CN208459682U - A kind of long working distance imaging microscope and the micro imaging system using it - Google Patents

A kind of long working distance imaging microscope and the micro imaging system using it Download PDF

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Publication number
CN208459682U
CN208459682U CN201820950612.0U CN201820950612U CN208459682U CN 208459682 U CN208459682 U CN 208459682U CN 201820950612 U CN201820950612 U CN 201820950612U CN 208459682 U CN208459682 U CN 208459682U
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CN
China
Prior art keywords
camber reflection
mirror
lens
primary mirror
shell
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Withdrawn - After Issue
Application number
CN201820950612.0U
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Chinese (zh)
Inventor
迟力峰
王文冲
迪尔克·豪内斯
杨·泰拉斯
弗兰克·克里希
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Suzhou University
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Suzhou University
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Abstract

The utility model relates to a kind of long working distance imaging microscopes, comprising: entrance window, object to be observed are located on front side of entrance window, and entrance window includes the marginal portion of center portion and centrally located portion perimeter;Object lens, object lens include camber reflection primary mirror and camber reflection secondary mirror, center opening is provided in the middle part of camber reflection primary mirror, camber reflection secondary mirror is set to the rear side on the center portion of entrance window and being located at entrance window, and camber reflection primary mirror is located at the rear side of camber reflection secondary mirror;Lens, lens are set to the rear side of camber reflection primary mirror, and entrance window, camber reflection secondary mirror, camber reflection primary mirror, lens common optical axis;Imaging sensor, imaging sensor are set to the rear side of lens.The utility model has operating distance that is longer, reaching 10 centimetres, carries out imaging operation convenient for treating observed objects, can guarantee that treating observed objects clearly, is steadily imaged.

Description

A kind of long working distance imaging microscope and the micro imaging system using it
Technical field
The utility model belongs to micro-imaging field, and in particular to a kind of long working distance imaging microscope and application should The micro imaging system of imaging microscope.
Background technique
Its operating distance of existing imaging microscope is smaller, i.e. the distance between its object lens and object to be observed very little, example Such as when observing the object of 1 μ m in size, the operating distance of micro- lens head to object to be observed is less than 1mm, it is necessary to make object lens and The distance between object to be observed is maintained in operating distance could be clearly to being observed image objects.Therefore, in many fields It in conjunction, can not accomplish so close to object to be observed, and allow to close to object to be observed, for so small operating distance There is also operate with very inconvenient problem.Therefore, that there are operating distances is too small, using difficult for existing imaging microscope Defect.
Utility model content
The purpose of the utility model is to provide one kind to have long working distance, so that the very convenient imaging used is micro- Mirror.
In order to achieve the above objectives, the technical solution adopted in the utility model is:
A kind of long working distance imaging microscope, for treating observed objects micro-imaging, the imaging microscope packet It includes:
Entrance window, the object to be observed are located on front side of the entrance window, and the entrance window includes center portion and is located at The marginal portion of the center portion periphery;
Object lens, the object lens include camber reflection primary mirror and camber reflection secondary mirror, are opened in the middle part of the camber reflection primary mirror After thering is center opening, the camber reflection secondary mirror to be set on the center portion of the entrance window and be located at the entrance window Side, the camber reflection primary mirror are located at the rear side of the camber reflection secondary mirror;
Lens, the lens are set to the rear side of the camber reflection primary mirror, and the entrance window, the camber reflection time Mirror, the camber reflection primary mirror, the lens common optical axis;
Imaging sensor, described image sensor are set to the rear side of the lens;
It is anti-that the light of the object sending to be observed or reflection reaches the curved surface behind the marginal portion of the entrance window Primary mirror is penetrated to camber reflection secondary mirror direction first reflection, and the light after first reflection reaches the camber reflection Mirror and to the second secondary reflection of camber reflection primary mirror direction, the light after the second secondary reflection passes through in the camber reflection primary mirror The center opening in portion reaches the lens and transmits and received by described image sensor.
