A kind of liquid transmission pipeline system and extension peel-off device
Technical field
The utility model relates to fluid transmission fields, shell more particularly, to a kind of liquid transmission pipeline system and extension
From equipment.
Background technique
It usually needs to use the liquid of specific temperature in manufacturing field, and has more to the demand of liquid
Strict requirements.Pump, heating mechanism and valve are usually sequentially connected in series in pipeline by existing liquid transmission pipeline, pass through turning for pump
Velocity modulation section realizes the output quantity of control liquid, and the on-off of liquid export line is controlled by the opening and closing of valve.
When the liquid transmission pipeline of this structure stops conveying liquid, valve is closed, and heating mechanism is also accordingly turned off, and liquid is defeated
Send the liquid in pipeline that will be stuck in pipeline for a long time.Not only it is difficult to meet manufacturing process when output liquid again to liquid
The demand of temperature, and will lead to the performance of liquid since liquid is stagnated for a long time and change, it directly influences manufacture and produces
The quality of product.
By taking use to liquid transmission pipeline in photovoltaic industry or semicon industry as an example, these industries in making technology to making
The parameters such as the temperature and processing performance of liquid are extremely sensitive.It is wanted if the temperature and/or processing performance of liquid cannot reach
It asks, will result directly in technique failure.
Therefore, how to provide a kind of can meet fluid temperature and liquid transmission pipeline that processing performance requires becomes simultaneously
The technical problem of this field urgent need to resolve.
Utility model content
One purpose of the utility model is to provide a kind of liquid that can meet fluid temperature and processing performance requirement simultaneously
The new solution of body delivery pipeline system.
It is according to the present utility model in a first aspect, providing a kind of liquid transmission pipeline system.
The liquid transmission pipeline system of the utility model is pumped including the first triple valve, the second triple valve, first, second pumps,
First heating mechanism, the second heating mechanism, the first control valve, first circulation branch pipe and multistage heating device, second threeway
Valve has the waste liquid outlet of the residual liquid for being discharged in the liquid transmission pipeline system, and the multistage heating device includes
Multistage heating mechanism;Wherein,
The first outlet of first triple valve, first pump, first heating mechanism, first control valve and
The import of second triple valve is sequentially connected to by pipeline, to constitute small flow feed flow flow path;
One end of the first circulation branch pipe is connected between the first outlet of first triple valve and first pump
Pipeline on, the other end of the first circulation branch pipe be connected to it is described first pump first heating mechanism between pipeline
On, alternatively, the other end of the first circulation branch pipe is connected between first heating mechanism and first control valve
On pipeline, to constitute partial circulating flow path;
The second outlet of first triple valve, second pump, second heating mechanism, at least one is described multistage
Heating device is sequentially connected to the import of second triple valve by pipeline, to constitute big flow feed flow flow path.
Optionally, the liquid transmission pipeline system further includes cooling body and the second control valve;
The cooling body and second control valve are set on the first circulation branch pipe.
Optionally, the liquid transmission pipeline system further includes third control valve and the 4th control valve;Wherein,
The third control valve is set between first pump and first heating mechanism;
4th control valve is set between second pump and second heating mechanism.
Optionally, the multistage heating device further includes the first multistage control valve and the second multistage control valve;Wherein,
The first multistage control valve is arranged in series with the multistage heating mechanism, the second multistage control valve with it is described
Multistage heating mechanism and the first multistage control valve are arranged in parallel.
Optionally, the liquid transmission pipeline system further includes main control valve, the main control valve by pipeline with it is described
The import of first triple valve is connected.
Optionally, the liquid transmission pipeline system also has shell;
First triple valve, first pump, second pump, first heating mechanism, second heater
Structure, first control valve, the first circulation branch pipe and the multistage heating device are disposed in the housing.
Optionally, the liquid transmission pipeline system further includes the 5th control valve and second circulation branch pipe;
5th control valve is set between the import and the multistage heating device of second triple valve;
One end of the second circulation branch pipe is connected between the second outlet of first triple valve and second pump
Pipeline on, the other end of the second circulation branch pipe is connected between the multistage heating device and the 5th control valve
On pipeline, to constitute systemic circulation flow path.
