CN208461791U - A kind of beam type micro-resonator part of low-heat elastic damping - Google Patents
A kind of beam type micro-resonator part of low-heat elastic damping Download PDFInfo
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- CN208461791U CN208461791U CN201821480170.4U CN201821480170U CN208461791U CN 208461791 U CN208461791 U CN 208461791U CN 201821480170 U CN201821480170 U CN 201821480170U CN 208461791 U CN208461791 U CN 208461791U
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- beam type
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- resonant body
- eardrum
- elastic damping
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Abstract
The utility model relates to micro-electromechanical system (MEMS) fields, disclose a kind of beam type micro-resonator part of low-heat elastic damping, comprising: resonant body, substrate.Resonant body both ends are fixed in substrate, form fixed constraint.Resonant body is eardrum biomimetic features, and cross section profile is similar to human body eardrum, is obtained by first-order bessel function.Resonant body not only generates bending strain in vibration, there is also elongation strain, and elongation strain does not generate thermoelasticity dissipation, so the structure of the utility model is able to achieve lower thermoelastic damping.
Description
Technical field
The utility model belongs to micro-electromechanical system (MEMS) field, and the beam type eardrum for being related to a kind of low-heat elastic damping is bionical micro-
Resonating device.
Background technique
Quality factor are the important performance indexes of resonating device.For encapsulating device in a vacuum, thermoelastic damping is
One of an important factor for influencing quality factor.Thermoelastic damping is that compression occurs under stress due to mechanical structure, stretches,
So that volume changes, causes heat to generate and dissipate namely the vibrational energy of resonating device becomes thermal energy consumption and dissipates.When
Micro-resonator works in a vacuum, generates high-frequency vibration, thermoelastic damping is exactly the maximum restraining factors of its performance and efficiency.
Now common flat thin template micro-resonator, principal vibration mode is oscillation crosswise, and thermoelastic damping is also primarily generated at curved
The big thickness direction of curved strain degree, numerical value are relatively large.Therefore need to explore more reasonable structure to reduce because thermoelasticity hinders
Buddhist nun's bring energy loss improves energy utilization efficiency.
Bionics is that engineer application is realized using the structure and function of the technology-imitation organisms such as machinery, electronics
Section permeates and is combined with biology, biophysics, electronics, cybernetics, ergonomics, mathematics, psychology and automation skill
Art etc..With bionic continuous development, people start with prior art simulation biological structure and function, to solve
Engineering problem.As the progress and nanotechnology and MEMS technology of molecular biology develop, the combination tool of bionics and MEMS
There is feasibility.Eardrum is one layer of semitransparent thin film in human ear, it plays the role of amplification and receives sound wave, with the micro- resonance of MEMS
The function of device has common place.During evolution, eardrum development has its superiority for existing structure, therefore MEMS is micro- humorous
Vibration device is designed as eardrum structure with real value.
Utility model content
Technical problem: the utility model provides a kind of beam type micro-resonator part that thermoelastic damping can be significantly reduced.
Technical solution: the low-heat elastic damping beam type micro-resonator part of the utility model, comprising: resonant body and substrate.It is humorous
Vibration body both ends are fixed in substrate, form fixed constraint.Resonant body is eardrum biomimetic features, and cross section profile is similar to human body drum
Film is obtained by first-order bessel function.
In the bionical micro-resonator part of the beam type eardrum of the utility model, resonance body running generates high frequency at intrinsic frequency
Micro breadth oscillation, exiting form are electrostatic drive or Piezoelectric Driving.
Low-heat elastic damping resonant body in the utility model is a kind of biomimetic features, derives from human ear eardrum structure.By
Bessel function can be fitted eardrum structure, which is
Wherein a is the half of beam plane length, and W is the height that plan range is at r between midpoint, J0(x) and I0(x)
Not Wei real argument and empty argument Bessel function of the first kind.B=-J0(x)/I0(x), C is height coefficient.The bionical knot of the eardrum
Structure works near intrinsic frequency, and thermoelastic damping is significantly less than the common beam of same length.Physical principle is analyzed as follows.
In the vibration of MEMS resonant device, the compression and stretching of structure will cause temperature imbalance, lead to Non reversing heat flow,
Hot wire-CVD phenomenon occurs and forms energy dissipation, i.e. thermoelastic damping so that mechanical energy is converted into thermal energy.Bending strain is heat
The main source of elastic damping.
Itself there is certain bending under static state in the low-heat elastic damping structure resonance body of the utility model, when by
When external drive generates vibration, resonant body can not only bend strain, there is also elongation strain.Bending strain can generate thickness
The heat transmitting of direction, that is, normal direction is spent, elongation strain itself does not generate hot transmitting.Mainly occur compared to common beam type micro-resonator
Oscillation crosswise, generates bending strain, and beam type eardrum biomimetic features micro-resonator of the invention exists and do not generate thermoelastic damping
Elongation strain, normal direction bending strain is smaller, so overall thermoelastic damping is lower.