Preferably, the camber reflection primary mirror uses concave mirror, and the camber reflection secondary mirror uses convex reflecting mirror.
Preferably, the imaging microscope further includes shell, the concatenated tube body in rear end with the shell, the entrance window It is installed on the front end of the shell, the object lens are set in the shell, and the lens are set to the rear end of the tube body, institute State the rear end that imaging sensor is connected to the tube body.
Preferably, the imaging microscope further includes the cyclic adapting piece being connected to each other with flange, fixed ring, the shell Front end is inserted into the cyclic adapting piece, and the convex of the front end for resisting the fixed ring is provided on the cyclic adapting piece Edge, the rear end of the fixed ring are provided with internal screw thread, and the outside of the shell is provided with external screw thread, and the shell passes through described outer Screw thread and the internal screw thread and the fixed ring are mutually detachably connected.
Preferably, offer several fixation holes on the cyclic adapting piece, the cyclic adapting piece by with it is described solid Determine the fixing bolt that hole matches and is connected to each other with the flange.
Preferably, the groove to match with the flange, the flange are offered on the front end face of the cyclic adapting piece Be at least partially embedded into the groove.
Preferably, several first apertures are provided between the camber reflection primary mirror and the camber reflection secondary mirror.
Preferably, first aperture is set to camber reflection primary mirror corresponding region and/or the center opening pair Answer region.
Preferably, first aperture for being set to camber reflection primary mirror corresponding region is connected with the shell, First aperture for being set to the center opening corresponding region is connected with the aperture pipe being arranged in the center opening.
Preferably, several second apertures are provided between the camber reflection primary mirror and the lens.
Preferably, second aperture is connected with the tube body.
Preferably, the rear end of the shell is provided with cover board, and the tube body is connected by the cover board with the shell.
Preferably, the camber reflection primary mirror, which is installed on, is arranged on the intracorporal pedestal of the shell, and the pedestal passes through tune It saves mechanism and is slidably connected with the cover board along the optical axis direction of the camber reflection primary mirror.
Preferably, the regulating mechanism includes that both ends are connected respectively and along the curved surface with the cover board and the pedestal The optical axis direction of reflection primary mirror flexible compressible spring is in contact or connect with the pedestal and is connected with the cover board Regulating device.
Preferably, the regulating device include one end be in contact or be fixedly connected with the pedestal and the other end pass through it is described The adjusting bolt of cover board, the adjusting nut for being set on rear side of the cover board and being matched with the adjusting bolt.
Preferably, the pedestal is connected by regulating mechanism described in multiple groups with the cover board, and is adjusted described in multiple groups Mechanism is uniformly distributed around the axial line of the cover board.
Preferably, the shell at least middle part is tapered, and is incremented by by its front end rear end outer diameter.
Preferably, the rear end of the tube body is fixedly installed with sensor connecting piece, the shell of described image sensor and institute Sensor connecting piece is stated mutually to be rigidly connected.
Preferably, the imaging microscope further includes light source, guides the light source issued light to the entrance window The guide assembly of side.
A kind of micro imaging system, including with oral area cavity, be set to the mouth rim flange, described in covering The observation window of oral area, long working distance imaging microscope above-mentioned, the imaging microscope are mutually rigidly connected with the flange, The observation window is opposite with the entrance window.
Preferably, the cavity is vacuum cavity, atmosphere cavity, high-pressure chamber, body fluid cavity, high temperature cavity or specific Atmosphere cavity.
Preferably, the flange surrounds the periphery of the observation window.
Since above-mentioned technical proposal is used, the utility model has the advantage that the utility model compared with prior art With operating distance that is longer, reaching 10 centimetres, imaging operation is carried out convenient for treating observed objects, can guarantee to treat Observed objects are clear, are steadily imaged.
Detailed description of the invention
Attached drawing 1 is the appearance schematic diagram of the imaging microscope of the utility model.
