CN208459871U - A kind of stable connection and the gas mass flow controller with anti-leak function - Google Patents

Abstract

The utility model discloses a kind of stable connection and with the gas mass flow controller of anti-leak function, including tube body, capping and vibration tube, the left end of the tube body is internally provided with air inlet pipe, restraining position ring block is arranged in the right end outer surface of the air inlet pipe, magnetism-isolating loop is installed on the outside of the switch block, guide ring is provided on the outside of the armature, the right end of the guide ring is connected with inner casing, the inside of the fixed ring is fixed with escape pipe, the capping is located at the right end of tube body, the vibration tube is located at the inside of flow sensor, and the outer surface of vibration tube is provided with driving coil, the upper end of the tube body is provided with display screen, and regulation button is provided on the right side of display screen.The stable connection and the gas mass flow controller with anti-leak function, connection is relatively stable, and connection is very closed is not easy to leak, and more in place to detections such as gas flow quality, can be closed when not used, prevents from entering impurity.

Description

A kind of stable connection and the gas mass flow controller with anti-leak function

Technical field

The utility model relates to gas mass flow controller technical field, specially a kind of stable connection and there is anti-let out Leak the gas mass flow controller of function.

Background technique

Mass flow controller is mainly used for carrying out accurate measurement and control to the mass flow of gas, in semiconductor microactuator electricity In the research and production of multiple fields such as sub- industry, special material development, chemical industry, petroleum industry, medicine, environmental protection and vacuum It has important application, general gas mass flow controller, connection is not sufficiently stable, and connects not closed enough easy leakage, right Gas flow quality etc. can't detect position, can not be closed when not used, therefore, it is proposed that a kind of stable connection and having anti- The gas mass flow controller of leakage function, in order to solve the problems, such as to propose among the above.

Utility model content

The purpose of this utility model is to provide a kind of stable connection and with the gas mass flow control of anti-leak function Device processed, to solve stable connection existing in the prior art and there is the gas mass flow controller connection of anti-leak function not It is enough to stablize, not closed enough easy leakage is connected, position can't detect to gas flow quality etc., closed ask can not be carried out when not used Topic.

To achieve the above object, the utility model provides the following technical solutions: a kind of stable connection and having anti-leak function The gas mass flow controller of energy, including tube body, capping and vibration tube, the left end of the tube body are internally provided with air inlet pipe, and The outer surface of air inlet pipe is provided with fixing bolt, and restraining position ring block, and the right side of stop collar is arranged in the right end outer surface of the air inlet pipe End is connected with switch block, magnetism-isolating loop is equipped on the outside of the switch block, and armature is provided on the right side of magnetism-isolating loop, outside the armature Side is provided with guide ring, and the right end inner surface of guide ring is provided with temperature inductor, and the right end of the guide ring is connected with interior Shell, and inner casing is internally provided with fixed ring, the inside of the fixed ring is fixed with escape pipe, and the left outer surface of escape pipe Be provided with spring, the right end covered positioned at tube body, and tube body is internally provided with flow sensor, and the vibration tube is located at stream The inside of quantity sensor, and the outer surface of vibration tube is provided with driving coil, the upper end of the tube body is provided with display screen, and shows Regulation button is provided on the right side of screen.

Preferably, the air inlet pipe is applied in the inside of tube body, and air inlet pipe and the connection type of fixing bolt are screw thread Connection, and the T-shaped structure in longitudinal section of air inlet pipe.

Preferably, the diameter of the magnetism-isolating loop and the internal diameter of guide ring are equal, and magnetism-isolating loop is fastened on the outer surface of switch block, And switch block is rotational structure in the inside of guide ring.

Preferably, the escape pipe is applied in the inside of fixed ring, and fixed ring is symmetrically arranged with 2 groups about inner casing, and And inner casing is to be threadedly coupled with the connection type of guide ring.

Preferably, the spring is set in qually spaced in the two sides of escape pipe, and the connection type of escape pipe and armature is card Slot connection, and armature is slide construction in the inside of guide ring.

Preferably, the driving coil is wrapped in the outer surface of vibration tube, and vibration tube is symmetrically arranged with 2 groups about tube body, and And the T-shaped structure of vibration tube.

Compared with prior art, the utility model has the beneficial effects that the stable connection and the gas with anti-leak function Weight flow controller, connection is relatively stable, and connection is very closed to be not easy to leak, and relatively arrives to detections such as gas flow quality Position, can be closed when not used, prevent from entering impurity.

