CN208395316U - A kind of highly-safe electric annealing furnace - Google Patents

Abstract

The utility model discloses a kind of highly-safe electric annealing furnaces, its structure includes furnace body, doorframe, fire door, fire-bar, sliding rail, power supply line, trolley, anti-oxidation cover, steel support plate, charcoal, upper cover, air inlet, blower, lifting device and warning device, by the way that lifting device is arranged between doorframe, it is flexible that operating is carried out by starting electric pushrod, to drive convex block to move up and down simultaneously with fire door, the beneficial effect that can easily carry out oven door opening and closure is reached；And warning device is set with inner wall outside furnace body, the temperature sensor of set temperature sensor is carried out by setting knob, then incuded, microprocessor carries out information processing, when the temperature is excessively high, and then control buzzer sounds, and sounds an alarm to staff, it is adjusted, has reached in the beneficial effect can be timely adjusted when annealing internal temperature is excessively high in time again.

Description

A kind of highly-safe electric annealing furnace

Technical field

The utility model relates to electric annealing furnace technical fields, and in particular to a kind of highly-safe electric annealing furnace.

Background technique

Annealing furnace is a kind of technique used in semiconductor devices manufacture comprising heats multiple semiconductor wafers with shadow Its electrical property is rung, heat treatment is designed for different effects, can heat chip to activate dopant, film is converted It is converted into wafer substrates interface at film or by film, makes the film of compact deposits, changes the state of the film of growth, repairs note The damage entered moves dopant or dopant is transferred to another film from a film or enters wafer substrate from film, In steelshop, electric annealing furnace is a kind of common thermal processing equipment, especially in high alloy mould steel In heat treatment, after annealing, oxidation reaction easily occurs for mould steel, this is pole for the promotion of the surface quality of mould steel To be unfavorable, thus how the simple and effective oxidation for preventing steel surface after anneal be one it is necessary face ask Topic, with the rapid development of science and technology, highly-safe electric annealing furnace has also obtained technological improvement, but the prior art can not It is convenient that the fire door is opened, and carry out annealing internal temperature it is excessively high when and can not timely be adjusted causes Annealing quality reduces.

Utility model content

(1) technical problems to be solved

In order to overcome the shortage of prior art, it is proposed that a kind of highly-safe electric annealing furnace, to solve not facilitating to this Fire door is opened, and carry out annealing internal temperature it is excessively high when and can not timely be adjusted leads to annealing quality The problem of reduction, reach can easily carry out oven door opening and closure, and carry out annealing internal temperature it is excessively high when can The effect being timely adjusted.

(2) technical solution

The utility model is achieved through the following technical solutions: the utility model proposes a kind of highly-safe electricity annealing Furnace, including furnace body, doorframe, fire door, fire-bar, sliding rail, power supply line, trolley, anti-oxidation cover, steel support plate, charcoal, on Lid, air inlet, blower, lifting device and warning device, furnace body front end the right and left are welded with door by manual metal-arc welding mode Frame, doorframe the right and left middle part slidably connect fire door, and lifting device top left and right ends is rectangular logical It crosses manual metal-arc welding mode and is welded with doorframe, the inboard wall of furnace body left and right ends pass through plum blossom threaded screw fasteners and are connected with fire-bar, institute It states inboard wall of furnace body left and right ends lower part and sliding rail is welded with by manual metal-arc welding mode, furnace body right end middle and upper part passes through hexagonal Bolt is bolted with warning device left end, and the warning device rear end lower and power supply line front end carry out grafting, described Trolley bottom end the right and left is slidably connected with sliding rail top, and the trolley inner wall is by hexagon socket countersunk flat cap head screw and prevents Oxidation cover outer surface lower part is bolted, and the anti-oxidation cover inner wall center bottom passes through plum blossom bolt and steel support plate bottom End is bolted, and is provided with charcoal between the steel support plate and anti-oxidation cover, the trolley top peripheral cornice with it is upper Base end periphery is snapped connection, and furnace body top middle and back is provided with air inlet, furnace body right end upper back and wind Machine is bolted by hexagon socket countersunk flat cap head screw, and the lifting device is by support rod, fixed plate, fixing piece, electric pushrod It is formed with convex block, the support rod front end is rectangular and its middle part is bolted with fixed plate by fixing piece, described Fixing piece run through simultaneously fixed plate do in the middle part of fish both ends with support rod front end or so two, and fixing piece with fixed plate and branch Strut is threadedly coupled, and the fixing piece front end face is rectangular and it with electric pushrod upper rear end passes through manual metal-arc welding mode It is welded, is welded in the middle part of the rear end of the electric pushrod lower part by manual metal-arc welding mode and convex block front end, after the convex block End is welded with fire door front center, and the warning device is revolved by shell, switch, connecting plate, buzzer, display screen, setting Button, electric connection line, temperature sensor and microprocessor composition, after the housing forward end is rectangular and its left upper part and switch End carries out grafting, and shell left and right ends rear portion is welded with connecting plate, the buzzer bottom end and shell by manual metal-arc welding mode The left portion in body front end is bolted by plum blossom bolt, the housing forward end it is rectangular and its right with display screen rear end Grafting is carried out, the setting knob rear end is rotatablely connected with housing forward end upper left quarter, the electric connection line right end and shell Carry out grafting in the middle part of left end, be plugged with electric connection line in the middle part of the temperature sensor left end, the inner walls center bottom with Microprocessor bottom end is bolted by hex bolts, and furnace body right end middle and upper part passes through hex bolts and warning device Left end is bolted, the fire-bar, blower, electric pushrod, power supply line, buzzer, display screen, setting knob and temperature Sensor passes through microprocessor and is electrically connected with switch.