Attached drawing 2 is the schematic cross-sectional view of the imaging microscope of the utility model.
Attached drawing 3 is the schematic diagram of the micro imaging system of the utility model.
In the figures above: 1, imaging microscope;2, shell;3, cyclic adapting piece;4, observation window;5, object to be observed;6, Object to be observed is at a distance from observation window;7, object lens;8, center opening;9, camber reflection primary mirror;10, camber reflection secondary mirror;11, Entrance window;12, the first aperture;13, the first aperture;14, the first aperture;15, aperture pipe;16, pedestal;17, cover board;18, tube body; 19, the second aperture;20, lens;21, imaging sensor;22, compressible spring;23, regulating device;24, optical axis;25, image passes The shell of sensor;26, flange;27, cavity;28, fixed ring;29, fixation hole;31, sensor connecting piece.
Specific embodiment
Embodiment shown in reference to the accompanying drawing is further described the utility model.
Embodiment one: as shown in Figure 1 and Figure 2, object 5 to be observed is located at the side of an observation window 4, is located at observation window 4 other sides for treating the imaging microscope 1 with long working distance of 5 micro-imaging of observed objects, mainly include according to Entrance window 11, object lens 7, lens 20 and the imaging sensor 21 of secondary setting and common optical axis 24.In the present invention, being defined on makes It is front side close to the side of object 5 to be observed when treating 5 micro-imaging of observed objects with the imaging microscope 1, and its opposite direction For rear side, i.e., it is front side close to the side of entrance window 11, is rear side close to the side of imaging sensor 21.In fig 2, front side On the left of corresponding diagram, and on the right side of rear side corresponding diagram.Distance 6 is formed in figure between object 5 and observation window 4 to be observed.
Object 5 to be observed is located at light transmission and is the front side of circular entrance window 11 and forms a spacing between entrance window 11 From.The entrance window 11 includes the marginal portion of center portion and centrally located portion perimeter.
Object lens 7 include the camber reflection secondary mirror 10 and camber reflection primary mirror 9 that are arranged from the front to the back, and also common optical axis 24 is simultaneously for the two It and is also circular eyeglass.Camber reflection secondary mirror 10 is set to the rear side on the center portion of entrance window 11 and being located at entrance window 11. Camber reflection primary mirror 9 is located at the rear side of camber reflection secondary mirror 10.The middle part of camber reflection primary mirror 9 offers center opening 8, center The axis of aperture 8 is conllinear with the optical axis 24 of camber reflection primary mirror 9.
The lens 20 for capableing of light transmission are set to the rear side of camber reflection primary mirror 9, and imaging sensor 21 is set to lens 20 Rear side.
In above-mentioned imaging microscope 1, object 5 to be observed is issued or the light of reflection is behind the marginal portion of entrance window 11 Camber reflection primary mirror 9 is reached to 10 direction first reflection of camber reflection secondary mirror, the light after first reflection reaches curved surface Secondary mirror 10 is reflected to 9 the second secondary reflection of direction of camber reflection primary mirror, and the light after the second secondary reflection passes through camber reflection primary mirror 9 The center opening 8 at middle part reaches lens 20 and transmits and received by imaging sensor 21, to form complete optical path.
Structure based on above-mentioned object lens 7 designs and is formed by optical path, for above-mentioned microscope, has a work Make distance WD and an angle [alpha], numerical aperture NA=sin α of object lens 7 can be determined according to angle [alpha], and derive WDtan α >= 15mm, so that the microscopical operating distance increases to several centimetres of magnitude.More Preferable scheme is that, the imaging is micro- WDtan α >=20mm in mirror 1, may be implemented very big operating distance in this way.Design according to the present utility model is imaged micro- The operating distance of mirror 1 at least can achieve 70mm, and ordinary circumstance can reach at least 100mm.That is, using the utility model Imaging microscope 1 can easily adjust the distance several centimeters object to be observed 5 be imaged.Preferably, the utility model The image-forming range or operating distance of imaging microscope 1 are about 10cm or so, specifically in 9cm between 12cm.Here Operating distance WD be the distance between object 5 and entrance window 11 to be observed.