The utility model has the advantages that the utility model compared with prior art, has the advantage that
The beam type eardrum biomimetic features micro-resonator of the utility model, when by external drive, peak swing is appeared in
Close to the position of edges at two ends, and occur in symmetrical fashion, coverage is big；And common beam type micro-resonator, maximum vibration
Width is in midpoint, range very little.So bionical micro-resonator of the invention, maximum vibration displacement is easier to be utilized.
The beam type eardrum biomimetic features micro-resonator of the utility model, when vibration, can bend strain and elongation strain,
Elongation strain does not generate thermoelastic damping.Common beam type micro-resonator, vibration principal mode are oscillation crosswise, bend and answer
Become.And bending strain is the main source of thermoelastic damping, so the thermoelasticity of the bionical micro-resonator of beam type eardrum of the invention
Damping is less than the common beam type micro-resonator with length.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model
Fig. 2 is the schematic cross-section of the utility model
Fig. 3 is the external drive schematic diagram of the utility model
Fig. 4 is the structural schematic diagram that the utility model height coefficient changes
Specific embodiment
Below with reference to example and Figure of description, the present invention will be further described.
As shown in Figure 1, the beam type micro-resonator part of the low-heat elastic damping of the utility model, comprising: resonant body (1) and base
Bottom (2).Resonant body (1) both ends are fixed on substrate (2), form fixed constraint.Resonant body (1) is eardrum biomimetic features, section
Profile is similar to human body eardrum, is obtained by first-order bessel function.
Size based on MEMS device, the low-heat elastic damping resonant body in the utility model, with practical eardrum knot
On the basis of structure parameter, certain multiple is reduced, keeps radius, height, thickness corresponds to proportional.As shown in figure 3, in radius midpoint
Apply a normal direction external drive close with first natural frequency, resonant body generates vibration, and peak swing appears in radius
Partially extrorse annular region is put, amplitude very little near central axes.It is larger that bending strain and elongation strain occur mainly in amplitude
Region, coverage is limited.When being vibrated under identical excitation with the common beam type resonator of length, have from center to both ends
Obvious bending strain.So the thermoelastic damping of eardrum biomimetic features micro-resonator of the invention is obvious near intrinsic frequency
Less than common beam type micro-resonator.
In the case where constraining constant, changes the height coefficient C of eardrum biomimetic features equation, it is different radian can be obtained
Structure.By taking Fig. 4 as an example, reduce height coefficient C, makes the reduction of resonator height, curvature becomes smaller, but compared to common beam, still has
There is certain biomimetic features advantage.
Claims (3)
1. a kind of beam type micro-resonator part of low-heat elastic damping, which is characterized in that the device includes having low-heat elastic damping
The resonant body (1) and substrate (2) of structure, the resonant body (1) thickness is small and uniform, and both ends are fixed on substrate (2), is formed
Fixed constraint；Resonant body (1) is eardrum biomimetic features, and cross section profile is similar to human body eardrum, is obtained by first-order bessel function.
2. the beam type micro-resonator part of low-heat elastic damping according to claim 1, which is characterized in that resonant body (1)
Contour curve is fitted by first-order bessel function and is formed.
3. the beam type micro-resonator part of low-heat elastic damping according to claim 1, which is characterized in that resonant body (1) work
Make at intrinsic frequency, generate high frequency micro amplitude vibration, exiting form is electrostatic drive or Piezoelectric Driving.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821480170.4U CN208461791U (en) | 2018-09-05 | 2018-09-05 | A kind of beam type micro-resonator part of low-heat elastic damping |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201821480170.4U CN208461791U (en) | 2018-09-05 | 2018-09-05 | A kind of beam type micro-resonator part of low-heat elastic damping |
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| Publication Number | Publication Date |
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| CN208461791U true CN208461791U (en) | 2019-02-01 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201821480170.4U Expired - Fee Related CN208461791U (en) | 2018-09-05 | 2018-09-05 | A kind of beam type micro-resonator part of low-heat elastic damping |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108471297A (en) * | 2018-03-21 | 2018-08-31 | 东南大学 | Low-heat elastic damping both-end fine beam resonator with through-hole structure |
-
2018
- 2018-09-05 CN CN201821480170.4U patent/CN208461791U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108471297A (en) * | 2018-03-21 | 2018-08-31 | 东南大学 | Low-heat elastic damping both-end fine beam resonator with through-hole structure |
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| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190201 Termination date: 20200905 |