Detailed description of the invention

Fig. 1 is the sectional side elevation in the utility model；

Fig. 2 is the attachment structure schematic diagram of the switch block and magnetism-isolating loop in the utility model；

Fig. 3 is the attachment structure schematic diagram of the vibration tube and driving coil in the utility model.

Specific embodiment

The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work Every other embodiment obtained, fall within the protection scope of the utility model.

Fig. 1-3 is please referred to, the utility model provides a kind of technical solution: a kind of stable connection and with anti-leak function Gas mass flow controller, including tube body 1, air inlet pipe 2, fixing bolt 3, stop collar 4, switch block 5, magnetism-isolating loop 6, armature 7, lead To ring 8, temperature inductor 9, inner casing 10, fixed ring 11, escape pipe 12, spring 13, capping 14, flow sensor 15, vibration tube 16, Driving coil 17, display screen 18 and regulation button 19, the left end of tube body 1 are internally provided with air inlet pipe 2, and the appearance of air inlet pipe 2 Face is provided with fixing bolt 3, and restraining position ring block 4 is arranged in the right end outer surface of air inlet pipe 2, and the right end of stop collar 4 is connected with switch block 5, the outside of switch block 5 is equipped with magnetism-isolating loop 6, and the right side of magnetism-isolating loop 6 is provided with armature 7, and the outside of armature 7 is provided with guide ring 8, and the right end inner surface of guide ring 8 is provided with temperature inductor 9, the diameter of magnetism-isolating loop 6 is equal with the internal diameter of guide ring 8, and Magnetism-isolating loop 6 is fastened on the outer surface of switch block 5, and switch block 5 is rotational structure in the inside of guide ring 8, conveniently passes through switch block 5 Rotary action controls effect of the magnetism-isolating loop 6 to armature 7, and armature 7 is conveniently made to separate or engage with escape pipe 12, guide ring 8 Right end is connected with inner casing 10, and inner casing 10 is internally provided with fixed ring 11, and the inside of fixed ring 11 is fixed with escape pipe 12, and The left outer surface of escape pipe 12 is provided with spring 13, and spring 13 is set in qually spaced in the two sides of escape pipe 12, and escape pipe 12 It is that card slot is connect, and armature 7 is slide construction in the inside of guide ring 8 with the connection type of armature 7, capping 14 is located at tube body 1 right end, and tube body 1 is internally provided with flow sensor 15, vibration tube 16 is located at the inside of flow sensor 15, and vibration tube 16 Outer surface be provided with driving coil 17, the upper end of tube body 1 is provided with display screen 18, and the right side of display screen 18 is provided with adjusting Button 19.

Air inlet pipe 2 is applied in the inside of tube body 1 as shown in figure 1, and air inlet pipe 2 and the connection type of fixing bolt 3 are screw thread Connection, and the T-shaped structure in longitudinal section of air inlet pipe 2 facilitate gas being quickly passed into inside, and by by air inlet pipe 2 are fixed on the inside of tube body 1 by stop collar 4, increase the stablizing effect of air inlet pipe 2, and stop collar 4 also acts as the work of sealing With, prevent gas from the gap of tube body 1 and air inlet pipe 2 flow out；

Escape pipe 12 is applied in the inside of fixed ring 11 as shown in figure 1, and fixed ring 11 is symmetrically arranged with 2 about inner casing 10 Group, and inner casing 10 is to be threadedly coupled with the connection type of guide ring 8, encrypts device more by the threaded connection of inner casing 10 Envelope, and pass through the inside that escape pipe 12 is fixed on inner casing 10 by two groups of fixed rings 11, then pass through the buffer function of spring 13, so that Escape pipe 12 is more stable, not will receive the influence of armature 7；

Driving coil 17 is wrapped in the outer surface of vibration tube 16 as shown in figure 1, and vibration tube 16 is symmetrically arranged with 2 groups about tube body 1, And the T-shaped structure of vibration tube 16 carries out certain induction to the gas of entrance, transmits when inducing different current signals It is adjusted onto display screen 18, then through regulation button 19, facilitates control gas mass flow.

