor deposition liner is deposited.
This mounting structure can will be in vapor deposition by the adsorption capacity of one-to-one first permanent magnet and the second permanent magnet
Lining is absorbed and fixed on vapor deposition chamber inner wall face, completes the installation process of vapor deposition liner；When needing to dismantle vapor deposition liner, only need
The active force of outer bound pair vapor deposition liner is greater than the adsorption capacity between the first permanent magnet and the second permanent magnet, so that it may liner will be deposited
It is taken off from vapor deposition chamber inner wall face, any destruction will not be caused to liner and chamber inner wall face, consequently facilitating in vapor deposition
Installation and removal effectively improve the efficiency of liner installation.
6. evaporation coating device provided by the utility model, including the installation knot that chamber is deposited, liner and any of the above-described is deposited
Structure.Wherein, mounting structure described in any of the above embodiments and the vapor deposition liner correspond, for splicing the vapor deposition liner
And it is removably adsorbed on the inner wall of the vapor deposition chamber.The evaporation coating device of this structure takes the first permanent magnet and soft magnetism
Vapor deposition liner is mounted on vapor deposition chamber inner wall face, improves by the absorption fixed form between material area or the second permanent magnet
The efficiency of liner installation；And any destruction will not be caused to vapor deposition chamber, to improve the service life of vapor deposition chamber.
Detailed description of the invention
It, below will be right in order to illustrate more clearly of specific embodiment of the present invention or technical solution in the prior art
Specific embodiment or attached drawing needed to be used in the description of the prior art are briefly described, it should be apparent that, it is described below
In attached drawing be that some embodiments of the utility model are not paying creativeness for those of ordinary skill in the art
Under the premise of labour, it is also possible to obtain other drawings based on these drawings.
Fig. 1 is the longitudinal profile schematic diagram of the mounting structure of vapor deposition liner provided in the utility model embodiment 1；
Fig. 2 is the longitudinal profile schematic diagram of the mounting structure of vapor deposition liner provided in the utility model embodiment 2；
Description of symbols: the first permanent magnet of 1-；2- soft magnetic materials region；The second permanent magnet of 3-；4- coding；In 5- vapor deposition
Lining；6- inner wall.
Specific embodiment
The technical solution of the utility model is clearly and completely described below in conjunction with attached drawing, it is clear that described
Embodiment is the utility model a part of the embodiment, instead of all the embodiments.Based on the embodiments of the present invention, originally
Field those of ordinary skill every other embodiment obtained without making creative work belongs to practical
Novel protected range.
It is in the description of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right", " perpendicular
Directly ", the orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" is to be based on the orientation or positional relationship shown in the drawings, and is only
For ease of description the utility model and simplify description, rather than the device or element of indication or suggestion meaning must have it is specific
Orientation, be constructed and operated in a specific orientation, therefore should not be understood as limiting the present invention.
In addition, as long as technical characteristic involved in the utility model different embodiments disclosed below is each other
Not constituting conflict can be combined with each other.
Embodiment 1
The present embodiment provides a kind of mounting structures that liner is deposited, as shown in Figure 1, including the first permanent magnet 1, soft magnetic materials
Region 2, the second permanent magnet 3 and indicia patterns and coding 4.
First permanent magnet 1 has several, is arranged on the surface of direction vapor deposition 6 side of chamber inner wall face of vapor deposition liner 5；
Soft magnetic materials region 2, such as steel material protrusion, correspond on the inner wall 6 that the first permanent magnet 1 is molded over vapor deposition chamber；
Second permanent magnet 3 is identical as 1 quantity of the first permanent magnet, is removably adsorbed on soft magnetic materials region 2, with the first permanent magnet 1
Opposed facing one end polarity is on the contrary, the end of such as the first permanent magnet is the pole N, and the end of the second permanent magnet is the pole S, at two
Under the magnetic field force effect that permanent magnet mutually adsorbs, liner can be removably secured with vapor deposition chamber inner wall face and be connect, so that
Simple and convenient, raising installation effectiveness is installed.
Indicia patterns and coding 4 are arranged at lining in vapor deposition, for example, indicia patterns and coding 4 are all set in vapor deposition
On one side surface in the separate vapor deposition chamber inner wall face 6 of lining 5.Wherein, the shape one of the shape of indicia patterns and the vapor deposition liner 5
It causes, can be convenient installation personnel and timely and accurately find corresponding liner, to save the time, improve efficiency.