Optionally, the liquid transmission pipeline system further includes at least one for detecting the liquid transmission pipeline system
The temperature sensor of the temperature of interior liquid.
Optionally, the liquid transmission pipeline system further includes the first temperature sensor, second temperature sensor, third temperature
Spend sensor and the 4th temperature sensor, first temperature sensor is set to the input end of first triple valve, and described the
Two temperature sensors are set between first heating mechanism and first control valve, and the third temperature sensor is set to institute
The outlet end of the second triple valve is stated, the 4th temperature sensor is set to second heating mechanism and neighbouring second heating
Between the multistage heating device of mechanism;
The multistage heating device further includes multistage temperature sensor, the multistage temperature sensor and the multistage heating
Mechanisms in series setting.
Second aspect according to the present utility model provides a kind of extension peel-off device.
The extension peel-off device of the utility model includes the liquid transmission pipeline system of the utility model.
When the demand of liquid is smaller, small flow feed flow flow path feed flow can be passed through;It, can when the demand of liquid is larger
Pass through big flow feed flow flow path feed flow;When stopping feed flow, the liquid in small flow feed flow flow path can follow in partial circulating flow path
Circulation is dynamic, and liquid is avoided to stagnate for a long time;The setting of multiple heating mechanisms advantageously ensures that the fluid temperature of output can sufficiently expire
Foot requires.
It is long to can effectively avoid liquid by different flow path conveyings or circulating liquid for the liquid transmission pipeline system of the disclosure
Time is stuck in the problems in pipeline, and can neatly control the temperature of liquid, meets manufacturing process to the need of fluid temperature
It asks.
In addition, existing liquid transmission pipeline is to sufficiently meet the requirement of liquid demand, in design according to liquid
A maximum demand be designed, the waste of pipeline will be caused.And the liquid transmission pipeline system of the disclosure has for difference
The flow path of liquid supply rate demand can effectively avoid the waste problem of pipeline.
By the detailed description referring to the drawings to the exemplary embodiment of the utility model, the utility model it is other
Feature and its advantage will become apparent.
Detailed description of the invention
It is combined in the description and the attached drawing for constituting part of specification shows the embodiments of the present invention, and
And together with its explanation for explaining the principles of the present invention.
Fig. 1 is the structural schematic diagram of disclosure liquid transmission pipeline system embodiment.
Fig. 2 be disclosure liquid transmission pipeline system embodiment by small flow feed flow flow path feed flow when route structure show
It is intended to.
Fig. 3 is route structure schematic diagram when disclosure liquid transmission pipeline system embodiment uses partial circulating flow path.
Fig. 4 is disclosure liquid transmission pipeline system embodiment by providing when big flow feed flow flow path feed flow compared with low temperature
The route structure schematic diagram of liquid.
Fig. 5 is disclosure liquid transmission pipeline system embodiment by providing higher temperatures when big flow feed flow flow path feed flow
The route structure schematic diagram of liquid.
It is indicated in figure as follows:
First triple valve -1, the second triple valve -2, the first pump -3, the second pump -4, first heating mechanism -5, the second heater
Structure -6, the first control valve -7, first circulation branch pipe -8, multistage heating device -9, the multistage multistage control of heating mechanism -91, the first
The multistage control valve -93 of valve -92, the second, multistage temperature sensor -94, cooling body -10, the second control valve -11, third control
Four control valve -13 of valve -12, the, main control valve -14, shell -15, the first temperature sensor -16, second temperature sensor -17,
Four temperature sensor -19, the of third temperature sensor -18, the, five temperature sensor -20.
Specific embodiment
The various exemplary embodiments of the utility model are described in detail now with reference to attached drawing.It should also be noted that unless another
It illustrates outside, the component and the positioned opposite of step, numerical expression and numerical value otherwise illustrated in these embodiments is unlimited
The scope of the utility model processed.
Be to the description only actually of at least one exemplary embodiment below it is illustrative, never as to this is practical
Novel and its application or any restrictions used.
Technology, method and apparatus known to person of ordinary skill in the relevant may be not discussed in detail, but suitable
In the case of, the technology, method and apparatus should be considered as part of specification.
