CN208396877U - Pneumatic liquid conveying device - Google Patents

Abstract

A pneumatic liquid conveying device comprises a pneumatic rotary driver and a hydraulic pump. The pneumatic rotary driver comprises a first shell section, a rotating shaft and an actuating unit. The first housing section defines an inlet and an outlet. The rotating shaft comprises a first shaft section and a second shaft section, the first shaft section is pivoted to the first shell section, and the second shaft section protrudes out of the first shell section. The actuating unit actuates the rotating shaft to rotate through gas driving. The hydraulic pump includes a second housing section and a fluid transfer unit. The second housing section defines a liquid inlet channel and a liquid discharge channel. The second shaft section is pivoted to the second shell section, and the liquid transmission unit is arranged on the second shaft section. The second shaft section is used for driving the liquid transmission unit to operate so as to enable the liquid transmission unit to suck the liquid flowing in through the liquid inlet channel and discharge the liquid to the liquid discharge channel after being pressurized. The pneumatic rotary driver adopts a pneumatic motor mode, so that the use safety can be improved.

Description

Pneumatic liquid transport device

Technical field

The utility model relates to a kind of pneumatic liquid transport device, more particularly to one kind using gas as power source simultaneously Mechanical energy is converted thereof into the pneumatic liquid transport device of liquid work done.

Background technique

The existing pump to convey liquid mainly divides into reciprocating pump and rotary pump.Reciprocating pump mainly passes through gas Cylinder pressure reciprocally presses to carry out the conveying of liquid.Pulse can be generated when reciprocally pressing due to pneumatic cylinder, easily cause liquid Pulsation is generated when body is discharged and causes discharge pressure unstable.Some reciprocating pumps are existing for pulsation when reducing liquid discharge As accumulator can be additionally installed at outlet end, in this way, easily increasing the cost of manufacture.

Rotary pump is to be rotated using the electric motor of such as inverter motor as power source drive revolving part to carry out liquid Conveying.However, electric motor easily produces when the humidity of working environment is higher than to a certain degree or when working environment forbids fire source Raw electric leakage produces pyrophoric situation, causes to be affected using upper safety.Furthermore when system breakdown and temporarily ceasing makes When with liquid, the control valve on drain pipe can switch to closed state, at this point, since electric motor still in continuous running makes to revolve Rotatable pump persistently exports the state in fluid under pressure to drain pipe, and drain pipe internal cause fluid pressure makes load that can continue to increase very To overload condition is reached, therefore, drain pipe is easily caused to generate the situation of rupture, and also will lead to electric motor overheat even thus Damage.

Summary of the invention

One purpose of the utility model is to provide a kind of pneumatic liquid transport device, hydraulic discharge pressure can be made steady Fixed can simultaneously be promoted uses upper safety.

The another object of the utility model is to provide a kind of pneumatic liquid transport device, rotates and drive by pneumatic type The revolving speed of dynamic device can change with load, be avoided that system load is excessive or overload cause the damage of pneumatic type rotating driver with And drain pipe generates rupture.

The purpose of this utility model and solve the problems, such as that background technique adopts the following technical solutions to realize, according to this reality It include pneumatic type rotating driver and hydraulic pump with the pneumatic liquid transport device of novel proposition, the pneumatic type rotation is driven Dynamic device includes the first shell segments, shaft and actuating unit, and first shell segments define the air inlet flowed into supplied gas, And with the gas vent flowed out for the gas, the shaft includes the first shaft part, and is axially prolonged by first shaft part one end The second shaft part stretched, first shaft part are rotationally articulated in first shell segments and are located at first shell segments Interior, second shaft part protrudes out first shell segments, and the actuating unit is set to first shaft part and by described Gas drives and activates shaft rotation, and the hydraulic pump includes second housing section and liquid transmission unit, outside described second Shell section is set to first shell segments side and defines the feed pathway to flow into for liquid, and the liquid is discharged Apocenosis passage, second shaft part be rotationally articulated in the second housing section and be located at the second housing section in, The liquid transmission unit is located in the second housing section and is set to second shaft part, and second shaft part is to drive Liquid transmission unit operating makes the liquid transmission unit draw the liquid flowed into via the feed pathway simultaneously And the apocenosis passage is expelled to after being pressurizeed.