In the above scheme, camber reflection primary mirror 9 uses concave mirror, and camber reflection secondary mirror 10 uses convex refractive Mirror.To which camber reflection primary mirror 9 and camber reflection secondary mirror 10 form a Schwarzschild lens systems.Above-mentioned curved surface Reflection primary mirror 9, camber reflection secondary mirror 10 and lens 20 form the combination of two reflecting mirrors and a lens 20, that is, form institute The refringent/reflection lens 20 of meaning can also be easier to carry out color difference school in general 20 system of lens of sizable wave-length coverage internal ratio Just.Design i.e. according to the present utility model, the chromatic aberration correction that can be measured in big wave-length coverage.In embodiment, should Imaging microscope 1 can carry out chromatic aberration correction to the wavelength within the scope of 190nm to 2300nm, can also be to 180nm to 4500nm Most of wavelength in range carries out chromatic aberration correction, and it covers deep ultraviolet, ultraviolet, visible light, near-infrared and infrared wavelength model It encloses.
On the basis of above-mentioned basic scheme, the embodiment of the utility model further includes following part:
The imaging microscope 1 further includes shell 2 and tube body 18, and tube body 18 is round tube, and is connected on the rear end of shell 2, shell The central axes of body 2 and the central axes of tube body 18 are conllinear.The front opening of shell 2, therefore entrance window 11 is just installed on 2 front end of shell Aperture position, and tube body 18 is then attached thereto at the open rearward end of shell 2.Object lens 7 are arranged in shell 2, and lens 20 are then set It is placed in the rear end of tube body 18, and imaging sensor 21 is then connected to the rear end of tube body 18, so that the imaging in imaging sensor 21 Chip is located at the rear end of lens 20 and therewith common optical axis 24.Sensor connecting piece 31 can be fixedly mounted in the rear end of tube body 18, Then the shell 25 of imaging sensor 21 is rigidly connected with 31 phase of sensor connecting piece.
The imaging microscope 1 further includes cyclic adapting piece 3 and fixed ring 29.Cyclic adapting piece 3 can pass through fixed ring 29 It is rigidly connected with 2 phase of shell, and cyclic adapting piece 3 can also rigidly be docked with 26 phase of flange, so that the front end of shell 2 can insert Enter in cyclic adapting piece 3.Specifically, cyclic adapting piece 3 includes the side wall that cricoid ontology and vertical surrounding ontology are arranged.Ring Several fixation holes 30 are offered on the ontology of shape connector 3, fixation hole 30 is opposite with the bolt hole on flange 26 to be installed It answers, so that cyclic adapting piece 3 can be connected to each other and the fixing bolt to match with fixation hole 30 with flange 26.Loop connecting The groove to match with the shape of flange 26 is formed on the front end face of part 3, so that at least capable of being locally embedded in for flange 26 is recessed It is connected after in slot using fixing bolt.The flange of the front end for resisting fixed ring 29 is provided on the side wall of cyclic adapting piece 3, To 29 sets of fixed ring behind 3 periphery of cyclic adapting piece its front end can be blocked by flange without rearward moving.Fixed ring 29 Rear end be provided with internal screw thread, and shell 2 is then provided with external screw thread close to the outside of its front end, and shell 2 can pass through external screw thread It is mutually detachably connected with internal screw thread and fixed ring 29.When shell 2 front end be inserted into cyclic adapting piece 3 when, then may be implemented with The rigid connection of cyclic adapting piece 3.
At least middle part of shell 2 is tapered, and is incremented by by its front end rear end outer diameter.In the present embodiment, the front end of shell 2 In a shorter cylinder, middle part is in truncated cone, and rear portion is also cylindrical, thus small before the whole presentation of the shell 2 Big state afterwards.