The mounting structure of the vapor deposition liner of this embodiment, use process are as follows: first the first permanent magnet 1 is arranged in vapor deposition
On the surface towards vapor deposition 6 side of chamber inner wall face of lining 5；The second permanent magnet 3 is arranged in soft magnetic materials region 2 again
On, so that the second permanent magnet 3 and the opposed facing one end polarity of the first permanent magnet 1 are on the contrary, the first permanent magnetism on liner 5 will be deposited
Body 1 is close with its one-to-one second permanent magnet 3, under the magnetic field force effect that two pieces of permanent magnets mutually adsorb, so that first
Permanent magnet 1 and the second permanent magnet 3 can be effectively to positive absorptions, to complete liner and the fixed installation of chamber is deposited；Without
Installation through-hole or blind hole are opened up on vapor deposition liner 5 and vibration chamber inner wall face 6, effectively improves the installation of vapor deposition liner 5
Efficiency.It is deposited in 5 disassembly process of liner, need to only be removed from inner wall 6 by external force by liner 5 is deposited, it will not be to vapor deposition chamber
Any destruction is caused in room, can also reuse, and whole dismounting process is simple and convenient, while extending vapor deposition liner 5 and vapor deposition
The service life of chamber.
As interchangeable embodiment, the shape of indicia patterns can also be inconsistent with the shape of the vapor deposition liner 5, example
As long as schematic diagram signal, specific shape signal facilitate installation personnel rapidly and accurately to find can be corresponding to vapor deposition liner 5
To corresponding vapor deposition liner 5.
As further interchangeable embodiment, indicia patterns and coding 4 also be can be set in the direction of vapor deposition liner 5
It is deposited on the surface of 6 side of chamber inner wall face；Alternatively, indicia patterns and coding 4 are separately positioned on the both side surface of vapor deposition liner 5
On, the surface setting coding or indicia patterns of 5 side of liner is either only deposited, just installation personnel is found in time wait pacify demander
The liner of dress；As further deformation, above-mentioned indicia patterns and coding 4 can also be all not provided with.
As deformation, the first permanent magnet 1 can also only be one, and accordingly the second permanent magnet 3 is also one；As long as it has
There are enough adsorption capacities to can satisfy the fixing intensity requirement that vapor deposition liner 5 is installed；As further deformation, the first permanent magnetism
Body 1 can also be unevenly distributed on the surface of direction vapor deposition 6 side of chamber inner wall face of vapor deposition liner 5, as long as first forever
The adsorption capacity of magnet 1 can satisfy the fixing intensity requirement that vapor deposition liner 5 is installed in the distribution of interior lining.
As further interchangeable embodiment, it can also be not provided with the second permanent magnet 3, due to soft magnetic materials region 2
It under fixed magnetic field effect, can directly be attracted on the first permanent magnet 1, so that vapor deposition liner 5 and vapor deposition chamber inner wall face 6
Fixed absorption.Soft magnetic materials region 2 is preferably made of steel material, or can also be made of all kinds of permeability alloys materials, only
Meet the performance of magnetic conduction.
As interchangeable embodiment, soft magnetic materials region 2 or plane or groove can only facilitate
First permanent magnet 1 and its fixing intensity requirement installed to positive absorption, satisfaction vapor deposition liner 5, vapor deposition liner 5 is absorbed and fixed at
It is deposited on chamber inner wall face 6.
As interchangeable embodiment, the first permanent magnet 1 can also be set on vapor deposition chamber inner wall face 6, it will be soft
Magnetic material area 2 is set on a side surface of direction vapor deposition chamber for vapor deposition liner 5；Alternatively, can also be by a part first
The setting of permanent magnet 1 on vapor deposition chamber inner wall face 6, steam by the direction that vapor deposition liner 5 is arranged in corresponding soft magnetic materials region 2
On the side surface for plating chamber；The side table of the direction vapor deposition chamber of vapor deposition liner 5 is arranged in first permanent magnet 1 of remainder
On face, the setting of soft magnetic materials region 2 of remainder is on vapor deposition chamber inner wall face 6；As long as the two corresponds, meet first
Permanent magnet 1 is removably adsorbed on the effect in soft magnetic materials region 2.