The pneumatic liquid transport device of the utility model, the liquid transmission unit include swash plate, rotary cylinder-block, and more A piston, the swash plate are sheathed on second shaft part, and the rotary cylinder-block is fixed on second shaft part and is located at described oblique Between disk and the feed liquor, apocenosis passage and multiple cylinder chambers around second shaft part are formed with, described piston one end can be slided It is contacted with the swash plate dynamicly and the other end is movably arranged in the corresponding cylinder chamber, when the rotary cylinder-block is described When second shaft part drives rotation, the rotary cylinder-block will drive the piston rotation and the piston can be simultaneously in corresponding described It moves back and forth in cylinder chamber to change its volume, the corresponding cylinder chamber is enable to draw the liquid by the feed pathway and leads to Cross the apocenosis passage discharge.

The pneumatic liquid transport device of the utility model, the piston include outer peripheral surface, and the cylinder chamber is by the rotation The inner peripheral surface for turning cylinder body defines, the outer peripheral surface and the inner peripheral surface at least one be provided with lubrication part.

The pneumatic liquid transport device of the utility model, the piston and the rotary cylinder-block at least one be profit Saddle.

The pneumatic liquid transport device of the utility model, the liquid transmission unit also includes valve plate, and the valve plate is set The rotary cylinder-block is placed in contrast between the side and the feed liquor, apocenosis passage of the swash plate, the valve plate is formed with suction Enter slot, and discharge slot, the suction tank is connected with the feed pathway and is located on the rotation path of the cylinder chamber, when any A cylinder chamber can draw the liquid, the discharge slot and the drain by the suction tank when being connected to the suction tank Channel is connected and is located on the rotation path of the cylinder chamber, can pass through when any one described cylinder chamber is connected to the discharge slot The liquid is discharged in the discharge slot.

The pneumatic liquid transport device of the utility model, the feed pathway have be connected with the suction tank into Liquid bath, and the inlet opening being connected with the lead channel, the apocenosis passage have the sump pit being connected with the discharge slot, And the drainage hole being connected with the sump pit, the aperture of the inlet opening are greater than the aperture of the drainage hole.

The pneumatic liquid transport device of the utility model, the swash plate have the disk for the sliding contact of described piston one end Face, the disk and perpendicular to angle degree between the sagittal plane of second shaft part, the liquid transmission unit also includes setting Assembly is adjusted to adjust the angle of the angle between the second housing section and the swash plate.

The pneumatic liquid transport device of the utility model, the angle adjustment assembly angle can be adjusted between Unspecified angle between 10 degree to 60 degree.

The pneumatic liquid transport device of the utility model, first shell segments include cylinder block, the cylinder block tool There are the air inlet and the gas vent, first shaft part is prejudicially arranged in the cylinder block, outside first shaft part Surface radial depressions are formed with multiple grooves, and the actuating unit is arranged in the groove and radial phase comprising multiple respectively Spaced blade, the blade can be along first shaft parts radial to telescopic moving in the corresponding groove.

The pneumatic liquid transport device of the utility model, the second housing section are shaped in first shell segments Side.

The utility model has the beneficial effects that: can be mentioned by pneumatic type rotating driver by the way of air motor It rises and uses upper safety.The shaft revolving speed of pneumatic type rotating driver can change with load, whereby, be avoided that system is negative Carrying excessive or overload causes the damage of pneumatic type rotating driver and drain pipe to generate rupture, and by hydraulic pump using inclined disc type The mode of axial poiston pump can reduce the pulsation generated when liquid discharge and make steady pressure jar.

Detailed description of the invention

Fig. 1 is a front view of the first embodiment of the utility model pneumatic liquid transport device, is illustrated outside one second One shell of shell section and a cylinder block of one first shell segments pass through together with an adapter unit；

Fig. 2 is a stereogram exploded view, illustrates the thin portion structure of a pneumatic type rotating driver of the first embodiment；

Fig. 3 is the cross-sectional view that the S1-S1 line in Fig. 1 is intercepted, and illustrates that each blade is pressed by gas and drives one the The rotation of one shaft part；

Fig. 4 is an incomplete partial sectional view of the first embodiment, illustrates the thin portion structure of a hydraulic pump；

Fig. 5 is a stereogram exploded view, is illustrated between an end cap and a valve plate for the hydraulic pump of the first embodiment Assembled relation；

Fig. 6 is the cross-sectional view that the S2-S2 line in Fig. 5 is intercepted；

Fig. 7 is an incomplete partial sectional view of the first embodiment, illustrates the thin portion structure of the hydraulic pump；

Fig. 8 is a right side view of a rotary cylinder-block of the first embodiment；

Fig. 9 is that the valve plate of the first embodiment is combined in a right side view of the rotary cylinder-block, described in explanation One suction tank of valve plate and a discharge slot connected relation with multiple cylinder chambers of the rotary cylinder-block respectively；