It is shown here and discuss all examples in, any occurrence should be construed as merely illustratively, without
It is as limitation.Therefore, other examples of exemplary embodiment can have different values.
It should also be noted that similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined in a attached drawing, then in subsequent attached drawing does not need that it is further discussed.
In order to solve, the liquid in liquid transmission pipeline is stuck in for a long time in pipeline and liquid is difficult to meet manufacture
The problem of demand of the technique to fluid temperature, the utility model provides a kind of liquid transmission pipeline system.
As shown in fig. 1, the liquid transmission pipeline system of the disclosure includes the first triple valve 1, the second triple valve 2, first
The 4, first heating mechanism 5 of the 3, second pump of pump, the second heating mechanism 6, the first control valve 7, first circulation branch pipe 8 and multistage heating dress
Set 9.
Triple valve in the disclosure can be the structure for including an import and two triple valves exported, in order to more easily
The on-off for controlling triple valve, can set the outlet of triple valve to the structure of Pneumatic opening & closing, that is to say, can be by triple valve
The open and close control of outlet controls the on-off of triple valve.Particularly, the second triple valve 2 has for liquid transmission pipeline system to be discharged
The waste liquid outlet of residual liquid in system.Here, the outlet of liquid of second triple valve 2 for exporting participation technique outward can claim
For working solution outlet.When in liquid transmission pipeline in the presence of motionless liquid is stagnated for a long time, such as in small flow feed flow flow path
Liquid in pipeline or big flow feed flow flow path between the first control valve 7 and the second triple valve 2 are for a long time when not used
The liquid retained in pipeline, these liquid can be discharged liquid delivery pipeline system by the waste liquid outlet of the second triple valve 2, avoid
Because liquid performance change caused by technique fail.
Pump in the disclosure can be pump configuration common in this field, such as positive displacement pump or impeller pump etc..The disclosure
In heating mechanism generally can be electric heater.Control valve in the disclosure refers to the valve arrangement of achievable pipeline on-off, for example,
Mechanical valve or solenoid valve etc..Loop branch pipe in the disclosure refers to the pipeline configuration that can be connected to according to design requirement on pipeline.
Multistage heating device 9 includes multistage heating mechanism 91.Multistage heating mechanism 91 in the disclosure generally can be electricity and add
Hot device.When needing the output liquid of higher temperature, multistage heating mechanism 91 can be started and heated;When needing lower temperature
When output liquid, the heating function of multistage heating mechanism 91 can be closed.According to the demand of output liquid temperature, can be exported in liquid
Multiple multistage heating devices 9 are set in pipe-line system.It will be apparent to those skilled in the art that passing through the multistage of control different number
The starting or closing of heating mechanism 91 can adjust the temperature of output liquid with refining.
The first outlet of first triple valve 1, first the 3, first heating mechanism 5 of pump, the first control valve 7 and the second triple valve 2
Import be sequentially connected to by pipeline, to constitute small flow feed flow flow path.In general, small flow feed flow flow path is from the first triple valve
The one-way passage of 1 to the second triple valve 2.
One end of first circulation branch pipe 8 is connected on the pipeline between the first outlet of the first triple valve 1 and the first pump 3,
The other end of first circulation branch pipe 8 is connected on the pipeline between the first pump 3 and the first heating mechanism 5, to constitute partial circulating stream
A kind of embodiment on road.In the embodiment of the partial circulating flow path, second when the first control valve 7 and the first triple valve 1 goes out
When mouth is closed, by the work of the first pump 3, liquid can be pushed to circulate in first circulation branch pipe 8.
Alternatively, one end of first circulation branch pipe 8 is connected to the pipe between the first outlet of the first triple valve 1 and the first pump 3
On the road, the other end of first circulation branch pipe 8 is connected on the pipeline between the first heating mechanism 5 and the first control valve 7, to constitute
The another embodiment of partial circulating flow path.In the embodiment of the partial circulating flow path, when the first control valve 7 and the first triple valve
When 1 second outlet is closed, by the work of the first pump 3, liquid can be pushed in the first heating mechanism 5 and first circulation branch pipe 8
Between circulate.The embodiment of this partial circulating flow path also helps holding circulation fluid while maintaining liquid flowing
The temperature of body.