Further, electric pushrod outer surface lower part is cylindrical, left with fire door in the middle part of electric pushrod left and right ends Right both ends of the surface are parallel.

Further, there are two the fixing piece settings, and external surface of fixing member rear portion is provided with screw thread.

Further, the switch front end face is in rounded shape, and it is coarse to switch front end face.

Further, the connecting plate is provided with two pieces, and two setting holes above and below connecting plate rear and front end.

Further, the setting knob outer surface front is provided with concave-convex item, and a concave-convex outer surface is provided with item The anti-skid chequer of line shape.

Further, temperature sensor rear and front end lower part is provided with fixing piece, and fixing piece top and bottom ends are set It is equipped with threaded hole.

Further, the model CWD18 of the temperature sensor.

Further, the model AT89S52-24AU of the microprocessor.

Further, the model HRB-P80A2 of the buzzer.

Further, the electric pushrod model is XTL100.

Further, the model FD-300-2 of the blower.

(3) beneficial effect

The utility model compared with the existing technology, has the advantages that

1), the fire door is opened to solve the problems, such as not facilitating, by the way that lifting device is arranged between doorframe, is passed through It crosses starting electric pushrod and operate and stretch, so that convex block be driven to move up and down simultaneously with fire door, having reached can be convenient Carry out the beneficial effect of oven door opening and closure.

2), for solve carry out annealing internal temperature it is excessively high when and can not timely be adjusted leads to annealing quality The problem of reduction, carries out set temperature sensor by setting knob by the way that warning device is arranged with inner wall outside furnace body Temperature sensor is then incuded, and microprocessor carries out information processing, when the temperature is excessively high, and then is controlled buzzer and is rung Rise, staff is sounded an alarm, then is adjusted in time, reached carry out annealing internal temperature it is excessively high when can be timely The beneficial effect being adjusted.

Detailed description of the invention

Upon reading the detailed description of non-limiting embodiments with reference to the following drawings, other spies of the utility model Sign, objects and advantages will become more apparent upon:

Fig. 1 is the structural schematic diagram of the utility model；

Fig. 2 is the lifting device structure schematic diagram of the utility model；

Fig. 3 is the warning device structural schematic diagram of the utility model；

Fig. 4 is the warning device housing interior structure schematic diagram of the utility model；

Fig. 5 is the circuit block diagram structural schematic diagram of the utility model；

In figure: furnace body -1, doorframe -2, fire door -3, lifting device -4, fire-bar -5, sliding rail -6, warning device -7, Power supply line -8, trolley -9, anti-oxidation cover -10, steel support plate -11, charcoal -12, upper cover -13, air inlet -14, blower -15, branch Strut -41, fixed plate -42, fixing piece -43, electric pushrod -44, convex block -45, shell -71, switch -72, connecting plate -73, bee Ring device -74, display screen -75, setting knob -76, electric connection line -77, temperature sensor -78, microprocessor -79.

Specific embodiment

In the technical program:

Lifting device 4, warning device 7, support rod 41, fixed plate 42, fixing piece 43, electric pushrod 44, convex block 45, shell 71, switch 72, connecting plate 73, buzzer 74, display screen 75, setting knob 76, electric connection line 77, temperature sensor 78 and Wei Chu Reason device 79 is that the utility model contains the innovative component of essence.