Figure 10 is an incomplete partial sectional view of the second embodiment of the utility model pneumatic liquid transport device, Illustrate that a lubrication part is fixed on an inner peripheral surface and is connected to an outer peripheral surface of a piston rod in liquid-tight manner；

Figure 11 is an incomplete partial sectional view of the 3rd embodiment of the utility model pneumatic liquid transport device, Illustrate that the outer peripheral surface of the piston rod and the inner peripheral surface are each provided with the lubrication part；

Figure 12 is an incomplete partial sectional view of the fourth embodiment of the utility model pneumatic liquid transport device, Illustrating the piston rod and the rotary cylinder-block, at least one is a lubrication part；And

Figure 13 is a front view of the 5th embodiment of the utility model pneumatic liquid transport device, illustrates described second The shell of shell segments is shaped in the cylinder block side of first shell segments.

Specific embodiment

The utility model is described in detail with reference to the accompanying drawings and embodiments.

It refering to fig. 1, is the first embodiment of the utility model pneumatic liquid transport device, pneumatic liquid transport device 100 apply the equipment in for example, semiconductor wet processed processing procedure, and pneumatic liquid transport device 100 is rotated comprising a pneumatic type Driver 1 and a hydraulic pump 2.

Refering to fig. 1, Fig. 2 and Fig. 3, pneumatic type rotating driver 1 include one first shell segments 11, a shaft 12, one actuating Unit 13 and an engagement unit 14.First shell segments 11 are close comprising a cylinder block 110, one first sealing cover 111 and one second Capping 112.Cylinder block 110 defines the air inlet 114 that a chamber 113, one is connected with chamber 113 and one is connected with chamber 113 Logical gas vent 115.Air inlet 114 flows into chamber 113 to supplied gas, and gas vent 115 is then in chamber 113 Gas discharge.In the present embodiment, gas is for drying compressed air (Clean Dry Air, CDA).First sealing cover 111 can be fixedly engaged for example, by screw locking mode in 110 one end of cylinder block, and the first sealing cover 111 is airtightly engaged in Cylinder block 110 and 113 one end of closed chamber.Second sealing cover 112 can for example, by screw lock mode be fixedly engaged in 110 other end of cylinder block, the second sealing cover 112 are airtightly engaged in cylinder block 110 and 113 other end of closed chamber.

The second shaft part that shaft 12 is axially extending by 121 one end of the first shaft part comprising one first shaft part 121 and one and goes out 122.First shaft part 121 is rotationally articulated in the first sealing cover 111 of the first shell segments 11 and the second sealing cover 112 and is located at In the chamber 113 of cylinder block 110.Second shaft part 122 protrudes out the second sealing cover 112 of the first shell segments 11.Actuating unit 13 It is set to the first shaft part 121 and is located in chamber 113, actuating unit 13 activates shaft 12 by gas drive and rotates.

In the present embodiment, pneumatic type rotating driver 1 is a pneumatic vane motor.Air inlet 114 is set to first Sealing cover 111, and gas vent 115 is set to cylinder block 110.First shaft part 121 is prejudicially arranged in the chamber of cylinder block 110 In 113, the first shaft part 121 has one to be articulated in the first sealing cover 111 and the hinge portion 123 and one of the second sealing cover 112 is arranged And it is fixed on the sleeve 124 of hinge portion 123.124 outer surface radial depressions of sleeve form the groove of multiple arrangements spaced apart 125.Actuating unit 13 is arranged in the groove 125 and radial spaced blade 131, each leaf comprising multiple respectively Piece 131 can be along the first shaft part 121 radial to telescopic moving in corresponding groove 125.

Refering to Fig. 4 and Fig. 5, hydraulic pump 2 includes a second housing section 21 and a liquid transmission unit 23.Second housing section 21 are set to 11 side of the first shell segments and include a shell 210 and an end cap 211.Shell 210 is fixed by engagement unit 14 Ground is engaged in the cylinder block 110 of the first shell segments 11, and shell 210 defines a room 212.End cap 211 can be for example, by screw Locking mode is fixedly engaged in the one end of shell 210 in contrast to cylinder block 110 and closing room 212.End cap 211 defines one Apocenosis passage 214 to the feed pathway 213 flowed into for liquid and one liquid is discharged.In the present embodiment, liquid is For example, treatment liquid needed for water or processing procedure.Second shaft part 122 of shaft 12 is rotationally articulated in second housing section 21 shell 210 and be located at room 212 in.Liquid transmission unit 23 is located in the room 212 of second housing section 21 and is set to Second shaft part 122.Second shaft part 122 to drive liquid transmission unit 23 operate, make liquid transmission unit 23 draw via into Liquid that liquid channel 213 is flowed into and apocenosis passage 214 is expelled to after being pressurizeed.

