CN208432215U - A kind of X-ray bunch semiconductor position sensitive detector - Google Patents

Abstract

The utility model provides a kind of X-ray bunch semiconductor position sensitive detector, including shell, panel, absorbing sheet slot board, signal plug, 100 μ thickness beryllium pieces, beryllium membrane pressure plate, fixing screws, PSD detecting element；Wherein, panel inner face is placed in shell, PSD detecting element is fixed on panel inner face, shell two sides are equipped with signal plug slot, and signal plug is inserted into shell by signal plug slot, and three pins of PSD detecting element are welded in signal plug, 100 μ thickness beryllium pieces are placed on panel, beryllium membrane pressure plate is placed in beryllium on piece, and absorbing sheet slot board is placed on beryllium membrane pressure plate, and absorbing sheet slot board, beryllium membrane pressure plate, beryllium piece, panel are fixed by fixing screws and shell.The environment that utility model works shine in visible light shields the interference of visible light, improves detectivity, structure is simple, stable and reliable for performance for detecting one-dimensional space position and the intensity of X-ray of X-ray bunch.

Description

A kind of X-ray bunch semiconductor position sensitive detector

Technical field

The utility model belongs to semiconductor detector technical field, more particularly, to a kind of X-ray bunch semiconductor position spirit Quick detector.

Background technique

Semiconductor position sensitive detector (PSD) is a kind of semiconductor device developed by Japanese Bin Song company, is used In detection visible light beam in one-dimensional or two-dimensional directional position.Different from the position detection device of traditional lattice structure, such as CCD.The structural principle (referring to Fig. 1) of PSD is one layer of resistance elements of P-I-N semiconductor surface uniform fold in stripe shape, item An extraction electrode is respectively installed at the both ends of type, and when light beam is incident on the certain point of stripe shape, which generates signal code, and electric current is logical Sheet resistance laminar flow is crossed to both ends, according to Ohm's law, the distance of incidence point to both ends is proportional to the resistance at both ends, then exists The signal code that both ends extraction electrode obtains is then and apart from inverse ratio, if the electric current of both ends extraction electrode is I₁And I₂, stripe shape overall length Degree is L, and the distance of light beam incidence point to stripe shape midpoint is X, then has: X=2/L (I₁ -I₂/I₁+I₂).Accordingly, according to both ends The electric current I of extraction electrode₁And I₂The position of light beam incidence point can be obtained in value, in addition, by I₁+I₂The strong of the light beam can be obtained Degree.

The position detection device of lattice structure such as CCD, detecting location resolution ratio be determined by the size of its array element, and PSD detecting location resolution ratio is by I₁And I₂Continuous quantity determines that theoretical no maximum, detecting location resolution ratio is limited solely by element The noise of itself and subsequent probe circuit.PSD is connect with mating data processor may make up complete position sensitive spy system, The relatively low several orders of magnitude of location detection system of its price and CCD lattice structure.

The position sensitive that PSD is constituted visits the position that system is used to detect visible light beam, but can not detect the position of X-ray beam It sets, in relevant scientific experiment, especially in synchrotron radiation experiment, the position for detecting X-ray beam is very necessary means.

Summary of the invention

In view of this, the utility model is directed to a kind of X-ray bunch semiconductor position sensitive detector, make the detector Only receive X-ray and shield visible light completely, improve detectivity, reduces cost.

In order to achieve the above objectives, the technical solution of the utility model is achieved in that

A kind of X-ray bunch semiconductor position sensitive detector, including shell, panel, absorbing sheet slot board, signal plug, 100 μ thickness beryllium pieces, beryllium membrane pressure plate, fixing screws, PSD detecting element；Wherein, panel inner face is placed in shell, PSD detecting element It is fixed on panel inner face, for detecting visible light beam line position, shell two sides are equipped with signal plug slot, and signal plug passes through signal Socket slot is inserted into shell, and three pins of PSD detecting element are welded in signal plug, and 100 μ thickness beryllium pieces are placed on panel, beryllium film Pressing plate is placed in beryllium on piece, and absorbing sheet slot board is placed on beryllium membrane pressure plate, and absorbing sheet slot board, beryllium membrane pressure plate, beryllium piece, panel pass through Fixing screws are fixed with shell.

Further, the PSD detecting element uses shore pine S3270PSD detecting element, investigative range 37mm.

Further, O-ring seal is placed in slot outside the panel.

Further, the 100 μ thickness beryllium piece makes X-ray beam that can be incident on the spy of semiconductor One-dimensional position sensitive as window film The sensitizing range of element is surveyed, and visible light not can enter.

Further, the absorbing sheet slot board is for inserting absorbing sheet, when luminous intensity is beyond use when being saturated detector The light intensity that absorbing sheet is lowered into.

Further, the position sensitive detector further includes controller connected to it.

Compared with the existing technology, a kind of X-ray bunch semiconductor position sensitive detector described in the utility model have with Lower advantage:

1. the utility model carries out the detection of visible light beam line position using shore pine S3270PSD detecting element, it is by beryllium film Window material shields visible light using shell and dependency structure, is operable with the environment of visible light photograph, detects the one of X-ray bunch The intensity of dimension space position and X-ray can shield the interference of visible light, improve detectivity, structure is simple, and performance stabilization can It leans on.

2. can achieve the position better than CCD pixilated detectors by the detection system that the X-ray beam position sensor is constituted Resolution ratio；

3. the location detection system being made of the detector is cheap, the location detection system ratio with CCD lattice structure Lower several orders of magnitude.