Furnace body 1, doorframe 2, fire door 3, fire-bar 5, sliding rail 6, power supply line 8, trolley 9, anti-oxidation cover 10, steel support plate 11, charcoal 12, upper cover 13, air inlet 14 and blower 15 are to realize the essential connectivity structure of technical solutions of the utility model Part.

In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation Example, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only used to explain The utility model is not used to limit the utility model.

Fig. 1, Fig. 2, Fig. 3, Fig. 4 and Fig. 5 are please referred to, the utility model provides a kind of highly-safe electric annealing furnace: including Furnace body 1, doorframe 2, fire door 3, fire-bar 5, sliding rail 6, power supply line 8, trolley 9, anti-oxidation cover 10, steel support plate 11, charcoal 12, upper cover 13, air inlet 14, blower 15, lifting device 4 and warning device 7,1 front end the right and left of furnace body pass through manual metal-arc welding side Formula is welded with doorframe 2, slidably connects fire door 3 in the middle part of 2 the right and left of doorframe, 4 top left and right ends of lifting device is in square Shape is welded with doorframe 2 by manual metal-arc welding mode, and 1 inner wall left and right ends of furnace body pass through plum blossom threaded screw fasteners and are connected with fire-bar 5,1 inner wall left and right ends lower part of furnace body is welded with sliding rail 6 by manual metal-arc welding mode, and 1 right end middle and upper part of furnace body passes through hexagonal Bolt is bolted with 7 left end of warning device, and 7 rear end lower of warning device and 8 front end of power supply line carry out grafting, trolley 9 Bottom end the right and left is slidably connected with 6 top of sliding rail, and 9 inner wall of trolley passes through hexagon socket countersunk flat cap head screw and anti-oxidation cover 10 outer surfaces lower part are bolted, 10 inner wall center bottoms of anti-oxidation cover by plum blossom bolt and 11 bottom end of steel support plate into Row is bolted, and is provided with charcoal 12,9 top peripheral cornice of trolley and 13 bottom of upper cover between steel support plate 11 and anti-oxidation cover 10 End periphery is snapped connection, and 1 top middle and back of furnace body is provided with air inlet 14, and 1 right end upper back of furnace body passes through with blower 15 Hexagon socket countersunk flat cap head screw is bolted, and lifting device 4 is by support rod 41, fixed plate 42, fixing piece 43,44 and of electric pushrod Convex block 45 forms, and 41 front end of support rod is rectangular and its middle part is bolted with fixed plate 42 by fixing piece 43, Gu Determine part 43 and meanwhile through fixed plate 42 do in the middle part of fish both ends with 41 front end of support rod or so two, and fixing piece 43 with fixation Plate 42 and support rod 41 are threadedly coupled, and 43 front end face of fixing piece is rectangular and it passes through with 44 upper rear end of electric pushrod Manual metal-arc welding mode is welded, and is welded in the middle part of 44 lower part rear end of electric pushrod by manual metal-arc welding mode and 45 front end of convex block, 45 rear end of convex block is welded with 3 front center of fire door, warning device 7 by shell 71, switch 72, connecting plate 73, buzzer 74, Display screen 75, setting knob 76, electric connection line 77, temperature sensor 78 and microprocessor 79 form, and 71 front end of shell is in rectangle Shape and its left upper part and 72 rear end of switch carry out grafting, and 71 left and right ends rear portion of shell is welded with connection by manual metal-arc welding mode Plate 73,74 bottom end of buzzer are bolted with the left portion in 71 front end of shell by plum blossom bolt, and 71 front end of shell is in rectangle Shape and its right and the progress grafting of 75 rear end of display screen, setting 76 rear end of knob and 71 front end upper left quarter of shell carry out rotation company It connects, grafting is carried out in the middle part of 77 right end of electric connection line and 71 left end of shell, is plugged with electric connection line in the middle part of 78 left end of temperature sensor 77,71 inner wall center bottom of shell is bolted with 79 bottom end of microprocessor by hex bolts, 1 right end middle and upper part of furnace body It is bolted by hex bolts and 7 left end of warning device, fire-bar 5, blower 15, electric pushrod 44, power supply line 8, bee Ring device 74, display screen 75, setting knob 76 and temperature sensor 78 are electrically connected by microprocessor 79 with switch 72.

Wherein, the 44 outer surface lower part of electric pushrod is cylindrical, left with fire door 3 in the middle part of 44 left and right ends of electric pushrod Right both ends of the surface are parallel, improve accurately, provide conveniently for sliding fire door 3 closure with opening.