When using partial circulating flow path circulating liquid, the first outlet of the first triple valve 1 and/or the second triple valve 2 into
Mouth can close, more effectively to avoid liquid from leaking to outside partial circulating flow path.
The second outlet of first triple valve 1, second the 4, second heating mechanism 6 of pump, at least one multistage heating device 9 and the
The import of two triple valves 2 is sequentially connected to by pipeline, to constitute big flow feed flow flow path.In general, big flow feed flow flow path is certainly
The one-way passage of first triple valve, 1 to the second triple valve 2.
When it is implemented, can be by the power of selection the first pump 3 and the second pump 4, or pass through and control small flow for liquid stream
The modes such as the caliber of road and big flow feed flow flow path realize the size of liquid output amount.
The liquid transmission pipeline system of the disclosure can work by following circulation style:
When there is no residual liquid and a small amount of liquid of demand in liquid transmission pipeline system, pass through small flow feed flow flow path
Feed flow.Specifically, the second outlet of the first triple valve 1 and the waste liquid outlet of the second triple valve 2 are closed, the first control valve 7 is opened,
First outlet, first pump 3, first heater of the liquid flowed into from the import of the first triple valve 1 followed by the first triple valve 1
The working solution of structure 5, the first control valve 7 and the second triple valve 2 exports.
After the completion of small flow feed flow flow path feed flow, liquid can recycle in partial circulating flow path.Specifically, the first control is closed
Valve 7 processed, liquid recycle between the first pump 3 and first circulation branch pipe 8.
When the liquid and demand a small amount of liquid in partial circulating flow path with circulation, pass through small flow feed flow flow path feed flow.
Specifically, it first opens the waste liquid outlet of the second triple valve 2 and closes the working solution outlet of the second triple valve 2, in discharge line
Residual liquid.Then, the waste liquid outlet of the second triple valve 2 is closed, the working solution outlet and the first control of the second triple valve 2 are opened
Valve 7 processed, first outlet of the liquid flowed into from the import of the first triple valve 1 followed by the first triple valve 1, the first pump 3, first
The working solution of heating mechanism 5, the first control valve 7 and the second triple valve 2 exports.
When there is no residual liquid and the big quantity of fluid of demand in liquid transmission pipeline system, pass through big flow feed flow flow path
Feed flow.Specifically, the first outlet of the first triple valve 1, the waste liquid outlet of the first control valve 7 and the second triple valve 2, starting are closed
Multistage heating mechanism 91 is heated, and the liquid flowed into from the import of the first triple valve 1 is followed by the second of the first triple valve 1
Outlet, the working solution outlet of second the 4, second heating mechanism 6 of pump, multistage heating device 9 and the second triple valve 2.
When having residual liquid and a large amount of liquid of demand in liquid transmission pipeline system, by big flow for liquid stream
Road feed flow.Due to big flow feed flow flow path can rapidly in discharge line residual liquid, first extraction raffinate can be discharged.
Specifically, the first outlet of the first triple valve 1, the second outlet of the first triple valve 1, the first control valve 7 and the two or three are first closed
The working solution of port valve 2 exports, and the waste liquid outlet of the second triple valve 2 is opened, with the residual liquid in discharge line.Then, it closes
The waste liquid outlet of second triple valve 2 opens the second outlet of the first triple valve 1 and the working solution outlet of the second triple valve 2, starting
Multistage heating mechanism 91 is heated, and the liquid flowed into from the import of the first triple valve 1 is followed by the second of the first triple valve 1
Outlet, the working solution outlet of second the 4, second heating mechanism 6 of pump, multistage heating device 9 and the second triple valve 2.
When the demand of liquid is smaller, the liquid transmission pipeline system of the disclosure can be supplied by small flow feed flow flow path
Liquid;When the demand of liquid is larger, the liquid transmission pipeline system of the disclosure can pass through big flow feed flow flow path feed flow;When stopping
Only when feed flow, the liquid in small flow feed flow flow path can circulate in partial circulating flow path, and liquid is avoided to stagnate for a long time;It is more
The setting of a heating mechanism advantageously ensures that the fluid temperature of output can sufficiently be met the requirements.