Embodiment 2
The present embodiment provides a kind of mounting structures that liner is deposited, as shown in Fig. 2, include, the first permanent magnet 1 and second is forever
Magnet 3.First permanent magnet 1 has several, is arranged on the surface of direction vapor deposition 6 side of chamber inner wall face of vapor deposition liner 5；The
Two permanent magnets 3 are identical as 1 quantity of the first permanent magnet, and correspond and the inner wall 6 of vapor deposition chamber is arranged in the first permanent magnet 1
On；In any group of one-to-one first permanent magnet 1 and the second permanent magnet 3, the first permanent magnet 1 and the mutual face of the second permanent magnet 3
Pair one end polarity on the contrary, so that the mutually absorption of the first permanent magnet 1 and the second permanent magnet 3, and then realize the peace of vapor deposition liner 5
Dress.
The mounting structure of vapor deposition liner in this embodiment, use process are as follows: the setting of the first permanent magnet 1 is being deposited
On the surface of direction vapor deposition 6 side of chamber inner wall face of liner 5, the second permanent magnet 3 is arranged in the inner wall 6 of vapor deposition chamber
On, so that the first permanent magnet 1 and the second permanent magnet 3 correspond, and opposed facing one end polarity is opposite.In being then deposited
Lining 5 is close to vapor deposition chamber inner wall face 6, and under the magnetic field force effect mutually adsorbed, the first permanent magnet 1 and the second permanent magnet 3 are mutually
It is attached together, so that liner is fixed together with chamber, to complete the installation of liner.
As interchangeable embodiment, the first permanent magnet 1 and the second permanent magnet 3 can also it is each only one, if the
One permanent magnet 1 is corresponded to each other with the second permanent magnet 3, and opposed facing one end polarity is on the contrary, make the first permanent magnet 1 and second
Permanent magnet 3 is mutually attached together, and meets the fixing intensity requirement of liner installation.
As deformation, the first permanent magnet 1 also be can be set on vapor deposition chamber inner wall face 6, and the second permanent magnet 3 can also be set
It is placed on the surface of direction vapor deposition 6 side of chamber inner wall face of vapor deposition liner 5, alternatively, can also be by a part of first permanent magnet 1
On vapor deposition chamber inner wall face 6, the second corresponding permanent magnet 3 is arranged in the direction vapor deposition chamber of vapor deposition liner 5 for setting
On one side surface of wall surface 6；The direction vapor deposition chamber inner wall face 6 of vapor deposition liner 5 is arranged in first permanent magnet 1 of remainder
On one side surface, the second permanent magnet 3 setting of remainder is on vapor deposition chamber inner wall face 6；As long as the first permanent magnet 1 and second
Permanent magnet 3 corresponds to each other, and opposed facing one end polarity is on the contrary, make the first permanent magnet 1 and the second mutually absorption of permanent magnet 3
Together, meet the fixing intensity requirement of liner installation.
Embodiment 3
The present embodiment provides a kind of evaporation coating devices, appoint including what is provided in vapor deposition chamber, vapor deposition liner 5 and embodiment 1 or 2
One mounting structure.Chamber, which is deposited, has inner cavity；Vapor deposition liner 5 has several；Mounting structure and vapor deposition liner 5 correspond,
Splice and be removably adsorbed on the inner wall 6 of vapor deposition chamber for liner 5 will to be deposited.
Evaporation coating device in this embodiment, use process are as follows: utilize the first permanent magnet 1 and second in mounting structure
Vapor deposition liner 5 and vapor deposition chamber inner wall face 6 are attached together by the magnetic attraction between permanent magnet 3 or soft magnetic materials region 2,
The installation for completing vapor deposition liner 5 can effectively increase the installation effectiveness of vapor deposition liner 5；Again since magnetic suck is to vapor deposition liner 5
And vapor deposition chamber does not damage, can effectively improve the service life of evaporation coating device；Again by being arranged on vapor deposition liner 5
Substrate completes the setting of device to be deposited；Finally it is deposited.
Obviously, the above embodiments are merely examples for clarifying the description, and does not limit the embodiments.It is right
For those of ordinary skill in the art, can also make on the basis of the above description it is other it is various forms of variation or
It changes.There is no necessity and possibility to exhaust all the enbodiments.And it is extended from this it is obvious variation or
It changes among the protection scope created still in the utility model.