Wherein, there are two the settings of fixing piece 43, and 43 outer surface rear portion of fixing piece is provided with screw thread, facilitates peace Dress improves connective stability.

Wherein, 72 front end face of switch is in rounded shape, and 72 front end face of switch is coarse, increases frictional force, so that Press more convenient.

Wherein, the connecting plate 73 is provided with two pieces, and two setting holes above and below 73 rear and front end of connecting plate, increases Add stability, and facilitates and dismantled.

Wherein, the 76 outer surface front of setting knob is provided with concave-convex item, and a concave-convex outer surface is provided with striped The anti-skid chequer of shape, increases frictional force, facilitates and carries out grabbing attached rotation.

Wherein, the 78 rear and front end lower part of temperature sensor is provided with fixing piece, and fixing piece top and bottom ends are arranged There is threaded hole, allow to carry out install convenient, improves fixed effect.

Wherein, the model CWD18 of the temperature sensor 78, stablizes, and induction force is strong.

Wherein, the model AT89S52-24AU of the microprocessor 79, speed is fast, durable.

Wherein, the model HRB-P80A2 of the buzzer 74, gives great volume, cheaply.

Wherein, the 44 model XTL100 of electric pushrod is pushed and is stablized, long service life.

Wherein, the model FD-300-2 of the blower 15, revolving speed is fast, and wind-force is big.

Electric pushrod 44 described in this patent, a kind of novel linear being made of mechanisms such as motor push rod and control devices Executing agency, it is believed that be a kind of extension of the rotating electric machine in configuration aspects；The temperature sensor 78, referring to can experience Temperature and the sensor for being converted into usable output signal, temperature sensor is the core of temperature measuring instrument, various in style.

Working principle: consolidating firstly, the highly-safe electric annealing furnace is moved to suitable position, then, leads to It crosses power supply line 8 to power on, then, by the way that lifting device 4 is arranged between doorframe 2, be transported by starting electric pushrod 44 Turn flexible, so that convex block 45 be driven to move up and down simultaneously with fire door 3, oven door opening and closure can easily be carried out by having reached Beneficial effect, and then open fire door 3, later, by trolley 9 be arranged steel support plate 11, put around steel support plate Charcoal 12 is set, and is covered with anti-oxidation cover 10 with upper cover 13, while being laid with sealing fine sand around anti-oxidation cover 10, steel carry Steel are placed on plate 11, which is entered inside furnace body 1 by sliding rail 6, clicking switch 72 makes 5 heat of fire-bar, Furnace body 1 heats steel, and after being heated to certain temperature, the charcoal 12 in anti-oxidation cover 10 burns, will be in anti-oxidation cover 10 Oxygen consume, thus can effectively prevent the oxidation of steel, finally, passing through in the outside of furnace body 1 and inner wall setting alarm dress 7 are set, the temperature sensor of set temperature sensor 78 is carried out by setting knob 76, is then incuded, microprocessor 79 carries out Information processing when the temperature is excessively high, and then controls buzzer 74 and sounds, sounds an alarm to staff, then carry out in time Adjustment has reached and has passed through liter in turn in the beneficial effect can timely be adjusted when annealing internal temperature is excessively high Falling unit 4 opens fire door 3, and trolley 9 is taken out.

The basic principles and main features of the present invention and the advantages of the present invention have been shown and described above, for For those skilled in the art, it is clear that the present invention is not limited to the details of the above exemplary embodiments, and without departing substantially from this In the case where the spirit or essential attributes of utility model, the utility model can be realized in other specific forms.Therefore, no matter From the point of view of which point, the present embodiments are to be considered as illustrative and not restrictive, and the scope of the utility model is by institute Attached claim rather than above description limit, it is intended that will fall within the meaning and scope of the equivalent elements of the claims All changes are embraced therein.It should not treat any reference in the claims as limiting related right It is required that.

In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should It considers the specification as a whole, the technical solutions in the various embodiments may also be suitably combined, forms those skilled in the art The other embodiments being understood that.