It is long to can effectively avoid liquid by different flow path conveyings or circulating liquid for the liquid transmission pipeline system of the disclosure
Time is stuck in the problems in pipeline, and can neatly control the temperature of liquid, meets manufacturing process to the need of fluid temperature
It asks.
In addition, existing liquid transmission pipeline is to sufficiently meet the requirement of liquid demand, in design according to liquid
A maximum demand be designed, the waste of pipeline will be caused.And the liquid transmission pipeline system of the disclosure has for difference
The flow path of liquid supply rate demand can effectively avoid the waste problem of pipeline.
In one embodiment of disclosure liquid transmission pipeline system, liquid transmission pipeline system further includes cooling body
10 and second control valve 11.Cooling body 10 may be, for example, the mechanism cooling by modes such as air-cooled or water coolings.Cooling body 10
It is set on first circulation branch pipe 8 with the second control valve 11.Cooling body 10 can cool down liquid in partial circulating flow path.When
When first heating mechanism 5 also assists in the circulation of partial circulating flow path, pass through the cold of the heating and cooling mechanism 10 of the first heating mechanism 5
But, the liquid in partial circulating flow path can be maintained at suitable temperature, and guarantees the stability of the performance of liquid.Second control
Valve 11 can control the on-off of first circulation branch pipe 8, by the control to the first control valve 7 and the second control valve 11, can effectively keep away
Exempt from the interference between small flow feed flow flow path and partial circulating flow path.
The distributing order of cooling body 10 and the second control valve 11 on first circulation branch pipe 8 can be set according to actual needs
It sets.Optionally, cooling body 10 compared to the second control valve 11 adjacent to the first outlet of the first triple valve 1, preferably to avoid
Interference between small flow feed flow flow path and partial circulating flow path.
When it is implemented, partial circulating flow path can be made of the first pump 3, cooling body 10 and the second control valve 11, when first
When control valve 7 is closed and the second outlet of the first triple valve 1 is closed, by the work of the first pump 3, liquid can be pushed to follow first
Circulating between the cooling body 10 of ring branch pipe 8 and the second control valve 11;Alternatively, partial circulating flow path can be by the first pump 3, the
One heating mechanism 5, cooling body 10 and the second control valve 11 are constituted, when the first control valve 7 close and the first triple valve 1 second
When outlet is closed, by the work of the first pump 3, liquid can be pushed in the cooler of the first heating mechanism 5 and first circulation branch pipe 8
It is circulated between structure 10 and the second control valve 11.
In one embodiment of disclosure liquid transmission pipeline system, liquid transmission pipeline system further includes third control
Valve 12 and the 4th control valve 13.Third control valve 12 is set between the first pump 3 and the first heating mechanism 5.Pass through third control valve
12 opening and closing can control the on-off of small flow feed flow flow path.4th control valve 13 be set to second pump 4 and second heating mechanism 6 it
Between.By the opening and closing of the 4th control valve 13, the on-off of big flow feed flow flow path can control.
In one embodiment of disclosure liquid transmission pipeline system, multistage heating device 9 further includes the first multistage control
Valve 92 and the second multistage control valve 93 processed.Multistage control valve in the disclosure refers to the valve arrangement of achievable pipeline on-off, for example,
Mechanical valve or solenoid valve etc..First multistage control valve 92 is arranged in series with multistage heating mechanism 91, the second multistage control valve 93 with
Multistage heating mechanism 91 and the first multistage control valve 92 are arranged in parallel.That is to say, the second multistage control valve 93 with connect after it is more
Rank heating mechanism 91 and the first multistage control valve 92 are in parallel.
First multistage control valve 92 and being provided with for the second multistage control valve 93 are conducive to more easily control big flow feed flow
The temperature of liquid in flow path.When needing the liquid of higher temperature, openable first multistage control valve 92 closes the second multistage control
Valve 93 processed, so that liquid flows through multistage heating mechanism 91;When needing the liquid of lower temperature, the first multistage control valve can be closed
92, the second multistage control valve 93 is opened, so that liquid is not passed through multistage heating mechanism 91.