In the present embodiment, hydraulic pump 2 is a wobble plate axial piston pump.The formation of cylinder block 110 of first shell segments 11 There are multiple first perforation 116, the shell 210 of second housing section 21 is formed with multiple 116 to be connected with first perforation respectively Second perforation 215.Engaging unit 14 includes multiple bolts 141 and multiple nuts 142.It is corresponding that each bolt 141 is arranged in position And the first perforation 116 being interconnected perforates with second and 215 and is bolted in corresponding nut 142.Whereby, 14 energy of unit is engaged Firmly cylinder block 110 and shell 210 are bonded together.

Refering to Fig. 4, Fig. 5 and Fig. 6, end cap 211 also defines an accommodation groove 216 towards room 212.Feed pathway 213 It is connected with accommodation groove 216 and arc-shaped lead channel 217 and the inlet opening 218 that is connected with lead channel 217 with one. Inlet opening 218 is connected with a liquid supply pipe (not shown), and whereby, it is logical to feed liquor that supply of liquid can convey liquid by liquid supply pipe In road 213.Apocenosis passage 214 has one to be connected with accommodation groove 216 and arc-shaped sump pit 219 and one and sump pit 219 The drainage hole 220 being connected.Drainage hole 220 is connected with a drain pipe (not shown), whereby, adds by liquid transmission unit 23 Liquid after pressure can be expelled to drain pipe via apocenosis passage 214.

In the present embodiment, the aperture D2 that an aperture D1 of inlet opening 218 is greater than drainage hole 220 can make liquid whereby The discharge pressure being discharged via drainage hole 220 is greater than the input pressure inputted via inlet opening 218.

Refering to Fig. 4 and Fig. 7, liquid transmission unit 23 includes a swash plate 24, a rotary cylinder-block 25, multiple pistons 26.Swash plate 24 are sheathed on the second shaft part 122 of shaft 12 and form a through hole 241 worn for the second shaft part 122, the hole of through hole 241 Diameter is greater than the outer diameter of the second shaft part 122, whereby, so that swash plate 24 can obliquely be sheathed on the second shaft part 122 and will not It is driven and rotates by the second shaft part 122.Swash plate 24 have a disk 242, disk 242 and one perpendicular to the second shaft part 122 radial direction A is positioned at an angle between the F of face.

Refering to Fig. 4, Fig. 7 and Fig. 8, rotary cylinder-block 25 is arranged and is fixed on the second shaft part 122 and is located at swash plate 24 and end cap Between 211 feed liquor, apocenosis passage 213,214.In the present embodiment, the second shaft part 122 has a croze portion 126, rotating cylinder Body 25 forms a croze hole 251 worn for croze portion 126, whereby, rotary cylinder-block 25 is driven by the second shaft part 122 and is revolved Turn and will not be rotated relative to the second shaft part 122.Rotary cylinder-block 25 is also formed with multiple circular croze holes 251 and the second shaft part 122 cylinder chamber 252, each cylinder chamber 252 have a piston hole 253 and one are connected to the aperture 254 of 253 one end of piston hole.Piston hole 253 is in rounded shape and towards swash plate 24, the arc-shaped shape of aperture 254 and towards end cap 211.The shape of piston hole 253 and aperture 254 It can design, be not limited to this embodiment according to actual demand.

Each 26 one end of piston is slidably contacted with the disk 242 of swash plate 24, and the other end is movably arranged in correspondence Cylinder chamber 252 piston hole 253 in.Each piston 26 of the present embodiment includes a sliding block 261 and a piston rod 262.Sliding block 261 can It is slidably contacted in disk 242.Piston rod 262 is movably arranged in the piston hole 253 of corresponding cylinder chamber 252, and piston One end of bar 262 is rotationally articulated in sliding block 261.When rotary cylinder-block 25 is driven by the second shaft part 122 to be rotated, rotary cylinder-block 25 will drive the rotation of each piston 26 and each piston 26 can be simultaneously in moving back and forth in the piston hole 253 of corresponding cylinder chamber 252 to change Become its volume, corresponding cylinder chamber 252 is enable to draw liquid by feed pathway 213 and liquid is discharged by apocenosis passage 214.