Claims (9)
1. the mounting structure of liner is deposited, which is characterized in that including
At least one first permanent magnet (1)；
Soft magnetic materials region (2), the soft magnetic materials region (2) is oppositely arranged with first permanent magnet (1), and faces each other
One end removably adsorb connection；
At least one described first permanent magnet (1) and the soft magnetic materials region (2) are respectively distributed to two components to be fixed
On；Described two components be deposited chamber inner wall (6) and it is described be deposited liner (5) towards the vapor deposition chamber inner wall face
(6) surface of side.
2. the mounting structure of vapor deposition liner according to claim 1, it is characterised in that: the soft magnetic materials region (2) is
Protrusion；
The protrusion is arranged on the inner wall (6) of the vapor deposition chamber, and accordingly first permanent magnet (1) is fixed on described
Be deposited liner (5) towards it is described vapor deposition chamber a side surface on；Or
The protrusion setting in vapor deposition liner (5) towards on a side surface of the vapor deposition chamber, accordingly described the
One permanent magnet (1) is fixed on the inner wall (6) of the vapor deposition chamber.
3. the mounting structure of vapor deposition liner according to claim 1 or 2, it is characterised in that: the soft magnetic materials region (2)
It is made of steel material.
4. the mounting structure of vapor deposition liner according to claim 1, it is characterised in that: further include removably being adsorbed on institute
State the second permanent magnet (3) on soft magnetic materials region (2), second permanent magnet (3) and the mutual face of first permanent magnet (1)
Pair one end polarity it is opposite.
5. the mounting structure of vapor deposition liner according to claim 1 or 2 or 4, it is characterised in that: first permanent magnet
It (1) is at least two, all first permanent magnets (1) are evenly distributed on the inner wall (6) of the vapor deposition chamber or are deposited
On the surface towards described vapor deposition chamber inner wall face (6) side of liner (5).
6. the mounting structure of vapor deposition liner according to claim 1 or 2 or 4, it is characterised in that: further include being arranged described
The indicia patterns on (5) one side surface of liner and/or coding (4) is deposited, the indicia patterns and/or coding (4) are for identifying
The vapor deposition liner (5).
7. it is according to claim 6 vapor deposition liner mounting structure, it is characterised in that: the shape of the indicia patterns with should
The shape of vapor deposition liner (5) is consistent.
8. the mounting structure of liner is deposited, which is characterized in that including
At least one first permanent magnet (1)；
Second permanent magnet (3) is oppositely arranged with first permanent magnet (1), and opposed facing one end polarity is opposite；
At least one described first permanent magnet (1) and second permanent magnet (3) are respectively distributed on two components to be fixed；
Described two components be deposited chamber inner wall (6) and it is described be deposited liner (5) towards the vapor deposition chamber inner wall face (6)
The surface of side.
9. evaporation coating device, which is characterized in that including
Chamber is deposited, the vapor deposition chamber has inner cavity；
It is deposited liner (5), the vapor deposition liner (5) is at least one；
The mounting structure of at least one vapor deposition liner of any of claims 1-8, one by one with the vapor deposition liner (5)
It is corresponding, for vapor deposition liner (5) to be spliced to and is removably adsorbed on the inner wall (6) of the vapor deposition chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821014139.1U CN208485941U (en) | 2018-06-28 | 2018-06-28 | The mounting structure and evaporation coating device of liner is deposited |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821014139.1U CN208485941U (en) | 2018-06-28 | 2018-06-28 | The mounting structure and evaporation coating device of liner is deposited |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208485941U true CN208485941U (en) | 2019-02-12 |
Family
ID=65249084
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821014139.1U Active CN208485941U (en) | 2018-06-28 | 2018-06-28 | The mounting structure and evaporation coating device of liner is deposited |
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| CN (1) | CN208485941U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110284108A (en) * | 2019-08-02 | 2019-09-27 | 昆山维信诺科技有限公司 | A kind of vapor deposition cavity inner lining device and its vapo(u)rization system, evaporation coating device |
-
2018
- 2018-06-28 CN CN201821014139.1U patent/CN208485941U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110284108A (en) * | 2019-08-02 | 2019-09-27 | 昆山维信诺科技有限公司 | A kind of vapor deposition cavity inner lining device and its vapo(u)rization system, evaporation coating device |
| CN110284108B (en) * | 2019-08-02 | 2021-10-01 | 苏州清越光电科技股份有限公司 | Evaporation chamber lining device, evaporation system thereof and evaporation device |
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