Detailed description of the invention

The attached drawing for constituting a part of the utility model is used to provide a further understanding of the present invention, this is practical new The illustrative embodiments and their description of type are not constituteed improper limits to the present invention for explaining the utility model.? In attached drawing:

Fig. 1 is PSD principle schematic diagram described in the utility model embodiment；

Fig. 2 is X-ray bunch semiconductor position sensitive detector sectional view described in the utility model embodiment；

Fig. 3 is X-ray bunch semiconductor position sensitive detector explosive view described in the utility model embodiment.

Description of symbols:

1- shell；2- panel；3- absorbing sheet slot board；4- signal plug；5-100 μ thickness beryllium piece；6- beryllium membrane pressure plate；7- is solid Determine screw；The shore 8- pine S3270PSD detecting element.

Specific embodiment

It should be noted that in the absence of conflict, the feature in the embodiments of the present invention and embodiment can To be combined with each other.

In the description of the present invention, it should be understood that term " center ", " longitudinal direction ", " transverse direction ", "upper", "lower", The orientation or positional relationship of the instructions such as "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside" is It is based on the orientation or positional relationship shown in the drawings, is merely for convenience of describing the present invention and simplifying the description, rather than indicate Or imply that signified device or element must have a particular orientation, be constructed and operated in a specific orientation, therefore cannot understand For limitations of the present invention.In addition, term " first ", " second " etc. are used for description purposes only, and should not be understood as indicating Or it implies relative importance or implicitly indicates the quantity of indicated technical characteristic." first ", " second " etc. are defined as a result, Feature can explicitly or implicitly include one or more of the features.It is in the description of the present invention, unless another It is described, the meaning of " plurality " is two or more.

In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " is pacified Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally Connection；It can be mechanical connection, be also possible to be electrically connected；Can be directly connected, can also indirectly connected through an intermediary, It can be the connection inside two elements.For the ordinary skill in the art, on being understood by concrete condition State the concrete meaning of term in the present invention.

The utility model will be described in detail below with reference to the accompanying drawings and embodiments.

As shown in Figure 1-3, a kind of X-ray bunch semiconductor position sensitive detector, comprising: shell 1, panel 2, absorbing sheet are inserted Frid 3,4,100 μ thickness beryllium piece 5 of signal plug, beryllium membrane pressure plate 6, fixing screws 7, shore pine S3270PSD detecting element 8；

Wherein: signal plug 4 is fixed on shell 1, and shore pine S3270PSD detecting element 8 is fixed on 2 inner face of panel, and PSD is visited 3 pins for surveying element 8 are welded in signal plug 4, and 2 inner face of panel is placed on shell 1, places O-shaped sealing in 2 outside slot of panel Circle, 100 μ thickness beryllium pieces 5 are placed on panel 2, and beryllium membrane pressure plate 6 is placed on beryllium piece 5, and absorbing sheet slot board 3 is placed on beryllium membrane pressure plate 6, Absorbing sheet slot board 3, beryllium membrane pressure plate 6, beryllium piece 5, panel 2 are fixed on shell 1 by fixing screws 7.

In use, using shore pine S3270 as semiconductor One-dimensional position sensitive detecting element, 37 mm of investigative range；Detector Structure can be isolated extraneous visible light and enter, it is ensured that semiconductor One-dimensional position sensitive detecting element is not interfered by visible light, with 100 μ thickness beryllium piece makes X-ray beam that can be incident on the sensitizing range of semiconductor One-dimensional position sensitive detecting element as window film, and visible light It not can enter, guarantee the sensitivity and accuracy of detection, be used for absorbing sheet slot board 3 to insert absorbing sheet, when luminous intensity exceeds The light intensity for being lowered into detector when being saturated using absorbing sheet.

The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this Within the spirit and principle of utility model, any modification, equivalent replacement, improvement and so on should be included in the utility model Protection scope within.

Claims (6)

1. a kind of X-ray bunch semiconductor position sensitive detector, it is characterised in that: including shell, panel, absorbing sheet slot board, Signal plug, 100 μ thickness beryllium pieces, beryllium membrane pressure plate, fixing screws, PSD detecting element；Wherein, panel inner face is placed in shell, PSD Detecting element is fixed on panel inner face, and for detecting visible light beam line position, shell two sides are equipped with signal plug slot, signal plug It is inserted into shell by signal plug slot, three pins of PSD detecting element are welded in signal plug, and 100 μ thickness beryllium pieces are placed in panel On, beryllium membrane pressure plate is placed in beryllium on piece, and absorbing sheet slot board is placed on beryllium membrane pressure plate, absorbing sheet slot board, beryllium membrane pressure plate, beryllium piece, Panel is fixed by fixing screws and shell.

2. a kind of X-ray bunch semiconductor position sensitive detector according to claim 1, it is characterised in that: the PSD is visited It surveys element and uses shore pine S3270PSD detecting element, investigative range 37mm.

3. a kind of X-ray bunch semiconductor position sensitive detector according to claim 1, it is characterised in that: the panel O-ring seal is placed in the slot of outside.

4. a kind of X-ray bunch semiconductor position sensitive detector according to claim 1, it is characterised in that: 100 μ Thick beryllium piece makes X-ray beam that can be incident on the sensitizing range of semiconductor One-dimensional position sensitive detecting element as window film, and visible light is not It can enter.

5. a kind of X-ray bunch semiconductor position sensitive detector according to claim 1, it is characterised in that: the absorption Piece slot board is for inserting absorbing sheet, when luminous intensity is beyond the light intensity being lowered into when being saturated detector using absorbing sheet.

6. a kind of X-ray bunch semiconductor position sensitive detector according to claim 1, it is characterised in that: the position Sensitive detector further includes controller connected to it.