The piston rod 262 of each piston 26 has an outer peripheral surface 263, and the piston hole 253 of each cylinder chamber 252 is by rotary cylinder-block 25 A corresponding inner peripheral surface 255 define.Make piston rod to reduce the frictional force between piston rod 262 and rotary cylinder-block 25 262 can swimmingly move in piston hole 253, outer peripheral surface 263 and inner peripheral surface 255 at least one be provided with a lubrication part 27, whereby, it is avoided that both outer peripheral surface 263 and inner peripheral surface 255 directly contact friction, enables piston rod 262 swimmingly in piston It is moved in hole 253.Specifically, the lubrication part 27 of the present embodiment is to be installed in outer peripheral surface 263 and be connected to inner peripheral surface in liquid-tight manner 255, lubrication part 27 can be as made by the good graphite material of lubricity or made by the good copper material of wearability.When So, lubrication part 27 is also possible to as made by the good material of other lubricities either good material of other wearabilities, not with this Material disclosed in embodiment is limited.

Refering to Fig. 4, Fig. 5 and Fig. 9, in order to separate out the one of each cylinder chamber 252 of the rotary cylinder-block 25 absorption row for drawing liquid The discharge stroke of journey and a discharge liquid, liquid transmission unit 23 are also opened comprising one to control the aperture 254 of each cylinder chamber 252 It opens or closed valve plate 28.Valve plate 28 is fixedly arranged in the accommodation groove 216 of end cap 211, and it is arc-shaped that valve plate 28 is formed with one The discharge slot 282 of the suction tank 281 of shape and an arc-shaped shape.Suction tank 281 is connected with the lead channel 217 of feed pathway 213 And position is on the rotation path of the aperture 254 of each cylinder chamber 252, when the aperture 254 of any one cylinder chamber 252 is connected to suction tank 281 And when rotating in the angular range that suction tank 281 is defined, the cylinder chamber 252 is drawing liquid by suction tank 281 Suction stroke.Discharge slot 282 be connected with the sump pit 219 of apocenosis passage 214 and position each cylinder chamber 252 aperture 254 turn On dynamic path, when the angle model that the aperture 254 of any one cylinder chamber 252 is connected to discharge slot 282 and is defined in discharge slot 282 When enclosing interior rotation, the cylinder chamber 252 is in the discharge stroke that liquid is discharged by discharge slot 282.

Refering to Fig. 4 and Fig. 7, in order to adjust the inclined angle A of swash plate 24 to change the piston rod 262 of piston 26 in cylinder chamber The stroke moved in 252, liquid transmission unit 23 are also set between the shell 210 of second housing section 21 and swash plate 24 comprising one Angle to adjust the angle A adjusts assembly 29.The swash plate 24 of the present embodiment is rotationally resisted against shell 210.Angle adjustment Assembly 29 includes the telescopic unit 291 and an elastic connection unit for being arranged in 210 opposite side of shell of second housing section 21 292.Telescopic unit 291 has a piston 293 and one is articulated in articulated part 294 between 24 one end of piston 293 and swash plate.Bullet Property connection unit 292 there is a fixed link 295, a motion bar 296, one to be set to the pressure between fixed link 295 and motion bar 296 Contracting spring 297 and one it is articulated in articulated part 298 between 24 other end of motion bar 296 and swash plate.

By delivering the gas in a gas chamber 290 and driving piston 293 mobile towards 212 direction of room, piston 293 can lead to Cross 294 pushing tow swash plate of articulated part, 24 one end make its relative to shell 210 rotate, 24 other end of swash plate then pass through articulated part 298 and Motion bar 296 squeezes compressed spring 297, deforms compressed spring 297 and accumulates reseting elasticity.Whereby, angle A can be turned down.

Conversely, making it towards mobile, the piston in contrast to 212 direction of room to draw piston 293 by being evacuated to gas chamber 290 293 can pull 24 one end of swash plate to rotate it relative to shell 210 by articulated part 294, the reset that compressed spring 297 is accumulated Elastic force can be applied to 24 other end of swash plate by motion bar 296 and articulated part 298 and push 24 other end of swash plate, by piston Thrust caused by the reseting elasticity that 293 generated pulling force when mobile and compressed spring 297 apply, enables swash plate 24 suitable Freely rotated relative to shell 210.Alternatively, by carrying out pressure release without being evacuated to gas chamber 290 to gas chamber 290, at this point, compression bullet The reseting elasticity that spring 297 itself is accumulated can be applied to 24 other end of swash plate by motion bar 296 and articulated part 298 and by its time Bullet, with promote swash plate 24 relative to shell 210 rotation and swash plate 24 by articulated part 294 by piston 293 towards in contrast to room 212 Direction pushes.Whereby, angle A can be tuned up.