Optionally, the first multistage control valve 92 compared to multistage heating mechanism 91 adjacent to the second heating mechanism 6, with preferably
Control multistage heating device 9.
In one embodiment of disclosure liquid transmission pipeline system, liquid transmission pipeline system further includes main control valve
14.Main control valve 14 can be motor-driven valve or hand-operated valve.Main control valve 14 is connected by pipeline with the import of the first triple valve 1,
More easily to control entire liquid transmission pipeline system.When closing main control valve 14, liquid transmission pipeline system stops supplying
Liquid.
In one embodiment of disclosure liquid transmission pipeline system, liquid transmission pipeline system also has shell 15.
First triple valve 1, first pump the 3, second pump the 4, first heating mechanism 5, the second heating mechanism 6, the first control valve 7, first circulation
Branch pipe 8 and multistage heating device 9 are set in shell 15.In this way, only the second triple valve 2 is located at outside shell 15, the equal position of remaining part
In in shell 15, this set is conducive to more easily design and installation liquid transmission pipeline.When it is implemented, can be by shell 15
And each component accommodated in shell 15 forms a total member, which is installed together with the second triple valve 2.
In one embodiment of disclosure liquid transmission pipeline system, liquid transmission pipeline system further includes the 5th control
Valve (not shown) and second circulation branch pipe (not shown).5th control valve is set to the import of the second triple valve 2 and more
Between rank heating device 9.One end of second circulation branch pipe is connected between the second outlet of the first triple valve 1 and the second pump 4
On pipeline, the other end of second circulation branch pipe is connected on the pipeline between multistage heating device 9 and the 5th control valve, to constitute
Systemic circulation flow path.Systemic circulation flow path can keep the mobility of the liquid in big flow feed flow flow path, avoid the waste of liquid.
In the embodiment of the systemic circulation flow path, when the first outlet of the 5th control valve and the first triple valve 1 is closed, lead to
The work for crossing the second pump 4, can push liquid to recycle between the second heating mechanism 6, multistage heating device 9 and second circulation branch pipe
Flowing.The embodiment of this systemic circulation flow path also helps the temperature for keeping circulating liquid while maintaining liquid flowing.
In order to more easily monitor fluid temperature in liquid transmission pipeline system, liquid transmission pipeline system further includes at least
One for detecting the temperature sensor of the temperature of liquid in liquid transmission pipeline system.The setting position of temperature sensor can root
According to actual demand flexible choice.
Further, liquid transmission pipeline system further includes the first temperature sensor 16, second temperature sensor 17, third
Temperature sensor 18 and the 4th temperature sensor 19.First temperature sensor 16 is set to the input end of the first triple valve 1.Second temperature
Sensor 17 is spent to be set between the first heating mechanism 5 and the first control valve 7.Third temperature sensor 18 is set to the second triple valve 2
Outlet end.4th temperature sensor 19 is set to the multistage heating device 9 of the second heating mechanism 6 and neighbouring second heating mechanism 6
Between.Further, the 5th temperature sensor 20 can be also set on first circulation branch pipe 8.
Multistage heating device 9 further includes multistage temperature sensor 94.Multistage temperature sensor 94 and multistage heating mechanism 91
It is arranged in series.Further, the first multistage control valve 92, multistage heating mechanism 91 and multistage temperature sensor 94 are along big stream
Liquid flow direction in amount feed flow flow path is successively arranged.
The disclosure additionally provides a kind of extension peel-off device.
The extension peel-off device includes the liquid transmission pipeline system of the disclosure.According to the need of different liquid measure and temperature
It asks, liquid is delivered in the processing chamber of extension peel-off device by liquid transmission pipeline system.
When needing small amount of liquid to participate in technique, supplied by the small flow feed flow flow path of liquid transmission pipeline system
Liquid;When needing larger amount of liquid to participate in technique, pass through the big flow feed flow flow path feed flow of liquid transmission pipeline system;When stopping
Only when feed flow, the liquid in liquid transmission pipeline system is recycled flowing, and liquid is avoided to stagnate for a long time.