Working principle: when using the stable connection and with the gas mass flow controller of anti-leak function, first Gas is passed through from the left end of air inlet pipe 2, fixing bolt 3 and stop collar 4 have fixed function to air inlet pipe 2, prevent air inlet pipe 2 Mobile, then gas is flowed into the inside of guide ring 8, passes through the effect of upper and lower two groups of flow sensor 15DN40, detection gas Flow and quality problems, then after gas enters the inside of flow sensor 15, by the effect of vibration of vibration tube 16, Electric signal is transmitted in the display screen 18 of top via driving coil 17, therefrom understands gas flow quality condition, it is then logical Operation regulation button 19 is crossed to control the rotation of switch block 5, so that the magnetism-isolating loop 6 of 5 outer surface of switch block acts on 7 generation of armature, is made Slideslip engages and is closed with escape pipe 12 armature 7 to the right, and gas can pass through clearance flow between armature 7 and guide ring 8 Enter to right side, then incudes the temperature conditions of gas via the effect of temperature inductor 9CWDZ11 and passed signal by single-chip microcontroller It is delivered on display screen 18, is easy to understand numerical value, finally make its Slideslip to the left, and and escape pipe by operating regulation button 19 again 12 separation, in the process, spring 13 has buffer function to escape pipe 12, and fixed ring 11 has fixed function to escape pipe 12, most After pass the gas through escape pipe 12 outflow, here it is the working principle of the device and operating methods.

The standardized element that the utility model uses can commercially, shaped piece according to specification and attached drawing Record can carry out customized, the specific connection type of each part is all made of in the prior art mature bolt, rivet, weldering It connects

Equal conventional means, mechanical, part and equipment are all made of in the prior art, conventional model, in addition circuit connection is adopted With connection type conventional in the prior art, this will not be detailed here.

Although the utility model is described in detail with reference to the foregoing embodiments, come for those skilled in the art Say, it is still possible to modify the technical solutions described in the foregoing embodiments, or to part of technical characteristic into Row equivalent replacement, within the spirit and principle of the utility model, any modification, equivalent replacement, improvement and so on should all It is included within the scope of protection of this utility model.

Claims (6)

1. a kind of stable connection and with anti-leak function gas mass flow controller, including tube body (1), capping (14) and Vibration tube (16), it is characterised in that: the left end of the tube body (1) is internally provided with air inlet pipe (2), and the outer surface of air inlet pipe (2) It is provided with fixing bolt (3), restraining position ring block (4) are arranged in the right end outer surface of the air inlet pipe (2), and the right end of stop collar (4) It is connected with switch block (5), is equipped with magnetism-isolating loop (6) on the outside of the switch block (5), and be provided with armature on the right side of magnetism-isolating loop (6) (7), it is provided with guide ring (8) on the outside of the armature (7), and the right end inner surface of guide ring (8) is provided with temperature inductor (9), the right end of the guide ring (8) is connected with inner casing (10), and inner casing (10) is internally provided with fixed ring (11), described solid The inside for determining ring (11) is fixed with escape pipe (12), and the left outer surface of escape pipe (12) is provided with spring (13), the envelope Lid (14) is located at the right end of tube body (1), and tube body (1) is internally provided with flow sensor (15), and the vibration tube (16) is located at The inside of flow sensor (15), and the outer surface of vibration tube (16) is provided with driving coil (17), the upper end of the tube body (1) is set It is equipped with display screen (18), and is provided with regulation button (19) on the right side of display screen (18).

2. a kind of stable connection according to claim 1 and the gas mass flow controller with anti-leak function, Be characterized in that: the air inlet pipe (2) is applied in the inside of tube body (1), and the connection type of air inlet pipe (2) and fixing bolt (3) To be threadedly coupled, and the T-shaped structure in longitudinal section of air inlet pipe (2).

3. a kind of stable connection according to claim 1 and the gas mass flow controller with anti-leak function, Be characterized in that: the diameter of the magnetism-isolating loop (6) is equal with the internal diameter of guide ring (8), and magnetism-isolating loop (6) is fastened on switch block (5) Outer surface, and switch block (5) is rotational structure in the inside of guide ring (8).

4. a kind of stable connection according to claim 1 and the gas mass flow controller with anti-leak function, Be characterized in that: the escape pipe (12) is applied in the inside of fixed ring (11), and fixed ring (11) is symmetrically set about inner casing (10) 2 groups are equipped with, and inner casing (10) is to be threadedly coupled with the connection type of guide ring (8).

5. a kind of stable connection according to claim 1 and the gas mass flow controller with anti-leak function, Be characterized in that: the spring (13) is set in qually spaced in the two sides of escape pipe (12), and the connection of escape pipe (12) and armature (7) Mode is card slot connection, and armature (7) is slide construction in the inside of guide ring (8).

6. a kind of stable connection according to claim 1 and the gas mass flow controller with anti-leak function, Be characterized in that: the driving coil (17) is wrapped in the outer surface of vibration tube (16), and vibration tube (16) is symmetrical arranged about tube body (1) There are 2 groups, and the T-shaped structure in vibration tube (16) side.