It matches, angle A can be adjusted between 10 degree to 60 degree by telescopic unit 291 and elastic connection unit 292 Between unspecified angle.Change the piston rod 262 of piston 26 in the stroke moved in cylinder chamber 252 by adjusting angle A, so as to Change liquid is discharged in hydraulic pump 2 flow or pressure.

Below for being illustrated as flowing mode for pneumatic liquid transport device 100:

Refering to Fig. 2 and Fig. 3, when gas flows into chamber 113 via air inlet 114, gas can press on blade 131 and protrude out Position outside groove 125 out makes blade 131 generate torque and then the first shaft part 121 is driven to rotate along a direction of rotation R.In gas When thrust and the rotation of the first shaft part 121 that body is applied under generated centrifugal force effect, the meeting in rotary course of blade 131 Closely it is connected to 110 inner wall of cylinder block.Gas after the pressure work done of blade 131 can be discharged by gas vent 115.

Refering to Fig. 4, Fig. 5, Fig. 7 and Fig. 9, the second shaft part 122 can be rotated together and then when the first shaft part 121 rotates, and the Two shaft parts 122 will drive rotary cylinder-block 25 and rotate along direction of rotation R, can drive simultaneously in 25 rotary course of rotary cylinder-block all Piston 26 rotates together.Angle A is set to be greater than 10 degree and when less than 60 degree when the disk 242 of swash plate 24 is inclined, each piston 26 exists Its sliding block 261 will receive the guiding of disk 242 and a holding board 30 in rotation process and restraining function drives piston rod 262 in turn It is mobile in generating axial reciprocating in the piston hole 253 of cylinder chamber 252, so that the volume in cylinder chamber 252 generates variation.When any one cylinder When the aperture 254 of room 252 is connected to suction tank 281 and rotates in the angular range that suction tank 281 is defined, piston rod 262 is mobile toward the directions far from apertures 254, and the cylinder chamber 252 is in the suction stroke for drawing liquid, at this point, the cylinder chamber 252 Aperture 254 can draw the liquid that feed pathway 213 is flowed by suction tank 281.Then, when the aperture 254 of the cylinder chamber 252 When being moved away from suction tank 281 and rotating between 281 bottom end of suction tank and discharge 282 bottom end of slot, aperture 254 is in by valve plate 28 Closed state makes the cylinder chamber 252 be in a compression liquid at this point, piston rod 262 can squeeze liquid towards 254 direction of aperture The compression travel of body.Then, when the aperture 254 of the cylinder chamber 252 is connected to discharge slot 282 and is defined in discharge slot 282 Angular range in rotation when, the cylinder chamber 252 discharge liquid discharge stroke, at this point, piston rod 262 will continue to liquid It is squeezed towards 254 direction of aperture, flow to liquid sequentially in apocenosis passage 214 via aperture 254 and discharge slot 282.Whereby, hydraulic Pump 2 can export in the liquid to drain pipe after pressurization so that the substrate board treatment in semiconductor wet processed processing procedure uses.

Refering to Fig. 3 and Fig. 7, liquid transporting apparatus 100 can be adjusted relevant parameter according to actual demand when in use, Illustrate the mode of three kinds of parameters adjustment below:

The first parameter adjustment mode: the pressure that fixed gas is inputted via air inlet 114, it is total by control angle adjustment The angle A of swash plate 24 is adjusted at 29, can change the pressure and flow of liquid discharge.Such as when angle A is bigger, liquid discharge Pressure and flow it is bigger, when angle A is smaller, liquid discharge pressure and flow it is smaller.

Second of parameter adjustment mode: the angle A of fixed swash plate 24 is at such as 45 degree, by control gas via air inlet The pressure of 114 inputs can change the pressure and flow of liquid discharge.Such as when gas input pressure is bigger, liquid discharge Pressure and flow are bigger, and when gas input pressure is smaller, the pressure and flow of liquid discharge are smaller.

The third parameter adjustment mode: the pressure that fixed liquid is inputted via feed pathway 213, by control angle adjustment Assembly 29 adjusts the angle A of swash plate 24, can change gas input pressure.Such as when angle A is bigger, the demand of gas input Pressure is smaller, and when angle A is smaller, the demand pressure of gas input is bigger.