In order to illustrate more clearly of the liquid transmission pipeline system of the disclosure, in the following, to implement shown in Fig. 1 to Fig. 5
It is illustrated for example:
As shown in fig. 1, the liquid transmission pipeline system of the present embodiment includes the first triple valve 1, the second triple valve 2, the
One pump 3, second pump the 4, first heating mechanism 5, the second heating mechanism 6, the first control valve 7, first circulation branch pipe 8, two it is multistage
Heating device 9, cooling body 10, the second control valve 11, third control valve 12, the 4th control valve 13, main control valve 14, shell
15, the first temperature sensor 16, second temperature sensor 17, third temperature sensor 18, the 4th temperature sensor 19 and the 5th
Temperature sensor 20.First triple valve 1 and the second triple valve 2 are Pneumatic three-way valve.Main control valve 1 is hand-operated valve.First control
Valve 7, the second control valve 11, third control valve 12 and the 4th control valve 13 are pneumatic control valve.First triple valve 1 have import,
First outlet and second outlet, residual liquid of second triple valve 2 with import, for being discharged in liquid delivery pipeline system
The working solution outlet of waste liquid outlet and the liquid for exporting participation technique outward.Second triple valve 2 and third temperature sensor
18 are located at outside shell 15, and remaining part is set in shell 15.
Liquid transmission pipeline system includes small flow feed flow flow path, big flow feed flow flow path and partial circulating flow path.
Small flow feed flow flow path pumps 3, third by main control valve 14, the first temperature sensor 16, the first triple valve 1, first
Control valve 12, the first heating mechanism 5, second temperature sensor 17, the first control valve 7, the second triple valve 2 and third temperature sensing
Device 18 is sequentially connected with composition by pipeline.
Big flow feed flow flow path is by main control valve 14, the first temperature sensor 16, the first triple valve 1, second pump the 4, the 4th
Control valve 13, the second heating mechanism 6,19, two multistage heating devices 9 of the 4th temperature sensor, the second triple valve 2 and third temperature
It spends sensor 18 and composition is sequentially connected with by pipeline.Multistage heating device 9 includes multistage heating mechanism 91, the first multistage control valve
92, the second multistage control valve 93 and multistage temperature sensor 94, the first multistage control valve 92, multistage heating mechanism 91 and multistage temperature
Degree sensor 94 is cascaded and successively arranges along the liquid flow direction in big flow feed flow flow path, the second multistage control
Valve 93 is arranged in parallel with the first multistage control valve 92, multistage heating mechanism 91 and the multistage temperature sensor 94 being cascaded.
Partial circulating flow path is by the first pump 3, third control valve 12, the first heating mechanism 5, second temperature sensor 17, first
Loop branch pipe 8, the second control valve 11, cooling body 9 and the 5th temperature sensor 20 are constituted, wherein the first pump 3, third control
Valve 12, the first heating mechanism 5 and second temperature sensor 17 are sequentially connected with by pipeline, the second control valve 11, cooling body 9 and
Five temperature sensors 20 are sequentially arranged in first circulation branch along flowing opposite direction with the liquid in small flow feed flow flow path
On pipe 8, one end of first circulation branch pipe 8 is connected on the pipeline between the first triple valve 1 and the first pump 3, first circulation branch pipe 8
The other end be connected on the pipeline between second temperature sensor 17 and the first control valve 7.
The circulation style of the liquid transmission pipeline system of the present embodiment is as follows:
When a small amount of liquid of demand, if the first control valve 7 is in close state, the waste liquid for first opening the second triple valve 2 goes out
Mouth and the working solution outlet for closing the second triple valve 2, so that the residual liquid between the second control valve 7 and the second triple valve 2 is certainly
The waste liquid outlet of second triple valve 2 is discharged.Then, second outlet, the second control valve 11 and the two or three of the first triple valve 1 are closed
The waste liquid outlet of port valve 2 opens working solution outlet and the first control valve 7 of the second triple valve 2, the liquid that autonomous valve 14 flows into
Body is followed by the first temperature sensor 16, the import of the first triple valve 1, the first outlet of the first triple valve 1, the first pump 3, the
Three control valves 12, the first heating mechanism 5, second temperature sensor 17, the first control valve 7, the import of the second triple valve 2, second
The working solution outlet of triple valve 2 and third temperature sensor 18 realize feed flow (liquid when small flow feed flow of small flow feed flow flow path
The route of body flowing referring to fig. 2 in the route that is indicated of overstriking black line).