Claims (7)

1. a kind of highly-safe electric annealing furnace, including furnace body (1), doorframe (2), fire door (3), fire-bar (5), sliding rail (6), power supply line (8), trolley (9), anti-oxidation cover (10), steel support plate (11), charcoal (12), upper cover (13), air inlet (14) With blower (15), it is characterised in that: further include lifting device (4) and warning device (7), furnace body (1) front end the right and left It is welded with doorframe (2) by manual metal-arc welding mode, slidably connects fire door (3), the lifting in the middle part of described doorframe (2) the right and left Device (4) top left and right ends is rectangular to be welded with doorframe (2) by manual metal-arc welding mode, and furnace body (1) inner wall is left Right both ends pass through plum blossom threaded screw fasteners and are connected with fire-bar (5), and furnace body (1) the inner wall left and right ends lower part passes through manual metal-arc welding Mode is welded with sliding rail (6), and furnace body (1) the right end middle and upper part is carried out by hex bolts and warning device (7) left end It is bolted, warning device (7) rear end lower and power supply line (8) front end carry out grafting, described trolley (9) bottom end or so two Side is slidably connected with sliding rail (6) top, and trolley (9) inner wall passes through hexagon socket countersunk flat cap head screw and anti-oxidation cover (10) outer surface lower part is bolted, and described anti-oxidation cover (10) inner wall center bottom passes through plum blossom bolt and steel support plate (11) bottom end is bolted, and is provided with charcoal (12) between the steel support plate (11) and anti-oxidation cover (10), described Vehicle (9) top peripheral cornice is snapped connection with upper cover (13) bottom end periphery, furnace body (1) the top middle and back be provided with into Air port (14), furnace body (1) the right end upper back are bolted with blower (15) by hexagon socket countersunk flat cap head screw, the liter Falling unit (4) is made of support rod (41), fixed plate (42), fixing piece (43), electric pushrod (44) and convex block (45), the branch Strut (41) front end is rectangular and its middle part is bolted with fixed plate (42) by fixing piece (43), the fixing piece (43) simultaneously through fixed plate (42) do in the middle part of fish both ends with support rod (41) front end or so two, and fixing piece (43) with Fixed plate (42) and support rod (41) are threadedly coupled, and fixing piece (43) front end face is rectangular and itself and electric pushrod (44) upper rear end is welded by manual metal-arc welding mode, passes through manual metal-arc welding mode in the middle part of electric pushrod (44) the lower part rear end It is welded with convex block (45) front end, convex block (45) rear end is welded with fire door (3) front center, the warning device (7) by shell (71), switch (72), connecting plate (73), buzzer (74), display screen (75), setting knob (76), electric connection line (77), temperature sensor (78) and microprocessor (79) composition, shell (71) front end is rectangular and its left upper part with It switching (72) rear end and carries out grafting, shell (71) the left and right ends rear portion is welded with connecting plate (73) by manual metal-arc welding mode, Buzzer (74) bottom end is bolted with shell (71) left portion in front end by plum blossom bolt, before the shell (71) Rectangular and its right is held to carry out grafting, the setting knob (76) rear end and shell (71) front end with display screen (75) rear end Upper left quarter is rotatablely connected, and grafting is carried out in the middle part of electric connection line (77) right end and shell (71) left end, and the temperature passes It is plugged with electric connection line (77) in the middle part of sensor (78) left end, shell (71) the inner wall center bottom and microprocessor (79) bottom end Be bolted by hex bolts, furnace body (1) the right end middle and upper part by hex bolts and warning device (7) left end into Row is bolted, the fire-bar (5), blower (15), electric pushrod (44), power supply line (8), buzzer (74), display screen (75), knob (76) and temperature sensor (78) is set to be electrically connected by microprocessor (79) and switch (72).

2. the highly-safe electric annealing furnace of one kind according to claim 1, it is characterised in that: the electric pushrod (44) is outside Surface lower portions are cylindrical, parallel with fire door (3) left and right ends in the middle part of electric pushrod (44) left and right ends.

3. the highly-safe electric annealing furnace of one kind according to claim 1, it is characterised in that: fixing piece (43) setting There are two, and fixing piece (43) outer surface rear portion is provided with screw thread.

4. the highly-safe electric annealing furnace of one kind according to claim 1, it is characterised in that: described switch (72) front end face It is in rounded shape, and it is coarse to switch (72) front end face.

5. the highly-safe electric annealing furnace of one kind according to claim 1, it is characterised in that: connecting plate (73) setting There are two pieces, and two setting holes above and below connecting plate (73) rear and front end.

6. the highly-safe electric annealing furnace of one kind according to claim 1, it is characterised in that: the setting knob (76) is outside Surface front is provided with concave-convex item, and concave-convex outer surface is provided with the anti-skid chequer of striated.

7. the highly-safe electric annealing furnace of one kind according to claim 1, it is characterised in that: the temperature sensor (78) Rear and front end lower part is provided with fixing piece, and fixing piece top and bottom ends are provided with threaded hole.