By pneumatic type rotating driver 1 by the way of air motor, so that pneumatic liquid transport device 100 is used for When the working environment of moist semiconductor wet processed processing procedure, pneumatic type rotating driver 1 can be operated normally and will not be because of work The humidity for making environment is excessively high and generates the situation of electric leakage, can promote the upper safety of use.In addition, pneumatic type rotating driver 1 12 revolving speed of shaft can change with load, until system overcharge will not damage pneumatic type rotating driver 1.Example As substrate board treatment can temporarily cease the liquid exported using pneumatic liquid transport device 100, control row in processing procedure Whether the control valve of output liquid to substrate board treatment can switch to closed state to liquid pipe, make drain pipe that liquid can not be discharged. At this point, gas may continue to be input in chamber 113 via air inlet 114, the shaft 12 of pneumatic type rotating driver 1 can only drop The slow-speed of revolution either stops operating, and reason is the gas when the fluid pressure in drain pipe is persistently enlarged to close to overload condition Motionless shaft 12 or gas can be pushed away to be discharged via gas vent 115, to reach the state that gas pressure is stable in chamber 113, whereby, It not will cause the component inside pneumatic type rotating driver 1 and damage and then generate failure, also not will cause drain pipe and generate rupture Situation, pneumatic type rotating driver 1 and drain pipe can be protected simultaneously.Drain pipe is discharged when control valve switches to open state When liquid, pneumatic type rotating driver 1 just can run well again immediately.

On the other hand, it by hydraulic pump 2 by the way of wobble plate axial piston pump, is generated when can reduce liquid discharge It pulses and makes steady pressure jar.Therefore, the lower use that can omit accumulator is compared with background technique.Furthermore liquid small in size Press pump 2 just can reach required high supercharging pressure level, therefore, can reduce the whole volume of pneumatic liquid transport device 100 to drop Low space occupied by it.

Refering to fig. 10, it is the second embodiment of the utility model pneumatic liquid transport device, overall structure and actuation Mode is substantially identical with the first embodiment, and is different in the set-up mode of lubrication part 27.

In the present embodiment, lubrication part 27 is the outer peripheral surface for being fixed on inner peripheral surface 255 and being connected to piston rod 262 in liquid-tight manner 263, whereby, it can equally reach the effect for moving piston rod 262 swimmingly in piston hole 253.

Refering to fig. 11, it is the 3rd embodiment of the utility model pneumatic liquid transport device, overall structure and actuation Mode is substantially identical with the first embodiment, and is different in the set-up mode of lubrication part 27.

In the present embodiment, the outer peripheral surface 263 of each piston rod 262 is respectively arranged with the inner peripheral surface 255 of corresponding piston hole 253 There is a lubrication part 27, two lubrication parts 27 cover respectively to be fixed in outer peripheral surface 263 and be fixed on inner peripheral surface 255 and mutually support in liquid-tight manner It is connected together, whereby, can equally reach the effect for moving piston rod 262 swimmingly in piston hole 253.

Refering to fig. 12, it is the fourth embodiment of the utility model pneumatic liquid transport device, overall structure and actuation Mode is substantially identical with the first embodiment, be different in each piston 26 piston rod 262 and rotary cylinder-block 25 at least within it One is a lubrication part.

Piston rod 262 by each piston 26 is lubrication part or rotary cylinder-block 25 is to lubricate part or aforementioned the two all For the design method for lubricating part, it is good that aforementioned lubrication part can be the either wearability as made by the good graphite material of lubricity Made by copper material, so that the piston rod 262 of each piston 26 equally can be moved swimmingly in piston hole 253.Whereby, it can omit Lubrication part 27 as shown in Figure 7, to reduce complex structural designs degree.

Refering to fig. 13, it is the 5th embodiment of the utility model pneumatic liquid transport device, overall structure and actuation Mode is substantially identical with the first embodiment, and is different in second housing section 21 and is set to 11 mode of the first shell segments.

In the present embodiment, the shell 210 of second housing section 21 is shaped in the cylinder block 110 1 of the first shell segments 11 Side makes the two collectively form single shell structure.In other embodiments, between second housing section 21 and the first shell segments 11 Setting or connection type can also have different variation designs according to actual demand, as long as second housing section 21 and the first shell Both sections 11 can define room 212 and chamber 113 respectively, be not limited in a manner of the integrated molding of the example above.

Above-mentioned, the pneumatic liquid transport device 100 of each embodiment is concluded, uses gas by pneumatic type rotating driver 1 The mode of dynamic motor, can be promoted and use upper safety.In addition, 12 revolving speed of shaft of pneumatic type rotating driver 1 can be with negative It carries and changes, whereby, be avoided that system load is excessive or overload causes the damage of pneumatic type rotating driver 1 and drain pipe to generate Rupture.On the other hand, by hydraulic pump 2 by the way of wobble plate axial piston pump, the arteries and veins generated when liquid discharge can be reduced It moves and makes steady pressure jar, and hydraulic pump 2 small in size just can reach required high supercharging pressure level, can reduce pneumatic type liquid The whole volume of conveying device 100 can achieve the purpose that the demand of the utility model institute to reduce the space occupied by it really.