After the completion of small flow feed flow flow path feed flow, the first control valve 7 is closed, opens the second control valve 11, liquid is first
Pump 3, third control valve 12, the first heating mechanism 5, second temperature sensor 17, the second control valve 11, cooling body 9 and the 5th
It is circulated between temperature sensor 20, realizes that (route that liquid flows in partial circulating flow path is referring to Fig. 3 for partial circulating flow path circulation
In the route that is indicated of overstriking black line).
Demand largely compared with the liquid of low temperature when, if having residual liquid in big flow feed flow flow path, first close first
The working solution outlet of the first outlet of triple valve 1, the second outlet of the first triple valve 1, the first control valve 7 and the second triple valve 2,
The waste liquid outlet of the second triple valve 2 is opened, with the residual liquid being discharged in big flow feed flow flow path.Then, the second threeway is closed
The waste liquid outlet of valve 2, first multistage heating device 9 first multistage 92, second multistage heating devices 9 of control valve first
Multistage control valve 92 opens the second outlet of the first triple valve 1 and the working solution outlet of the second triple valve 2, autonomous valve 14
The liquid of inflow is followed by the first temperature sensor 16, the import of the first triple valve 1, the second outlet of the first triple valve 1,
Two the 4, second heating mechanisms 6 of pump, the second multistage control valve 93 of the 4th 19, first multistage heating devices 9 of temperature sensor, the
The multistage control valve 93 of the second of two multistage heating devices 9, the import of the second triple valve 2, the working solution outlet of the second triple valve 2
With third temperature sensor 18, cryogenic liquid feed flow (liquid flowing when big flow low temperature feed flow of big flow feed flow flow path is realized
Route referring to fig. 4 in the route that is indicated of overstriking black line).
When the liquid of a large amount of higher temperatures of demand, if having residual liquid in big flow feed flow flow path, first is first closed
The working solution outlet of the first outlet of triple valve 1, the second outlet of the first triple valve 1, the first control valve 7 and the second triple valve 2,
The waste liquid outlet of the second triple valve 2 is opened, with the residual liquid being discharged in big flow feed flow flow path.Then, the second threeway is closed
The waste liquid outlet of valve 2, first multistage heating device 9 second multistage 93, second multistage heating devices 9 of control valve second
Multistage control valve 93 opens the second outlet of the first triple valve 1 and the working solution outlet of the second triple valve 2, autonomous valve 14
The liquid of inflow is followed by the first temperature sensor 16, the import of the first triple valve 1, the second outlet of the first triple valve 1,
Two the 4, second heating mechanisms 6 of pump, the first multistage control valve 92 of the 4th 19, first multistage heating devices 9 of temperature sensor, the
The multistage temperature sensor 94, second of 91, first multistage heating devices 9 of multistage heating mechanism of one multistage heating device 9
Multistage heating mechanism 91, second of multistage 92, the second multistage heating devices 9 of control valve of the first of a multistage heating device 9
The multistage temperature sensor 94 of multistage heating device 9, the import of the second triple valve 2, the working solution outlet and the of the second triple valve 2
Three-temperature sensor 18 realizes the high-temp liquid feed flow (road that liquid flows when big flow high temperature feed flow of big flow feed flow flow path
The route that line is indicated referring to the overstriking black line in Fig. 5).
Although being described in detail by some specific embodiments of the example to the utility model, this field
It is to be understood by the skilled artisans that example above merely to be illustrated, rather than in order to limit the scope of the utility model.This
Field it is to be understood by the skilled artisans that can not depart from the scope of the utility model and spirit in the case where, to above embodiments
It modifies.The scope of the utility model is defined by the following claims.