In shell 2, several apertures are provided between camber reflection primary mirror 9 and camber reflection secondary mirror 10, referred to as One aperture 12,13,14.First aperture 12,13,14 is set to 9 corresponding region of camber reflection primary mirror and/or center opening 8 is corresponding Region.In the present embodiment, provided with several first apertures 12 and center opening 8 in 9 corresponding region of camber reflection primary mirror Several first apertures 13,14 in corresponding region.For several first apertures in 9 corresponding region of camber reflection primary mirror 12, several cascaded surfaces are set in shell 2, then by these first apertures 12 be separately mounted on each cascaded surface and with shell 2 It is connected.For several first apertures 13,14 in 8 corresponding region of center opening, an aperture is first set in center opening 8 Pipe 15, aperture pipe 15 along camber reflection primary mirror 9 axial direction and to 10 direction of camber reflection secondary mirror extend, then it is center opening 8 is right Several first apertures 13,14 in region are answered to be connected with aperture pipe 15.In the present embodiment, it is both provided with and is mounted on aperture The first aperture 14 on 15 inner wall of pipe is also provided with the first aperture 13 being mounted on 15 outer wall of aperture pipe.By these first Aperture 12,13,14 can remove the spurious signal in optical signal, improve signal quality.Aperture pipe 15 can be set to have more Plant the ladder-like of aperture.
Several apertures, referred to as the second aperture 19, these second apertures are provided between camber reflection primary mirror 9 and lens 20 19 can be connected with tube body 18, that is, be installed in tube body 18.
The rear end of shell 2, i.e., be provided with cover board 17 at open rearward end, cover board 17 passes through the bolt and shell 2 at periphery It is connected, and the middle part of cover board 17 is then rigidly connected with tube body 18, so that tube body 18 is connected by cover board 17 with the realization of shell 2.
One pedestal 16 is set in shell 2, and camber reflection primary mirror 9 is installed on the pedestal 16.And pedestal 16 then passes through tune It saves mechanism and is slidably connected with cover board 17 along 24 direction of the optical axis of camber reflection primary mirror 9, so as to realize camber reflection The position of primary mirror 9 is adjusted.Regulating mechanism includes compressible spring 22 and regulating device 23.The both ends of compressible spring 22 respectively with Cover board 17 is connected with pedestal 16, and can be flexible along 24 direction of optical axis of camber reflection primary mirror 9.One end of regulating device 23 with Pedestal 16 is in contact or connects, and the other end is connected with cover board 17.In the present embodiment, regulating device 23 includes adjusting bolt and tune Save nut.The one end for adjusting bolt is in contact or is fixedly connected with pedestal 16, the other end then pass through the hole opened up on cover board 17 and 17 rear side of cover board is extended to, the axial direction for adjusting bolt drives the moving direction of camber reflection primary mirror 9 identical with pedestal 16.Adjust spiral shell Mother is set to 17 rear side of cover board and matches with bolt is adjusted.Then when rotating adjusting nut, adjusts bolt and move along its axis. When adjusting bolt to when the movement of 16 direction of pedestal, push pedestal 16 mobile, while 22 dilatation of compressible spring;And Shelves adjust bolt to when opposite direction movement, then pedestal 16 moves under the elastic reaction of compressible spring 22.Pedestal 16 passes through more It organizes regulating mechanism and is connected with cover board 17, and multiple groups regulating mechanism is uniformly distributed around the axial line of cover board 17.The present embodiment In, it is provided with three groups of regulating mechanisms.
The imaging microscope 1 further includes light source and guides light source issued light on front side of entrance window 11, i.e., at observation window 4 Guide assembly.Light source can be any light sources such as light emitting diode, laser, and guide assembly, which can be, to be arranged in camber reflection Reflecting mirror or optical fiber of 10 side of secondary mirror etc..Above-mentioned light source and guide assembly are similar with the structure in existing microscope, principle On can couple disengaging at an arbitrary position.