Claims (10)

1. a kind of pneumatic liquid transport device；It is characterized by:

The pneumatic liquid transport device includes pneumatic type rotating driver and hydraulic pump, the pneumatic type rotating driver Including the first shell segments, shaft and actuating unit, first shell segments define the air inlet flowed into supplied gas, and use For the gas outflow gas vent, the shaft include the first shaft part, and it is axially extending by first shaft part one end and The second shaft part out, first shaft part are rotationally articulated in first shell segments and are located in first shell segments, Second shaft part protrudes out first shell segments, and the actuating unit is set to first shaft part and by the gas It drives and activates the shaft rotation, the hydraulic pump includes second housing section and liquid transmission unit, the second housing section It is set to first shell segments side and defines the feed pathway to flow into for liquid, and the row the liquid is discharged Liquid channel, second shaft part is rotationally articulated in the second housing section and is located in the second housing section, described Liquid transmission unit is located in the second housing section and is set to second shaft part, and second shaft part is described to drive The operating of liquid transmission unit makes the liquid transmission unit draw the liquid flowed into via the feed pathway and incites somebody to action It is expelled to the apocenosis passage after pressurizeing.

2. pneumatic liquid transport device according to claim 1, it is characterised in that: the liquid transmission unit includes oblique Disk, rotary cylinder-block and multiple pistons, the swash plate are sheathed on second shaft part, and the rotary cylinder-block is fixed on described second Shaft part and between the swash plate and the feed liquor, apocenosis passage and it is formed with multiple cylinder chambers around second shaft parts, Described piston one end is slidably contacted with the swash plate and the other end is movably arranged in the corresponding cylinder chamber, works as institute When stating rotary cylinder-block by second shaft part drive rotation, the rotary cylinder-block will drive the piston rotation and the piston meeting Simultaneously in moving back and forth in the corresponding cylinder chamber to change its volume, the corresponding cylinder chamber is enable to pass through the feed pathway It draws the liquid and is discharged by the apocenosis passage.

3. pneumatic liquid transport device according to claim 2, it is characterised in that: the piston includes outer peripheral surface, institute Stating cylinder chamber is defined by the inner peripheral surface of the rotary cylinder-block, at least one setting of the outer peripheral surface and the inner peripheral surface There is lubrication part.

4. pneumatic liquid transport device according to claim 2, it is characterised in that: the piston and the rotary cylinder-block At least one is lubrication part.

5. pneumatic liquid transport device according to claim 2, it is characterised in that: the liquid transmission unit also includes Valve plate, the valve plate are set to the rotary cylinder-block in contrast between the side and the feed liquor, apocenosis passage of the swash plate, institute It states valve plate and is formed with suction tank, and discharge slot, the suction tank is connected with the feed pathway and is located at turning for the cylinder chamber On dynamic path, the liquid can be drawn by the suction tank when any one described cylinder chamber is connected to the suction tank, it is described Slot is discharged to be connected with the apocenosis passage and be located on the rotation path of the cylinder chamber, when any one described cylinder chamber and the row The liquid can be discharged by the discharge slot when slot is connected to out.

6. pneumatic liquid transport device according to claim 5, it is characterised in that: the feed pathway have with it is described The lead channel that suction tank is connected, and the inlet opening being connected with the lead channel, the apocenosis passage have and the discharge The aperture of the sump pit that slot is connected, and the drainage hole being connected with the sump pit, the inlet opening is greater than the drainage hole Aperture.

7. pneumatic liquid transport device according to claim 2, it is characterised in that: the swash plate, which has, supplies the piston The disk of one end sliding contact, the disk and perpendicular to angle degree between the sagittal plane of second shaft part, the liquid passes Defeated unit also includes to be set between the second housing section and the swash plate to adjust assembly to adjust the angle of the angle.

8. pneumatic liquid transport device according to claim 7, it is characterised in that: the angle adjustment assembly can be by institute Angle is stated to adjust to the unspecified angle between 10 degree to 60 degree.

9. pneumatic liquid transport device according to claim 1, it is characterised in that: first shell segments include cylinder Body, the cylinder block have the air inlet and the gas vent, and first shaft part is prejudicially arranged in the cylinder block, First shaft part outer surface radial depressions are formed with multiple grooves, the actuating unit include it is multiple be arranged in respectively it is described recessed Slot and radial spaced blade, the blade can be along first shaft parts radial in the corresponding groove Telescopic moving.

10. pneumatic liquid transport device according to claim 1, it is characterised in that: second housing section one at Type is in first shell segments side.