Embodiment two: as shown in Fig. 3, a kind of micro imaging system, including cavity 27, flange 26, observation window 4 and at As microscope 1.Cavity 27 is vacuum cavity, atmosphere cavity, high-pressure chamber, body fluid cavity, high temperature cavity or particular atmosphere chamber Body, object 5 to be observed are arranged in cavity 27.There is oral area, flange 26 is set to mouth rim, and observation window 4 is then on cavity 27 Oral area is covered, and the periphery of the encirclement observation window 4 of flange 26 can be made.Imaging microscope 1 is the scheme used in embodiment one, Then cavity 27 is rigidly connected by flange 26 and imaging microscope 1.Other flanges 28 can also be set on cavity 27.
When installation, first the cyclic adapting piece 3 of imaging microscope 1 is mounted on flange 26 by fixing bolt, then by shell Body 2 is inserted into cyclic adapting piece and is mated with, and then rotates fixed ring 29 and shell 2 and cyclic adapting piece are rigidly connected.
In the micro imaging system, imaging microscope 1 can close proximity be pacified by cyclic adapting piece 3 and fixed ring 29 On flange 26, since imaging microscope 1 is rigidly connected on cavity 27, the vibration of cavity 27 can cause to be imaged micro- The gearing of mirror 1 avoids the movement image blur generated because of the relative movement of imaging sensor 21 and object 5 to be observed, really Guarantor is steadily imaged.
When stating imaging microscope 1 involved in embodiment one and embodiment two in use and treating the imaging of observed objects 5, Imaging sensor can be used and carry out multiple continuous imaging, and using the software being set in imaging sensor 21 to the more of shooting Secondary imaging is handled, come effect on environment (vibration of such as equipment or the relative movement of microscope and imaging sensor 21) into Row correction, realizes the stable microcosmic imaging of object 5 to be observed.That is, lesser movement, image caused by such as vibrating is fuzzy It can be compensated in 21 visual field of imaging sensor by software, especially in the case where movement is not cracking situation.Correspondingly, originally Utility model can also include one fixed position of setting, and by the constant characteristic in the position in multiple capture images come school Image caused by quasi-moving is fuzzy.
In addition, above-mentioned imaging microscope 1 can also contain lighting system and contrast improving environment and corresponding component, The including but not limited to bright field image of incident light, astigmatism bright field image, incident light dark field image, off-axis laser light incident light image etc..
In above-mentioned imaging microscope 1, an acceleration transducer or motion sensor can also be included at least to examine The acceleration of junction or movement between microscope 1 and imaging sensor 21 are surveyed, such as imaging sensor 21 is relative to aobvious The movement of micro mirror connector 31.Further, should imaging microscope 1 can also include a motion controller, for compensating Relative acceleration or movement of the imaging sensor 21 relative to 1 port of microscope.Therefore, originally microscopical to can be designed so that Imaging sensor 21 and entire cavity 27 keep movement or vibration unanimously to ensure to object 5 to be observed in cavity 27 steadily Imaging, this design can be avoided the movement imaging mould generated because of imaging sensor 21 and the relative movement of object to be observed 5 Paste.
The above embodiments are only for explaining the technical ideas and features of the present invention, and its object is to allow be familiar with technique Personage can understand the content of the utility model and implement accordingly, do not limit the protection scope of the present invention. All equivalent change or modifications according to made by the spirit of the present invention essence, should all cover the protection scope of the utility model it It is interior.

Claims (10)

1. a kind of long working distance imaging microscope, for treating observed objects micro-imaging, it is characterised in that: the imaging Microscope includes:
Entrance window, the object to be observed are located on front side of the entrance window, and the entrance window includes center portion and is located at described The marginal portion of center portion periphery;
Object lens, the object lens include camber reflection primary mirror and camber reflection secondary mirror, are provided in the middle part of the camber reflection primary mirror Heart aperture, the camber reflection secondary mirror are set to the rear side on the center portion of the entrance window and being located at the entrance window, institute State the rear side that camber reflection primary mirror is located at the camber reflection secondary mirror;
Lens, the lens are set to the rear side of the camber reflection primary mirror, and the entrance window, the camber reflection secondary mirror, The camber reflection primary mirror, the lens common optical axis;
Imaging sensor, described image sensor are set to the rear side of the lens;
The object to be observed issues or the light of reflection reaches the camber reflection master behind the marginal portion of the entrance window Mirror and to camber reflection secondary mirror direction first reflection, the light after first reflection reach the camber reflection secondary mirror and To the second secondary reflection of camber reflection primary mirror direction, the light after the second secondary reflection is passed through in the middle part of the camber reflection primary mirror The center opening reaches the lens and transmits and received by described image sensor.
2. long working distance imaging microscope according to claim 1, it is characterised in that: the camber reflection primary mirror is adopted With concave mirror, the camber reflection secondary mirror uses convex reflecting mirror.
3. long working distance imaging microscope according to claim 1, it is characterised in that: the imaging microscope also wraps Shell, the concatenated tube body in rear end with the shell are included, the entrance window is installed on the front end of the shell, the object lens setting In in the shell, the lens are set to the rear end of the tube body, and described image sensor is connected to the rear end of the tube body.
4. long working distance imaging microscope according to claim 3, it is characterised in that: the imaging microscope also wraps The cyclic adapting piece being connected to each other with flange, fixed ring are included, the front end of the shell is inserted into the cyclic adapting piece, the ring-type The flange of the front end for resisting the fixed ring is provided on connector, the rear end of the fixed ring is provided with internal screw thread, institute The outside for stating shell is provided with external screw thread, and the shell is mutually removable by the external screw thread and the internal screw thread and the fixed ring It connects with unloading.
5. long working distance imaging microscope according to any one of claim 3 to 4, it is characterised in that: the song Several first apertures are provided between face reflection primary mirror and the camber reflection secondary mirror.
6. long working distance imaging microscope according to any one of claim 3 to 4, it is characterised in that: the song Several second apertures are provided between face reflection primary mirror and the lens.
7. long working distance imaging microscope according to any one of claim 3 to 4, it is characterised in that: the shell The rear end of body is provided with cover board, and the tube body is connected by the cover board with the shell.
8. long working distance imaging microscope according to claim 7, it is characterised in that: the camber reflection primary mirror peace Loaded on being arranged on the intracorporal pedestal of the shell, the pedestal is by regulating mechanism along the optical axis side of the camber reflection primary mirror To being slidably connected with the cover board.
9. a kind of micro imaging system, it is characterised in that: the micro imaging system includes the cavity with oral area, is set to institute It is micro- to state the flange of mouth rim, the observation window of the covering oral area, long working distance as claimed in claim 4 imaging Mirror, the imaging microscope are mutually rigidly connected with the flange, and the observation window is opposite with the entrance window.
10. micro imaging system according to claim 9, it is characterised in that: the cavity is vacuum cavity, atmosphere chamber Body, high-pressure chamber, body fluid cavity, high temperature cavity or particular atmosphere cavity.
CN201820950612.0U 2018-06-20 2018-06-20 A kind of long working distance imaging microscope and the micro imaging system using it Withdrawn - After Issue CN208459682U (en)

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Application Number Priority Date Filing Date Title
CN201820950612.0U CN208459682U (en) 2018-06-20 2018-06-20 A kind of long working distance imaging microscope and the micro imaging system using it

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Application Number Priority Date Filing Date Title
CN201820950612.0U CN208459682U (en) 2018-06-20 2018-06-20 A kind of long working distance imaging microscope and the micro imaging system using it

Publications (1)

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CN208459682U true CN208459682U (en) 2019-02-01

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